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M E A S U R E M E N T G E N E R A L C ATA L O G U E High Precision Measurement General Catalogue LK-G5000 Series / LK-G3000 Series / LK Series / LJ-V7000 Series / LJ-G Series SI-F1000 Series / SI-F80R Series / LT-9000 Series / LS-7000 Series LS-3100/5000 Series / TM-3000 Series / IM-6500 Series KEYENCE Measurement Technology Evolution KEYENCE Corporation has continuously developed measurement technolog y for over 30 years. Each generation of measurement systems provided additional capabilities and significant improvements in inspection quality. Surface Scanning Laser Confocal Surface scanning provides a new level of stability and flexibility. Confocal System Revolutionary system enables new measurement capabilities for transparent materials. LED+PSD System Small sensor head and robust controller. LASER+PSD System Semiconductor laser enables small sensor head and high stability on shiny targets. 1970 History of development 2 CCD Optical Micrometer Innovative CCD based system enables high repeatability and high speed. Ultra High Speed Laser Completely original design device achieves world's fastest sampling rate (392kHZ). 2D Micrometer Inline imaging system measures 2 dimensions in with sub-micron precision. Spectral Interferometry E3CMOS 2D Laser Original principle provides nanometer level measurement in a small sensor head design. Newly developed high sensitivity receiver enables highly stable and accurate 2D measurement. High-speed 2D/3D Laser Scanner 64,000 profiles per second allow precision inspection of even the most difficult parts. CCD Triangulation CCD based receiver element enables stable measurement on any material. 2012 and Beyond 3 INDEX Laser Triangulation LK-G5000 Series Ultra High-Speed/High-Accuracy Laser Displacement Sensor LK-G3000 Series High-Speed, High-Accuracy CCD Laser Displacement Sensor LK Series CCD Laser Displacement Sensors LJ-V7000 Series High-speed 2D/3D Laser Scanner LJ-G Series High-Accuracy 2D Laser Displacement Sensor SI-F1000 Series Micro-Head Spectral-Interference Laser Displacement Meter SI-F80R Series Spectral-Interference Wafer Thickness Meter LT-9000 Series Surface Scanning Laser Confocal Displacement Meter LS-7000 Series CCD Optical Micrometer LS-3100/5000 Series Laser Scan Micrometers TM-3000 Series High-speed 2D Measurement Sensor IM-6500 Series Image Dimension Measurement System Spectral Interferometer Confocal laser Optical Micrometer Optical Measurement System 4 I Fastest in the World 392 kHz I Best linearity in its Class 0.02% of F.S. I Connect up to 12 sensor heads/network capable ▶ P.10 LK-G5000 Series I I I I I Sampling rate of 50 kHz Linearity of 0.05% of F.S. Repeatability down to 0.01 μm Can measure diffuse, specular, transparent or translucent targets Wide beam spot models are available ▶ P.18 LK-G3000 Series I I I I I Linearity of 0.1% of F.S. Repeatability of 1 μm 30 μm diameter beam spot Ultra long measuring distance up to 750 mm Measurement unaffected by colour, surface texture or stray light ▶ P.24 LK Series I An emphasis on inline measurement I The world's fastest at 64,000 profiles/sec. I Blue laser optical system ▶ P.26 LJ-V7000 Series I I I I ▶ P.34 LJ-G Series I Resolution of 0.001 μm I Micro-head size of ø2 mm I Spectral interference method ▶ P.40 SI-F1000 Series I Resolution of 0.001 μm I Sampling speed of 5 kHz I Working distance 80mm ▶ P.46 SI-F80R Series I Precise 2 μm diameter beam spot I 0.3 μm resolution ▶ P.48 LT-9000 Series I High repeatability 0.06 μm I High speed 2400 samples/second I Maintenance-free design ▶ P.52 LS-7000 Series I I I I ▶ P.58 LS-3100/5000 Series I Multi-point 2D measurement I Tilt correction for inline measurement I High-speed sampling of 5.5 ms ▶ P.62 TM-3000 Series I I I I ▶ P.68 IM-6500 Series Linearity of 0.1% of F.S. High-speed sampling of 3.8 ms Simultaneous measurement/judgement of up to 8 features Stable measurement for all targets Repeatability of 0.3 μm Wide measuring range Touch-screen controller Up to four heads are connectable to one controller A wide variety of measurement & auxiliary tools Cutting edge sub-pixel processing algorithm Simultaneous inspection of up to 99 features Revolutionary iPASS target position correction function 5 PRINCIPLE PRINCIPLE LK-G5000 Series Measurement Principle (Triangulation type) WIDE RANGE HIGH-SPEED The semiconductor laser emits the laser beam to the target as shown below. The light reflected off the target is focused by the ernostar lens and forms an image on the light-receiving element. The position of the beam spot on the receiving element varies with the distance to the target. This variation is evaluated and converted into a measurement of target position. At the reference distance At a short distance Light-receiving element Semiconductor laser At a long distance Light-receiving element Semiconductor laser Transmitter lens Transmitter lens Light-receiving element Semiconductor laser Transmitter lens Ernostar lens Ernostar lens Light-receiving element Ernostar lens Light-receiving element Light-receiving element LJ-V7000 Series Measurement Principle Cylindrical lens Semiconductor Lasers Measurement principle GP64-Processor 2D Ernostar lens The laser light is projected in a horizontal line by the cylindrical lens and diffusely reflects on the target object. This reflected light is formed on the HSE3-CMOS and by detecting changes in position and shape, displacement and shapes are measured. HSE3-CMOS SI Series measurement principles (Spectral-Interference type) micro-head Spectroscopic unit SI-F01U Polarization maintaining optical fiber Light source (SLD) Spectroscope Actual size Waveform analysis Sensor head SI-F01 Emitted light Reference reflection surface CCD Displacement data 6 Interference light ultra high accuracy Target Diffraction grating SLD: Super Luminescent Diode SLD Optical interference Spectroscopic analysis Part of the broad wavelength light emitted from the SLD is reflected by the reference reflector mounted in the sensor head, while the part that passes the reference surface is mirror-reflected on the target and returns into the head. The two reflected light beams interfere with each other. The intensity of the light with a specific wavelength is determined according to the distance between the reference surface and the target. The relative maximum interference is reached when the determined distance is an integral multiple of the wavelength. Splitting the returned light into different wavelengths with a diffraction grating produces an optical intensity distribution for a specific wavelength band. The distance to the target is obtained by carrying out waveform analysis on this distribution. CLEAR TARGET THICKNESS LK-G5000 Series LT-9000 Series Measurement Principle (Confocal type) HIGH-ACCURACY LK-G3000 Series High-accuracy measurement method uses the confocal principle and tuning fork The laser beam is focused on the target surface through an objective lens that vibrates up and down at high speed by means of a tuning fork. The beam reflected off the target surface is converged on a pinhole and then enters the light-receiving element. By measuring the exact position of the objective lens when the light enters the light-receiving element, the target height can be determined. The sensor measures the distance to the target surface accurately without being affected by the material, colour, or angle of the target. When the focal point is not on the target surface LK Series Semiconductor laser When the focal point is on the target surface Semiconductor laser Light-receiving element Pinhole The received light Tuning fork intensity is low. Sensor Sensor A small amount of received light passes through the pinhole. LJ-V7000 Series Light-receiving element Pinhole The received light Tuning fork intensity is low. All of the received light passes through the pinhole. HIGH-ACCURACY LJ-G Series LS-7000 Series Measurement Principle (Thrubeam type) LONG LIFE Telecentric optical system High-intensity GaN green LED The system allows only parallel light to form an image, ensuring accurate measurement. This specifically designed CCD achieves high speed and improved accuracy. Collimator lens and special diffusion unit SI-F1000 Series HL-CCD The light source features a gallium nitride (GaN) green LED that provides a short wavelength and reliable operation. This optical unit distributes Green GaN LED light as a uniform , collimated beam. CMOS monitor camera SI-F80R Series Extremely compact CMOS camera captures an image of the target to aid alignment. Improvement over the laser-scanning method Light-receiving element Motor MICRO-HEAD LS-7000 Series TM Series measurement principles (2D Thrubeam type) LT-9000 Series Polygon mirror The green LED light is distributed as a uniform, parallel beam and is applied to a target. The edges between the bright and dark areas on the CCD detected and used to calculate a measurement value. The conventional scanning method as shown in the figure on the left uses a high speed motor, which limits the sensor's durability and stability. The solid state LS-7000 Series solves this problem and ensures excellent durability. ULTRA HIGH ACCURACY W telecentric optical system LS-3100/5000 Series W telecentric lens system ensures that the target image on the receiver element does not depend on target position. Principle of measurement A collimated green LED beam is used to generate a shadow on the high precision CMOS receiver. This shadow is then analysed to produce two dimensional measurements of distances, angle, etc. Collimator lens Mirror Target IM-6500 Series The newly developed InGaN LED system provides consistent, noise resistant illumination. In addition, because the system is LED based, there are none of the optical hazards associated with lasers. Mirror Lens High luminance InGaN green LED TM-3000 Series Telecentric lens Lens Diffusion unit Receiver CMOS LED Transmitter 7 SUCCESSFUL APPLICATION SUCCESSFUL APPLICATION Thickness Measurements of glass sheet thickness, warpage, and parallelism Substrate thickness measurement of solar cells LK-G5000 Series P.10 LK-G5000 Series P.10 Thickness measurement of transparent film LT-9000 Series P.48 Height and difference HDD arm assembly adjustment LK-G5000 Series Height and width measurement of rubber P.10 LJ-G Series P.34 Height control of dispenser LK-G3000 Series P.18 Width and outside diameter Drill outer diameter measurement TM-3000 Series 8 Film width measurement Roller outer diameter measurement P.62 LS-7000 Series P.52 LS-7000 Series P.52 LK-G5000 Series Swinging and vibration LK-G3000 Series LK Series P.10 LK-G5000 Series Ultrasonic welder monitoring P.10 LK-G5000 Series P.10 LJ-G Series LK-G5000 Series Vibration evaluation of cellular phone LJ-V7000 Series Disk rotor warpage measurement Stroke and positioning SI-F1000 Series SI-F80R Series P.40 LJ-G Series Position tracking of high temperature steel pipe P.34 LK-G3000 Series P.18 LS-7000 Series SI Series Feedback control of a welder LT-9000 Series Wafer position measurement Shape and warp LS-3100/5000 Series TM-3000 Series LK-G5000 Series P.10 Thermal expansion of a lithium-ion battery. Ampoule shape inspection TM-3000 Series IM-6500 Series Warpage measurement of a circuit board P.62 LJ-G Series P.34 9 LK-G5000 Series Ultra High-Speed/High-Accuracy Laser Displacement Sensor NEW LK-G5000 Series Features Fastest in the World 392 kHz Best linearity in its Class 0.02% of F.S. Connect up to 12 sensor heads/network capable Expert Engineering Sites A new site with answers to all of your difficult measurement application questions www.measurecentral.com Best specifications in class Highest Repeatability in its Class Highest Accuracy in its Class Fastest in the World 0.005 μm ±0.02 % 392 kHz The need to improve product quality makes high performance critical. The LK-G5000 Series provides the highest repeatability in its class and is highly capable in any application. High-linearity enhances the LK-G5000's capabilities. By taking advantage of new technology, the series provides high performance with the high accuracy that is increasingly required. The world's fastest sampling rate not only captures displacement of moving or rotating targets, but also increases stability in all manner of applications. Wide spot type (2.5x conventional models) Stable measurement on coarse targets Focused spot type (ø25 µm) Optimal for fine or profile measurements Specular reflection type Transparent/mirror surface measurement Surfaces that may appear flat, once magnified will often contain minute projections and depressions. This microscopic surface roughness can often cause measurement errors with conventional focused spot sensors. By using a sensor head with a wide beam spot, the effect of the uneven surface is averaged and stable measurements of even coarse targets are possible. The smallest spot diameter in its class of ø25 μm (LK-H022) can measure any target, from fine components to profile measurements, with the highest level of accuracy in the industry. The LK-G5000 Series includes a group of heads specifically designed for use on highly reflective targets such as glass or other mirror surfaces. These heads are available with wide or focused beam spots and are ideally suited for high accuracy measurements on such surfaces. Selectable variations 2x wider than conventional model 10 LK-G5000 Series LK-G5000 Series Applications LK-G3000 Series Position control of an air knife LK Series Active layer measurement of solar modules Measurements of glass board thickness, warpage, and parallelism LJ-V7000 Series Lineup Measurement type Reference Distance & Measurement Range Repeatability Model 8±0.5 mm 0.005 μm LK-H008W WIDE SPOT TYPE 0.02 μm LK-H027 0.025 μm LK-H057 80±18 mm 0.1 μm LK-H087 150±40 mm 0.25 μm LK-H157 8±0.5 mm 0.005 μm LK-H008 0.02 μm LK-H022 0.025 μm LK-H052 80±18 mm 0.1 μm LK-H082 150±40 mm 0.25 μm LK-H152 0.005 μm LK-H008(W) 0.02 μm LK-H027K 46.3±5.2 mm 0.025 μm LK-H057K 76.7 -17.6 mm/+14.5 mm 0.1 μm LK-H087 & LK-F3 147.5 -39.5 mm /+24.4 mm 0.25 μm LK-H157 & LK-F2 SPECULAR REFLECTION TYPE All-in-one type LK-G5001(P)V LS-7000 Series Main controller LT-9000 Series 8±0.5 mm 16.1±2.8 mm SI-F80R Series 20±3 mm 50±10 mm SI-F1000 Series FOCUSED SPOT TYPE 20±3 mm 50±10 mm LJ-G Series Sensor Head Display Separate display type LK-G5001(P) Additional head unit LK-HA100 CC-Link unit LK-CC100 DeviceNet unit LK-DN100 Touch panel display LK-HD1001 Compact display LK-HD500 LS-3100/5000 Series LK-Navigator2 LK-H2 Cable Sensor head-tocontroller cable (0.7, 2, 5, 10, 20, 30 m) CB-Axx TM-3000 Series Configuration Software Neutral density filter Extension cable between the head and cable (5, 10 m) CB-AxxE I/O Cable and Connector OP-51657 For LK-H08x LK-F3 For LK-H15x LK-F2 IM-6500 Series Controller-to-display connection cable 0.33 m: OP-84427 3 m: OP-51655 10 m: OP-51656 Ethernet cable OP-66843 11 LK-G5000 Series Convenient calculation functions Instantly calculates values based on measurements obtained by more than one head, enabling the user to easily set complicated calculations inside the controller that were conventionally done with PLCs or PCs. Standard Step Measurement Calculates the differences between a reference point and each measuring point. A Maximum/Minimum Measurement Flatness Measurement Calculates the difference between the maximum and minimum values among the A measurement points. Calculates the maximum and/or minimum values. B B A C C B C Measured value1=B-A Measured value2=B-C Measured value3=A-C… Measured value1=MAX (A,B,C...) Measured value2=MIN (A,B,C...) Measured value1=MAX (A,B,C...)−MIN (A,B,C...)... Warpage Measurement Multi-Point Thickness Measurement Average Height Measurement Calculates the amount of warpage. C A Calculates the average height. Calculates the thickness with each pair of sensors. A B C C B B A D Measured value1=B-(A+C)/2… E D F Measured value1=X+ (A+D) Measured value2=Y+ (B+E) Measured value3=Z+ (C+F)... Measured value1=Ave (A,B,C,D,...) Measurement of Velocity (m/s), Acceleration (m/s2) The LK-G5000 Series is equipped with a function to directly measure the speed (m/s) and acceleration (m/s2) of targets. Just select the type of measurement: displacement, speed, or acceleration. Using the differential processing circuit is inside the controller, it is possible to directly output or evaluate measurements that were previously calculated externally. The LK-G5000 Series is suitable for lightweight, easily deformed, and hightemperature targets which are difficult to measure with contact accelerometers. Example of measurement of stage movement Displacement Speed Acceleration Vibration test of high-temperature-muffler Data filter functions made easy 4 types of easy to use data processing filters are incorporated directly in the controller. The filters are user selectable for ease of use. Median filter High pass filter Removes any intermittent noise in the output. Captures sudden changes and removes low frequency variations. Unfiltered wave pattern Unfiltered wave pattern Wave pattern when using the high pass filter Moving average filter Low pass filter Averages the measured values to reduce high the overall noise level in the measurement. Captures moderate changes while removing high frequency noise. Unfiltered wave pattern 12 Wave pattern when using the median filter Wave pattern when using the average filter Unfiltered wave pattern Wave pattern when using the low pass filter LK-G5000 Series LK-G5000 Series Specifications Controller Main unit/head expansion unit Single unit type Separate type LK-G5001V LK-G5001PV LK-G5001/LK-HD500 LK-G5001P/LK-HD500 Designation Head expansion unit Compatible No. of connectable sensor heads 2 Minimum display unit Display range ±999.999 μm to ±9999.99 mm (7 settings selectable) Display cycle Approx. 10 times/sec. Display port Either the display unit (LK-HD500) or dedicated touch panel (LK-HD1001) can be connected N/A LED indicator LASER ON POWER ON, STABILITY, BRIGHT, DARK Analogue voltage output N/A ±10 V output, Output impedance: 100 Ω Analogue current output 4 to 20 mA, Maximum load resistance: 350 Ω No. of analogue outputs 2 1 Non-voltage input Voltage input Non-voltage input Voltage input LJ-V7000 Series TIMING1 input*1 Terminal block 1 0.001 μm LK Series Display interface LK-HA100 Main controller Sensor head compatibility Display (LK-HD500) LK-G3000 Series Model RESET1 input*1 Auto-zero1 input*1 Laser control input*2 N/A Laser remote input Alarm output NPN open-collector output PNP open-collector output Non-voltage input Voltage input Non-voltage input Voltage input TIMING input LJ-G Series General comparator output Non-voltage input RESET input Auto-zero input Expansion connector Program switch input N/A Binary selection input Comparator output NPN open-collector output SI-F1000 Series Alarm output PNP open-collector output Binary output Baud rate: 9600 to 115200 bps Data length: 8 bits Stop bit length: 1 bit Parity: None/even/odd RS-232C interface 100Base-TX/10Base-T Expansion unit connector Environment resistance SI-F80R Series Head expansion unit connector Power supply N/A USB 2.0 Hi-Speed compliant*3 USB interface Ethernet interface*4 Up to 10 head expansion units can be connected to one main controller Either of the CC-Link unit (LK-CC100) or DeviceNet unit (LK-DN100) can be connected N/A 24 VDC±10% 24 VDC±10% (Supplied from the controller) Power supply voltage Maximum current consumption 0.6 A or less with 1 head/3.5 A or less with 12 heads When one or less head expansion unit is connected: 0 to 50°C When two or more head expansion units are connected: 0 to 40°C Ambient temperature Relative humidity 35 to 85%RH (No condensation) Approx. 600 g LT-9000 Series Weight Approx. 300 g LS-7000 Series *1 This input is applied to all of the synchronised OUT. *2 When the laser class 3B sensor head is connected, a key-operated switch must be used for the input to this terminal. The laser is emitted only when the key-operated switch is set to the ON position. (Select a key which can be removed only when it is set to the OFF position.) When the laser class 2/3R sensor head is connected, the laser turns on when this terminal is opened and turns off when it is short-circuited. *3 When a PC supporting USB 1.1 or USB 2.0 full speed is connected, the data refresh cycle and other operations may slow down. *4 Use the Ethernet interface only for direct connections with a PC or for local network connections with a PC or LK-G5000 Series units. • NPN open-collector output rating: 50 mA max. (40 V max.), Residual voltage: 0.5 V max. • PNP open-collector output rating: 50 mA max. (30 V max.), Residual voltage: 0.5 V max. • Non-voltage input rating: ON voltage: 1 V max., OFF current: 0.6 mA max. • Voltage input rating: Maximum input rating: 26.4 V, ON voltage: 10.2 V, OFF current: 0.6 mA • Part of the input/output circuit of the LK-G5000 Series is internally common. Be careful that no potential difference is generated between the internally common terminals due to the potential difference between the cables/external devices. For details, refer to "Precautions on wiring" in the User's Manual. LK-H2 (LK-Navigator2) Operating environment Pentium III 1 GHz or higher (1.7 GHz or higher recommended) Supported OS Windows 7*1 Windows Vista*2 Windows XP*3 Windows 2000 Professional*4 Memory capacity 256 MB or more (1 GB or more recommended) Display resolution 1024 x 768 pixels, 24-bit full colour or better 1 GB or more Interface The PC must be equipped with one of these interfaces: • USB: 2.0 Hi-Speed (USB 1.1 compatible full speed)*5 • LAN: 100BASE-TX, 10BASE-T*6 TM-3000 Series Available hard disk space LS-3100/5000 Series CPU *1 Editions supported: Ultimate, Professional and Home Premium. *2 Editions supported: Ultimate, Business, Home Premium, and Home Basic. *3 Supports Professional SP2 and Home Edition SP2 or later. *4 Supports SP4 or later. *5 Does not support connection via a USB hub. *6 Does not support connection via private LANs or routers. Use in a 1:1 or local connection. * Windows is a registered trademark of Microsoft Corporation of America. * Pentium is a registered trademark of Intel Corporation. IM-6500 Series 13 LK-G5000 Series Sensor heads Coarse target measurement (wide spot type) LK-H008W Model Mounting mode Reference distance Measurement range*1 Specular reflection LK-H025 LK-H027 LK-H055 LK-H057 LK-H085 LK-H087 LK-H155 Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection LK-H157 Diffuse reflection 8 mm 20 mm 20 mm 50 mm 50 mm 80 mm 80 mm 150 mm 150 mm ±0.5 mm ±3 mm ±3 mm ±10 mm ±10 mm ±18 mm ±18 mm ±40 mm ±40 mm Light source Red semiconductor laser 655 nm Wavelength Laser class IEC 60825-1 Class 1 Class 3R Class 2 Class 3R Class 2 Class 3R Class 2 Class 3R Class 2 FDA (CDRH) Part 1040.10 Class II Class IIIa Class II Class IIIa Class II Class IIIa Class II Class IIIa Class II 0.3 mW 4.8 mW 0.95 mW 4.8 mW 0.95 mW 4.8 mW 0.95 mW 4.8 mW 0.95 mW Output Spot diameter (at reference distance) Linearity*2 Repeatability*3 20 μm × 550 μm ±0.05% of F.S. (F.S.=1 mm) 0.005 μm (0.001 μm) 25 μm × 1400 μm ±0.02%of F.S. (F.S.= 6 mm) 0.02 μm (0.01 μm) 0.02% of F.S./°C (F.S.=1 mm) 0.01% of F.S./°C (F.S.= 6 mm) Sampling cycle Environment resistance Temperature fluctuation Enclosure rating 0 to +50°C*4 120 μm × 4200 μm ±0.02% of F.S. (F.S.= 80 mm) 0.25 μm 2.55/5/10/20/50/100/200/500/1000 μs (9 steps selectable) 0.01% of F.S./°C 0.01% of F.S./°C (F.S.= 20 mm) (F.S.= 36 mm) IP67 0.01% of F.S./°C (F.S.= 80 mm) Incandescent lamp or fluorescent lamp: 5000 lux max. 0 to +50°C*4 0 to +50°C 35 to 85%RH (No condensation) Relative humidity 10 to 55 Hz, 1.5 mm double amplitude in X, Y, and Z directions, 2 hours respectively Vibration resistance Aluminium die-cast Material Weight 70 μm × 2500 μm ±0.02% of F.S. (F.S.= 36 mm) 0.1 μm Incandescent lamp or fluorescent lamp: 10000 lux max. Ambient light Ambient temperature 50 μm × 2000 μm ±0.02% of F.S. (F.S.= 20 mm) 0.025 μm Approx. 240 g Approx. 230 g Approx. 260 g Approx. 280 g Approx. 300 g *1 Measurement range when the sampling cycle is 20 μs or more. *2 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008W) is measured in the normal measurement mode. *3 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008W) is measured at the reference distance with the number of averaging measurements set to 16384. The value in parentheses is a typical example of a measurement with the number of averaging measurements set to 65536 and the sampling cycle to 200 μs. *4 When the ambient temperature rises to 40°C or more, mount this on a metal plate before use. Fine target measurement (focused spot type) Light source Model Mounting mode Reference distance Measurement range*1 Wavelength Laser IEC 60825-1 class FDA (CDRH) Part 1040.10 Output Spot diameter (at reference distance) Linearity*2 Repeatability*3 Sampling cycle Environment resistance Temperature fluctuation LK-H008 Specular reflection 8 mm ±0.5 mm Class 1 Class II 0.3 mW ø20 μm ±0.05% of F.S. (F.S.=1 mm) 0.005 μm (0.001 μm) 0.02% of F.S./°C (F.S.=1 mm) Enclosure rating Ambient light Ambient temperature Relative humidity Vibration resistance Material Weight 0 to +50°C*4 Approx. 240 g LK-H020 LK-H022 LK-H050 LK-H052 LK-H080 LK-H082 LK-H150 LK-H152 Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection 20 mm 20 mm 50 mm 50 mm 80 mm 80 mm 150 mm 150 mm ±3 mm ±3 mm ±10 mm ±10 mm ±18 mm ±18 mm ±40 mm ±40 mm Red semiconductor laser 655 nm Class 3R Class 2 Class 3R Class 2 Class 3R Class 2 Class 3R Class 2 Class IIIa Class II Class IIIa Class II Class IIIa Class II Class IIIa Class II 4.8 mW 0.95 mW 4.8 mW 0.95 mW 4.8 mW 0.95 mW 4.8 mW 0.95 mW ø25 μm ø50 μm ø70 μm ø120 μm ±0.02% of F.S. ±0.02% of F.S. ±0.02% of F.S. ±0.02% of F.S. (F.S.= 6 mm) (F.S.= 20 mm) (F.S.= 36 mm) (F.S.= 80 mm) 0.02 μm (0.01 μm) 0.025 μm 0.1 μm 0.25 μm 2.55/5/10/20/50/100/200/500/1000 μs (9 steps selectable) 0.01% of F.S./°C 0.01% of F.S./°C 0.01% of F.S./°C 0.01% of F.S./°C (F.S.= 6 mm) (F.S.= 20 mm) (F.S.= 36 mm) (F.S.= 80 mm) IP67 Incandescent lamp Incandescent lamp or fluorescent lamp: 10000 lux max. or fluorescent lamp: 5000 lux max. 0 to +50°C 0 to +50°C*4 35 to 85%RH (No condensation) 10 to 55 Hz, 1.5 mm double amplitude in X, Y, and Z directions, 2 hours respectively Aluminium die-cast Approx. 230 g Approx. 260 g Approx. 280 g Approx. 300 g *1 Measurement range when the sampling cycle is 20 μs or more. *2 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008) is measured in the normal measurement mode. *3 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008) is measured at the reference distance with the number of averaging measurements set to 16384. The value in parentheses is a typical example of a measurement with the number of averaging measurements set to 65536 and the sampling cycle to 200 μs. *4 When the ambient temperature rises to 40°C or more, mount this on a metal plate before use. Transparent/mirror target measurement (specular reflection type) Light source Model Mounting mode Reference distance Measurement range*1 Environment resistance Wavelength Laser IEC 60825-1 class FDA (CDRH) Part 1040.10 Output Spot diameter (at reference distance) Linearity*2 Repeatability*3 Sampling cycle Temperature fluctuation Enclosure rating Ambient light Ambient temperature Relative humidity Vibration resistance Material Weight LK-H008 Specular reflection 8 mm ±0.5 mm LK-H008W LK-H022K LK-H027K LK-H052K LK-H057K LK-H082 LK-H087 LK-H152 LK-H157 Specular reflection Specular reflection Specular reflection Specular reflection Specular reflection Specular reflection*4 Specular reflection*4 8 mm 16.1 mm 16.1 mm 46.3 mm 46.3 mm 76.7 mm 147.5 mm ±0.5 mm ±2.8 mm ±2.8 mm ±5.2 mm ±5.2 mm −17.6 mm to +14.5 mm −39.5 mm to +24.4 mm Red semiconductor laser 655 nm Class 1 Class 2 Class II 0.3 mW 0.95 mW ø20μm 20 μm×550 μm ø25 μm 25 μm×1400 μm ø50 μm 50 μm×2000 μm ø70 μm 70 μm × 2500 μm ø120 μm 120 μm × 4200 μm ±0.05% of F.S. (F.S.= 1 mm) ±0.02% of F.S. (F.S.= 6 mm) ±0.02% of F.S. (F.S.= 20 mm) ±0.02% of F.S. (F.S.= 36 mm)*6 ±0.02% of F.S. (F.S.= 80 mm)*6 0.005 μm (0.001 μm) 0.02 μm (0.01 μm) 0.025 μm 0.1 μm 0.25 μm 2.55/5/10/20/50/100/200/500/1000 μs (9 steps selectable) 0.02% of F.S./°C (F.S.=1 mm) 0.01% of F.S./°C (F.S.= 6 mm) 0.01% of F.S. (F.S.= 20 mm) 0.01% of F.S. (F.S.= 36 mm) 0.01% of F.S. (F.S.= 80 mm) IP67 Incandescent lamp or fluorescent Incandescent lamp or fluorescent lamp: 10000 lux max. lamp: 5000 lux max. 0 to +50°C*5 0 to +50°C 0 to +50°C*5 35 to 85% RH (No condensation) 10 to 55 Hz, 1.5 mm double amplitude in X, Y, and Z directions, 2 hours respectively Aluminium die-cast Approx. 240 g Approx. 230 g Approx. 260 g Approx. 280 g Approx. 300 g *1 Measurement range when the sampling cycle is 20 μs or more. *2 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008/LK-H008W) is measured in the normal measurement mode. *3 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008/LK-H008W) is measured at the reference distance with the number of averaging measurements set to 16384. The value in parentheses is a typical example of a measurement with the number of averaging measurements set to 65536 and the sampling cycle to 200 μs. *4 Use one of the following dark filters when measuring a transparent or mirror surface object: LK-H082/LK-H087: LK-F3, LK-H152/LK-H157: LK-F2 *5 When the ambient temperature rises to 40°C or more, mount this on a metal plate before use. *6 Value measured at the event of diffuse reflection installation. Please contact us for the case of regular reflection installation. 14 LK-G5000 Series Model Designation Ambient temperature Environment resistance Relative humidity LK Series Rated voltage Current consumption Weight LK-G3000 Series LK-CC100 CC-Link communication unit dedicated to LK-G5000 Series Ver. 1.10 (Extended cyclic setting: Single) Ver. 2.00 (Extended cyclic setting: Double or more)*2 CLPA-certified master unit (CC-Link Ver. 2.00/Ver. 1.10) 1 to 4 156 kbps, 625 kbps, 2.5 Mbps, 5 Mbps, 10 Mbps Dedicated CC-Link cable supporting Ver. 1.10 (Shielded 3-core twisted-pair cable: OP-79426, OP-79427) 156 kbps: 1200 m, 625 kbps: 900 m, 2.5 Mbps: 400 m, 5 Mbps: 160 m, 10 Mbps: 100 m Remote device station When one or less head expansion unit is connected: 0 to 50°C. When two or more head expansion units are connected: 0 to 40°C. 35 to 85 %RH (No condensation) 24 VDC±10 % (supplied from controller) 200 mA max. Approx. 300 g Supported CCLink*1 version Master unit No. of occupied stations Communication speed Connection cable Maximum total cable extension length Station type Network connection LK-G5000 Series LK-CC100 (CC-Link unit) *1 CC-Link is a registered trademark of Mitsubishi Electric Corporation. *2 The LK-G5000 Series supports the "extended cyclic transmission" and "station-to-station cable length relaxation" of CC-Link Ver. 2.00. LK-DN100 (DeviceNet unit) Maximum trunk line cable length Communication type Power supply Current consumption Ambient temperature Environment resistance Relative humidity SI-F1000 Series Rated voltage Current consumption Weight LJ-G Series LK-DN100 DeviceNet communication unit dedicated to LK-G5000 Series DeviceNet*1 compliant ODVA-certified master unit 500 kbps, 250 kbps, 125 kbps Generic Dedicated 5 cables (2 signal cables, 2 power supply cables, 1 shielding cable) Thick cable: 500 m (at transmission speed of 125 kbps)/250 m (at 250 kbps)/ 125 m (at 500 kbps) Thin cable: 100 m (at all transmission speed settings) I/O communication (Poll) Explicit message communication 11 VDC to 25 VDC 10 mA max. (when network power supply 24 V is applied) When one or less head expansion unit is connected: 0 to 50°C. When two or more head expansion units are connected: 0 to 40°C. 35 to 85%RH (No condensation) 24 VDC ±10% (supplied from controller) 200 mA max. Approx. 300 g Communication protocol Master unit Transmission speed Device type Transmission medium Network connection LJ-V7000 Series Model Designation *1 DeviceNet is a registered trademark of ODVA (Open DeviceNet Vendor Association). Model Name Storage temperature Vibration resistance Weight Rated voltage Current consumption Head-to-controller cable CB-A2 2m Approx. 200 g Extension cable between the head and cable CB-A5 5m Approx. 400 g CB-A10 10 m Approx. 750 g CB-A20 CB-A30 20 m 30 m Approx. 1400 g Approx. 2000 g Model Cable length Weight CB-A5E 5m Approx. 400 g TM-3000 Series CB-A07 0.7 m Approx. 100 g LS-3100/5000 Series Storage humidity LS-7000 Series Ambient humidity LT-9000 Series LK-HD1001 LK-G5000 Series Touch Panel Display TFT colour LCD 32,768 colours 640 × 480 170.9 × 128.2 Approx. 50,000 hours White LED Approx. 50,000 hours 40 x 30 per 1 image Matrix resistance membrane mode 0.98N or less More than one million times Available only with the LK-G5000 Series Panel built-in type, IP65f equivalent dust-proof, waterjet-proof on only front panel Limit dust and corrosive gas 0 to 50°C 35 to 85%RH (no condensation) When the ambient temperature is higher than 40°C, limit the absolute humidity to 85%RH at 40°C. -10 to +60°C (no freezing) 35 to 85%RH (no condensation) When the ambient temperature is higher than 40°C, limit the absolute humidity to 85%RH at 40°C. 10 to 57 Hz, 0.3 mm double amplitude/57 to 500 Hz, 2G, 3 hours in each direction (X, Y, and Z) Approx. 1150 g 24 VDC ±10% 1 A or less Display elements Display colour Display panel Pixels (W x H pixels) Display area (W x H mm) Service life (normal temperature and humidity) Type Backlight lamp Service life Number of switches Mode Touch switch Operating force Service life Communication function Structure Operating environment Ambient temperature Model Cable length Weight SI-F80R Series LK-G5000 Series Touch Panel Display CB-A10E 10 m Approx. 750 g IM-6500 Series 15 LK-G5000 Series Dimensions Unit: mm Head ø14 LK-H020/LK-H022/LK-H023 LK-H025/LK-H027/LK-H028 LK-H008/LK-H008W ø14 55 500 55 500 11 LASER ON/STABILITY LED 31.2 22.8 ø7 13.4 15 ø7 12.7 13 max. 13.5 LASER ON/STABILITY LED 13.5 max. 0.5 0.5 62 53.4 20 4.4 57.5 73.5 2×ø4.4 Mounting hole 90° 11.8 8 9.2 4.4 12.3 66 40° 27.5 2xø4.4 Mounting hole 12.2 51.4 60 33.4 ø14 LK-H022K/LK-H027K LK-H050/LK-H052/LK-H053 LK-H055/LK-H057/LK-H058 75.9 4.6 LK-H052K/LK-H057K 55 74.8 500 66.6 LASER ON/STABILITY LED 13.4 22.1 2xø4.4 Mounting hole 24 7.7 max. 10.1 max. 37.6 ø7 0.5 89 max. 77.7 89.9 max. 55.4 68.5 22.8 68 59.9 10.1 40° 16.1 35.8 50 30° 30° 4.4 46.3 9.2 12.2 68 ø14 LK-H080/LK-H082/ LK-H085/LK-H087 7.7 max. 37.4 33.4 ø14 LK-H150/LK-H152/ LK-H155/LK-H157 55 55 500 500 80.3 LASER ON/STABILITY LED 7.7 max. 24 ø7 13.5 10.1 max. 2x ø4.4 Mounting hole LASER ON/STABILITY LED 35.4 22.7 20.2 0.5 ø7 68 84.3 67.3 6.8 4.2 4.4 24° 24° 18 8.2 76.7 9.2 12.3 75 16 10.1 33.3 9 80 20.6 76.2 90.5 max. 69 61.4 86.6 4 2x ø4.4 Mounting hole 0.6 70 82.2 7.7 max. 150 17° 33.5 38.5 147.5 17° LK-G5000 Series Extension cable [Cable between the head and cable] CB-A07/CB-A2/CB-A5/CB-A10/CB-A20/CB-A30 CB-A5E/CB-A10E 33 ø7 Cable length (5 m, 10 m) ø14 55 LK-G3000 Series ø7 Cable length (0.7 m, 2 m, 5 m, 10 m, 20 m, 30 m) ø14 55 LK-G5000 Series Extension cable [Cable between the head and controller] ø14 55 26 LK Series 11.5 Controller LK-G5001(P) LK-G5001(P)V 65 128 65 (65) LK-HA100 (65) 105.5 26.3 128 (65) 26.3 (65) 105.5 124 124 DIN-rail mounting position 124 35.9 LJ-V7000 Series DIN-rail mounting position 124 35.9 62.1 62.1 6 6 6 79.5 9 4xM4 Depth: 6 14 79.5 9 4xM4 Depth: 6 LK-CC100 6 M4 Depth: 6 LJ-G Series 34.5 13.5 47 47 13.5 M4 Depth: 6 114 14 LK-DN100 26.3 128 (13.2) 26.3 (13.2) 105.5 26.3 128 (13.2) 26.3 (13.2) 105.5 124 124 35.9 DIN-rail mounting position 124 124 35.9 62.1 62.1 6 6 6 M4 Depth: 6 M4 Depth: 6 (3.2) 114 (3.2) 13.5 13.5 PANEL CUTOUT DIMENSIONS LK-HD500 62 46 43 13 Panel mounting ring 62 min. 91 167 +0.6 0 LS-7000 Series 75 128.2 (Effective display area) 178 LT-9000 Series 6 14 114 Panel thickness 0.5 to 5 237 (3.2) M4 Depth: 6 14 LK-HD1001 Touch Panel Display 170.9(Effective display area) 13.5 13.5 (3.2) M4 Depth: 6 SI-F80R Series 6 SI-F1000 Series DIN-rail mounting position 74.5 80 100 min. 45 +0.6 0 8.5 51 25 LS-3100/5000 Series Warning The LK-G Series conforms to the following FDA and IEC standards: FDA (CDRH) Part 1040.10 IEC60825-1 LK-H008/ LK-H008W Class ll Laser Product Class 1 Laser Product LK-H022/H022K/H027/H027K/H052/H052K/ LK-H057/H057K/H082/H087/H152/H157 Class ll Laser Product Class 2 Laser Product TM-3000 Series Model LK-H020/H025/H050/H055/ LK-H080/H085/H150/H155 Class llla Laser Product Class 3R Laser Product IM-6500 Series 17 LK-G3000 Series High-Speed, High-Accuracy CCD Laser Displacement Sensor LK-G3000 Series Features Sampling rate of 50 kHz Linearity of ±0.05% of F.S. Repeatability down to 0.01 μm Can measure diffuse, specular, transparent, or translucent targets Wide beam spot models are available Expert Engineering Sites A new site with answers to all of your difficult measurement application questions www.measurecentral.com The newly-developed algorithms support various applications RPD* ALGORITHM Laser light tends to react differently with translucent targets, generating diffused reflections, which result in gradual broadening of the received light waveform. The RPD algorithm cancels the influence of the broadened waveform and detects the true peak (Real Peak). Light from subduction Light from subduction * RPD=Real Peak Detect Translucent object Waveform obtained by optimizing the 1st surface using ABLE MULTI-ABLE CONTROL The reflected light at each layer is sensed to optimize the intensity of laser light. Highly accurate thickness measurements are enabled by optimizing the optical setting for each layer. Waveform synthesized by the multi-ABLE function The 1st surface Glass The 2nd surface Waveform obtained by optimizing the 2nd surface using ABLE Saturation level MRC* ALGORITHM When two or more peaks are generated by multiple reflections, the algorithm compares the waveforms to the most recent received-light waveform and determines the one with the most similarity to the correct waveform. Normal reflection * MRC=Multiple Reflection Cancel Light from multiple reflections Multiple reflections 18 LK-G3000 Series LK-G5000 Series Applications LK-G3000 Series Thickness measurement of a glass plate LK Series Detecting the runout of a HDD Height measurement of PCB resin LJ-V7000 Series LJ-G Series Lineup Type Model LK-G10 Compact/ Super Precision Measuring range Repeatability ø20 μm 10 mm Class II (FDA) Class 1 (IEC) Spot diameter Measuring range 10 ±1 mm 0.01 μm LK-G15 20 x 500 μm Small spot LK-G32 ø30 μm 25 mm Wide beam LK-G37 SI-F80R Series Wide beam High Accuracy SI-F1000 Series Small spot Laser Class 0.05 μm 30 mm 35 mm 30 x 850 μm Small spot LT-9000 Series Measuring range 30 ±5 mm ø70 μm LK-G82 0.2 μm Multi-purpose 65 mm 80 mm 95 mm LS-7000 Series Wide beam 70 x 1100 μm LK-G87 Measuring range 80 ±15 mm Small spot ø120 μm LK-G152 Wide beam Small spot LK-G157 0.5 μm 110 mm 150 mm 190 mm 120 x 1700 μm Measuring range 150 ±40 mm ø290 μm LK-G402 300 mm 400 mm 500 mm LK-G407 Small spot LK-G502 Ultra Long Distance LK-G507 290 x 8300 μm Measuring range 400 ±100 mm ø300 μm 250 mm 500 mm 1000 mm Wide beam 2 μm Measuring range 500 -250/+500 mm IM-6500 Series Wide beam TM-3000 Series High-speed Long Distance LS-3100/5000 Series Class II (FDA) Class 2 (IEC) Long Distance 2 μm 300 x 9500 μm 19 LK-G3000 Series Specifications Sensor heads Model LK-G10/G15 Mounting mode LK-G32/G37 – LK-G82/G87 LK-G152/G157 Diffused reflection Specular reflection Diffuse reflection Specular reflection Diffuse reflection Specular reflection Reference distance 10 mm 30 mm 23.5 mm 80 mm 75.2 mm 150 mm 147.5 mm Measuring range *1 ±1 mm ±5 mm ±4.5 mm ±15 mm ±14 mm ±40 mm ±39 mm Red semiconductor laser Wavelength Light source Laser Class Output Spot diameter (at reference distance) Linearity *2 Repeatability *3 655 nm (visible light) Class II (FDA (CDRH) Part 1040.10), Class 1 (IEC 60825-1) Class II (FDA (CDRH) Part 1040.10), Class 2 (IEC 60825-1) 0.3 mW 0.95 mW Approx. 20 x 500 μm (G15), Approx. ø20 μm (G10) Approx. 30 x 850 μm (G37), Approx. ø30 μm (G32) Approx. 70 x 1100 μm (G87), Approx. ø70 μm (G82) Approx. 120 x 1700 μm (G157), Approx. ø120 μm (G152) ±0.03% of F.S. (F.S.= ±1 mm) ±0.05% of F.S. (F.S.= ±5 mm) ±0.05% of F.S. (F.S.= ±15 mm) ±0.05% of F.S. (F.S.= ±40 mm) 0.02 μm (0.01 μm) 0.05 μm *4 0.2 μm *4 0.5 μm *4 Sampling time 20/50/100/200/500/1000 μs (Selectable from 6 levels) LED display Near the centre of the measurement: Green lights, Within the measurement area: Orange lights, Outside the measurement area: Orange flashing Temperature characteristics 0.01% of F.S./°C (F.S.= ±1 mm ) 0.01% of F.S./°C (F.S.= ±5 mm) Enclosure rating 0.01% of F.S./°C (F.S.= ±15 mm) 0.01% of F.S./°C (F.S.= ±40 mm) IP67 (IEC60529) Ambient luminance Incandescent lamp or fluorescent lamp: 5000 lux max. Incandescent lamp or fluorescent lamp: 10000 lux max. Ambient temperature 0 to 50°C Relative humidity 35 to 85%, No condensation Vibration resistance 10 to 55 Hz, double amplitude 1.5 mm; two hours in each direction of X, Y, and Z Material Aluminium die-cast Weight (including the cable) Approx. 190 g Approx. 280 g Approx. 380 g Approx. 290 g *1 The value is obtained by measuring KEYENCE’s standard target (ceramic). LK-G10/G15: When the sampling rate is 20 μs, the value becomes +0.37 (FAR side) to -1 mm (NEAR side). LK-G32/G37: When the sampling rate is 20 μs, the value becomes +1.8 (FAR side) to -5 mm (NEAR side) for diffuse reflection, and +1.6 (FAR side) to -4.5 mm (NEAR side) for specular reflection. LK-G82/G87: When the sampling rate is 20 μs, the value becomes -9 (NEAR side) to -15 mm (NEAR side) for diffuse reflection, and -8.7 (NEAR side) to -14 mm (NEAR side) for specular reflection. LK-G152/G157: When the sampling rate is 20 μs, the value becomes -22 (NEAR side) to -40 mm (NEAR side) for diffuse reflection, and -22 (NEAR side) to -39 mm (NEAR side) for specular reflection. *2 The value is obtained by measuring KEYENCE’s standard target (ceramic) with the Standard mode. *3 The value is obtained by measuring KEYENCE’s standard(SUS) with 4096 times of averaging at the reference distance. The value in parenthesis is the typical repeatability obtained by measuring the target with 16384. *4 Consult your nearest KEYENCE representative for the Class IIIa type with increased repeatability. Model LK-G402/G407 Mounting mode LK-G502/G507 Diffused reflection Specular reflection Diffused reflection Reference distance 400 mm 398 mm 500 mm Specular reflection 497.5 mm Measuring range*1 ±100 mm ±99 mm -250 to +500 mm -249 to +498 mm Red semiconductor laser Light source Wavelength 655 nm (visible light) Laser Class Class II (FDA (CDRH) Part 1040.10), Class 2 (IEC 60825-1) Output 0.95 mW Spot diameter (at reference distance) Approx. 290 x 8300 μm (G407) Approx. ø290 μm (G402) Linearity *2 ±0.05% of F.S.(F.S.= ±100 mm) Approx. 300 x 9500 μm (G507) Approx. ø300 μm (G502) ±0.05% of F.S. ( ±250 μm) *4*5 -250 to +250 mm <high-accuracy range> ±0.02% of F.S. ( ±100 μm) -250 to -50 mm <long range> ±0.1% of F.S. ( ±500 μm) -250 to +500 mm (F.S. = ±250 mm) Repeatability *3 2 μm Sampling time 20/50/100/200/500/1000 μs (Selectable from 6 levels) LED display Temperature characteristics Near the centre of the measurement: Green lights Within the measurement area: Orange lights Outside the measurement area: Orange flashing 0.01% of F.S./˚C (F.S.= ±100 mm) Enclosure rating Ambient light Incandescent lamp or fluorescent lamp: 5000 lux max. Ambient temperature 0 to 50°C Relative humidity Vibrations resistance 35 to 85%, No condensation 10 to 55 Hz, double amplitude 1.5 mm; two hours in each direction of X, Y, and Z Material Weight (including the cable) *1 The value is obtained by measuring KEYENCE’s standard target (ceramic). <LK-G407/G402> When the sampling rate is 20 μs, the value becomes -70 mm (NEAR side) to -100 mm (NEAR side) for diffuse reflection. When the sampling rate is 20 μs, the value becomes -70 mm (NEAR side) to -99 mm (NEAR side) for specular reflection. <LK-G507/G502> When the sampling rate is 20 μs, the value becomes -230 mm (NEAR side) to -250 mm (NEAR side) for diffuse reflection. When the sampling rate is 20 μs, the value becomes -230 mm (NEAR side) to -249 mm (NEAR side) for specular reflection. When the sampling rate is 50 μs, the value becomes -125 mm (NEAR side) to -250 mm (NEAR side) for diffuse reflection. When the sampling rate is 50 μs, the value becomes -125 mm (NEAR side) to -249 mm (NEAR side) for specular reflection. *2 The value is obtained by measuring KEYENCE’s standard target (ceramic) with the Standard mode. *3 The value is obtained by measuring KEYENCE’s standard (SUS) with 4096 times of averaging at the reference distance. *4 All are calculated at F.S. = (±250 mm). *5 “High accuracy range” and “long range” refer to the linearity when those ranges are used. 20 0.01% of F.S./˚C (F.S.= ±250 mm) IP67 (IEC60529) Aluminium die-cast Approx. 380 g LK-G3000 Series LK-G5000 Series Controller Type Separate monitor model *1 All-in-one model LK-G3001V LK-G3001/LK-GD500 PNP LK-G3001PV LK-G3001P/LK-GD500 Display Head compatibility All LK-G sensor heads are compatible Number of connectable sensors Maximum of 2 units Minimum display unit 0.01 μm Display range ±9999.99 mm to ±9999.99 μm (Selectable from six levels) 10 times/sec Analogue voltage output ±10 V x 2 outputs, output impedance: 100 Ω Analogue current output 4 to 20 mA x 2 outputs, maximum load resistance: 350 Ω For OUT1, non-voltage or voltage input *3 Timing/Reset/Auto-zero input Non-voltage input *3 Laser remote interlock input For OUT1, NPN or PNP open-collector output *2 Comparator output For OUT1, NPN or PNP open-collector output *3 (N.C.) Alarm output LJ-V7000 Series For OUT2, non-voltage or voltage input *3 Timing/Reset/Auto-zero input Non-voltage or voltage input *3 x 3 inputs Program switching input Expansion connector LK Series Terminal block Refresh rate For Head A/Head B, non-voltage or voltage input *3 Laser-Off input For OUT2, NPN or PNP open-collector output *2 Comparator output For OUT2, NPN or PNP open-collector output *2(N.C.) Alarm output Binary output Measured data output (21 bits), OUT1/OUT2 selectable, NPN or PNP open-collector output *2 Strobe output NPN or PNP open-collector output *2 Binary selector output NPN or PNP open-collector output *2 LJ-G Series Binary LK-G3000 Series Model NPN Non-voltage or voltage input *3 Binary selector input RS-232C interface Measured data output and control input/output (Maximum baud rate: 115200 bps, selectable) USB interface In conformity with USB Revision 2.0 Full speed (USB1.1 compatible) Major functions Power supply voltage 24 VDC±10%, Ripple: 10% (P to P) or less Current consumption 500 mA or less with 1 head/600 mA or less with 2 heads Ambient temperature SI-F1000 Series 2 OUT simultaneous measurement, Operation, Averaging, Filter, Calibration, Measurement, AUTO ZERO, Sampling frequency setting, Mutual interference prevention, Data storage, 8-program memory, ECO mode, ABLE setting, Target setting, ABLE tuning, Selection of measurement surface of transparent target, Statistics processing, Connection of setting support software, Selectable head-mounting, etc. 0 to 50°C Relative humidity 35 to 85%, No condensation Weight Approx. 480 g (LK-G3001V/G3001PV), Approx. 370 g (LK-G3001/G3001P), Approx. 60 g (LK-GD500) SI-F80R Series *1 LK-G3001(P) can be operated singly. The measured value display and setting modifications can be performed on the display panel (LK-GD500) or via the setting support software (LK-H1W). *2 The rating of the NPN open-collector: 50 mA max. (40 V max.), residual voltage of 0.5 V max. The rating of the PNP open collector: 50 mA max. (30 V max.), residual voltage of 0.5 V max. *3 (NPN model) The rating of non-voltage input: 1 V or less ON voltage, 0.6 mA or less OFF current. (PNP model) The rating of voltage input: 10.2 V or more ON voltage (26.4 V max.) 0.6 mA or less OFF current. Hardware environment Item CPU Supported OS Memory capacity Display Hard disk space Interface*4 LT-9000 Series Hardware requirements Pentium III, 400 MHz or higher Windows 7*1/Windows Vista*2 Windows XP*3/Windows 2000 Professional 64 Mbytes or more 800 x 600 pixels, 256 colours or more 10 Mbytes or more RS-232C (serial port) or USB2.0/1.1*5 must be installed. LS-7000 Series *1 Home Premium, Professional and Ultimate editions are supported. *2 Ultimate, Business, Home Premium, Home Basic editions are supported. For Windows Vista, Ver. 1.5 and later versions are supported. *3 Professional and Home edition are supported. *4 Select one for communication. Multiple interfaces cannot be used for communication at the same time. *5 Operations are not guaranteed when connected through a USB hub. Use under an environment that exceeds the recommended environment of the your OS. • Windows is a registered trademark of Microsoft Corporation of America. • Pentium is a registered trademark of Intel Corporation. LS-3100/5000 Series Extension cable (Cable between the head and controller) Model Cable length Weight LK-GC2 LK-GC5 LK-GC10 LK-GC20 2m 5m 10 m 20 m LK-GC30 30 m Approx. 200 g Approx. 400 g Approx. 750 g Approx. 1400 g Approx. 2000 g Model Cable length OP-51654 OP-51655 OP-51656 0.3 m 3m 10 m TM-3000 Series Extension cable (Cable for display panel) IM-6500 Series 21 LK-G3000 Series Dimensions Unit: mm Sensor heads ø14 ø14 LK-G10/G15 LK-G32/G37 Diffused reflection type mounting 55 55 ø7 500 ø7 54 26 85 2-ø4.5 26.3 22.8 500 25 Mounting hole 2-ø4.4 Mounting hole 76 67 51.2 71.7 15 40° 4 25 to 35 9 to 11 75° 13.5 11.5 27 13 LK-G82/G87 ø14 LK-G152/G157 ø14 Diffused reflection type mounting Diffused reflection type mounting 55 55 ø7 0.6 4 500 2-ø4.5 Mounting hole 33.3 20.2 2-ø4.4 95 25 500 ø7 82.2 36 Mounting hole 76 67 76.2 68 4 25° 65 to 95 4.2 18 8.2 13.5 18 110 to 190 17° LK-G402/G407/G502/G507 Data in ( ) applies to LK-G407/G402 Diffused reflection type mounting ø14 55 500 108 1 ø7 20 0.7 85 4.5 2 - ø4.4 mounting hole 76 8.2 19.2 10.2° 36.2 250 to 1000 (300 to 500) 22 LK-G3000 Series LK-G5000 Series Controllers LK-G3001V/LK-G3001PV 62 (65) 117 LK-G3000 Series 62 LK-G3001/LK-G3001P 95 (65) DIN-rail mounting position 124 124 35.9 LK Series 66.1 LJ-V7000 Series 6 6 43 43 9.5 33 9.5 13.5 4-M4 screws, 70 Depth: 6 70 4-M4 screws, LJ-G Series Depth: 6 Cable between the head and controller ø7 Cable length (2 m, 5 m, 10 m, 20 m, 30 m) 33 SI-F1000 Series LK-GC2/LK-GC5/LK-GC10/LK-GC20/LK-GC30 ø14 55 SI-F80R Series 26 11.5 LT-9000 Series Display panel Panel cutout dimensions LK-GD500 46 13 Panel-mounting ring 75 74.5 80 100 min. 45 +0.6 0 LS-3100/5000 Series 91 LS-7000 Series 62 min. Panel thickness 0.5 to 5 62 +0.6 0 8.5 25 TM-3000 Series IM-6500 Series 23 LK Series CCD Laser Displacement Sensors LK Series Features Linearity of ±0.1% of F.S. Repeatability of 1 μm 30 μm diameter beam spot Ultra long measuring distance up to 750 mm Measurement unaffected by colour, surface texture or stray light Expert Engineering Sites A new site with answers to all of your difficult measurement application questions www.measurecentral.com Measurement of various target surfaces Laser beam spot of 30 μm diameter The LFTC circuit enables measurement of multicoloured or patterned targets. Low reflectance targets, such as black rubber, can be measured without additional adjustment. KEYENCE’s unique optical system minimizes lens aberration to give the LK-031 a minimum spot diameter of 30 μm. This enables the surface contour of a target to be accurately measured. Lineup Type Model Measurement mode Compact/high-accuracy LK-011 Normal Mirror surface 7.9 7.0 6.1 mm mm mm 11 10 9 mm mm mm High-precision LK-031/036 – 35 30 25 mm mm mm Standard LK-081/086 – 95 mm 80 mm 65 mm Reference distance 10 ±1mm 7.0 ±0.9 mm Repeatability 30 ±5 mm 0.1 μm Linearity 80 ±15 mm 1 μm 3 μm ±0.25% of F.S. Sampling cycle ±0.1% of F.S. 128/256/512/2,048 μs Type Model Measurement mode 512 μs 1,024 μs Long-distance LK-503 High-precision mode 450 mm 350 mm 250 mm Long-range mode 750 mm 500 mm 250 mm Reference distance 350 ±100 mm Repeatability Linearity Sampling cycle 24 500 ±250 mm 10 μm 50 μm ±0.1% of F.S. 1,024 μs LK Series LK-G5000 Series Specifications Sensor head Controller Model Measurement mode Reference distance Measuring range Light source Output Wavelength Laser Class Standard Long-distance *4 LK-031/036 LK-2001/2011 LK-081/086 LK-2101/2111 LK-503 LK-2503 — 30 mm ±5 mm High-precision mode Long-range mode 350 mm ±100 mm 500 mm ±250 mm 80 mm ±15 mm Visible red semiconductor laser 0.95 mW 670 nm 690 nm Approx. 30 μm (LK-031) Approx. 30 x 850 μm (LK-036) 1 μm *1 Approx. 20 μm Sampling cycle Voltage output 512 μs 50 μm *1 1024 μs ±5 V (1 μm/mV) *3 0.04% of F.S./°C 0.005% of F.S./°C IP64 SI-F1000 Series Approx. 80 g LJ-G Series ±5 V ±10 V ±5 V (3 μm/mV) *3 (10 μm/mV) *3 (50 μm/mV) *3 100 Ω 4 to 20 mA (Applicable load: 350 Ωmax.) NPN: 100 mA max. (40 V max.) (N.C.), Residual voltage: 1 V max. AUTO ZERO, Response selection, Shift/Span adjustment, Holding output in alarm condition 24 VDC ±10%, Ripple: 10% (P to P) or less 400 mA max. 0.01% of F.S./°C 0.02% of F.S./°C 0.01% of F.S./°C IP67 Incandescent or fluorescent lamp: 10000 lux max. 0 to 50°C 35 to 85%, No condensation Aluminium die-cast Polycarbonate Approx. 260 g Approx. 385 g Approx. 700 g Approx. 515 g Impedance Current output Alarm output Other functions Power supply Current consumption Sensor head Temperature fluctuation Controller Enclosure rating Ambient light Ambient temperature Relative humidity Sensor head Housing Controller Sensor head Weight (including cable) Controller Approx. 0.3 mm LJ-V7000 Series 0.1 μm *1 ±0.25% of F.S. *2 128/256/512/2,048 μs selectable ±10 V (±9 V) (0.1 μm/mV)*3 Repeatability Linearity Class II Laser Product Class 2 Laser Product Approx. 70 μm (LK-081) Approx. 0.7 mm Approx. 70 x 1100 μm (LK-086) 3 μm *1 10 μm *1 ±0.1% of F.S. *2 LK Series FDA (CDRH) Part 1040.10 IEC 60825-1 Spot diameter (at reference distance) Analogue output High-precision LK-G3000 Series Compact high-accuracy LK-011 LK-3101 Normal (mirror surface) 10 mm (7.0 mm) ±1 mm (±0.9 mm) Type SI-F80R Series *1 Repeatability was obtained using KEYENCE’s analogue sensor controller (RD-50) with the number of averaging measurements set to 64. Note: The ripple of the analogue output may be 1 mV or more due to common mode noise when observed with an oscilloscope or a high-speed A/D conversion board. *2 Linearity was obtained using KEYENCE’s standard target (Zirconia block gauge: LK-031/036, LK-081/086, LK-011, White ceramic block gauge: LK-503). *3 When measurement is impossible, 12 V (31.2 mA) is output. *4 The LK-503 can both be used in High-precision mode or Long-range mode. LT-9000 Series Dimensions Unit: mm Controllers 4-ø5 (mounting hole) 13 140 110 76 LS-7000 Series LK-3101/2001/2011/2101/2111/2503 (60) 27.3 90 100 112 35.4 LS-3100/5000 Series 172 Extension cable (Optional) 0 to 140° Cable length 2m 5m 10 m Model LK-C2 LK-C5 LK-C10 Sensor head LK-081/086 ø15 42.7 7 45° 9 to 11 7.9 500 26 ø7 2-ø4.5 (mounting hole) 25 76 67 4 500 13.5 47.8 25 to 35 4 13 ø7, Cable length: 500 43 79 ø15 36 95 5 25 250 to 750 (250 to 450) 76 67 40° 2-ø5.4 (mounting hole) IM-6500 Series 2-ø4.5 (mounting hole) 3 2-ø3.2 (mounting hole) 33.5 43 90 ø7 17.7 85 39.8 120 43 500 ø5 33 * Data in ( ) applies to at high-precision mode. ø15 43 3 LK-503 ø15 TM-3000 Series LK-031/036 LK-011 8° (11°) 25° 13.5 65 to 95 18 13.8 Measurement reference position 24.5 25 LJ-V7000 Series High-speed 2D/3D Laser Scanner NEW LJ-V7000 Series Features An emphasis on inline measurement The world's fastest at 64,000 profiles/sec. Blue laser optical system Expert Engineering Sites A new site with answers to all of your difficult measurement application questions www.measurecentral.com 240 times greater than conventional devices 64,000 profiles/sec. sampling 12,800,000 points/sec. World's fastest The LJ-V7000 Series has achieved the world's fastest sampling speed. Other devices within the 2D laser measuring device market cannot even come close. It can measure the shapes of products running on a line or through equipment at ultra high speeds, with high-resolution and without missing an item. As an example, it can measure targets moving at 6.4 m/s with a pitch of 0.1 mm. The LJ-V7000 Series does not allow the passing of abnormal or defective areas. 64 times the dynamic range of conventional devices Overwhelming workpiece response capabilities and detection stability Industry's greatest Normally, detection stability is inversely proportional to speed. However, the LJ-V7000 Series has achieved the improvements in both speed and detection stability. Shapes are accurately measured even in cases where black surfaces or inclines with low reflectivity and metallic surfaces with high reflectivity are mixed together under the same optical axis. 26 LJ-V7000 Series LK-G5000 Series Applications LK-G3000 Series loose seals and perform a variety of measurements. High-speed measurement is possible, and in addition to bearings, the completion time to inspect shapes for rotating objects is also greatly improved. The shapes of continuous swelling on steel sheets that are flowing at high-speeds are measured. Because it is possible to measure at speeds of up to 64 kHz, you can perform high-definition measurement at fine pitches. Welding grooves and bead shapes are measured. Can be used on site without worry due to its strong IP67 structure, shock resistance, and high-flex cable. Measuring the shapes of projections and depressions on extrusion moulded products LJ-V7000 Series Measuring the swelling of steel sheets LK Series Measuring loose bearing seals Measuring welding grooves and bead shapes Bearings are rotated to detect Measurement is performed to determine if the shapes of moulded parts that are extruded at high speeds are correct or not. Various targets can be supported, including rubber, metal, ceramics, concrete, and food products. LJ-G Series Lineup High-accuracy Middle range Long range LJ-V7060K LJ-V7060 LJ-V7080 LJ-V7200 Ultra-long range LJ-V7300 (mm) (mm) 450 450 450 450 450 400 400 400 400 400 350 350 350 350 350 300 300 300 300 300 250 250 250 250 250 200 200 200 200 200 150 150 150 150 150 100 100 100 100 100 50 50 50 0 0 Measurement Z-axis 54.6±7.6 mm range X-axis 14 mm Repeatability Z-axis 0.4 μm X-axis 5 μm 52 mm 60 mm 68 mm Measurement range 60±8 mm Width：13 13.55 mm m Width：15 mm Width：15 mm Z-axis 0.4 μm X-axis 5 μm Controller variation NPN output type LJ-V7001 Display output unit LJ-VM100 Width：18 180 mm Width：51 mm 50 200 mm Width：62 mm Width：32 mm 103 mm Width：39 mm 0 248 mm Width：73 mm Measurement range 80±23 mm Measurement ntt range 200±48 mm Measurement Z-axis 80±23 mm range X-axis 32 mm Measurement Z-axis 200±48 mm range X-axis 62 mm Repeatability 300 mm Z-axis 0.5 μm X-axis 10 μm Repeatability 0 Z-axis 1 μm X-axis 20 μm Monitor Cable connector Touch panel monitor CA-MP120T Head connection cable CB-B3 （3 m） / CB-B10 （10 m） Specialised monitor stand OP-87262 Display monitor connection cable RS-232C cable （2.5 m） OP-66842 （3 m） / OP-87055 （10 m）OP-96368 445 mm Measurement nt range raa 300±145 mm Width：2400 mm Measurement Z-axis 300±145 mm range X-axis 180 mm 5 μm Repeatability Z-axis X-axis 60 μm TM-3000 Series Controller Controller LJ-V7001(P) 0 Measurement Z-axis 60±8 mm range X-axis 15 mm Repeatability Wid h：25 mm Width 80 mm 50 Width d ：11 110 mm LS-3100/5000 Series 47 mm Width：8 mm 54.6 54 6 mm Width：14 mm 62 2 mm 62.2 Width：8 mm Measurement range 54.6±7.6 mm 57 mm 155 mm LS-7000 Series (mm) LT-9000 Series (mm) SI-F80R Series (mm) 152 mm SI-F1000 Series High-accuracy specular reflection Head connection extension cable Touch panel monitor extension cable CB-B5E （5 m） / CB-B10E （10 m） OP-87258 （3 m） CB-B20E （20 m） OP-87259 （10 m） PNP output type LJ-V7001P USB cable Console (LJ-H2 accessory) OP-87504 OP 66844 OP-66844 EtherNet/IP unit CB-EP100 D-sub9 pin connector OP-26401 IM-6500 Series Sett S eett ttings ings gs m mon mo nitor tor to o s f ware so sof soft ar LJ H2 LJ-H LJ 27 LJ-V7000 Series Blue laser optical system Forms images of profiles with ultra-stability and high-accuracy World’s first The LJ-V7000 Series is the first 2D laser displacement sensor in the world to adopt a blue laser. A sharp line beam is formed on the light-receiving element by focusing a short wavelength 405 nm laser to its maximum limit with a 2D Ernostar lens. This generates a stabilised high-precision profile. Also, the received light density for the laser has been increased to successfully secure a greater level of received light intensity. This achieves ultra-stable and highly accurate measurement with all types of targets that are typically difficult to detect. Red laser (conventional) Blue laser (LJ-V) With a conventional red laser, the beam that formed the image is thick, resulting in the generation of variation in the profile. With a blue laser, the image forming beam becomes sharp to enable the measurement of shapes with excellent accuracy. HSE3*-CMOS Can perform stable measurement of any target even at ultra-high-speeds Newly developed/world's greatest The LJ-V7000 Series is equipped with the newly developed HSE3-CMOS. In addition to improved speed, the dynamic range has been further powered up over the established and conventional E3-CMOS. Even with the extremely short exposure time of 64 kHz (15.6 μs) it has achieved sensitivity that allows it to reliably measure a range of surfaces from black (small amount of reflection) surfaces to those with lustre (large amount of reflection) as well a wide dynamic range. * HS=High Speed E3 =Enhanced Eye Emulation Measurement is impossible due to insufficient light intensity. Could not be measured at all. All ranges could be measured. The exposure time is short, so inclines could not be measured. All ranges could be measured. Even though the exposure time is short, all ranges could be measured without issue. CMOS (General displacement metre) 300x Dynamic range When using high-speed sampling Dynamic range When using low-speed sampling 64x E3-CMOS (LJ-G) Reflectivity and light intensity in the width direction will change greatly depending on the shape, colour, material, or sampling speed (exposure time) of the target. HSE3-CMOS (LJ-V) GP*64-Processor Achieves 64 kHz ultra-high-speed measurement Newly developed We have newly developed a custom IC that can perform ultra-high-speed pipeline processing that in addition to reading CMOS image capture data and performing high-resolution subpixel processing, also performs highprecision linearisation and data output. This allows for the measurement of objects moving at high-speeds with room to spare. * G=Generating P=Profiles CMOS image capture data Reaading (11) reading Reading (2 2) High-resolution subpixel processing Subbpixeel (11) High-accuracy linearisation processing Lineearissattioon (1) linnearisation (2) Data a ouutp put (1) Data output 64 kHz 28 Subpixel (2) 64 kHz LJ-V7000 Series LK-G5000 Series 74 types of measurement modes 16-point complete simultaneous measurement The industry's greatest variety With 13 types of measurement details and 7 types of measurement target specifications, this single device can handle a total of 74 types of measurements. This single device achieves the measurement of a wide variety of target and responds to customer demands without missing a beat. LK-G3000 Series Types of measurements Types of measurement targets for each measurement LK Series LJ-V7000 Series Any 16 points can be measured simultaneously with a measurement mode that has been selected from the 74 types that are available. Simultaneously completes measurements and inspections that were considered to be a lost cause until now. LJ-G Series Centre position SI-F1000 Series Angle Height Distance Height difference SI-F80R Series Width Bottom height/position Cross-section area LT-9000 Series Publicly open communications library LS-3100/5000 Series Profile data LS-7000 Series Continuous profile data output at a top speed of 64 kHz Max. 64,000 profiles/sec. TM-3000 Series Giga bit Ethernet Profile data Height data that has been linearised at 20 bits for each point IM-6500 Series The LJ-V7000 Series has now been equipped with a TOE (TCP/IP off-load engine) specifically for processing high-speed communication. This achieves high throughput that does not affect CPU load. With this it is possible to output 64,000 units of profile data at a top speed of 1 second. Rather than performing measurements in standard measurement mode, the LJ-V7000 Series is used as a measuring probe and is effective in cases when you would like to perform measurements using your own original algorithms. The communications library is also publicly available as standard. Pixel pitch 29 LJ-V7000 Series Specifications Controller Model LJ-V7001 LJ-V7001P No. of connectable sensors Display Max. 2 units Minimum display unit 0.1 μm, 0.00001 mm2, 0.01° Maximum display range ±99999.9 mm, ±999999 mm2 Laser remote interlock input Non-voltage input Encoder input NPN open-collector output, voltage output (5 V/12 V/24 V), and line-driver output all supported Trigger inputs Timing 1, 2 input Auto-zero1, 2 input Input terminal Reset 1, 2 input block Start measurement/stop input Non-voltage input Voltage input Start storage/stop input Clear memory input Laser OFF input Programme switch input Non-voltage input x 4 inputs Analogue voltage output OUT comparator output Voltage input x 4 inputs ±10 V x 2 outputs, Output impedance: 100 Ω NPN open collector output x 12 outputs (Can freely assign 16 OUTs x 3 stage judgement results) PNP open collector output x 12 outputs (Can freely assign 16 OUTs x 3 stage judgement results) NPN open collector output PNP open collector output Strobe output Output terminal block Disable trigger output Memory FULL output Ready output Error output NPN open collector output (N.C.) PNP open collector output (N.C.) Ethernet interface 1000BASE-T/100BASE-TX USB Interface USB 2.0 high speed compliant (USB 1.1 Full-SPEED compatible) RS-232C interface Rating Measurement data output and control I/O (Can select a baud rate of up to 115,200 bits/s) Voltage Includes 24 VDC ±10% ripple (P-P) Maximum current consumption 1.3 A or less when connected to 1 head/ 1.9 A or less when connected to 2 heads Environmental Operating ambient temperature resistance Operating ambient humidity 0 to +50°C 20 to 85% RH (No condensation) Weight Approx. 1500 g • The rating for NPN open-collector output is up to 50 mA (40 V or less), residual voltage of up to 1 V • The rating for PNP open-collector output is up to 50 mA (30 V or less), residual voltage of up to 1 V • The rating for non-voltage input is up to 1 V for ON voltage and up to 0.6 mA for OFF current • The rating for voltage input is a maximum input voltage of 26.4 V, a minimum ON voltage of 10.8 V, and up to 0.6 mA for OFF current Display output unit Model LJ-VM100 Monitor output Analogue RGB XGA (1024 x 768) Touch panel monitor (CA-MP120T), specialised connector included Voltage Supplied from the controller Power consumption 2.5 W or less Environmental Operating ambient temperature resistance Operating ambient humidity 0 to +50°C Weight Approx. 400 g 20 to 85% RH (No condensation) LJ-H2 (LJ-Navigator 2) operation system environment Item PC Interface Minimum system requirements Ethernet*1 1000BASE-T/100BASE-TX USB*1 USB 2.0 high speed compliant (USB 1.1 Full-SPEED compatible) Supported OS Windows7 (Home Premium, Professional, Ultimate) Windows Vista (Home Basic, Home Premium, Business, Ultimate) Windows XP (SP2 or later) (Home Edition, Professional Edition) Supported languages*2 Japanese, English, German, French, Simplified Chinese, Traditional Chinese CPU Core i3 2.3 GHz or higher Memory capacity 2 GB or more 2D cache memory 2 MB or more Free space on hard disk 10 GB or more Display resolution XGA (1024 x 768) or higher Weight Approx. 400 g *1 Connections through a hub are not covered under warranty. *2 All languages except for Japanese and English are expected to receive support in the near future. • Windows is a registered trademark of the Microsoft Corporation, U.S.A. • Core is a registered trademark of the Intel Corporation. 30 LJ-V7000 Series LK-G5000 Series Communication unit Model CB-EP100 Compatible network EtherNet/IP and displacement sensor’s own protocols (socket communication) Eternet Compliant standards IEEE 802.3 (10BASE-T), IEEE 802.3u (100BASE-TX) Transmission speed 10 Mbps (10BASE-T), 100 Mbps (100BASE-TX) Transmission media STP or Category 3 or higher UTP (10BASE-T), STP or Category 5 or higher UTP (100BASE-TX) 100 m (Distance between the unit and Ethernet switch) Maximum number of connectable hubs*1 4 hubs (10BASE-T), 2 hubs (100BASE-TX) Cyclic communication (Implicit messaging) Supported functions EtherNet/IP LK-G3000 Series Maximum cable length Message communication (Explicit messaging), Compatible with UCMM and Class 3 64 RPI 0.5 ms to 10000 ms (in 0.5 ms) Tolerable communication bandwidth for cyclic communication 6000 pps Message communication UCMM, Class 3 Conformance test Compatible with Version A9 Power supply voltage LK Series Number of connections 24 VDC, including ±10% ripple (P-P) (supplied from the controller unit of the laser scanner) Power consumption 2400 mW max. Operating ambient temperature 0 to +50°C Operating ambient humidity 20 to 85% RH (No condensation) Weight LJ-V7000 Series Environmental resistance Approx. 470 g *1 The number of connectable hubs is not limited when using a switching hub. Sensor head unit Model LJ-V7060K Mounting conditions LJ-V7200 LJ-V7300 Diffuse reflection 54.6 mm 60 mm 80 mm 200 mm 300 mm ±7.6 mm (F.S.=15.2 mm) ±8 mm (F.S.=16 mm) ±23 mm (F.S.=46 mm) ±48 mm (F.S.=96 mm) ±145 mm (F.S.=290 mm) NEAR side 8 mm 13.5 mm 25 mm 51 mm 110 mm Reference distance 14 mm 15 mm 32 mm 62 mm 180 mm Far side 8 mm 15 mm 39 mm 73 mm 240 mm Z-axis (height) SI-F1000 Series Measurement range LJ-V7080 LJ-G Series Reference distance X-axis (width) LJ-V7060 Specular reflection Blue semiconductor laser Wavelength Light source Laser class IEC60825-1 FDA(CDRH) Part 1040.10*11 Output 405 nm (visible beam) Class 2 Laser Product Class 2M Laser Product*10 4.8 mW 10 mW Repeatability*1 Approx. 48 mm x 48 μm Approx. 90 mm x 85 μm Z-axis (height) *2 0.4 μm 0.5 μm 1 μm 5 μm X-axis (width) *3 5 μm 10 μm 20 μm 60 μm Linearity Z-axis (height) *4 Profile Data interval X-axis (width) Approx. 240 mm x 610 μm ±0.05 to *5 ±0.15% of F.S. ±0.1% of F.S. 20 μm 50 μm 100 μm 300 μm LT-9000 Series Top speed: 16 μs (high-speed mode) Top speed: 32 μs (advanced function mode) Sampling cycle (trigger interval)*6 Temperature characteristics 0.01% of F.S./°C Enclosure rating*7 IP67 (IEC60529) Ambient operating illuminance*8 Incandescent lamp: 10000 lux max Ambient temperature*9 0 to +45°C Operating Ambient humidity LS-7000 Series Environmental resistance 4.8 mW Approx. 21 mm x 45 μm SI-F80R Series Spot shape (reference distance) Class 2 Laser Product 20 to 85% RH (No condensation) Vibration resistance 10 to 57 Hz, 1.5 mm double amplitude in X, Y, and Z directions, 3 hours respectively Impact resistance 15 G/6 msec Material Aluminium Weight Approx. 450 g Approx. 400 g Approx. 550 g Approx. 1000 g 110 145 LS-3100/5000 Series ±0.05% of F.S. 180 ±0.1% of F.S. 145 TM-3000 Series *1 This value is from a case in which measurement has been performed with a reference distance at an average frequency of 4096 times. *2 The measurement targets are KEYENCE standard targets (white diffused objects). This value is from a case in which the average height of the default setting area has been measured in height mode. All other settings are default. *3 The measurement target is a pin gauge. This value is from a case in which the position of the intersection between the rounded surface of the pin gauge and the edge level has been measured in position mode. All other settings are default. *4 The measurement targets are KEYENCE standard targets (white diffused objects). The profile data is from a case in which measurement has been performed with 64x smoothing and 8x averaging. All other settings are default. *5 The linearity will differ depending on the measurement area. (See the diagram on the right.) *6 When the measurement area is at its minimum, binning is ON, image capture mode is set to standard, and parallel image capture is ON in high-speed mode. All other settings are default. When the measurement area is at its minimum, binning is ON and image capture mode is set to standard in advanced function mode. All other settings are default. *7 This value is from a case in which the head cable (CB-B*) or extension cable (CB-B*E) has been connected. *8 When measuring white paper, this is the illuminance for the light-receiving surface of the sensor head when light has been shined onto white paper. *9 Use the sensor head after first mounting it on a metal plate. *10 Viewing the laser output with certain optical instruments (for example, eye loupes, magnifiers and microscopes) within a distance of 100 mm may pose an eye hazard. *11 The laser classification for FDA(CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No.50. 240 ±0.15% of F.S. Cables CB-B3 Cable type Cable length CB-B10 3m CB-B10E CB-B20E Extension cable 10 m Minimum bend radius 5m 10 m 20 m Approx. 800 g Approx. 1500 g 22 mm Enclosure rating*1 IP67 (IEC60529) Material (outer covering) Weight CB-B5E Head cable IM-6500 Series Model PVC Approx. 250 g Approx. 750 g Approx. 400 g *1 This value is from a case in which the sensor head has been connected. However, the controller side connector is not included. • Regarding cable extension between the head and controller: Up to 2 cables can be connected with the CB-BxxE, and these cables should be kept to a total length of 30 m or less. 31 LJ-V7000 Series Dimensions Sensor head High-accuracy specular reflection model LJ-V7060K High-accuracy model LJ-V7060 22 11 21 65 11 21 20 20 114.3 83.5 42 13 16 M4 Depth: 4.2 2 x M4 Depth: 2.8 M4 Depth: 4.2 2 x ø4.4 Mounting hole 48.6 110 42 16 13 2 x M4 Depth: 2.8 4 x M3 Depth: 3.5 28 (75) 2 x ø4.4 Mounting hole 59 4 x M3 Depth: 3.5 80 71 30 104.1 96.7 25 4 18.5 12 11.3 60 18.5 35° 13.5 54.6 54.6 15 8 8 8 14 7.6 7.6 15 7.6 7.6 Measurement area 2.4 8 35° 60 8 8 Measurement area 2.4 52.6 4 Middle-range model LJ-V7080 84 11 21 20 2 x M4 Depth: 6 M4 Depth: 2.8 14 42 16 96 4 4 x M3 Depth: 3.5 71 30 (75) 71 62 20 4 18 80 12 24° 80 2 x ø4.4 Mounting hole 25 23 23 32 Measurement area 23 23 39 100 38 173 100 25 32 Long range model LJ-V7200 4 x M4 Depth: 2.8 105 Ultra-long range model LJ-V7300 11 20 4 x M4 Depth: 2.8 42 13 16 38 16 16 57 25 4 x M3 Depth: 3.5 50 145 4 x M3 Depth: 3.5 32 105 (75) 3 x ø4.4 Mounting hole 88 79 20 4 12 30 30 77 68 21.2° 25 4 18 12 110 300 300 24.2° 200 200 Measurement area 51 48 180 48 62 Measurement area 48 145 145 145 145 48 73 240 32 (75) 3 x ø5.4 Mounting hole LJ-V7000 Series Controller 88.8 EtherNet/IP unit CB-EP100 Display output unit LJ-VM100 (70) LK-G5000 Series Multi-function controller LJ-V7001(P) 153.5 26.3 DIN rail mounting unit 35.9 83.3 DIN-rail mounting unit 35.9 153 35.9 153 LK-G3000 Series DIN rail mounting unit 178 150.6 26.3 83.3 6 83.3 6 6 2 x M4 Depth: 6 2 x M4 Depth: 6 13.2 13.2 60 80 LK Series 4 x M4 Depth: 6 16.5 80 16.5 14.4 Head connection cable CB-B3/CB-B10 41 31 16.5 Head connection extension cable CB-B5E/CB-B10E/CB-B20E ø7.6 Cable length (3 m, 10 m) 55 14 18 51 Console OP-87504 55 ø7.6 Cable length (5 m, 10 m, 20 m) (CB-B cable side) 30.7 47 18 14 16.5 16.5 14 14 16.5 32 LJ-V7000 Series 80 2 5.45 20.3 17.1 11.1 (Sensor head side) 81.5 13 LJ-G Series 114.9 Monitor ø20 Touch panel monitor CA-MP120T 4.6 75 6.5 10.55 75 35 186 (Effective display) 255 ø4.5 Cable length (3 m) SI-F1000 Series 247.4 (Effective display) 240 ø10 8.1 SI-F80R Series 342 28 15 360 6 (49.5) 55.5 Panel thickness (1.6 to 4.0) Panel mounting Mounting brackets Mounting screws LT-9000 Series 263 (Mounting bracket dimensions) Panel cut dimensions 242 157 344 157 LS-7000 Series Specialised monitor stand OP-87262 151.5 334.3 315 LS-3100/5000 Series 20° 315 5° 187.5 200 5 2x .5 R2 TM-3000 Series 4x 85 8 45 250 260 IM-6500 Series 33 LJ-G Series High-Accuracy 2D Laser Displacement Sensor LJ-G Series Features Linearity of ±0.1% of F.S. High-speed sampling of 3.8 ms Simultaneous measurement/judgement of up to 8 features Stable measurement for all targets Expert Engineering Sites A new site with answers to all of your difficult measurement application questions www.measurecentral.com 8-point simultaneous measurement/judgment The LJ-G Series provides 8-point simultaneous measurement in various measuring modes (height, width, height difference, angle, profile, crosssection area, etc.). Desired measuring points can be specified relative to a profile waveform. Furthermore, the LJ-G Series provides outputs of individual measured values and upper/lower tolerance comparator outputs. Measurement menus HEIGHT Measures height in a specifi ed range. Position (XZ coordinate) Measures width/ position with a specifi ed condition. Average Measurements Peak height Bottom height Average height Gap Width/Position Section area Angle/Intersection Profile comparison Useful Adjustment Functions WIDTH/ POSITION Peak Best in its class POSITION ADJUSTMENT FUNCTION After the adjustment, the LJ-G Series can provide stable measurements though the targets are not neatly arranged or positioned. Bottom Width SECTION AREA Measured point Step 34 Displacement of target Reference surface Reference point Measuring range ANGLE/ INTERSECTION Measures the angle or intersection of detected lines. Section area Measures the area on the basis of the reference surface. PROFILE COMPARISON Angle Position of intersection (XZ coordinate) Compares the target profile with the master profile to measure the largest difference. Master profile Measurement value Since the workpiece is not in the measuring range, a precise measurement cannot be carried out. Adjustment STEP Determines the height difference between a measured point and the reference point. Measuring range The measuring range moves according to the displacement of the workpiece for precise measurement. LJ-G Series LK-G5000 Series Applications LK-G3000 Series LK Series Confirmation of door/hood mounting accuracy Confirmation of sealant coating profile Pre-weld position feedback LJ-V7000 Series Confirmation of PCB mounting height LJ-G Series SI-F1000 Series SI-F80R Series Lineup Sensor head LJ-G015K LJ-G015 LJ-G030 LJ-G080 LJ-G200 LT-9000 Series 250 LS-7000 Series 200 150 LS-3100/5000 Series Measuring range 200 ±48 mm 100 152 mm w: 51 mm 200 mm w: 62 mm 248 mm w: 73 mm Measuring range 80 ±23 mm 50 12.7 mm 15 mm 17.3 mm w: 7 mm 12.4 mm 15 mm 17.6 mm Measuring range 30 ±10 mm w: 7 mm 20 mm 30 mm 40 mm w: 20 mm w: 22 mm w: 25 mm 57 mm w: 25 mm 80 mm w: 32 mm 103 mm w: 39 mm 15 ±2.3 mm 15 ±2.6 mm 30 ±10 mm 80 ±23 mm 200 ±48 mm X-axis (Width) 7 mm 7 mm 22 mm 32 mm 62 mm Z-axis repeatability 0.2 μm 0.2 μm 1 μm 1 μm 2 μm X-axis repeatability 2.5 μm 2.5 μm 5 μm 10 μm 20 μm IM-6500 Series Z-axis (Height) TM-3000 Series Measuring range 15 ±2.6 mm Measuring range 15 ±2.3 mm 35 LJ-G Series E3-CMOS providing ultra-wide dynamic range First in the world The E3-CMOS provides ultra-wide dynamic range which is approximately 300 times wider than conventional modes. The LJ-G Series enables target profile measurement and the measurement of different target materials, such as black rubber (low reflected light intensity) and reflective metal (high reflected light intensity). * E3-CMOS sensor: Enhanced Eye Emulation CMOS image sensor Laser light reflection Profile measurement Light intensity Light-receiving sensitivity range High Sensor head Conventional Out of measurement Low Traditional light receiving elements do not have enough sensitivity to cover the entire range. Target object The edges of the profile are not measured because the light intensity is far less on the Light-receiving angled surfaces than the flat surfaces. sensitivity range is 300 times larger. High The reflected light intensity changes according to the shape, color, and material of the target. 3 E -CMOS Low The dynamic range is 300 times larger than the conventional model and covers the entire range. The entire profile is measured. ASAP (Automatic Sensitivity Adjustment by Pixel) NEW This function adjusts the sensitivity and laser power of the E3-CMOS to obtain suitable waveform data for each measurement position that has a different reflectance. The obtained data is merged as a single measurement profile. Target with an extremely different reflectance at each position Sensitivity: Small Sensitivity: Medium High capacity memory for saving data Dynamic range 6000x Sensitivity: Largest Measurement profile Best in its class High capacity memory is built into the controller. A memory card slot is included to store the production records of mass-produced products. Handling many product types Profile saving The built-in memory can store up to 16 programs. When the memory card is used, up to 160 programs can be stored to handle various product types. For analyzing NG records or production history. OUT01 Program setting Profile saving Data storage Internal memory 16 1024 x 2 65536 x 8 CF(1GB) 160 1024 x 300 65536 x 3200 17.221 15.982 Measure 10.121 Measure 16.382 OK Measure 14.268 OK Measure 15.393 OK Program01 ZERO 30.000mm OUT01 30.000mm OUT01 30.000mm OUT01 Program01 X : [ 5.000mm/div] X : [ 10.000mm/div] [mm] GO ZERO MemoryCard X : [ 5.000mm/div] X : [ 10.000mm/div] [mm] X : [ 5.000mm/div] X : [ 10.000mm/div] -30.000mm -20.000mm -30.000mm -20.000mm -30.000mm OK OUT1 GO OUT2 GO OUT3 GO OUT4 GO OUT5 GO OUT6 GO OUT7 GO OUT8 GO ALL OUT -20.000mm -30.000mm -20.000mm 36 OUT6 GO OUT7 GO OUT8 GO ALL OUT OUT1 GO OUT2 GO OUT3 GO OUT4 GO OUT5 GO OUT6 GO OUT7 GO OUT8 GO ALL OUT MemoryCard Measure OUT1 GO OUT2 GO OUT3 GO OUT4 GO OUT5 GO OUT6 GO OUT7 GO OUT8 GO ALL OUT OK OUT1 GO OUT2 GO OUT3 GO OUT4 GO OUT5 GO OUT6 GO OUT7 GO OUT8 GO ALL OUT OK OUT1 GO OUT2 GO OUT3 GO OUT4 GO OUT5 GO OUT6 GO OUT7 GO OUT8 GO ALL OUT Trg interval 5 ms Process time 20.000mm Trg interval 5 ms 5 ms Process time 20.000mm Trg interval 5 ms 5 ms Process time 20.000mm Trg interval 5 ms 5 ms Process time 20.000mm 5 ms 5 ms Process time -20.000mm 20.000mm Trg interval 5 ms -30.000mm -20.000mm OUT1 GO OUT2 GO OUT3 GO OUT4 GO OUT5 GO Trg interval -30.000mm Handles 160 types X : [ 5.000mm/div] X : [ 10.000mm/div] [mm] MemoryCard GO 30.000mm MemoryCard GO ZERO ZERO X : [ 5.000mm/div] X : [ 10.000mm/div] [mm] 30.000mm OUT01 Program01 Program01 MemoryCard GO ZERO [mm] X : [ 5.000mm/div] Measure X : [ 10.000mm/div] [mm] ZERO 30.000mm OUT01 GO MemoryCard GO Program01 Program01 Process time 20.000mm 5 ms 5 ms 1024 profiles LJ-G Series LK-G5000 Series Specifications Model LJ-G015K Type Reference distance LJ-G030 LJ-G200 ±2.3 mm ±2.6 mm 30 mm 80 mm 200 mm ±10 mm ±23 mm ±48 mm Near 6.5 mm 20 mm 25 mm 51 mm Reference distance 7.0 mm 22 mm 32 mm 62 mm Far 7.5 mm 25 mm 39 mm 73 mm LK-G3000 Series X-axis (Width) LJ-G080 Diffuse reflective 15 mm Z-axis (Height) Measuring range LJ-G015 Specular reflective Red semiconductor laser Light source Wavelength 655 nm (Visible light) Laser Class Class II Laser Product (FDA (CDRH) PART1040.10), Class 2 Laser Product (IEC 60825-1) Repeatability*1 0.95 mW Approx. 32 μm x 12 mm Approx. 40 μm x 25 mm Approx. 80 μm x 46 mm Z-axis (Height) *2 0.2 μm 1 μm 1 μm 2 μm X-axis (Width) *3 2.5 μm 5 μm 10 μm 20 μm Linearity Z-axis (Height) *2 3.8 ms LJ-V7000 Series Temperature characteristics 0.02% of F.S./°C Enclosure rating IP67 (IEC60529) Ambient light *5 Incandescent lamp or fluorescent lamp: 5000 lux max. Ambient temperature 0 to 50°C Relative humidity Vibration 35 to 85%, No condensation 10 to 55 Hz, double amplitude 1.5 mm, two hours in each direction of X, Y, and Z Material Aluminium Approx. 260 g Approx. 290 g Approx. 350 g LJ-G Series Weight Approx. 180 μm x 70 mm ±0.1% of F.S. Sampling frequency (Trigger interval) *4 Environmental resistance LK Series Output Spot diameter (at reference distance) Approx. 480 g *1 The value obtained after 64 times averaging at the reference distance. *2 The target is KEYENCE standard object. (White diffusing material). The value is the average of the widths in the Height mode. *3 The target is ø10 mm pin gauge. The value is the edge in the Position mode after 16 times of the Smoothing. *4 With initial setting, minimum measuring range, and single smoothing processing *5 The illumination on the receiver of the sensor head when targeting an illuminated white paper. SI-F1000 Series SI-F80R Series LT-9000 Series LS-7000 Series LS-3100/5000 Series TM-3000 Series IM-6500 Series 37 LJ-G Series Controller Model LJ-G5001 LJ-G5001P Sensor head compatibility Compatible Number of connectable sensors Display 2 units max. 0.1 μm *1, 0.001 mm2, 0.01° Minimum display unit ±99999.9 mm, ±999999 mm2, ±99999.9° Maximum display range Laser remote interlock input Input terminal block Trigger input Timing 1 input Auto-zero 1 input Reset input Non-voltage input For sensor head A, non-voltage input For sensor head A, voltage input Non-voltage input Voltage input Analogue voltage output Total judgment output Output terminal block Error output Process output Trigger input enable output Adjusted error output Timing 2 input Auto-zero 2 input PNP open-collector output NPN open-collector output (N.C.) PNP open-collector output (N.C.) NPN open-collector output PNP open-collector output For sensor head A, NPN open-collector output For sensor head A, PNP open-collector output Non-voltage input Voltage input For sensor head B, non-voltage input For sensor head B, voltage input Program switching input Non-voltage input, 4 inputs Voltage input, 4 inputs Memory card save input Non-voltage input Voltage input For sensor head A/B, non-voltage input For sensor head A/B, voltage input 3-level judgment output: OUT1 to OUT8, total judgment output Binary output: OUT1 to OUT8 measured data output (21 bits) NPN open-collector output 3-level judgment output: OUT1 to OUT8, total judgment output Binary output: OUT1 to OUT8 measured data output (21 bits) PNP open-collector output NPN open-collector output PNP open-collector output Trigger input Expansion connector ±10 V x 2 outputs, output impedance: 100 Ω NPN open-collector output Laser-Off input Judgment/Binary output *2 Strobe output Trigger input enable output Adjusted error output For sensor head B, NPN open-collector output Analogue RGB monitor output RS-232C interface USB interface Measured data output and control input/output (Maximum baud rate: 115200 bps, selectable) In conformity with USB Revision 2.0 HI-SPEED (USB 1.1 Full-SPEED compatible) Ethernet interface Memory card Environmental resistance 100BASE-TX/10BASE-T Compatible with NR-M32 (32 MB), GR-M256 (256MB), and NR-M1G (1GB). (with FAT32) Sensor heads calculation, Profile adjustment, Filter, Smoothing, Averaging, Position adjustment, OUT name change, Measurement mode selection (Height, position, gap, width, centre position, section area, intersection, angle, profile comparison, profile tracking), Scaling, Average, Measurement, Measured value alarm, Tolerance setting, Auto-zero, Storage (data/profile), Memory card saving, Program memory, Trigger mode change, Mutual interference prevention, Measuring range change, Calibration, Laser light adjustment, Sampling time setting, Mask, Profile alarm setting, Inclination adjustment, Height adjustment, Display language switch, Setting support software connection, Trigger pitch/Measuring time display, etc. Major functions Ratings For sensor head B, PNP open-collector output SVGA (800 x 600 pixels) Power supply voltage 24 VDC ±10%, Ripple: 10% (P to P) or less Current consumption 800 mA or less with 1 sensor head/1 A or less with two sensor heads Ambient temperature 0 to 50°C Relative humidity 35 to 85%, No condensation Weight Approx. 1050 g *1 When LJ-G015 or LJ-G015K is connected only. When other sensor heads are connected, the minimum display unit is 1 μm. *2 Time-sharing output of judgment results or binary measured data. The rating of the NPN open-collector output: 50 mA max. (30 V max.), residual voltage of 1 V max. The rating of the PNP open-collector output: 50 mA max. (30 V max.), residual voltage of 1 V max. The rating of the non-voltage input: 1 V or less ON voltage, 0.6 mA or less OFF current (Trigger input terminal: 1 V or less ON voltage, 1.0 mA or less OFF current) The rating of the voltage input: 26.4 V maximum rating, 10.8 V or less ON voltage, 0.6 mA or less OFF current (Trigger input terminal: 26.4 V maximum rating, 10.8 V or less ON voltage, 1.0 mA or less OFF current) Hardware environment for the LJ-H1W (LJ-Navigator) Model CPU Supported OS Memory capacity Display Hard disk space Interface*3 LJ-H1W Pentium III, 400 MHz or higher Windows 7*1/Windows Vista*2/Windows XP Professional Edition/ Home Edition/Windows 2000 Professional 128 MB or more XGA (1024 x 768 pixels) or greater, 256 colours or greater 30 MB or more Includes one of the following: USB 2.0/1.1*4, Ethernet*5, RS-232C (Serial port) • Windows is a registered trademark of Microsoft Corporation of America. • Pentium is a registered trademark of Intel Corporation. *1 Home Premium, Professional and Ultimate editions are supported. *2 Ultimate, Business, Home Premium, Home Basic editions are supported. For Windows Vista, Ver. 1.6 and later versions are supported. *3 Select one for communication. Multiple interfaces cannot be used for communication at the same time. *4 Operations are not guaranteed when connected through a USB hub. *5 Operations are not guaranteed when connected through a router or a LAN connection. 38 LJ-G Series LK-G5000 Series Dimensions Unit: mm Sensor head ø14 Ultra high-accuracy specular reflection Ultra high-accuracy LJ-G015K LJ-G015 LK-G3000 Series 55 500 ø7 82.6 34 2 x ø4.4 (mounting hole) 19.3 34 20.3 68 LK Series 9.5 9.9 22 2 x ø4.4 (mounting hole) 0.7 48 82.8 43.5 25° 70 25° 50° 18 19.5 6.5 15 7 2.3 6.5 2.3 7 Z-axis measurement range 7.5 1.3 LJ-V7000 Series 19.5 20.8 15 19.5 2.6 2.6 8 7.5 Z-axis measurement range X-axis measurement range X-axis measurement range ø14 LJ-G080 ø14 LJ-G Series LJ-G030 55 55 500 ø7 500 2 x ø4.4 (mounting hole) 42 8.9 0.7 62 62 30 4 10 10 45° 4 24 9 2 25° 25 23 32 Z-axis measurement range 23 X-axis measurement range Z-axis measurement range 39 ø14 X-axis measurement range Controller 55 LJ-G5001(P) 500 3 x ø4.4 (mounting hole) 0.7 138 114.5 4.2 132 82.4 DIN rail mounting position 68 35.9 153 4 19 LS-7000 Series 76 27 ø7 LT-9000 Series LJ-G200 38 9 80 SI-F80R Series 25 8.9 10 70 19.5 88 23 70 20 22 23 9 SI-F1000 Series 88 2 x ø4.4 (mounting hole) 0.7 34 ø7 9 83.3 LS-3100/5000 Series 65.3 25° 200 (65) 6 200 117 4 x M4 Depth: 6 51 60 48 62 73 Z-axis measurement range LJ-GC2/5/10/20/30 Weight 33 LJ-GC2 LJ-GC5 LJ-GC10 LJ-GC20 LJ-GC30 2m 5m 10 m 20 m 30 m Approx. 200 g Approx. 400 g Approx. 750 g Approx. 1400 g Approx. 2000 g ø7 Cable length: 2 m, 5 m, 10 m, 20 m, 30 m 55 IM-6500 Series Cable between the sensor head and the controller Cable length 17 Cable between the sensor head and the controller X-axis measurement range Model TM-3000 Series 80 48 ø14 26 11.5 39 SI-F1000 Series Micro-Head Spectral-Interference Laser Displacement Meter SI-F1000 Series Features Resolution of 0.001 μm Micro-head size of ø2 mm Spectral interference method Expert Engineering Sites A new site with answers to all of your difficult measurement application questions www.measurecentral.com Spectral interface method First in the Industry Development of a new principle can meet incompatible needs for small size with high accuracy that was previously impossible. Spectroscopic unit SI-F01U Polarization maintaining optical fiber Light source (SLD) Spectroscope Waveform analysis Interference light Sensor head SI-F01 Emitted light Reference reflection surface CCD Displacement data Target Diffraction grating SLD: Super Luminescent Diode SLD Interference light Spectroscopic analysis Part of the broad wavelength light emitted from the SLD is reflected by the head’s reference surface, while the part that passes the reference surface is mirror-reflected on the target and returns into the head. The two reflected light beams interfere with each other. The intensity of the interference light with a specific wavelength is determined according to the distance between the reference surface and the target. The relative maximum interference is reached when the determined distance is an integral multiple of the wavelength. Splitting the interference light into different wavelengths with the spectroscope produces an optical intensity distribution for a specific wavelength. The distance to the target is obtained by carrying out waveform analysis on the distribution. No heat generation and no noise Advantages of the optical fiber head structure The measurement head consists of only optical fibers and lenses, with no electronic parts. Small size, light weight, and heat resistant No heat generation Not influenced by electromagnetic noise These features greatly reduce the constraints on selecting an installation area. A micro-head of this type can be used with a wider range of measurement applications because it can be installed in places where conventional units cannot. An exothermic body is one of the error-causing factors in high-accuracy measurement. The optical fiber head structure produces no heat generation in the head section. The measurement head contains no electrical circuits. Because of this, it is not influenced by electromagnetic noise, which is difficult to isolate and remove. Resolution of 1 nm (0.001 μm) Highest in its class High resolution of 1 nm (0.001 μm) has been realised by the development of new principles and the application of sophisticated controllers. This resolution can fully respond to a variety of needs for high accuracy. Head size of ø2 mm World’s smallest The simple fiberoptic structure for the measurement head has allowed KEYENCE to develop the world's smallest sensor head without any heat generation problems associated with compact electronics. In addition as the sensor head has no electronic components, it is immune to electromagnetic noise. Actual Size 40 SI-F1000 Series LK-G5000 Series Applications LK-G3000 Series Positioning of high precision stages LK Series Measuring the behavior of critical components inside an assembled device Measuring the thickness of glass discs LJ-V7000 Series Lineup Type Model Major technical data Measurement range 0.05 to 1.1 mm Resolution 0.001 μm Linearity ±0.2 μm Head size ø2 mm Measurement range 11.3 to 12.35 mm Resolution 0.01 μm Linearity ±0.3 μm Micro-Head Type Head size SI-F01 ø2 mm Measurement range 0.05 to 1.1 mm ø8 mm SI-F10 Measurement range 11.3 to 12.35 mm High accuracy achieved by targeting thickness measurement. Head size ø8 mm Setting distance 80 to 81.1 mm Measurable thickness 0.05 to 1.1 mm Resolution 0.001 μm Linearity ±0.2 μm Head size ø12 mm ø12 mm SI-F80 Setting distance 80 mm Measurement thickness 0.05 to 1.1 mm LT-9000 Series Sensor head Micro-head type SI-F01 SI-F80R Series Thickness (Gap) Measurement Type Head size SI-F1000 Series Head size Long Distance Type Long-distance measurement with high accuracy. LJ-G Series Best suited for measurements requiring ultra high-accuracy, compact spaces, or high temperatures. Optional unit Long distance type SI-F10 Thickness measurement type SI-F80 Head mounting jig (For SI-F01) OP-84480 LS-7000 Series Spectrum unit SI-F01U/ SI-F10U/ SI-F80U (One spectroscopic unit is needed for each sensor head.) LS-3100/5000 Series Controller Single unit type SI-F1001V Separate type SI-F1001 Expansion controller SI-FA100 Spectrum unit spacer OP-84474 TM-3000 Series Back surface (Supplied together with the spectroscopic unit) Cable Controller-to-sensor head unit connecting cable CB-A07/CB-A2/CB-A5/ CB-A10/CB-A20/CB-A30 Software Controller-to-spectrum unit extension cable CB-A5E/CB-A10E Display-to-controller cord 0.33 m: OP-84428 3 m': OP-51655 10 m: OP-51656 IM-6500 Series Display Display panel SI-FD500 Dedicated PC software "SI-Navigator" SI-H1 41 SI-F1000 Series Specifications Sensor head Type Model Sensor head Spectrum unit Micro-head type Long distance type Thickness measurement type SI-F01 SI-F10 SI-F80 SI-F01U SI-F10U 0.05 to 1.1 mm *1 Measurement range Light source Beam spot diameter*3 SI-F80U 0.05 to 1.1 mm *2 11.3 to 12.35 mm *1 (Possible detection distance : 80 to 81.1 mm) Infrared SLD Central wavelength 820 nm Output 0.6 mW, Class 1 Laser product (IEC60825-1, FDA (CDRH) Part 1040.10 *8 ) ø20 μm ø40 μm ø20 μm Linearity ±0.2 μm *4 ±0.3 μm *4 ±0.2 μm *5 Resolution 0.001 μm *6 0.01 μm *6 0.001 μm *7 Sampling cycle 200 μs Red semiconductor laser Wavelength 650 nm Output 0.1 mW, Class 1 Laser product (IEC60825-1, FDA (CDRH) Part 1040.10 *8) Target near centre of measurement range: green lights. Target within measurement range: orange lights. Target outside measurement range: Flashes orange. Light source for guide LED display Temperature fluctuation Spectrum unit 0.01% of F.S./°C Enclosure rating Sensor head IP67 Ambient light Environment resistance Ambient temperature Sensor head Relative humidity Sensor head Vibration Material Weight 0 to +85°C Spectrum unit IP64 0 to +40°C 35 to 85%RH (No condensation) Spectrum unit 35 to 80%RH (No condensation) Sensor head 10 to 55 Hz, 1.5 mm double amplitude in X, Y, and Z directions, 2 hours respectively Spectrum unit 10 to 55 Hz, 0.5 mm double amplitude in X, Y, and Z directions, 2 hours respectively SUS Spectrum unit Sensor head (including cable) 0 to +50°C 0 to +35°C Sensor head Spectrum unit IP64 Incandescent lamp or fluorescent lamp: 10000 lux max. Polycarbonate Approx. 24 g Approx. 38 g Approx. 39 g Approx. 1 kg *1 Indicates distance from the front of the sensor head. For long distance type sensor heads there is an individual difference of up to ±0.2 mm. *2 The thickness measurement type sensor head displays the measurement range for the distance between plates of glass. Ensure that the measurement target is within the possible detection distance range. *3 Indicates the minimum beam spot diameter within the measurement range. *4 This value is obtained when the measurement target is a glass plate with the number of averaging measurements set to 256. *5 This value is obtained by measuring the gap between two glass plates with the number of averaging measurements set to 256. *6 This value is obtained by measuring a glass plate surface located at the centre of the measurement range with the number of averaging measurements set to 4,096. *7 This value is obtained by measuring a 0.3 mm thick glass target within the possible detection distance with the number of averaging measurements set to 4,096. *8 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No. 50. 42 SI-F1000 Series LK-G5000 Series Controller Type SI-F1001V Separate type*2 SI-F1001/SI-FD500 No. of connectable spectrum units Minimum display unit Display SI-FA100 2 LK-G3000 Series Model Expansion controller*1 Main Controller Single unit type 1 0.001 μm Display range ±999.999 μm to ±9999.99 mm, (7 settings selectable) Display cycle 10 times/sec. N/A Laser remote interlock input RESET1 input Non-voltage input N/A ±10 V x 2 outputs, Output impedance: 100 Ω 4 to 20 mA x 2 outputs, Maximum load resistance: 350 Ω ±10 V x 1 output, Output impedance: 100 Ω 4 to 20 mA x 1 output, Maximum load resistance: 350 Ω LK Series TIMING1 input Auto-zero1 input Terminal block Laser control input Analogue voltage output Alarm output NPN open-collector output (N.C.) General comparator output Non-voltage input 2 RESET input Non-voltage input Auto-zero input Program switch input Non-voltage input x 3 inputs Alarm output Comparator/ binary output NPN open-collector output (N.C.) Binary output Measured value data output (21 bits) OUT selectable NPN open-collector output Strobe output NPN open-collector output NPN open-collector output Non-voltage input Measured data output and control input/output (Baud rate selectable to 115,200 bps max.) USB 2.0 high speed compliant (USB 1.1 Full-SPEED compatible) RS-232C interface Ethernet interface N/A 100Base-TX/10Base-T Power supply voltage Maximum current consumption 24 VDC±10% Ripple 10% (P-P) max. One head connected: 0.6 A or less. Six heads connected: 1.5 A or less. *3 Vibration*4 Supplied from the main controller 0 to +50°C Ambient temperature Relative humidity 35 to 85%RH (No condensation) 10 to 55 Hz, 0.5 mm double amplitude in X, Y, and Z directions, 2 hours respectively Approx. 600 g LT-9000 Series Weight SI-F80R Series 12 Out simultaneous measurement calculation, average, filter, scaling measurement, measured value alarm, tolerance setting, auto-zero, data storage, light monitor, 8-program memory, interferometer mode, mask, connection of setting support software, etc. Major functions Environment resistance N/A SI-F1000 Series Binary selection output Binary selection input USB interface Power supply LJ-G Series Expansion connector N/A NPN open-collector output TIMING input LJ-V7000 Series Analogue current output Approx. 300 g *1 Up to four expansion controllers can be connected to the main controller. *2 The SI-F1001 can be used independently. The measured value display and setting change can be done with the display panel (SI-FD500) and setup support software (SI-H1). *3 When two or more expansion controllers are connected, the ambient temperature is 0 to 40°C *4 When two or more expansion controllers are connected, the vibration resistance is "10 to 55 Hz, 0.3 mm double amplitude in X, Y, and Z directions, 2 hours respectively". • NPN open-collector output rating: 50 mA max. (40 V max.), Residual voltage: 0.5 V max. • Non-voltage input rating: ON voltage: 1 V max., OFF current: 0.6 mA max. • Part of the input/output circuit of the SI Series is internally common. Be careful that no potential difference is generated between the internally common terminals due to the potential difference between the cables/external devices. For details, refer to "Precautions on wiring". LS-7000 Series Operating environment required to use SI-H1 (SI-Navigator) Item Minimum system requirements CPU Pentium III, 1 GHz or higher (1.7 GHz or higher is recommended) OS Windows 7*1/ Windows Vista*2/ Windows XP*3/ Windows 2000 Professional*4 256 MB or higher (1 GB or more is recommended) Display resolution 1024 x 768 pixels, 24-bit full colour or higher Free hard disk space Interface LS-3100/5000 Series Memory capacity 1 GB or larger One of the following interfaces is required. - USB: Revision 2.0, high-speed (full speed in USB1.1 compatible mode)*5 - LAN: 100BASE-TX or 10BASE-T*6 - RS-232C (serial port) TM-3000 Series The other system requirements must meet those recommended for your OS. *1 Home Premium, Professional and Ultimate editions are supported. *2 Ultimate, Business, Home Premium and Home Basic editions are supported. *3 Professional SP2 and later versions and Home Edition SP2 and later versions are supported. *4 SP4 and later versions are supported. *5 Connections via a USB hub are not supported. *6 Connections via an in-house LAN or a router are not supported. Direct or local connections must be used. * Windows is a registered trademark of Microsoft Corporation. * Pentium is a registered trademark of Intel Corporation. IM-6500 Series 43 SI-F1000 Series Dimensions Unit: mm Sensor head Micro-head type Long distance type SI-F01 SI-F10 11 0.05 to 1.1 (Measurement range) 1 11.3 to 12.35 (Measurement range) +1000 0 11000 42.3 11000 25 (10) +1000 0 (19.2) 25 8.3 8.3 ø0.9 (Optical fiber) 0 ø2 -0.008 ø0.9 (Optical fiber) ø8 -0.01 -0.05 9 9 ø1.25±0.01 Thickness measurement type SI-F80 0 to 1.1 (Detection range) 21 80 28 (19) 11000 +1000 0 25 0.05 to 1.1 (Measurement range) 8.3 ø0.9 (Optical fiber) ø8-0.01 ø12 -0.01 -0.05 -0.05 9 Head mounting jig (For SI-F01) OP-84480 M2 Set screw 10.5 2 x ø2.5 Spot facing: ø5, Depth: 2.5 3 3.5 6 6 12 C1 3 3.1 max. SUS304 7 Spectrum unit SI-F01U/SI-F10U/SI-F80U (With decorative panel) 127.5 65 (Without decorative panel) 65 (63) (63) 105 DIN rail 124 124 35.9 62.1 6 6 47 47 9 9 44 34.5 79.5 4xM4 Depth: 6 13.5 79.5 4xM4 Depth: 6 SI-F1000 Series LK-G5000 Series Controller Separate type SI-F1001V SI-F1001 (65) 128 65 (65) 65 LK-G3000 Series Single unit type 105.5 DIN rail 124 124 35.9 LK Series 62.1 6 6 9 34.5 79.5 LJ-V7000 Series 47 47 9 4xM4 Depth: 6 14 4xM4 Depth: 6 79.5 LJ-G Series Expansion controller SI-FA100 (With decorative panel) 128 26.3 (65) SI-F1000 Series 26.3 (Without decorative panel) 105.5 (65) DIN rail 124 SI-F80R Series 124 35.9 62.1 6 M4 Depth: 6 13.5 LT-9000 Series 114 M4 Depth: 6 6 13.5 14 LS-7000 Series Additional accessories Display panel Controller-to-spectroscopic unit connection cable SI-FD500 CB-A07/CB-A2/CB-A5/CB-A10/ CB-A20/CB-A30 ø7 Cable length (0.7 m, 2 m, 5 m, 10 m, 20 m, 30 m) Panel cutout Panel thickness: 0.5 to 5 mm 62min. 13 Display panel attachment ring 33 75 74.5 91 80 100min. 45 +0.6 0 +0.6 0 11.5 ø7 Cable length (5 m, 10 m) 55 IM-6500 Series 25 ø14 55 26 ø14 8.5 TM-3000 Series 62 46 LS-3100/5000 Series Display ø14 55 45 SI-F80R Series Spectral-Interference Wafer Thickness Meter NEW SI-F80R Series Features Resolution of 0.001 μm Sampling speed of 5 kHz Working distance 80mm Expert Engineering Sites A new site with answers to all of your difficult measurement application questions www.measurecentral.com Accurately measure wafer thickness Not influenced by wafer patterns Variations from wafer surface patterns and measurement alarms can be held to a minimum by decreasing the spot beam diameter and surface aberrations inside the beam spot. The SI-F80R Series employs a nearinfrared SLD that can penetrate through Si, GaAs, SiC, InP, a-Si, and other semiconductors. It can accurately measure wafer thickness, even when covered with BG (backgrind) tape. Patterned Si wafer thickness profile data [μm] 200 195 Near-infrared light 190 185 Setting distance 80mm 180 175 p-p 1 to 2 μm 170 Semiconductor wafer BG tape 165 Measurement thickness 160 -150 -100 -50 0 50 100 Measurement position (mm) 150 Min. beam spot diameter 25 μm Surface pattern Simple, accurate measurements next to the line • The sensor can easily make measurements just by being positioned 80 mm from wafers. • Non-contact, so wafers are not damaged. • The sensor can directly measure just wafer thickness, so measurements are not influenced by BG tape thickness. 46 Constant monitoring in process • With a small head that can be installed 80 mm from the wafer, wafer thickness can be constantly monitored inside equipment while polishing. Patterned wafer BG tape SI-F80R Series LK-G5000 Series Lineup Components External device Spectrum unit SI-F80RU IR sensor card LK-G3000 Series Sensor head Wafer thickness measurement type SI-F80R Type Model Wafer thickness measurement type Sensor head SI-F80R Spectrum unit SI-F80RU 10 to 310 μm (when n=3.5) Possible detection distance 80 to 81.1 mm Infrared SLD Output 0.6 mW, Class 1 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10 *5 ) Light source Beam spot diameter *2 ø25 μm Linearity *3 ±0.1 μm (when n=3.5) Resolution *4 1 nm Sampling cycle 200 μs Spectrum unit Enclosure rating 0.01% of F.S./°C Sensor head IP64 Ambient light Relative humidity Vibration Incandescent lamp or fluorescent lamp: 10000 lux max. Sensor head 0 to +50°C Spectrum unit SI-F1000 Series Ambient temperature Environment resistance 0 to +35°C Sensor head 35 to 85% RH (No condensation) Spectrum unit 35 to 85% RH (No condensation) Sensor head 10 to 55 Hz, 1.5 mm double amplitude in X, Y, and Z directions, 2 hours respectively Spectrum unit 10 to 55 Hz, 0.5 mm double amplitude in X, Y, and Z directions, 2 hours respectively Sensor head SUS Spectrum unit SI-F80R Series Weight LJ-G Series Target near centre of measurement range: green lights. Target within measurement range: orange lights. Target outside measurement range: flashes orange. LED display Material LJ-V7000 Series Measurement range *1 Temperature fluctuation LK Series Specifications Polycarbonate Sensor head (including cable) Approx. 70 g Spectrum unit Approx. 1.2 kg LT-9000 Series The sensor head and spectrum unit are calibrated as a pair. They are not interchangeable. *1 Indicates the thickness measurement range when the refractive index is 3.5. (The thickness measurement range is 35 to 1100 μm when the refractive index is 1.) *2 Indicates the minimum beam spot diameter within the measurement range. *3 This value is obtained by measuring the gap between two glass plates with the number of averaging measurements set to 256, converted to a refractive index of 3.5. *4 This value is obtained by measuring a 0.3 mm thick glass target within the possible detection distance with the number of averaging measurements set to 4096. *5 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No. 50. Dimensions SI-F80R Unit: mm 0 to 1.1 Detection range 21 80 28 18 (26) 11000 +1000 0 LS-7000 Series 25 0.05 to 1.1 Measurement range 8.3 ø12 -0.01 -0.05 ø8 -0.01 -0.05 ø2.0 (Optical fiber) ø7.5±0.1 LS-3100/5000 Series 9 SI-F80RU 127.5 91.3 (63) 91.3 105 (63) TM-3000 Series DIN rail mount 124 124 35.9 62.1 6 6 34.5 IM-6500 Series 79.5 9 22.5 47 47 22.5 5xM4 Depth: 6 13.5 79.5 9 5xM4 Depth: 6 47 LT-9000 Series Surface Scanning Laser Confocal Displacement Meter LT-9000 Series Features Precise 2 μm diameter beam spot 0.3 μm resolution Expert Engineering Sites A new site with answers to all of your difficult measurement application questions www.measurecentral.com The surface scanning method allows measurements of all types of targets Profile measurement The surface profile can be traced accurately using the oscillation unit. A tuning fork unit and oscillation unit are combined to create a surface scanning laser. This results in advanced displacement and profile measurements that are unaffected by target colour or angle. Z-axis scanning NEW RUN PRG0 PROFILE OUT1:A1 +75.00 GO UP LIMIT +40.00 LO LIMIT -40.00 X-axis scanning POSITION A1:DIFF A2:AVE Vertical The surface profile can be traced using the double-scanning method. The height difference between the two points can be measured. Horizontal The coaxial optical system improves measurement performance. Wide scanning enables various measurements. Transparent object thickness measurement The surface condition and thickness of transparent objects can be measured stably by utilizing the confocal principle. High angular characteristics Measurement of film thickness Profile measurement Angular measurement OUT1: +100.00 OUT2: +40.00 The first surface The second surface Angle measurement An angle can be measured in increments of 0.01 degrees based on the measurement values of two or more points obtained by scanning the laser beam spot. The third surface NEW The thickness of transparent disks can be measured. In addition, the slant correction function enables more reliable measurements. [+1P RUN PRG0 DISTANCE +2P] N E A R OUT1 THICK PKx :100 PKx :105 PROG : 80 Multi-surface measurement function NEW The first surface The second surface The third surface The fourth surface The peak value of light intensity of up to four target surfaces can be detected with one measurement unit. The selected measurement surface can be measured with high accuracy. 48 LT-9000 Series LK-G5000 Series Applications OUT1:A1 +75.00 GO RUN PRG0 PROFILE OUT1: +100.00 OUT2: +40.00 [+1P UP LIMIT +40.00 POSITION The third surface A1:DIFF A2:AVE Measuring the thickness of an optical disc The profile of lead-free solder can be measured for detecting abnormalities such as cracks, bridges, and insufficient soldering. The intermediate layer of an optical disc can be measured. OUT1 THICK PKx :100 PKx :105 PROG : 80 LK Series Measuring the profile of solder paste on a PWB N E A R LK-G3000 Series The first surface The second surface LO LIMIT -40.00 RUN PRG0 DISTANCE +2P] LJ-V7000 Series LJ-G Series Measuring the cross-sectional area of liquid sealing material The inclination of a CCD surface against the rear surface of the glass can be measured accurately using the newly developed relative angle measurement. The profile and cross-sectional area of sealing material applied for bonding glass substrates. Measuring the height of wire The height of narrow pitch bonding wire can be measured reliably. SI-F1000 Series Measuring the parallelism of a CCD and cover glass SI-F80R Series Lineup (Measuring unit) Long-range LT-9011M LT-9031M Measurement range ±0.3 mm ±1 mm Reference distance 6 mm 30 mm 0 to 1100 μm (6 steps) 0 to 560 μm (6 steps) 1 to 10 μm (4 steps) 1 to 8 μm (4 steps) Model LS-7000 Series High-accuracy LT-9000 Series Type Appearance Interval Resolution Linearity 0.3 μm 0.3 μm ±0.5% of F.S. ±0.3% of F.S. LS-3100/5000 Series Scan width TM-3000 Series IM-6500 Series 49 LT-9000 Series Specifications Controller Model Controller LT-9501H/LT-9001H LT-9501HSO(5654)/LT-9001HSO(5655) LT-9011M/LT-9011 LT-9031M/LT-9031 Measuring unit Measuring unit compatibility Measuring units are interchangeable without factory recalibration. 0.1 μm*5 , 1 μm2, 0.01° 0.1 μm*5 ±9999.99 μm, ±999999 μm2, 9999.99° ±9999.99 μm Minimum display unit Display range Display Microscope function Available (LT-9501H/LT-9011M only) Display cycle*1 Analogue output Terminal block ±10 V x 2 outputs, output impedance: 100 Ω Timing input/Reset input/Auto-zero input Non-voltage input Monitor dedicated power supply*2 Limits mode*3 24 VDC, 1 A 3-step limits output Binary mode*3 Control I/O For OUT1 and OUT2, and NPN open collector output Binary output Measured data output (21 bits), OUT1/OUT2/PROFILE selectable NPN open collector output Strobe output NPN open collector output Binary selection output NPN open collector output Binary selection input Non-voltage input Stability output NPN open collector output Laser remote input Non-voltage input Program change input Non-voltage input x 3 inputs RS-232C interface Measured data output and control I/O (Selectable up to baud rate 115200 bps.) Video output NTSC compliant (PIN connector) Distance measurement, Transparent object thickness Distance measurement, Transparent object thickness measurement, Angle measurement, Relative angle measurement, measurement, Surface selection, Dark-out, Mask, Trend graph Surface selection, Dark-out, Mask, Trend graph display, and Scan display, and Scan width/interval change width/interval change Area selection (Average, Maximum, Minimum, Maximum-tominimum, Area) Area calculation, Scan width/interval change, – Dark-out, Smoothing, Averaging, and Profile data output Light intensity accumulation, Microscope (LT-9501H, LT-9501HSO(5654) only), Tolerance judgment, 8-program registration, Calibration, Averaging, Hold modes, Auto-zero, and interface language selection Distance mode*4 Main function Profile mode*4 Common Rating Available (LT-9501HSO(5654)/LT-9031M only) 10 times/sec. Power supply voltage 100 to 240 VAC ±10% 50/60 Hz Current consumption 110 VA or lower Overvoltage category II Pollution degree 2 Ambient temperature 0 to 35°C, No condensation Relative humidity 35 to 85%, No condensation Weight (Controller) Approx. 2.4 kg *1 Varies depending on the setting *2 Dedicated power supply for the monitor specified by KEYENCE. *3 Select either the Limits mode or the Binary mode. *4 Select either the Distance mode or the Profile mode. (Distance mode is only available with the LT-9501HSO(5654) and LT-9001HSO(5655).) The rating of the NPN open-collector output is 30 mA (30 V or lower) maximum, and residual voltage is 0.5 V. The rating of the Non-voltage input is ON voltage 1 V or lower, and OFF current 0.6 mA or lower. *5 Display changes every ±0.3 μm. Measuring unit Type Model Measurement range Reference distance Light source High-accuracy LT-9011 Scan width/interval Resolution*1 Linearity*1 Sampling cycle*2 Temperature characteristics (20 to 30°C) Field of view Illumination light source Approx. ø2 μm 0 to 1100 μm (6 steps)/ 1 to 10 μm (4 steps) 0.3 μm ±0.5% of F.S. 640 μs to 356 ms (14 steps) Approx. ø7 μm 0 to 560 μm (6 steps)/ 1 to 8 μm (4 steps) 0.3 μm ±0.3% of F.S. 640 μs to 187 ms (14 steps) ±0.5% of F.S. ±0.25% of F.S. Available 1.3 mm x 1.05 mm Infrared LED (wavelength: 870 nm) Ambient light Ambient temperature Relative humidity Weight Unavailable – Available 2.5 mm x 2.0 mm Infrared LED – (wavelength: 870 nm) Incandescent lamp/fluorescent lamp: 10000 lux max. 0 to 35°C, No condensation 35 to 85%, No condensation Approx. 400 g *1 The value when the measurement target is a mirrored surface object measured in displacement mode, scan width/interval 120 μm/2 μm, and 8-times average *2 Sampling cycle differs according to the manufacturing variation of individual measuring units. The value when the FINE mode is set to OFF. Cable between the sensor head and controller (Extension cable) LT-C2 2m Approx. 200 g * Up to 3 cables can be connected with a total maximum length of 20 m. 50 LT-9031 ±1.0 mm 30 mm Red semiconductor laser 670 nm 170 μW (IEC 60825-1)/3.0 μW (FDA (CDRH) Part 1040.10) Class IIa Laser Product (FDA (CDRH) Part 1040.10) Class 1 Laser Product (IEC 60825-1) Wavelength Output Laser Class Model Cable length Weight LT-9031M ±0.3 mm 6 mm Spot diameter Microscope function Long-range LT-9011M LT-C10 10 m Approx. 700 g Unavailable – – Approx. 500 g LT-9000 Series LK-G5000 Series Dimensions Unit: mm Controllers LT-9501H/9001H, LT-9501HSO(5654)/9001HSO(5655) LK-G3000 Series 60 67 177 49 (100) 210 Measuring units LK Series 220 137 65 LJ-V7000 Series Extension cable Cable between the measuring unit and the controller LT-9011M/9011 LT-C2/LT-C10 43 43 56 ø6.3 Cable length: 500 4.5 14 14.7 22 LJ-G Series ø6.3 Cable length: 2 m, 10 m 52.5 94 37 Remote control console (Standard OP-51542) SI-F1000 Series 3 x ø4.5 mounting hole 28.8 15 47 6 ±0.5 (Reference distance) 46 2.1 17.1 5.5 33 17.1 ø15 11.2 SI-F80R Series 78 ø20 112.7 LT-9000 Series LT-9031M/9031 4 65 ø4.5 Cable length: 3 m ø11 56 ø6.3 Cable length: 500 4.5 LS-7000 Series 22 52.5 LS-3100/5000 Series 135 3 x ø4.5 mounting hole 78 30 ±2 (Reference distance) TM-3000 Series 15 46 33 ø26.4 IM-6500 Series 51 LS-7000 Series CCD Optical Micrometer LS-7000 Series Features High repeatability 0.06 μm High speed 2400 samples/second Maintenance-free design Expert Engineering Sites A new site with answers to all of your difficult measurement application questions www.measurecentral.com Optical System Achieving High-speed, High-accuracy, and High-durability Speed, accuracy, and durability have been improved by advanced optical technology, using a high-intensity Green LED, a telecentric lens, and the HL-CCD in the receiver. COMS image sensor Telecentric optical system High-intensity GaN green LED Beam splitter Target Special diffusion unit Collimator lens Transmitter HL-CCD for measurement Receiver Principle diagram of the LS-7000 Series Controller A/D converter The green LED light is distributed as a uniform, collimated beam and is applied to a target. The edge between the bright and dark area on the CCD is detected and used to calculate a measured value, such as an outer diameter. D.E. processor A/D converter Input/output CPU Frame memory TFT liquid crystal monitor Video output Excellent repeatability of ±0.06 μm, 4 times better than conventional systems By using LED and CCD technologies, repeatability is four times greater than with a conventional laser scan micrometers. Easy operation and quick inspection High-durability Best in its class Target viewer for easy position adjustment CCD without moving parts & Long-life LED The sensor incorporates a CMOS monitor camera to capture a real-time image of a target. Measurement conditions can be checked on the LCD monitor. The target viewer function allows the optical axis to be aligned exactly with the desired measurement point, even if a target has a complicated shape or is very small. The measuring area for the current measurement mode is displayed in real time. (LS-7070M/LS-7030M/LS-7010M) The laser scan method was reviewed thoroughly. Resulting in the combination of Green LED and HL-CCD that solved the problem of motor durability, which had been the weak point of the laser-scanning method. Furthermore, the long-life LED achieved continued reliability over the long term. Measurement line Outer-diameter measurement Gap measurement HL-CCD Target Viewer 52 Green LED LS-7000 Series LK-G5000 Series Applications LK-G3000 Series LK Series Measuring the width of a sheet Measuring the outer diameter of a wafer Measuring the outer diameter of a catheter LJ-V7000 Series Measuring the deflection of a crank journal LJ-G Series SI-F1000 Series SI-F80R Series Lineup LT-9000 Series Measuring head Wide range Standard Super fine Type Model With monitor No monitor With monitor No monitor With monitor No monitor LS-7070M LS-7070 LS-7030M LS-7030 LS-7010M LS-7010 LS-7000 Series Appearance Measurement accuracy Repeatability 0.5 to 65 mm 0.3 to 30 mm 0.04 to 6 mm ±3 μm ±2 μm ±0.5 μm ±0.2 μm ±0.15 μm ±0.06 μm LS-3100/5000 Series Measuring range Type Model High-performance Standard LS-7601 LS-7001 Monitor display Red LED 7-level display TM-3000 Series Controller Appearance IM-6500 Series Measurement indicator 53 LS-7000 Series Function Dual-head mode Newly-developed Measuring the outer diameter of a metal pipe This simple, special mode measures large diameter targets or wide sheet materials. Complicated calculations or other settings are unnecessary. One-head simultaneous measurement Measuring both the outer diameter and eccentricity of a copy roller simultaneously One measuring head allows simultaneous measurement using two measurement modes, such as measuring the outer diameter and eccentricity. Transparent object measurement Measuring area designation Measuring IC lead pitch Checking the width or edge position of a glass plate The measuring area can be designated according to the inspection purpose, such as measurement of the IC lead gap or pitch. Even transparent objects that were difficult to detect with conventional micrometers can be measured. The edge detection level can be easily changed via the controller. Change in received light intensity caused by the edge of a glass object Lead outer dimension 1 Threshold value Measuring range 30 mm Lead outer dimension 2 Gap between leads Threshold value Before threshold value adjustment Lead pitch After threshold value adjustment Air purge unit (Optional) & IP64 Rating OP-79428 [for LS-7030 (M)] OP-79429 [for LS-7070 (M)] Attaching the air purge unit in front of the measuring head and feeding an air flow prevents dirt or dust from accumulating on the head surface. 54 Air purge unit Air duct Controller-compatible IP64 head The head stores compensation data to ensure compatibility with the controller. This greatly improves measurement accuracy and head maintainability. In addition, the measuring head conforms to IP64. It is drip-proof and suitable for harsh environments. LS-7000 Series LK-G5000 Series Specifications Controller Type Model Standard LS-7601 LS-7001 2 (All types) 2 (LS-7070/LS-7030/LS-7010 only) TFT 5.5-inch LCD display, Backlight: CCFL (Average life: 40,000 hours) Main display: 7-segment red LED (Character height: 20.3 mm) Sub-display: 7-segment red LED (Character height: 9.9 mm) x 3 LK-G3000 Series High-performance Appearance No. of connectable measuring heads Display Minimum display unit Display range 0.01 μm to 100 μm (7-level selectable) ±99.99999 to ±9999.9 mm (Linked to minimum display unit setting, mm/inches selectable) Monitor image (When the measuring head with the monitor function is connected.) 7-level display with a red LED Tolerance check output display 5-level LCD indicator Green LED (GO), Red LED x 2 (HI, LO) NPN open-collector output (N.C.) 5-level comparator output Comparator ready output Strobe output Synchronous input Reset input Auto-zero input NPN open-collector output for OUT1 Non-voltage input for OUT1 Program selection input Non-voltage input x 4 inputs Non-voltage input for OUT1 — Analogue output Connector I/O BCD mode*1 ±10 V x 2 outputs 5-level comparator output Comparator ready output Strobe output Statistical processing output NPN open-collector output for OUT2 NPN open-collector output x 2 outputs Selectable from focus, area check, and difference check, NPN open-collector output x 2 outputs BCD output Measurement data output (Sign + 7 digits), OUT1/OUT2 selectable, NPN open-collector output BCD selection output NPN open-collector output BCD selection input Non-voltage input Video output Non-voltage input for OUT2 Non-voltage input for OUT2 — Measurement data output and control I/O, printer (Baud rate can be selected up to 115.200 bps) Conforming to the NTSC system (RCA connector) Power supply voltage*2 Current consumption*2 SI-F80R Series Statistical processing input RS-232C interface — 24 VDC ±10% 1.2 A max. 0.7 A max. LT-9000 Series Enclosure rating IP64 (Panel surface only) Ambient temperature 0 to 40°C Relative humidity Weight — Function output Synchronous input Reset input Auto-zero input SI-F1000 Series SUB mode*1 LJ-G Series Terminal block Alarm output LJ-V7000 Series Measurement position monitor Statistical processing input LK Series Measurement display 35 to 85%, No condensation Approx. 1010 g Approx. 820 g LS-7000 Series *1 Either SUB mode or BCD mode can be selected. *2 AC power supply can be used when the LS-S11 (AC power supply stand) is connected. The rating of the NPN open-collector inside the terminal block is: 100 mA max. (40 V max.), with a residual voltage of 0.5 V max. The rating of the NPN open-collector inside the connector I/O is: 30 mA max. (30 V max.), with a residual voltage of 0.5 V max. The rating of non-voltage input is: ON voltage of 1 V max., OFF current of 0.6 mA max. LS-3100/5000 Series TM-3000 Series IM-6500 Series 55 LS-7000 Series Specifications Measuring head Type Monitor camera Model Large-diameter type Wide measurement range Super fine measurement Provided Not provided Provided Not provided Provided Not provided LS-7070M LS-7070 LS-7030M LS-7030 LS-7010M LS-7010 Appearance Measuring range Smallest detectable object Transmitter/receiver distance 0.5 to 65 mm 0.3 to 30 mm 0.04 to 6 mm 0.5 mm 0.3 mm 0.04 mm 250 ±50 mm 160 ±40 mm 60 mm Light source GaN green LED CCD scanning range Measurement accuracy Repeatability Approx. 69 mm Approx. 33 mm ±3 μm*1 ±2 μm*3 ±0.5 μm*5 ±0.2 μm*2 ±0.15 μm*4 ±0.06 μm*6 No. of samples*7 Monitor function 2,400 samples/sec. Provided Not provided Provided Not provided Enclosure rating*8 Provided Not provided Transmitter: Approx. 140 g, Receiver: Approx. 380 g, Base: Approx. 220 g Transmitter: Approx. 140 g, Receiver: Approx. 340 g, Base: Approx. 220 g IP64 Ambient temperature 0 to 50°C Relative humidity Weight Approx. 7 mm 35 to 85%, No condensation Transmitter: Approx. 540 g, Receiver: Approx. 770 g, Base: Approx. 660 g Transmitter: Approx. 540 g, Receiver: Approx. 730 g, Base: Approx. 660 g Transmitter: Approx. 420 g, Receiver: Approx. 570 g, Base: Approx. 430 g Transmitter: Approx. 420 g, Receiver: Approx. 470 g, Base: Approx. 430 g *1 The error when a moving rod 20 mm in diameter is measured in the measuring area of 20 x 40 mm. *2 The value of ±2σ when the outer diameter of a rod 20 mm in diameter is measured at the centre of the measuring area while the number of averaging measurements is set to 512. *3 The error when a moving rod 10 mm in diameter is measured in the measuring area of 10 x 20 mm. *4 The value of ±2σ when the outer diameter of a rod 10 mm in diameter is measured at the centre of the measuring area while the number of averaging measurements is set to 512. *5 The error when a moving rod 1.0 mm in diameter is measured in the measuring area of 2 x 4 mm. *6 The value of ±2σ when the outer diameter of a rod 1.0 mm in diameter is measured at the centre of the measuring area while the number of averaging measurements is set to 512. *7 1200 samples/sec. when the mutual interference prevention function is used. *8 The connector section is excluded. Hardware environment for the LS-H1W (LS-Navigator) Model CPU Supported OS Pentium III, 400 MHz or higher Windows 7 *1/Windows Vista *2/Windows XP Professional Edition/ Home Edition/Windows 2000 Professional Memory capacity 128 MB or more Display XGA (1024 x 768 pixels) or greater, 256 colours or greater Hard disk space 30 MB or more Interface RS-232C (Serial port) • Windows is a registered trademark of Microsoft Corporation of America. • Pentium is a registered trademark of Intel Corporation. *1 Home Premium, Professional and Ultimate editions are supported. *2 Ultimate, Business, Home Premium, Home Basic editions are supported. For Windows Vista, Ver. 1.6 and later versions are supported. AC power supply stand LS-S11 Model LS-S11 Applicable controller LS-7001/LS-7601 Power supply voltage 100 to 240 VAC ±10%, 50/60 Hz Current consumption 110 VA max. Ambient temperature 0 to 40°C Relative humidity 35 to 85%, No condensation Weight Approx. 1.7 kg Options 56 AC power supply stand Air purge unit Air purge unit LS-S11 OP-79428 OP-79429 [For LS-7030(M)] Extension cables Model LS-H1W [For LS-7070(M)] Cable length Cable between the controller and measuring head LS-C3A 3m LS-C10A 10 m LS-C30A 30 m Camera cable between the controller and measuring head LS-C3AM 3m LS-C10AM 10 m LS-C30AM 30 m Cable between the receiver and transmitter OP-42182 1m OP-42183 3m LS-7000 Series LK-G5000 Series Dimensions Unit: mm Measuring heads LS-7070 (LS-7070M) 30 70 21 15 28 26 115 24 ±0.3 Measurement position Front surface of a receiver 3-ø5.5 (Mounting hole) 15 4-M4 effective depth: 10 Measuring area 130 250 31 72 3-ø5.5 (mounting hole) Cable length: 260 23 31 312 56 27 160 27 214 50 71.5 5.5 19.5 3-ø5.5 mounting hole Cable length: 200 80 Cable length: (500)* Cable length: 500 60 30 35.5±0.2 5.5 3-ø5.5 (Mounting hole) 126.5 LK Series 18 10 4-M2.5 effective depth: 3 45 13.5 Front surface of a transmitter Measuring area 109 71.5 60 104 24 6 55 Front surface of a receiver 20 5.5 150 4-M4 effective depth: 10 26 (34)* 56 ±0.3 15 22 ±0.2 Measurement position 55 13.5 92.5 15 38 114 65 5.5 * [Cable length: 500] 4-ø4.5 through-hole 24 ø8 spot facing, 4.5 (d) 21 Front surface of a transmitter 92.5 Cable length: 270 4-M2.5 10 effective depth: 3 45 6.5 65 104 Cable length: 500 30 9 4-M2.5, effective depth: 5 70 LK-G3000 Series 9 LS-7030 (LS-7030M) 4-M2.5, effective depth: 5 4-ø5.5, through-hole ø9.5 spot facing, d=5.5 Measuring head 42 50 Cable length: 200 LJ-V7000 Series * Figures in parentheses are the values for the LS-7070M. * Figures in parentheses are the values for the LS-7030M. LS-7010 (LS-7010M) Measuring head 4-ø4.5 through-hole ø8 spot facing, 4.5 (d) 15 15 4-M4, through 16 ±0.2 Measurement position (227)* Measuring area 76 51 4 3-ø4 (Mounting hole) 46 8 40±0.2 6 2-ø4 (Mounting hole) 32 46 6 4 56 4 18 Cable length: (500)* Cable length: 500 Cable length: 140 SI-F1000 Series 56 26 24 25 25 LJ-G Series 36 6 (30)* (60) * 81 38 126 3.5 48 Ca ble length: 140 3.5 25 SI-F80R Series * Figures in parentheses are the values for the LS-7010M. Controllers LS-7001 LS-7601 23.2 25 (191) Dimension of mounting bracket 175 60 Panel thickness: 1.2 to 4.0 Mounting screw 25 207 60 169 +1 0 Panel thickness: 1.2 to 4.0 Mounting screw 124 +1 0 200 Mounting bracket 60 Mounting bracket 60 5 130 130 LS-7000 Series 83 Effective display area 5 LT-9000 Series 22.3 (191) Dimension of mounting bracket 175 111 Effective display area Panel cutout (65) (65) LS-CxxA AC power supply stand 43 ø6.3 LS-3100/5000 Series Extension cables Cable between the controller and sensor head LS-S11 43 171 14.7 14 196 60 LS-CxxAM 35 (35) 35.3 14 178 11.5 11 35 11.5 ø4.8 216 43.5 148 201 (100) IM-6500 Series Cable between the receiver and transmitter OP-4218x ø4.8 TM-3000 Series Camera cable between the controller and sensor head 35.3 11 57 LS-3100/5000 Series Laser Scan Micrometers LS-3100/5000 Series Features Repeatability of 0.3 μm Wide measuring range Touch-screen controller Up to four heads are connectable to one controller Expert Engineering Sites A new site with answers to all of your difficult measurement application questions www.measurecentral.com Large touch screen for easy operation High resolution display of 0.05 μm High-speed, high-precision calculation achieves a display resolution of 1/2* that of previous models. This enables stable high-precision measurement at the sub-micron level. * Based on KEYENCE findings. Wide measuring range Objects from 0.2 to 120 mm in diameter can be measured. The LS-5121 increases transmitter/ receiver distance to a maximum of 1000 mm. 58 The system is operated via a touch screen, in which menu items are selected simply by touching the screen. Connects up to four scanning heads 120 mm Up to four scanning heads can be connected to a single controller for centralised control. This provides a lowcost system for measuring multiple lines simultaneously. LS-3100/5000 Series LK-G5000 Series Lineup Measuring head Type Standard Scanning head type Wide range Fine measuring Separate LS-5041 LS-5121 Measuring range 0.2 to 40 mm 0.8 to 120 mm Repeatability ±0.3 μm max. ±1 μm max. Laser scan rate Wide range Separate Single-body Separate Single-body Separate LS-3034 LS-3033SO (8073) LS-3032 LS-3033 LS-3036 LS-3060 0.3 to 30 mm 0.5 to 30 mm 0.3 to 30 mm 0.8 to 60 mm 0.08 to 30 mm ±0.3 μm 1200 scans/s LK-G3000 Series Model Standard Single-body ±0.5 μm 400 scans/s LK Series Scanning head shape LJ-V7000 Series Specifications (LS-5000) Controller Display unit Model Built-in display Separate display — LS-5501 LS-5001 LS-D501*2 — LCD display Number of connectable scanning heads 4 max. Measurement display Display -99.99995 to 999.99995 mm — -99.99995 to 999.99995 mm mm/inches selectable — mm/inches selectable Tolerance check output display 7-level LCD indicator — 7-level LCD indicator LCD (Green LED at scanning head) — LCD (Green LED at scanning head) Program selection input Laser stop input Interface RS-232C Non-voltage input (contact/solid state) — Measurement data output and control output — SI-F1000 Series Display range Terminal block input Timing input, Reset input, Auto-zero input Input Non-voltage input (contact/solid state) — ±10 V Output impedance: 100 Ω — Analogue voltage output 7-level comparator output 100 mA max. (40 V max.) — Power supply voltage 85 to 264 VAC, 50/60 Hz 24 VDC ±10 24 VDC ±10% Power consumption 85 VA max. 1.4 A max. 0.6 A max. 0 to 40°C 0 to 45°C Ambient temperature (No condensation) Relative humidity 0 to 40°C 35 to 85%, No condensation 35 to 85%, No condensation Approx. 3.7 kg Approx. 1.1 kg LT-9000 Series Weight SI-F80R Series I/O board*1 — LCD display Display units Laser emission indicator LJ-G Series Type Approx. 0.7 kg *1 The I/O board is optional. *2 The LS-D501 does not comply with EMC directive. Note: BCD output is available as an option. Please inquire with KEYENCE. Measuring head Standard Type Controller LS-5121 LS-5501/LS-5001 LS-5501/LS-5001 Measuring range 0.2 to 40 mm 0.8 to 120 mm Minimum target width Transmitter/receiver distance 0.2 mm 0.8 mm 160 ±40 mm 400 ±100 mm, 1000 mm max. *1 0.8 mW (FDA (CDRH) Part 1040.10), 130 μW (IEC 60825-1) Output Class II Laser Product FDA (CDRH) Part 1040.10 Class 2 Laser Product IEC 60825-1 ±8 μm max.*3 ±0.3 μm max.*4 ±1 μm max.*5 TM-3000 Series ±2 μm max.*2 Measurement accuracy Repeatability 14 μs 670 nm Wavelength Laser Class 0.6 mW (FDA (CDRH) Part 1040.10), 45 μW (IEC 60825-1) 63 μs Pulse duration LS-3100/5000 Series Visible red semiconductor laser Light source 0.05 μm Display repeatability 1200 scans/sec Laser scan rate 121 m/sec 504 m/sec Laser scan range Approx. 46 mm Approx. 124 mm Enclosure rating IP64 Laser scan velocity IP65 0 to 50°C, No condensation Ambient temperature IM-6500 Series 35 to 85%, No condensation Relative humidity Weight LS-7000 Series Model Wide range LS-5041 Scanning head Approx. 1.4 kg (including base) Approx. 5.5 kg (including base) *1 The measurable area is within 800 mm from the transmitter. *2 When a round rod 10 mm in diameter is measured in a 10 mm x 20 mm measuring area. *3 When a rod 40 mm in dia. is measured in a 40 mm x 80 mm measuring area. *4 When the average number of measurements is set to 768 in a 10 mm x 20 mm measuring area. *5 When the average number of measurements is set to 768 in a 40 mm x 80 mm measuring area. 59 LS-3100/5000 Series Specifications (LS-3100) Standard controller/2-head controller Type Fine measuring Scanning head type Single-body Separate Single-body Separate LS-3034 LS-3033SO(8073) LS-3032 LS-3033 LS-3036 LS-3060 0.08 to 30 mm*1 0.08 to 30 mm*1 0.3 to 30 mm 0.3 to 30 mm 0.8 to 60 mm Standard controller/ 2-head controller LS-3100/LS-3100D Scanning head Measuring range Wide range Separate Scanning head Model Standard Single-body Controller 0.5 to 30 mm mm/inch selectable Minimum target width T and R distance*4 0.08 mm 0.08 mm 0.3 mm 0.5 mm 0.3 mm 0.8 mm 60 mm 120 mm (Fixed) 60 mm 120 ±40 mm 60 mm 200 ±50 mm Light source Invisible infrared semiconductor laser Output Visible red semiconductor laser 0.5 mW (FDA), 35 μW (IEC) 3.0 mW (FDA), 55 μW (IEC) Wavelength 780 nm 0.5 mW (FDA), 20 μW (IEC) 670 nm Pulse duration 111 μs FDA (CDRH) Part 1040.10 Laser Class 55.6 μs Class I Laser Product IEC 60825-1 Class II Laser Product Class 1 Laser Product ±2 μm max.*2 Measurement accuracy Repeatability (number of averaging measurements: 512) ±3 μm max.*3 ±0.3 μm ±0.5 μm Display resolution 0.1 μm Laser scan rate 400 scans/s Laser scan velocity Laser scan range Measured value 63 m/s 126 m/s Approx. 33 mm Approx. 65 mm Main display: 7-segment green LED (8 digits) Sub display: 16 character x 2 line LCD (Backlight colour: yellow-green) Minimum display unit 0.1 μm/0.2 μm Display range -999.9999 to 9999.9999 Target position indicator Green LED (7 levels) Comparator output indicator Green LED x 3 (HI/GO/LO) Laser emission indicator Green LED x 2 (HEAD 1/HEAD 2) Hold synchronous, LASER REMOTE, PROGRAM SELECT (Program Nos. 1 to 5) Control I/O Terminal block I/O Non-voltage input (contact/solid state) Analogue voltage ±6 V, Output impedance: 0 Ω Contact output Relay output: 3PST-NO contact, 250 VAC, 2 A (resistive load) Hold synchronous, AUTO ZERO SET/RESET, PROGRAM SELECT (Program Nos. 1 to 5) Control input 36-pin connector I/O TTL level, negative logic Control output 7-level/3-level 40 mA max. (30 V max.) Interface port RS-232C/GP-IB (optional)/BCD (optional) Power supply 85 to 264 VAC, 50/60 Hz Power consumption 40 VA max. Scanning head Ambient temperature 0 to 45°C 0 to 40°C Controller 0 to 45°C Relative humidity 35 to 85%, No condensation Scanning head*3 Weight T: 0.5 kg R: 0.4 kg 0.8 kg T: 0.5 kg R: 0.4 kg 0.8 kg Controller Approx. 2.5 kg (base included) 0.8 kg Approx. 4.6 kg *1 When the outer diameter is measured. *2 When a rod 10 mm in diameter is measured in a 2 x 20 mm, 4 x 20 mm, or 10 x 20 mm measuring area. *3 When measuring a rod 20 mm in diameter in a 20 x 40 mm measuring area. *4 ‘T’ indicates a transmitter, ‘R’ indicates a receiver. Dimensions Unit: mm Scanning heads LS-5041 LS-5121 4-ø4.5 through-hole ø8 spot facing, d=4.5 13 15 55 105 5 10 77 160 85 180 3-ø7.5 mounting hole 17 175 Measuring area 180 168 17 168 180 120 89 29.5 20 200 6 125 15 200 15 360 135 2-M4 71 (9) 2-M4 97 97 71 4-M6, effective depth: 10 10 35 272 (16) 288 (16) 706 4-M4, effective depth: 6 10 17 17 27.5 145 8-ø4.5 through-hole ø10 spot facing, d=5 4-M4, effective depth: 10 5 40 6 24 135 (9) 60 *20 ±2 mm at the measuring centre 25 150 65 45 85 24 17 17 18 3-ø7.5 mounting hole 32 155 17.5 16.5 77 4-ø4.5 through-hole 5 5 10 80 25 150 3-ø5.5 mounting hole 32 76 86 80 55 20* 10 40 49 17 4-M4 effective depth: 10 35 5 105 76 24 15 55 Measuring area 3-ø5.5 Mounting hole 17 4-ø6.5 through-hole ø14 spot facing, d=7 24 34 21 86 4-M4 effective depth: 10 4-M4, effective depth: 6 10 35 35 21.5 112 221.5 221.5 132 21.5 LS-3100/5000 Series Mounting bracket Panel thickness: 1.2 to 4.0 LS-D501 Mounting screw Separate display controller 4x ø5 LK-G5000 Series Display unit 1 LS-5001 LK-G3000 Series 37.3 149 132 (Mounting bracket dimension) 152 (External mounting bracket) 140 124.5 35.4 Approx. 80 116 49 99 LK Series 5 108 130 170 163 Panel cutout Built-in display controller 173 min. LS-5501 LJ-V7000 Series 125 +1 0 187 197 156 159 min. +1 0 41 126 148 LJ-G Series 230 180 Approx. 80 Scanning heads LS-3060 LS-3032/3034/3036 4-ø4.5 through-hole ø8 spot facing, d=4.5 (12) M4 15 26 22 Measuring area 4-ø4.5 mounting hole 27 (34) (30) 30 34 180.5 32 56 124 5 19.5 210 220 (7) 21 6 6 8 77 167 73.5 105.5 4-ø5.5 mounting hole Measuring area Transmitter (25.5) 4-ø5.5 mounting hole Receiver 46 6 92 60 (34) 120 (±40) 136 (±40) 32 220.5 (7) 138.5 (7) 479 73.5 46 4-M4 12 24 85 4-M4 12 18 18 30 8 4-M4 5 32 LS-7000 Series 85 85 216 (±50) LT-9000 Series 51 (34) 105.5 62 20 21 43 5 38 38 (30) 100 200 (±50) 12.5 12.5 24 98.5 60 LS-3033/3033SO(8073) (25.5) 110 60 33 SI-F80R Series Measuring area 98.5 60 34 30 3-ø5.5 mounting hole 3-ø5.5 mounting hole 30 6 10 65.5 65.5 72 83 SI-F1000 Series 38 152 6 (30) 115.5 115.5 70 92 (7) 331 (±40) Controllers LS-3100 (LS-3100D) LS-3100/5000 Series * Distance is fixed for LS-3033SO (8073). 244 R11 123 330 R7.5 230 111 13 122 TM-3000 Series ø20 25 Approx. 47 36 238 34 ø16 20 176 IM-6500 Series 61 TM-3000 Series High-speed 2D Measurement Sensor NEW TM-3000 Series Features Multi-point 2D measurement Tilt correction for inline measurement High-speed sampling of 5.5 ms Expert Engineering Sites A new site with answers to all of your difficult measurement application questions www.measurecentral.com Because the system works in two dimensions it can... Simultaneously measure dimensions that require both X and Y values. In addition, inspection time is reduced due to the elimination of motion components. Position correction function [edge correction/pattern correction] Automatically corrects misalignments and tilt of the target which is directly linked to measurement errors. Can measure accurately even when positioning is difficult or objects are conveyed in random orientations. Because the measurement area autotracks according to the position and tilt of objects within the compensation area, it can be measured accurately. Example of measurement Area : Hole diameter Perpendicular distance : Centre pitch : Intersection point coordinates Angle : Radius : Width Intersection point coordinates Centre pitch Width Radius : Angle : Perpendicular distance : Area Hole diameter 62 Measured image Master image Position correction area Outer diameter measurement area Position correction area Correction Outer diameter measurement area after correction TM-3000 Series LK-G5000 Series Applications Unit: mm Overall length 50.000 Point angle 15.0° LK-G3000 Series Outer diameter 5.000 Overall length 35.000 Tip angle 45.0° Outer diameter 16.000 Outer diameter Outer diameter Outer diameter 0.300 0.299 0.148 Groove pitch 5.000 Measures pulley groove pitches/V groove angles Measures multi-point outer diameter/point angle of injection needles Outer thread height 14.000 Maximum diameter 8.000 Outer diameter 12.000 Thickness 3.500 Neck ring height 26.000 Outer thread diameter 26.500 LJ-V7000 Series Minimum diameter 6.000 LK Series Measures outer diameter/tip angle of needle valves V groove angle 22.5° Roundness 0.020 Measures outer diameter and threading a PET bottle LJ-G Series Measures maximum diameter/minimum diameter of ampules Measures roundness/thickness of O-rings Lineup SI-F1000 Series Sensor head Controller Type Model ø6 mm type Appearance Type Model Appearance TM-006 Standard type TM-040 ø65 mm type TM-065 SI-F80R Series ø40 mm type TM-3001 PNP Output type TM-3001P LT-9000 Series Features LS-7000 Series Diverse measurement modes A flexible combination of 15 types of basic measurement modes, and 8 types of auxiliary measurement modes, can support a variety of inspections. Angle Distance/Intersection Point Distance Measures a maximum diameter/minimum diameter within the specifi ed area, and a step/width between the detected edges. Maximum diameter Measures an angle between two detected straight lines, and a tilt angle from a virtual line. Measures a centre of the circles and intersection point, distance between 2 specifi ed points, distance from a point to a straight line. Angle Centre distance Step Intersection point distance Tilt angle from a virtual line. Width Distance between a point and a straight line Height / Position/Coordinates Radius/Roundness Pitch Measures height/ position of detected edges and coordinates of specifi ed points. Measures radius and roundness of specifi ed arc. Measures a maximum/minimum/average pitch within the specifi ed area. Pitch Radius Height (Y direction) IM-6500 Series Intersection point position (X,Y coordinates) TM-3000 Series Minimum diameter LS-3100/5000 Series Outer diameter/Step/Width Roundness Position (X direction) 63 TM-3000 Series Specifications Sensor head Model Measuring range Smallest detectable object Transmitter/receiver distance Light source TM-006 TM-040 TM-065 ø6 mm ø40 mm ø65 mm 0.04 mm 0.3 mm 0.5 mm 60 mm 180 mm 270 mm GaN Green LED InGaN Green LED Measurement accuracy ±0.5 μm*1 ±2 μm*3 ±3 μm*5 Repeatability ±0.06 μm*2 ±0.15 μm*4 ±0.2 μm*6 Sampling cycle (trigger interval) *7 5.5ms (33ms at the initial setting) Enclosure rating *8 Environmental resistance IP64 Ambient temperature 0 to 50°C Relative humidity 35 to 85% (No condensation) Material Weight Aluminium Transmitter Approx. 140g Approx. 560g Approx. 1280g Receiver Approx. 340g Approx. 720g Approx. 1460g Base Approx. 220g Approx. 630g Approx. 1500g *1 In a measurement area of 2 mm × ø4 mm error when measuring width of KEYENCE standard object (glass calibration scale). *2 Value of ±2σ measuring the width of KEYENCE standard object (glass calibration scale) in the centre of the measurement area, an average 16 times, average 1.3 mm line. *3 In a measurement area of 10 mm × ø26 mm error when measuring width of KEYENCE standard object (glass calibration scale). *4 Value of ±2σ measuring the width of KEYENCE standard object (glass calibration scale) in the centre of the measurement area, an average 16 times, average 8 mm line. *5 Error when measuring width of KEYENCE standard object (glass calibration scale) in a measurement area of 20 mm × ø40 mm. *6 Value of ±2σ measuring the width of KEYENCE standard object (glass calibration scale) in the centre of the measurement area, an average 16 times, average 14 mm line. *7 When measurement area is minimum, others are initial settings *8 Apart from connector component Controller Model TM-3001 TM-3001P Sensor head compatibility Compatible Number of connectable sensors *1 Display 2 units max. 0.01 μm, 0.001 mm2, 0.01° Minimum display unit ±9999.99 mm, ±99999.9 mm2, ±99999.9° Maximum display range Laser remote interlock input Input terminal block Non-voltage input Trigger input (for Head A) Timing 1 input Non-voltage input Voltage input Auto-zero 1 input Reset input Analogue voltage output Total judgment output Output terminal block ±10 V x 2 outputs, out put impedance: 100 Ω NPN open-collector output PNP open-collector output NPN open-collector output (N.C.) PNP open-collector output (N.C.) NPN open-collector output PNP open-collector output Non-voltage input Voltage input Program switching input Non-voltage input, 4 inputs Voltage input, 4 inputs Memory card save input Non-voltage input Voltage input Judgment/Binary output*2 3-level judgment output: OUT1 to OUT16, total judgment output Binary output: OUT1 to OUT16 measured data output (21 bits) NPN open-collector output 3-level judgment output: OUT1 to OUT16, total judgment output Binary output: OUT1 to OUT16 measured data output (21 bits) PNP open-collector output NPN open-collector output PNP open-collector output Error output Process output Trigger input enable output Adjusted error output Trigger input (for Head A) Timing 2 input Auto-zero 2 input Expansion connector Strobe output Trigger input enable output Analogue RGB monitor output RS-232C interface USB interface In conformity with USB Revision 2.0 HI-SPEED (USB 1.1 Full-SPEED compatible) Ethernet interface 1000BASE-T/1000 BASE-TX/10 BASE-T Memory card SD card CA-SD4G (4GB), CA-SD1G (1GB) support Position correction function, OUT name change function, select measurement mode (outer diameter, height, step height, position, width, distance, intersection distance, angle, radius, roundness, coordinates, area, search, ring test, pitch) functions, OUT function between operators, auxiliary measurements (straight edge, circular edge, the edge bounding line, centre line, intersection, straight line between two points, any line, any point), functions, scaling function, average function, measurement function, measurement value alarm setting function, tolerance setting function, auto-zero function, storage (data/image) function, memory card storage function, program memory function, trigger mode change function, mutual interference prevention function, adjustable measuring range function, detection threshold value change function, mask function, attitude correction function, display language switching function, support software setting function, trigger interval-measurement time display function, others Major functions Ratings Environmental resistance SVGA (800 x 600 pixels) Measured data output and control input/output (Maximum baud rate: 115200 bps, selectable) Power supply voltage 24 VDC ±10%, Ripple: 10% (P to P) or less Current consumption 1 head connected 480mA max./ 2 heads connected 550mA max. Ambient temperature Relative humidity 0 to 50°C 35 to 85% (No condensation) Material Polycarbonate Weight Approx. 1120g *1 1 or 2 units can be connected only with the same head model *2 OUT 1 to OUT 8 decision result, OUT 9 to OUT 16 decision result, time share output of binary measurement data. • The rating of the NPN/PNP open collector output (output terminal block): 50 mA (30 V or less) max., residual voltage: 1.4 V or less (50 mA) 1.0 V (20 mA) • The rating of the NPN/PNP open collector output (expansion connector): 50 mA (30 V or less) max., residual voltage: 1.0 V or less • Rating for non-voltage input, ON voltage 1V max., OFF current 0.3mA max. (trigger input terminal, ON voltage 5V max., OFF current 1mA max.) • Voltage rating, maximum rating 26.4V, ON voltage 10.8V, OFF current 0.3mA (trigger input terminal maximum rating 26.4V, ON voltage 10.8V, OFF current 1mA) 64 TM-3000 Series LK-G5000 Series Operating system environment CPU Pentium III 1GHz min. (recommended 1.7GHz min.) Windows 7 *1 Windows Vista *2 LK-G3000 Series Support OS Windows XP Professional Edition/Home Edition Windows 2000 Professional Memory capacity 512MB min. (1GB min. recommended) Resolution of display XGA (1024 x 768 pixels) min, 256 colours min. Free disk space 1GB min. Interface *3 As described above, all those mounted, USB2.0/1.1 *4, Ethernet *5 LK Series * For your OS, use environments above that recommended. *1 Supports all editions Home Premium, Professional, Ultimate. *2 Supports all editions Ultimate, Business, Home Premium, Home Basic. 64 bit versions are not supported. *3 Communicate selecting any of them. Simultaneous communication is not possible. *4 Connection through a USB hub is not included in the guarantee. *5 Connection to LAN and connection via a router is not included in the guarantee. • Windows Vista, Windows XP, Windows 2000 Professional are registered trademarks of US Microsoft Corporation. • Pentium is a registered trademark of intel Corporation. LJ-V7000 Series LJ-G Series Controller Sensor head Sensor head ø40mm type TM-040 Sensor head ø65mm type TM-065 SI-F1000 Series Sensor head ø6 mm type TM-006 Controller TM-3001(P) Controller lineup TM-3001 PNP Output type TM-3001P SI-F80R Series NPN Output type Monitor Setting and support software TM-H1 USB cable (Optional) OP-66844 High-resolution monitor CA-MP81 Option Transmitter to receiver expansion cable OP-87033 (1m) OP-87034 (3m) D-sub9 pin conversion connector OP-26401 Protective cover OP-87035 (2 per pack) (for TM-040) OP-87036 (2 per pack) (for TM-065) D-sub25 pin conversion connector OP-96369 Memory card CA-SD4G (4GB) CA-SD1G (1GB) IM-6500 Series I/O connector cable OP-51657 (3m) TM-3000 Series RS-232C communication cable OP-96368 (2.5m) Cable between controller - monitor OP-66842 (3m) LS-3100/5000 Series Ethernet cable OP-66843 (3 m) Monitor stand OP-42278 LS-7000 Series Cable - connector Cable between head and controller CB-A×× (0.7, 2, 5, 10, 20, 30m) LT-9000 Series Console (Optional) OP-82125 65 TM-3000 Series Dimensions Unit: mm Sensor heads TM-006 4-ø4.5 through-hole ø8 spot facing, 4.5 4-M4 through-hole 15 15 24 36 25 16±0.2 (227) 3-ø4 (mounting hole) 56 76 51 46 25 6 Measurement area 8 4 40±0.2 26 32 2-ø4 (mounting hole) 46 56 ø6 18 4 4 30 Cable length 100 60 Cable length 500 81 3.5 Cable length 190 48 6 2-M4 through-hole 3.5 38 25 126 Base 35 4.5 26 115 2-M4 through-hole 45 142 70 212 2-M4 Effective depth 5 2-M4 Effective depth 5 16 16 40 92 47 18 TM-040 7 4-M3 effective depth 3.5 4-M3 effective depth 3.5 Measurement area 48 4-ø4.5 cut ø8 depth 4.5 25 25 48 7 4-M4 48 48 50 62 31±0.3 41.5 50 55 55 Front surface of receiver 3-ø5.5 (mounting hole) 94.8 41.5 6 76.5 Measurement area Front surface of transmitter 3-ø5.5 (mounting hole) 20 ø40 97.5 88 88 97.5 65.5±0.6 5 5 47 29 90 6.5 Cable length: 500 180 58.5 Cable length: 235 8 17.5 When minimum bend R Cable length: 175 2.8 20 When minimum bend R 2-M4 effective depth 6 2-M4 effective depth 6 4-M4 effective depth 8 6 50 39.8 66 145 115 115 306 161 31 31 5.5 34 103 103.5 25 TM-3000 Series LK-G5000 Series TM-065 9 4-ø5.5 cut ø9.5 depth 5.5 76 4-M3 Depth 3.5 4-M4 Measurement area 35 76 LK-G3000 Series 4-M3 Depth 3.5 9 35 76 76 70 94 70 47±0.6 44 44 12 Front surface of receiver Front surface of transmitter 65 115 LK Series Measurement area 129.7 97 30 ø65 130 130 LJ-V7000 Series 115 120 82±0.8 5 5 20 3-ø5.5 (mounting hole) Cable length: 175 Cable length: 500 8.7 66 When minimum bend R 3-ø5.5 (mounting hole) 160 Cable length: 420 11.5 270 9.5 66.5 LJ-G Series 19 When minimum bend R 33.5 4-M5 Depth 10 2-M4 effective depth 6 2-M4 effective depth 6 12 47 47 240 49.7 200 130 430 190 53 17 176 135.5 (15) 241.2 Outer dimension of mounting bracket 230 SI-F80R Series 1.0 to 4.0 Panel thickness Mounting bracket 151 LT-9000 Series 92.5 44 131.5 LCD monitor CA-MP81 TM-3001(P) SI-F1000 Series 70 Mounting screw DIN rail mounting position 35.9 153 191.2 180 Outer 129.8 dimension of Effective mounting display area bracket 106 156 65.3 6 172.4 Effective display area 8 6 LS-7000 Series 83.3 34 (60) Stand OP-42278 LS-3100/5000 Series 4 x M4 Depth: 6 230 70 236 TM-3000 Series 146 80 17 2R2 21.5 .5 5 66.5 IM-6500 Series 111 8 130 210 67 IM-6500 Series Image Dimension Measurement System IM-6500 Series 99 features are measured in seconds. Just place a target And press the button. All points are measured in seconds. Expert Engineering Sites A new site with answers to all of your difficult measurement application questions www.measurecentral.com Drastically Reduced Measurement Time Just place and press: 99 features are measured in seconds. Just place a target and press the button. Ninety-nine points are measured in seconds. The system automatically finds and measures targets even when they are placed in a different location or orientation, which significantly reduces measurement time. Even the initial setup is easy, just specify points with the mouse while checking the entire image of a target. You can easily complete the setup procedure for a wider range of measurements from outer diameter, circular pitch, and angle measurements to measurements using virtual lines or points. Improved quality High-precision automatic measurement using the latest image processing technology Since the shape of a target is automatically recognised before measurement, the result is not affected by individual differences such as alignment errors or variations in the skill level of equipment users. The same results can be obtained consistently no matter who is taking the measurements. Easy Setup for Difficult Applications Easy setup by checking the entire image of a target Eliminating Operator Errors Easy Data Management Statistics/analysis function for easy trend checking or reporting All measurement results will be saved automatically. The included statistics and analysis function allows easy checking of the points for improvement and preparation of inspection records. Of course, measurement data can be imported to and used on spreadsheet software or exported in real time to a data server. Cost effi ciency Shorter lead tim e Four Features will Support your QCD Improvement. 68 IM- 6500 Series LK-G5000 Series Description ADVANCED TECHNOLOGIES FOR ACHIEVING "PLACE-AND-PRESS" MEASUREMENT LK-G3000 Series Pattern search for automatic orientation correction Industry first LK Series The location and orientation of the target placed on the stage are automatically adjusted based on the recorded shape of the target. There is no need for positioning of a target or preparation of a jig at the beginning of measurement. This is literally place-and-press measurement. LJ-V7000 Series The location and orientation of the target placed in the field of view are automatically adjusted for measurement. LJ-G Series Simultaneous measurement of 99 features by capturing an entire part Industry first SI-F1000 Series This is a completely new measurement system which measures by capturing the entire image of a target within the field of view. It does not require time for alignment of the stage and completes the measurement of 99 features in seconds. Measurement time can be reduced significantly compared with conventional optical comparators, measuring microscopes and optical CMMs. SI-F80R Series Even when many feature are specified on a dimension drawing, all features can be measured within a few seconds. LT-9000 Series Industry first LS-7000 Series Batch measurement for further reduction in measurement time LS-3100/5000 Series The dimensions of all targets on the stage are measured simultaneously. Even when the targets are placed randomly, it is unnecessary to align them in a jig because the location and orientation of each target is automatically adjusted before measurement. This further reduces measurement time. TM-3000 Series Even targets placed randomly are measured simultaneously. Clicking each target shows its measurement result. IM-6500 Series SIGNIFICANT TIME REDUCTION Example: When 5 or more minutes are required to measure 10 points with an optical comparator In addition to the inspection time, the standby time during product changeover is also reduced. This helps improve the facility utilization ratio and reduce costs. Projector Positioning time Focus adjustment time IM Series 5 seconds or less Measurement time 5 minutes or more No need for positioning, focus adjustment, and stage movement 69 IM-6500 Series Sub-pixel processing for measurement down to one hundredth or less of one pixel Latest technologies to eliminate operator variation Best in its class One pixel of the light receiving element One pixel of the light receiving element is divided into 100 or more squares and used as a unit for shape recognition. This allows high-resolution measurement in a wider field of view. The optical system is also taken into consideration to improve accuracy. One pixel is divided into 100 or more squares Without sub-pixel processing With sub-pixel processing The target is measured by one pixel of the light receiving element. The target is measured by one hundredth or less of a pixel of the light receiving element. Just click the points to be measured with the mouse Easy point and click programming interface To set up feature inspections, just select the desired tool from the menu and roughly specify the measurement points on the screen with the mouse. Since the entire image of a target is displayed, you can set details intuitively through simple mouse operations. Select a desired measurement type from the menu. Roughly specify the measurement points with the mouse. Automatic calculation of major statistical values. Group extraction is also easy. Statistics/analysis functions Critical statistical values required for inspection reports are automatically calculated and displayed, including maximum, minimum, average, σ, 3σ and CPK. You can also set various conditions for group extraction for statistical, analysis, and inspection records. Groups can be extracted on various conditions. Critical statistical values required for inspection reports are provided by default. System configuration Monitor Head IM-6010/6020 Controller IM-6500E RGB PC LAN Indicator, buzzer, etc. USB Accessories Sapphire glass for the measurement stage OP-86986 Normal glass: OP-86985 70 Foot switch Inkjet printer IM- 6500 Series LK-G5000 Series Specifications IM-6500E Controller Model IM-6010 Head IM-6020 1" 6.6 mega pixel CMOS Image pickup device LK-G3000 Series 10.4" LCD monitor (XGA: 1024 x 768) Display Double telecentric lens Light receiving lens Wide-field measurement mode Field of view High-precision measurement mode ø100 mm ø100 mm – ø25 mm 0.1 μm Minimum display unit Wide-field measurement mode Repetition Accuracy High-precision measurement mode High-precision measurement mode ±1 μm – ±0.5 μm ±5 μm*1 ±5 μm*1 – ±2 μm*2 LK Series Wide-field measurement mode Measurement accuracy ±1 μm No-voltage input (with and without contact) External remote input External output Comparator output (OK/NG/FAIL) Relay output/rated load: 24 VDC 0.5A/ON resistance: 50 mΩ or less RJ-45 (10BASE-T/100BASE-TX/1000BASE-T) LAN Interface 6 ports (Front: 2, Rear: 4) USB 2.0 series A 160 GB Hard disk drive +10 to 35˚C Operating ambient temperature Resistance to environment 20% to 80% RH (no condensation) Operating ambient humidity Coaxial transparent illumination Illumination system Telecentric transparent illumination (green LED) Four division ring illumination (white LED) Ring epi-illumination 30 mm Moving range along Z axis Z-axis stage 3 kg Withstand load Weight LJ-G Series 100 to 240 VAC 50/60 Hz Power supply voltage Power supply LJ-V7000 Series Record Power consumption 180 VA max. Controller Approx. 8 kg Approx. 24 kg Head Approx. 25 kg *1 ±2σ in the range of ø80 mm from the centre of the stage at the operating temperature range of +23±1.0°C degrees at the focused focal point position *2 ±2σ in the range of ø20 mm from the centre of the stage at the operating temperature range of +23±1.0°C degrees at the focused focal point position Virtual line function Application tool Element tool LS-7000 Series Manual measurement Coordinate system configuration Batch configuration of tolerance Element list editing Measurement setting data binding function LT-9000 Series GD&T SI-F80R Series 99 points max. (99 x 9 points possible when the measurement setting binding function is used) XYθ (with 360° rotary position compensation) 1000 or more*3 8 types (point-point/line-point/line-line/circle-point/circle-line/circle-circle/circle/arc) Provided Provided Middle point/intersection Line conjunction/circular conjunction 6 types (midline/perpendicular line/parallel lines/tangent line/line passing through the point/approximate line) Middle circle/approximate circle/auxiliary circle Line/circumference Edge width Thickness measurement/Gap measurement between inner and outer diameters Rounded corner/curved surface/oval/reticle/point position/perimeter Straightness/circularity/profile Squareness/parallelism Point position/concentricity Point (on a line or arc)/maximum/minimum (rectangle, circle, arc) Line/centreline Circle/arc Provided Automatic generation Provided Provided Provided Provided Provided Distance measurement Angle measurement Calculation Point Conjunction edge Line Circle Pitch measurement Width measurement Thickness measurement Special tool Shape tolerance Orientation tolerance Position tolerance Point Line Circle Profile extraction Special tool Basic measurement function SI-F1000 Series Measurement points Pattern search (Profile tracking function) Registration of measurement configuration LS-3100/5000 Series *3 Depending on the measurement setting data and number of data pieces being stored Dimensions Controller IM-6010/6020 IM-6500E Unit: mm TM-3000 Series Head 551 173 240 264 IM-6500 Series 343.3 322 482 71 www.measurecentral.com Your online portal to... A complete knowledge centre to assist you with all of your measuring needs Get Useful Technical Literature FREE! Would you like to learn more about today's Measurement Technology? MEASUREMENT TECHNOLOGY Beginner’s Help Ask the Experts Measurecentral.com has a vast database of technical resources to help beginners and experts learn more about effectively implementing measurement technology. www.measurecentral.com Our experts are ready to answer your questions on measurement applications. w w w. m e a s u re c e n t r a l . c o m / services/ask.php Not sure which product is right for you? PRODUCTS FINDER Let KEYENCE help you determine the ideal measurement solution to your specific application. www.measurecentral.com/ w w w . m e a s u r e c e n t r a l . c o m / topics/index.php productfinder/ Please visit: www.keyence.com SAFETY INFORMATION Please read the instruction manual carefully in order to safely operate any KEYENCE product. 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