Download Mass Flow Controllers Series FC-77X / 77XX, Series FC

Mass Flow Controllers
Series FC-77X / 77XX, Series FC-78X / 78XX, and
Series FC-79X
June 2006
5700512-C
AERA PRODUCTS
User Manual
User Manual
Series FC-77X / 77XX,
Series FC-78X / 78XX, and
Series FC-79X MFCs
5700512-C
Advanced Energy®
COPYRIGHT
This manual and the information contained herein is the proprietary property of
Advanced Energy Industries, Inc.
No part of this manual may be reproduced or copied without the express written
permission of Advanced Energy Industries, Inc. Any unauthorized use of this manual
or its contents is strictly prohibited. Copyright © 2006 Advanced Energy Industries,
Inc. All Rights Reserved.
DISCLAIMER AND LIMITATION OF LIABILITY
The information contained in this manual is subject to change by Advanced Energy
Industries, Inc. without prior notice. Advanced Energy Industries, Inc. makes no
warranty of any kind whatsoever, either expressed or implied, with respect to the
information contained herein. Advanced Energy Industries, Inc. shall not be liable in
damages, of whatever kind, as a result of the reliance on or use of the information
contained herein.
PRODUCT USAGE STATEMENT
Read this entire manual and all other publications pertaining to the work to be
performed before you install, operate, or maintain this equipment. Practice all plant
and product safety instructions and precautions. Failure to follow instructions can
cause personal injury and/or property damage. If the equipment is used in a manner
not specified by the manufacturer, the protection provided by the equipment may be
impaired. All personnel who work with or who are exposed to this equipment must
take precautions to protect themselves against serious or possibly fatal bodily injury.
Advanced Energy Industries, Inc., (AE) provides information on its products and
associated hazards, but it assumes no responsibility for the after-sale operation of
the equipment or the safety practices of the owner or user. This equipment produces
or uses potentially lethal high-voltage, high-current, radio frequency (RF) energy.
NEVER DEFEAT INTERLOCKS OR GROUNDS.
iv
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
TRADEMARKS
®
is a registered trademark of Advanced Energy Industries,
Inc.
Advanced Energy® is a registered trademark of Advanced Energy Industries,
Inc.
AE® is a registered trademark of Advanced Energy Industries, Inc.
Aera® is a registered trademark of Advanced Energy Industries, Inc.
CUSTOMER FEEDBACK
Advanced Energy’s technical writing staff has carefully developed this manual using
research-based document design principles. However, improvement is ongoing, and
the writing staff welcomes and appreciates customer feedback. Please send any
comments on the content, organization, or format of this user manual to:
• [email protected]
To order a manual, please contact Technical Support:
• [email protected]
5700512-C
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Table of Contents
Chapter 1. Safety and Product Compliance Guidelines
Important Safety Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
Model Numbers for this Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
Interpreting the Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Type Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Danger, Warning, and Caution Boxes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Interpreting Product Labels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Safety Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
Product Certification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
Conditions of Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
Chapter 2. Product Overview
Product Description and Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
MFC Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Flow Sensor Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Bypass Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
Electronics Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
Valve Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
Chapter 3. Installation and Operation
Preparing to Install the Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
Installation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
Installing the Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
Overview of Unit Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
Confirming the MFC Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Preparing the Installation Site . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Unpacking the MFC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Positioning the MFC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Mounting the MFC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Making the Mechanical Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Making the Electrical Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
Power Supply Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
Ground Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
Testing the System for Leaks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
Connecting the MFC to Peripheral Equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
Operating the Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
First-Time Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9
Zeroing the MFC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9
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Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
Chapter 4. I/O Connections and Communication
20-Pin Card Edge Connector and 20-Pin Honda Connector . . . . . . . . . . . . . . . . . 4-1
Card Edge Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Honda Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
20-Pin Connector Signal Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
9-Pin Subminiature-D Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
Pin and Signal Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
Special Function Signal Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
Alarm Output (Error Detection) Signals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
Control Valve Purge Function Signals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
Card Edge Purge Function Signals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9
Honda 20-pin Purge Function Signals . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10
Subminiature-D Purge Function Signal . . . . . . . . . . . . . . . . . . . . . . . . . 4-11
Chapter 5. Troubleshooting and Global Customer
Support
Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
Alarm Signals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
Troubleshooting the Gas Flow . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
No Gas Is Being Supplied . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
Set Point and Flow Output Do Not Match . . . . . . . . . . . . . . . . . . . . . . . . 5-3
Unstable Flow or Insufficient Output Exists . . . . . . . . . . . . . . . . . . . . . . . 5-4
AE World Wide Web Site . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6
AE Global Services . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6
USA Support Locations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6
European Sales and Service Contacts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7
Middle East Sales and Service Contacts . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8
Asian Sales and Service Contacts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9
Returning MFCs for Repair . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10
Packing an MFC for Shipping . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10
Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11
Authorized Returns . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11
Warranty Statement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12
Chapter 6. Specifications and Reference Information
Model Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
Specifications for Model FC-770 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2
Specifications for Model FC-771 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3
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Specifications for Model FC-772 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4
Specifications for Model FC-780HT MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5
Specifications for Model FC-780 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
Specifications for Model FC-780X MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
Specifications for Model FC-781HT MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8
Specifications for Model FC-781 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9
Specifications for Model FC-782 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-10
Specifications for Model FC-785 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-11
Specifications for Model FC-785T-B MFCs . . . . . . . . . . . . . . . . . . . . . . . . . 6-12
Specifications for Model FC-785X-B MFC . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13
Specifications for Model FC-785Y-B MFCs . . . . . . . . . . . . . . . . . . . . . . . . . 6-14
Specifications for Model FC-786 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-15
Specifications for Model FC-786T-B MFCs . . . . . . . . . . . . . . . . . . . . . . . . . 6-16
Specifications for Model FC-786Y-B MFCs . . . . . . . . . . . . . . . . . . . . . . . . . 6-17
Specifications for Model FC-790 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-18
Specifications for Model FC-791 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-19
Specifications for Model FC-795 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-20
Specifications for Model FC-795T-B MFCs . . . . . . . . . . . . . . . . . . . . . . . . . 6-21
Specifications for Model FC-796 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-22
Specifications for Model FC-7700 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23
Specifications for Model FC-7710 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-24
Specifications for Model FC-7720 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-25
Specifications for Model FC-7800 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-26
Specifications for Model FC-7810 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-27
Specifications for Model FC-7820 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-28
Specifications for Model FC-7850Y-B MFCs . . . . . . . . . . . . . . . . . . . . . . . . 6-29
Specifications for Model FC-7810 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-30
Specifications for Model FC-7820 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-31
Specifications for Model FC-7850Y-B MFCs . . . . . . . . . . . . . . . . . . . . . . . . 6-32
Specifications for Model FC-785Y-B MFCs . . . . . . . . . . . . . . . . . . . . . . . . . 6-33
MFC Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-33
Dimensions for Standard MFC Models . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-34
Dimensions For Block-Type MFC Models . . . . . . . . . . . . . . . . . . . . . . . . . . 6-37
Dimensions for High Temperature MFC Models . . . . . . . . . . . . . . . . . . . . . . 6-38
Reference Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-39
Calibration References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-39
Flow Indication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-39
Product Label . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-40
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List of Figures
Figure 2-1. MFC cutaway view . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
Figure 2-2. MFC functional block diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Figure 3-1. Connection to peripheral equipment using a RO-Box power supply . . . . . 3-6
Figure 3-2. Connection to peripheral equipment using a dedicated power supply . . . . 3-7
Figure 3-3. Example of connections using dedicated line code LC-OUT-N . . . . . . . . . 3-8
Figure 3-4. MFC zero point adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
Figure 4-1. 20-pin card-edge connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Figure 4-2. 20-pin Honda connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
Figure 4-3. 9-pin subminiature-D connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
Figure 4-4. Alarm connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
Figure 4-5. Card edge purge function signals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9
Figure 4-6. Card edge normally open internal circuitry for purge function . . . . . . . . . . 4-9
Figure 4-7. Card edge normally closed internal circuitry for purge function . . . . . . . . 4-10
Figure 4-8. Honda 20-pin purge function connection . . . . . . . . . . . . . . . . . . . . . . . . . 4-10
Figure 4-9. Honda 20-pin normally open internal circuitry for purge function . . . . . . . 4-11
Figure 4-10. Honda 20-pin normally closed internal circuitry for purge function . . . . . 4-11
Figure 4-11. 9-pin subminiature-D purge function connection . . . . . . . . . . . . . . . . . . 4-12
Figure 4-12. 9-pin subminiature-D internal circuitry for purge function . . . . . . . . . . . . 4-12
Figure 5-1. No Gas Is Being Supplied troubleshooting flow chart . . . . . . . . . . . . . . . . . 5-2
Figure 5-2. Set Point and Flow Output Do Not Match troubleshooting flow chart . . . . . 5-3
Figure 5-3. Unstable Flow or Insufficient Output Exists troubleshooting flow chart . . . 5-5
Figure 6-1. Dimensions for standard MFC models with 1/4″ VCR fitting . . . . . . . . . . 6-34
Figure 6-2. Dimensions of block-type MFC models . . . . . . . . . . . . . . . . . . . . . . . . . . 6-37
Figure 6-3. Dimensions for high temperature MFC models . . . . . . . . . . . . . . . . . . . . 6-38
Figure 6-4. MFC label example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-40
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List of Tables
Table 1-1. Standard MFC model numbers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
Table 1-2. Block-type MFC model numbers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Table 1-3. High temperature MFC model numbers . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Table 4-1. 20-pin connector signal descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
Table 4-2. 9-pin connector signal descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
Table 5-1. AE Global Services locations (USA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6
Table 5-2. European sales and service offices . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7
Table 5-3. European sales representative contacts . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8
Table 5-4. Middle East sales and service contacts . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8
Table 5-5. Pacific Rim sales and service offices . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9
Table 6-1. Specifications for FC-770 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2
Table 6-2. Specifications for FC-771 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3
Table 6-3. Specifications for FC-772 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4
Table 6-4. Specifications for FC-780HT series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5
Table 6-5. Specifications for FC-780 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
Table 6-6. Specifications for FC-780X series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
Table 6-7. Specifications for FC-781HT series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8
Table 6-8. Specifications for FC-781 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9
Table 6-9. Specifications for FC-782 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-10
Table 6-10. Specifications for FC-785 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . 6-11
Table 6-11. Specifications for FC-785T-B series MFCs . . . . . . . . . . . . . . . . . . . . . . . 6-12
Table 6-12. Specifications for model FC-785X-B MFC . . . . . . . . . . . . . . . . . . . . . . . . 6-13
Table 6-13. Specifications for FC-785Y-B series MFCs . . . . . . . . . . . . . . . . . . . . . . . 6-14
Table 6-14. Specifications for FC-786 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . 6-15
Table 6-15. Specifications for FC-786T-B series MFCs . . . . . . . . . . . . . . . . . . . . . . . 6-16
Table 6-16. Specifications for FC-786Y-B series MFCs . . . . . . . . . . . . . . . . . . . . . . . 6-17
Table 6-17. Specifications for FC-790 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . 6-18
Table 6-18. Specifications for FC-791 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . 6-19
Table 6-19. Specifications for FC-795 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . 6-20
Table 6-20. Specifications for FC-795T-B series MFCs . . . . . . . . . . . . . . . . . . . . . . . 6-21
Table 6-21. Specifications for FC-796 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . 6-22
Table 6-22. Specifications for FC-7700 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . 6-23
Table 6-23. Specifications for FC-7710 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . 6-24
Table 6-24. Specifications for FC-7720 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . 6-25
Table 6-25. Specifications for FC-7800 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . 6-26
Table 6-26. Specifications for FC-7810 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . 6-27
Table 6-27. Specifications for FC-7820 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . 6-28
Table 6-28. Specifications for FC-7850Y-B series MFCs . . . . . . . . . . . . . . . . . . . . . . 6-29
Table 6-29. Specifications for FC-7810 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . 6-30
Table 6-30. Specifications for FC-7820 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . 6-31
Table 6-31. Specifications for FC-7850Y-B series MFCs . . . . . . . . . . . . . . . . . . . . . . 6-32
Table 6-32. Specifications for FC-785Y-B series MFCs . . . . . . . . . . . . . . . . . . . . . . . 6-33
5700512-C
List of Tables
xiii
Advanced Energy®
Table 6-33. Dimensions for standard models in mm (and inches) . . . . . . . . . . . . . . . 6-34
Table 6-34. Dimensions for block-type models in mm (and inches) . . . . . . . . . . . . . . 6-37
Table 6-35. Dimensions of high temperature MFC units in mm (and inches) . . . . . . . 6-38
Table 6-36. Dimensions of high temperature PCB units in mm (and inches) . . . . . . . 6-38
Table 6-37. Calibration references . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-39
xiv
List of Tables
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Chapter
1
Safety and Product Compliance
Guidelines
IMPORTANT SAFETY INFORMATION
To ensure safe installation and operation of the Advanced Energy® MFC, read and
understand this manual before attempting to install and operate this unit. At a
minimum, read and follow the safety instructions and practices documented under
“Safety Guidelines” on page 1-6.
MODEL NUMBERS FOR THIS MANUAL
This manual applies to the MFC model numbers shown in the following tables:
• Table 1-1 on page 1-1 shows standard MFC model numbers covered by this
manual
• Table 1-2 on page 1-3 shows block-type MFC model numbers covered by this
manual
• Table 1-3 on page 1-4 shows high temperature MFCs covered by this manual.
Table 1-1. Standard MFC model numbers
Model
Number
Control Valve
Normally
closed
5700512-C
Rubber
x
x
FC-771A
FC-771AC
Metal
x
FC-770A
FC-770AC
Normally
Open
External Seal
x
Safety and Product Compliance Guidelines
Connector
Type
x
Card edge
x
Card edge
x
Card edge
x
Card edge
1-1
Advanced Energy®
Table 1-1. Standard MFC model numbers (Continued)
Model
Number
Control Valve
Normally
closed
x
x
x
FC-781
FC-781C
x
x
FC-782
FC-782C
x
x
FC-780X
FC-780XC
x
FC-790
FC-790C
x
x
x
FC-791
FC-791C
x
x
FC-795
FC-795C
x
FC-796
FC-796C
x
x
Connector
Type
x
Card edge
x
Card edge
x
Card edge
x
Card edge
x
Card edge
x
Card edge
x
Card edge
x
Card edge
x
Card edge
x
Card edge
x
Honda 20-pin
x
Honda 20-pin
x
Honda 20-pin
x
Honda 20-pin
x
Honda 20-pin
x
Honda 20-pin
x
Honda 20-pin
x
Honda 20-pin
x
FC-7700
x
Card edge
FC-7700C
x
x
Card edge
FC-7700CD
x
x
Subminiature-D
FC-7700CU
x
x
Card edge
x
Card edge
x
FC-7710
FC-7710C
x
x
Card edge
FC-7710CD
x
x
Subminiature-D
FC-7710CU
x
x
Card edge
x
Card edge
x
Card edge
x
FC-7720
FC-7720C
x
FC-7720CD
x
x
FC-7800
1-2
Rubber
x
FC-780
FC-780C
Metal
x
FC-772
FC-772C
Normally
Open
External Seal
x
Subminiature-D
x
Card edge
FC-7800C
x
x
Card edge
FC-7800CD
x
x
Subminiature-D
Safety and Product Compliance Guidelines
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Table 1-1. Standard MFC model numbers (Continued)
Model
Number
FC-7800CU
Control Valve
Normally
closed
External Seal
Normally
Open
Metal
x
x
FC-7810
Rubber
Connector
Type
x
Card edge
x
Card edge
FC-7810C
x
x
Card edge
FC-7810CD
x
x
Subminiature-D
FC-7810CU
x
x
Card edge
x
Card edge
x
Card edge
x
Honda 20-pin
x
Honda 20-pin
x
Honda 20-pin
x
Honda 20-pin
x
FC-7820
FC-7820C
x
x
FC-785
FC-785C
x
x
FC-786
FC-786C
x
Table 1-2. Block-type MFC model numbers
Model
Number
Control Valve
Normally
closed
FC-7850Y-B
FC-7850CY-B
FC-785XC-B
FC-795T-B
5700512-C
x
x
x
x
x
x
x
x
x
x
x
x
x
x
FC-786T-B
FC-786CT-B
x
x
FC-785T-B
FC-785CT-B
x
x
FC-785X-B
Lateral
x
x
FC-786Y-B
FC-786CY-B
Vertical
x
FC-785Y-B
FC-785CY-B
Normally
Open
Connector Position
x
x
x
x
x
Safety and Product Compliance Guidelines
1-3
Advanced Energy®
Table 1-2. Block-type MFC model numbers (Continued)
Model
Number
Control Valve
Normally
closed
Connector Position
Normally
Open
Vertical
x
FC-795CT-B
Lateral
x
Note: All of these models use a Honda 20-pin connector, have metal
external seals, and have a connection with a flange fitting.
Table 1-3. High temperature MFC model numbers
Model
Number
Control Valve
Normally
closed
FC-780HT
FC-780CHT
Metal
x
x
Card edge
x
Card edge
x
Card edge
x
Card edge
x
x
FC-781CHT
Rubber
Connector
Type
Normally
Open
x
FC-781HT
External Seal
INTERPRETING THE MANUAL
The following sections explain the document type conventions and the danger,
warning, and caution boxes that provide information about the specific levels of
hazard seriousness.
Type Conventions
Please note the following type conventions:
• Pin and signal names appear in capitalized italics (POWER_ON).
• New terms appear in italicized text.
• Unit labels (switches, indicators, and so on) appear in boldface text (MODIFY).
• Commands (stx) appear in boldface, lowercase text.
1-4
Safety and Product Compliance Guidelines
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Danger, Warning, and Caution Boxes
This symbol represents important notes concerning potential harm to people, this unit,
or associated equipment. Advanced Energy® includes this symbol in Danger,
Warning, and Caution boxes to identify specific levels of hazard seriousness.
DANGER indicates an imminently hazardous situation that, if not
avoided, will result in death or serious injury. DANGER is limited to the
most extreme situations.
WARNING indicates a potentially hazardous situation that, if not avoided,
could result in death or serious injury, and/or property damage.
CAUTION indicates a potentially hazardous situation that, if not avoided,
could result in minor or moderate injury, and/or damage to property.
CAUTION is also used for property-damage-only accidents.
Interpreting Product Labels
The following labels may appear on your unit:
CE label
Refer to manual for more
information
5700512-C
Safety and Product Compliance Guidelines
1-5
Advanced Energy®
SAFETY GUIDELINES
Review the following information before attempting to install and operate the product.
Do not attempt to install or operate this equipment if you have not first
reviewed this manual.
Hazardous voltages exist inside the mass flow controller (MFC). Do not
remove the MFC cover.
• Do not install substitute parts or perform any unauthorized modification to the
MFC.
• Service and repair the MFC only at authorized service centers to ensure that all
safety features are maintained.
• Do not remove MFC covers. Component replacement and internal adjustments
must be made by qualified service personnel only.
• If hazardous materials are used, observe the proper safety precautions, completely
purge the MFC when necessary, and ensure that the material used is compatible
with sealing materials.
• After installing the MFC, or before its removal from a system, purge the MFC
completely with a clean, dry gas to eliminate all traces of the previously used flow
material.
• This MFC should be purged by qualified personnel following standard company
procedures.
• Do not operate this product in an explosive environment.
• Ensure that all MFC fittings are consistent with MFC specification and
compatible with the intended use of the MFC.
• Before proceeding with the MFC setup, carefully check all plumbing connections
to ensure leak-tight installation.
• Never operate this MFC at pressures higher than the rated maximum pressure.
(Refer to “Model Specifications” on page 6-1 for maximum allowable pressure
specifications.)
1-6
Safety and Product Compliance Guidelines
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
• When operating from a pressurized gas source, install a suitable burst disc in the
vacuum system to prevent system explosion if system pressure rises.
• Do not allow contaminants of any kind to enter the MFC before or during use.
Contamination such as dust, dirt, lint, glass chips, metal chips, or any other
particles may permanently damage the MFC.
Product Certification
Certain options of this product are certified by:
• CE Marking – Self-declaration, assessed by AE Corporate Compliance
For more information, refer to the Certificate or Letter of Conformity (US) or
Declaration of Conformity (EU) accompanying the product.
Conditions of Use
To comply with the stated directives and standards, you must meet the following
conditions of use:
• Install and operate this device only in accordance with the listed safety guidelines
and all other applicable directives and standards specific to your process and
application.
• Dispose of this product as directed by applicable laws and regulations.
5700512-C
Safety and Product Compliance Guidelines
1-7
Advanced Energy®
1-8
Safety and Product Compliance Guidelines
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Chapter
2
Product Overview
PRODUCT DESCRIPTION AND THEORY OF
OPERATION
The MFC provides analog control, an array of possible mechanical and electrical
connections, and a wide variety of flow ranges. As shown in Figure 2-1, the MFC
(mass flow controller) is composed of a PC board that is integrated with the following
sections:
• Flow and temperature sensor
• Bypass
• Electronics
• Control valve
PC board
Control
Valve
Sensor
Gas outlet
Gas inlet
Base
Bypass
Figure 2-1. MFC cutaway view
5700512-C
Product Overview
2-1
Advanced Energy®
When gas flows through the MFC it is split into two streams. A larger stream is routed
through the bypass assembly, and a smaller stream that is proportional to the larger
stream is routed through the flow sensor. The MFC is designed so that the ratio
between these two streams remains constant over the entire measurable flow range of
the instrument.
The flow sensor measures the flow of the smaller stream which represents the total gas
flow through the MFC. The flow sensor consists of a small stainless steel capillary
tube with two thermal resistors wound around the outside. Current passes through the
thermal resistors that function as heaters to warm the sensor tube. The thermal
resistors form part of a bridge circuit that senses the resistors’ resistance balance.
When gas is flowing, heat is transferred from the upstream to the downstream thermal
resistor. The degree of imbalance is proportional to the rate of the gas flow.
The control valve adjusts gas flow through the MFC based on the flow sensor reading
and the set point to ensure a stable gas flow from the MFC.
For more detailed information regarding the components in the MFC, see “MFC
Components” on page 2-2.
MFC COMPONENTS
The main components of the MFC are the flow sensor, bypass, electronics (bridge,
amplifier, and comparator circuits), and valve assemblies. Figure 2-2 illustrates these
major components.
2-2
Product Overview
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Figure 2-2. MFC functional block diagram
Flow Sensor Assembly
The flow sensor consists of a capillary tube wound by two self-heating resistance
wires through which electrical current is passed. The resistance wires heat the sensor
tube and when gas flows through the flow sensor a temperature differential is
produced between the upstream and downstream wires. The temperature change
causes a change in resistance which is detected as an electronic signal by the bridge
circuit of the electronics assembly.
The MFC uses the mass gas flow measurement because the heat exchange between
the gas and the self-heating resistance wire depends on the mass flow. When gas is not
flowing, heat is distributed evenly over the upstream and downstream wires, therefore
the resistance of upstream and downstream wires is equal and the bridge circuit
outputs zero. When gas flows, heat is exchanged between the gas and the self-heating
resistance wires. The temperature distribution between the upstream and downstream
resistance wires changes causing an imbalance. The imbalance of the upstream and
downstream temperatures results in a resistance differential that is detectable by the
bridge circuit as an electronic signal. The electronic signal represents the mass gas
flow.
5700512-C
Product Overview
2-3
Advanced Energy®
As a result of the techniques of thermal mass flow measurement, gas flow can be
measured independently of factors which affect volume and density, such as
temperature and pressure.
Bypass Assembly
The bypass assembly diverts a small stream of incoming gas through the flow sensor
and channels the rest through the bypass and toward the valve assembly of the MFC.
The bypass assembly design ensures a constant flow ratio between the flow sensor and
the larger flow passing through the instrument, making the output signal of the flow
sensor proportional to the total (or mass) gas flow. A comparator circuit in the
electronics assembly compares the output signal from the flow sensor and the flow set
point. The signal created from this comparison drives the control valve until the
difference between the set point and the sensor output signal decreases to zero.
Electronics Assembly
The electronics assembly consists of a bridge circuit, a high resolution analog
converter, a valve drive circuit, and an analog I/O. The signal generated by the bridge
circuit is amplified and fed into the analog converter which outputs this signal into the
CPU (central processing unit). The CPU compares the set point signal to the sensor
reading to generate a signal to drive the control valve.
Valve Assembly
The valve assembly consists of a normally closed or normally open, solenoid control
valve.
2-4
Product Overview
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Chapter
3
Installation and Operation
PREPARING TO INSTALL THE UNIT
The following sections provide information that you need to understand before
installing the MFC.
Installation Requirements
Install the MFC according to the following requirements.
Operating and maintenance personnel must receive proper training
before installing, troubleshooting, or maintaining this equipment.
• Do not use this product for medical or life-support purposes.
• Use the appropriate tube size for the MFC fitting.
The MFC does not come with mounting screws and gaskets. The selection and
preparation of appropriate screws and gaskets is your responsibility.
Note: For product and attachment dimensions, see “MFC Dimensions” on
page 6-33.
• Connect the MFC with the gas flowing in line with the arrow marked on the front
of the MFC.
• Make the electrical connection according to the instructions in “Making the
Electrical Connection” on page 3-5.
• Use optional functions such as error detection and the purge function according to
the relevant instructions.
• Perform the gas connector leak test with a helium leak detector.
Note: For models with a normally closed control, perform the leak test with the
valve open (by providing a set point voltage to the MFC).
• After power on, warm up the MFC for at least 15 minutes before supplying gas.
5700512-C
Installation and Operation
3-1
Advanced Energy®
• The MFC can be mounted in any position, but the zero point may shift if the MFC
is in a nonvertical position.
Adjust the zero point in the intended mounting position (see “Zeroing the MFC”
on page 3-9 for more information).
• AE recommends that you use a filter on the MFC primary side. A clogged MFC
can result in inaccurate control and measurement and subsequent process failures.
• AE recommends that you use a dedicated regulator on the MFC primary side.
Excessive service pressure can cause control errors and MFC failure. Unstable
pressure (or multiple MFCs below a single regulator) can cause unstable output.
INSTALLING THE UNIT
The following sections explain how to install the unit.
Hazardous voltages exist inside the mass flow controller (MFC). Do not
remove the MFC cover.
Overview of Unit Installation
To install the MFC, do the following:
1. “Confirming the MFC Model” on page 3-3.
2. “Preparing the Installation Site” on page 3-3.
3. “Unpacking the MFC” on page 3-3.
4. “Positioning the MFC” on page 3-3.
5. “Mounting the MFC” on page 3-4.
6. “Making the Mechanical Connections” on page 3-4
7. “Making the Electrical Connection” on page 3-5.
8. “Testing the System for Leaks” on page 3-6.
3-2
Installation and Operation
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Confirming the MFC Model
Before you install the MFC, ensure that you have the correct model for your system
requirements. The part number, serial number, calibration gas, and full-scale flow are
listed on the label of the MFC. See “Product Label” on page 6-40 for an example
MFC label.
Preparing the Installation Site
Before installing the MFC, thoroughly clean, dry, and purge all piping associated with
the entire flow control system (in accordance with your company’s procedures). The
MFC control valve is not capable of completely shutting off gas flow. You must
install another shut off valve downstream of the MFC to completely stop gas flow.
Unpacking the MFC
The MFC is manufactured in a cleanroom environment and delivered in
contamination-free packages. Unpack MFC products in a cleanroom.
Unpack and inspect the MFC carefully, looking for obvious physical damage. If no
damage is apparent, locate and save all documentation, and then proceed with the
installation procedures.
If you do see signs of shipping damage, contact Aera, an Advanced Energy company,
and the carrier immediately (see “AE Global Services” on page 5-6 for contact
information). Save the shipping container for submitting necessary claims to the
carrier.
Save any undamaged shipping materials in the event you must ship the MFC in the
future. For more information on shipping an MFC, see “Packing an MFC for
Shipping” on page 5-10.
Positioning the MFC
Position the MFC so the gas flow is in the direction of the arrow stamped on the MFC
base. The MFC can be mounted in any position, but the zero point may shift if the
MFC is mounted in a non-vertical position. Adjust the zero point in the intended
mounting position before running the MFC (see “Zeroing the MFC” on page 3-9 for
more information).
5700512-C
Installation and Operation
3-3
Advanced Energy®
Mounting the MFC
Look to the following information to correctly mount the MFC.
Note: If you are using an MFC with IGS connections, you must make the mechanical
connections before mounting the MFC. See “Making the Mechanical
Connections” on page 3-4 for more information.
Note: The MFC may be retrofitted into any system because it has been manufactured
for drop-in replacement for all existing MFCs and is backward compatibility
with all older analog MFCs.
To Mount the MFC:
1. Match the mounting holes on the bottom of the MFC with those on the mounting
surface.
2. Using two #8-32 UNC-2B screws mount the MFC. Ensure it is securely attached
and will resist vibration from external sources.
See “MFC Dimensions” on page 6-33 for dimensional drawings of the MFC, as well
as the specifications of the MFC mounting footprint.
Making the Mechanical Connections
To make the mechanical connections for the MFC, connect the inlet and outlet fittings
of the MFC to the gas supply line. Depending on the fitting type, use one of the
following procedures to connect the MFC.
Note: See “Model Specifications” on page 6-1 for more information about your fitting
type.
To Make VCR Fitting Connections:
1. Verify the MFC is correctly mounted (see “Mounting the MFC” on page 3-4).
2. Inspect the tubing, ferrules, and fittings for dirt, dust, contamination, or damage.
If necessary, replace damaged components and clean the tubing, ferrules, and
fittings in accordance with your company’s procedures.
3. Insert associated tubing until it rests flush against the shoulder of the fitting.
4. Tighten nut to finger tight and then 1/8 of a turn past finger tight.
To Make IGS Connections:
1. Inspect the mounting blocks for dirt, dust, contamination, or damage.
If necessary, replace damaged components and fittings in accordance with your
company’s procedures.
2. Insert appropriate metal seals for your seal type.
Note: Metal seals are not included with the MFC.
3-4
Installation and Operation
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
3. Mount the MFC and tighten screws according to IGS torque specifications (see
“Mounting the MFC” on page 3-4).
Making the Electrical Connection
Connect the system to the MFC using an appropriate mating connector and cable. For
electrical connector pin and signal information, see Chapter 4, “I/O Connections and
Communication.”
Note: If possible, securely fasten the connector with jack-post screws to the MFC to
prevent the connector from vibrating loose. Signals at this I/O port can be
sensitive to electrical noise. Take standard preventative measures against
electromagnetic interference (EMI), including using shielded cable.
POWER SUPPLY REQUIREMENTS
For specific power supply requirements, see the specifications for your MFC model in
“Model Specifications” on page 6-1.
Note: The power supply used with the MFC must be sufficient to handle the larger
current demand during operation. Additionally, the ripple voltage of the power
supply should be less than 20 mV.
If needed, Aera recommends using the following Aera power supplies for use with
Aera MFCs:
• PS94UA (For use with up to 4 MFCs)
• PS76DA (For use with up to 6 MFCs)
• PS74DA (For use with up to 4 MFCs)
GROUND CONNECTIONS
The MFC employs both signal and power commons. Proper grounding of these
common leads is essential for the MFC to operate accurately and safely. Improper
grounding practices may result in inaccurate actual and indicated flow. Follow all
appropriate industry and local practices and standards in making these connections.
Note: For electrical connector pin and signal information, see Chapter 4, “I/O
Connections and Communication.”
5700512-C
Installation and Operation
3-5
Advanced Energy®
Testing the System for Leaks
Do not use liquid leak detectors to leak test connections. They may
damage the MFC.
After installing the MFC in your system, you should test the leak integrity of the gas
connections with a helium leak detector.
Note: MFCs equipped with a normally closed control valve should be leak tested with
the valve open (by providing a set point voltage to the MFC). For more
information about setting the set point voltage, see Chapter 4, “I/O Connections
and Communication.”
CONNECTING THE MFC TO PERIPHERAL
EQUIPMENT
The following illustrations provide guidance for connecting a MFC to peripheral
equipment. The illustrations list Aera part numbers for equipment.
Figure 3-1. Connection to peripheral equipment using a RO-Box power
supply
3-6
Installation and Operation
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Figure 3-2. Connection to peripheral equipment using a dedicated power
supply
5700512-C
Installation and Operation
3-7
Advanced Energy®
Figure 3-3. Example of connections using dedicated line code LC-OUT-N
OPERATING THE UNIT
The following sections explain how to operate the unit.
3-8
Installation and Operation
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Hazardous voltages exist inside the mass flow controller (MFC). Do not
remove the MFC cover.
First-Time Operation
The first time you operate the MFC:
1. Ensure that you have installed the MFC properly by following the procedures in
“Installing the Unit” on page 3-2.
2. After energizing the MFC (turning on power) through the appropriate
communications interface, allow the MFC to warm up for at least 15 minutes
before supplying gas to the MFC.
If you observe deviation in the zero output, perform a zero-point adjustment (see
“Zeroing the MFC” on page 3-9).
3. When using the MFC with vapors at room temperature, set the supply pressure at
the minimum value capable of securing the full-scale flow rate to avoid liquid
recondensation in the pipes. Be sure to maintain stable temperature for all pipes.
Zeroing the MFC
Look to the following information to adjust the MFC to the zero point.
Note: Contamination can negatively affect proper flow rate control and measurement,
despite zero point adjustment.
Before Zeroing the MFC, Review the Following:
• Make sure that your MFC has a zero-point adjustment hole. To identify this hole,
see Figure 3-4 on page 3-10. If your model does not have this hole, you can not
adjust the zero point. In this situation, contact AE Global Services (see “AE
Global Services” on page 5-6).
• The MFC can be mounted in any position. However, if the MFC is in a vertical
position, thermal siphoning can occur with a gas that has a molecular weight that
is 140 or less, which may cause the zero point to shift. Make sure to adjust the zero
point in the intended mounting position and with pressured service gas.
• Adjust the zero point at the service operating temperature. Temperature
deviations, even within the specified range of operating temperatures, may cause
the zero point to shift.
5700512-C
Installation and Operation
3-9
Advanced Energy®
To Adjust the MFC Zero Point:
1. Make sure that the MFC has reached ambient temperature.
2. Energize the MFC, then wait at least 15 minutes. During this time, make sure that
the ambient temperature remains constant and that the output stabilizes.
3. Close the shut-off valves upstream and downstream of the MFC to ensure that
there is no gas flow.
4. For normally closed MFCs set the set point signal to 0 V. For normally open
MFCs, set the set point signal to 5 V. For more information on the set point
command, see Chapter 4, “I/O Connections and Communication.”
5. Use a small, flat head screw driver to make the zero-point adjustment as shown in
Figure 3-4.
Figure 3-4. MFC zero point adjustment
3-10
Installation and Operation
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
MAINTENANCE
Recalibration and repair should be performed by Advanced Energy. See “AE Global
Services” on page 5-6 for contact information.
Note: Removal of an MFC should be done only after adequate purging with a
nonreactive gas such as nitrogen gas (N2). You should follow your company
procedures for removing gas line components.
Reactive gas calibrated MFCs may receive severe contamination or
corrosion from exposure to air or moisture. Check plumbing for leaks,
and purge thoroughly with dry nitrogen before operating or
disconnecting from the system.
STORAGE
Observe the following requirements when placing an MFC in storage:
• Temperature between 5ºC (41ºF) and 45ºC (113ºF)
• Relative humidity less than 60%
Additionally, prevent any mechanical impact or corrosion.
5700512-C
Installation and Operation
3-11
Advanced Energy®
3-12
Installation and Operation
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Chapter
4
I/O Connections and
Communication
The following sections provide information on the MFC’s electrical connectors and
communication interfaces for MFC control, read back, and alarm indications.
20-PIN CARD EDGE CONNECTOR AND 20PIN HONDA CONNECTOR
Card Edge Connector
Figure 4-1 shows the pin names on the card edge connector.
1
A
2
B
3
C
4
D
5
E
6
F
\
\
8
J
9
K
10
L
Figure 4-1. 20-pin card-edge connector
5700512-C
I/O Connections and Communication
4-1
Advanced Energy®
Honda Connector
Figure 4-2 shows the pin numbers on the 20-pin Honda connector.
11
1
12
2
13
3
14
4
15
5
16
6
17
7
18
8
19
9
20
10
Figure 4-2. 20-pin Honda connector
20-Pin Connector Signal Descriptions
Table 4-1 provides the pin and signal descriptions for the 20-pin card-edge connector
and the 20-pin Honda connector.
Table 4-1. 20-pin connector signal descriptions
Pin
Signal Name
Signal Description
1
CASE GND
Case ground terminal. This terminal is
connected to the base of the MFC. All other
terminals must be insulated from this
terminal.
2
POWER
COMMON
Common line that carries the majority of the
MFC operating current.
Note: POWER COMMON (pin 2) and
SIGNAL COMMON (pins B and C for
the card edge connector, pins 12 and 13
for the Honda connector) must be
connected at the power supply.
4-2
I/O Connections and Communication
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Table 4-1. 20-pin connector signal descriptions (Continued)
Pin
3
Signal Name
OUTPUT
Signal Description
Flow output terminal. Flow is represented by
a signal scaled between 0 VDC and 5 VDC:
• 0 VDC = 0%
• 5 VDC = 100% of full-scale flow
4
+15 VDC
For specifications on this signal, see the
supply power section of the specifications
table for the specific MFC model (see “Model
Specifications” on page 6-1).
5
UNASSIGNED
This pin is unassigned and should not be
connected.
6
VALVE TEST
POINT
Terminal for monitoring the voltage of the
valve drive. The scale is 0 VDC to -13 VDC
(maximum valve voltage).
Key (card
edge)
KEY
7 (Honda)
UNASSIGNED
The key is a slot in the card-edge connector
that ensures the connector can not be
connected backwards.
or
For Honda connectors, this pin is unassigned
and should not be connected.
5700512-C
8
ALARM H
This pin provides an alarm output, which does
not need to be connected. For more
information see “Alarm Output (Error
Detection) Signals” on page 4-7.
9
ALARM L
This pin provides an alarm output, which does
not need to be connected. For more
information see “Alarm Output (Error
Detection) Signals” on page 4-7.
10
ALARM OFF
This pin resets the alarm signal on pins 8 and
9. It does not need to be connected. For more
information see “Alarm Output (Error
Detection) Signals” on page 4-7.
I/O Connections and Communication
4-3
Advanced Energy®
Table 4-1. 20-pin connector signal descriptions (Continued)
Pin
A (card edge)
11 (Honda)
Signal Name
SET POINT
INPUT
Signal Description
Analog flow control set point signal. The
signal range is 0 VDC to 5 VDC:
• 0 VDC = 0%
• 5 VDC = 100% of full-scale flow
(card edge)
SIGNAL
COMMON
Return for control signals.
SIGNAL
COMMON
See pin B (12)
VALVE OPEN/
CLOSE
This signal controls the position of the control
valve and allows you to use the purge function
on the MFC. The controls for this function
vary with connector and MFC type. For more
information, see “Control Valve Purge
Function Signals” on page 4-8.
UNASSIGNED
This pin is unassigned and should not be
connected.
-15 VDC
For specifications on this signal, see the
supply power section of the specifications
table for the specific MFC model (see “Model
Specifications” on page 6-1).
Key (card
edge)
KEY
17 (Honda)
UNASSIGNED
The key is a slot in the card-edge connector
that ensures the connector can not be
connected backwards.
12 (Honda)
C (card edge)
13 (Honda)
D (card edge)
14 (Honda)
E (card edge)
15 (Honda)
F (card edge)
16 (Honda)
or
Note: POWER COMMON (pin 2) and
SIGNAL COMMON (pins B and C for
the card edge connector, pins 12 and 13
for the Honda connector) must be
connected at the power supply.
For Honda connectors, this pin is unassigned
and should not be connected.
J (card edge)
UNASSIGNED
This pin is unassigned and should not be
connected.
UNASSIGNED
This pin is unassigned and should not be
connected.
UNASSIGNED
This pin is unassigned and should not be
connected.
18 (Honda)
K (card edge)
19 (Honda)
L (card edge)
20 (Honda)
4-4
I/O Connections and Communication
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
9-PIN SUBMINIATURE-D CONNECTOR
Connector
Figure 4-3 shows the pin numbers on the 9-pin subminiature-D connector.
Figure 4-3. 9-pin subminiature-D connector
Pin and Signal Descriptions
Table 4-2 provides the pin and signal descriptions for the 9-pin subminiature-D
connector.
5700512-C
I/O Connections and Communication
4-5
Advanced Energy®
Table 4-2. 9-pin connector signal descriptions
Pin
1
Signal
Name
VALVE
OPEN/
CLOSED
Signal Description
This signal controls the position of the control
valve and allows you to use the purge function on
the MFC.
• Open = Common or +15 VDC
• Closed = -15 VDC
• Normal = Floating
For more information, see “Control Valve Purge
Function Signals” on page 4-8.
Note: Complete shut off of a gas cannot be
achieved by the control valve of an MFC.
2
OUTPUT
Analog flow output signal. The signal range is
0 VDC to 5 VDC:
• 0 VDC = 0%
• 5 VDC = 100% of full-scale flow
3
+15 VDC
For specifications on this signal, see the supply
power section of the specifications table for the
specific MFC model (see “Model Specifications”
on page 6-1).
4
POWER
COMMON
Common line that carries the majority of the MFC
operating current.
Note: POWER COMMON (pin 4) and SIGNAL
COMMON (pins 7 and 8) must be connected
at the power supply.
5
-15 VDC
For specifications on this signal, see the supply
power section of the specifications table for the
specific MFC model (see “Model Specifications”
on page 6-1).
6
SET POINT
Analog flow control signal. The signal range is
0 VDC to 5 VDC:
• 0 VDC = 0%
• 5 VDC = 100% of full-scale flow
7
4-6
SIGNAL
COMMON
Return for control signals.
Note: POWER COMMON (pin 4) and SIGNAL
COMMON (pins 7 and 8) must be connected
at the power supply.
I/O Connections and Communication
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Table 4-2. 9-pin connector signal descriptions
Pin
Signal
Name
Signal Description
8
SIGNAL
COMMON
See pin 7.
9
VALVE
TEST POINT
Test point signal indicating the position of the
control valve:
• Open = -13 VDC
• Closed = 0 VDC
SPECIAL FUNCTION SIGNAL DESCRIPTIONS
The following sections provide detailed signal information for signals that are
dedicated to specific functions.
Alarm Output (Error Detection) Signals
Not all MFC models provide these signals. To see if your model provides alarm output
signals see the specifications for the MFC model in question (see “Model
Specifications” on page 6-1). For signal descriptions, see Chapter 4, “I/O Connections
and Communication.”
FC-77X and FC-77XX MFCs provide error detection as a standard feature. The
function is an option on some other models.
For MFCs with the error detection feature, the MFC provides alarm output if it detects
a difference between the flow rate set point and the actual flow rate for longer than
eight seconds.
5700512-C
I/O Connections and Communication
4-7
Advanced Energy®
As shown in Figure 4-4, ALARM H and ALARM L are connection terminals for the
open collector that is isolated with the photocoupler. To use the terminals, apply
appropriate power, as shown in the illustration. Use the ALARM ON/OFF signal to
reset the signal.
Note: If no gas is being supplied, but the MFC has a nonzero set point, the MFC will
report an error (because the flow rate does not match the set point).
Figure 4-4. Alarm connection
Control Valve Purge Function Signals
The control valve purge function allows you to completely open the control valve and
purge gas at many times the MFC full-scale flow rate. This function is particularly
useful for purging gas when using MFCs with a low full-scale flow rate or for leak
checking. The settings for opening/closing the control valve vary with the connector
type and, in some cases, with whether the MFC is normally open or normally closed.
For most applications, this signal is not connected.
The following illustrations show the connection and the internal MFC wiring, for the
purge function signals on all connectors.
4-8
I/O Connections and Communication
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
CARD EDGE PURGE FUNCTION SIGNALS
For the card edge connector, MFCs with normally open and normally closed valves
require inverse connections. Be sure to connect the signal properly. (To check whether
an MFC is normally closed or normally open, see “Model Numbers for this Manual”
on page 1-1.) Figure 4-5 shows the connections. Figure 4-6 and Figure 4-7 show the
internal circuitry for normally open and normally closed MFCs, respectively.
To disengage this function, disconnect the MFC terminal.
Figure 4-5. Card edge purge function signals
Figure 4-6. Card edge normally open internal circuitry for purge function
5700512-C
I/O Connections and Communication
4-9
Advanced Energy®
Figure 4-7. Card edge normally closed internal circuitry for purge function
HONDA 20-PIN PURGE FUNCTION SIGNALS
For the Honda 20-pin connector, normally open and normally closed valves use the
same connection. However, the internal MFC circuitry is different for normally open
and normally closed MFCs. Figure 4-8 shows the connection for the purge function.
Figure 4-9 and Figure 4-10 show the internal circuitry for normally open and normally
closed MFCs, respectively. (To check whether an MFC is normally closed or
normally open, see “Model Numbers for this Manual” on page 1-1.)
To disengage this function, disconnect the MFC terminal.
Figure 4-8. Honda 20-pin purge function connection
4-10
I/O Connections and Communication
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Figure 4-9. Honda 20-pin normally open internal circuitry for purge function
Figure 4-10. Honda 20-pin normally closed internal circuitry for purge function
SUBMINIATURE-D PURGE FUNCTION SIGNAL
For the 9-pin subminiature-D connector, Figure 4-11 shows the purge function
connection. This connector is only available on normally closed MFCs. Figure 4-12
shows the internal circuitry for this connection.
5700512-C
I/O Connections and Communication
4-11
Advanced Energy®
To disengage this function, disconnect the MFC terminal.
Figure 4-11. 9-pin subminiature-D purge function connection
Figure 4-12. 9-pin subminiature-D internal circuitry for purge function
4-12
I/O Connections and Communication
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Chapter
5
Troubleshooting and Global
Customer Support
TROUBLESHOOTING
The following sections provide information on troubleshooting the MFC as well as
AE Global Services contact information.
Hazardous voltages exist inside the mass flow controller (MFC). Do not
remove the MFC cover.
Alarm Signals
Some MFCs provide alarm output under certain operating conditions. For more
information, see “Alarm Output (Error Detection) Signals” on page 4-7.
Troubleshooting the Gas Flow
This section provides information on responding to the following flow-related
problems:
• “No Gas Is Being Supplied” on page 5-2.
• “Set Point and Flow Output Do Not Match” on page 5-3.
• “Unstable Flow or Insufficient Output Exists” on page 5-4.
5700512-C
Troubleshooting and Global Customer Support
5-1
Advanced Energy®
NO GAS IS BEING SUPPLIED
Use the following flow chart to troubleshoot if no gas is being supplied. If these
procedures do not resolve the problem, contact AE Global Services (see “AE Global
Services” on page 5-6).
Check the pressure
on the cylinder or
factory piping.
Not OK
Replace the cylinder or
adjust the pressure.
Not OK
Adjust to specified input
pressure or to maintain a
proper pressure differential
for MFC operation.
Not OK
Check control valves for the
gas supply, MFC, and
chamber.
Not OK
The pneumatic control valve
will not open without the
specified pressure. Adjust to
specifications.
OK
Check gas input
pressure.
OK
Check the gas
passage to the
MFC.
OK
Check the pressure
on the pneumatic
control valve.
OK
Perform an overall leak
check on the system and
MFC.
Not OK
Repair any leaks.
Figure 5-1. No Gas Is Being Supplied troubleshooting flow chart
5-2
Troubleshooting and Global Customer Support
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
SET POINT AND FLOW OUTPUT DO NOT MATCH
Use the following procedure to troubleshoot if the set point and the flow output do not
match. If these procedures do not resolve the problem, contact AE Global Services
(see “AE Global Services” on page 5-6).
Check the power
supply voltages
(+/-15 VDC).
Not OK
Check for faulty wiring or
power failure.
Not OK
Check the wiring to the
controller and between the
controller and the MFC.
Check for power failures in
the 5 VDC system.
Not OK
Disengage the purge function
(valve open/close) signal
(see "Electrical Connectors"
in Chapter 4 for more
information on this signal).
Not OK
May indicate a problem with
the MFC. Contact AE Global
Customer Support.
Not OK
Flow rate indicator may be
incorrectly calibrated or may
have failed.
OK
Gas pressure is
not needed for
these three
checks.
Check the set point
voltage.
OK
Check the purge
function (valve
open/close) signal
to make sure it is
not active.
OK
Supply gas, and
make sure that the
MFC responds to
voltage from the
controller.
OK
Check the output
voltage and the
readout indicator.
Figure 5-2. Set Point and Flow Output Do Not Match troubleshooting flow
chart
5700512-C
Troubleshooting and Global Customer Support
5-3
Advanced Energy®
UNSTABLE FLOW OR INSUFFICIENT OUTPUT EXISTS
Use the following procedure to troubleshoot unstable flow or insufficient output. If
these procedures do not resolve the problem, contact AE Global Services (see “AE
Global Services” on page 5-6).
5-4
Troubleshooting and Global Customer Support
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Check for stable pressure
on both the inlet and outlet
sides of the MFC.
Not OK
Ensure that pressure is stable on
inlet and outlet sides.
Not OK
Adjust pressure to meet pressure
differential specifications. See the
"Specifications" section in
Chapter 6.
Not OK
Using a gas other than the one
specified for the MFC may cause
hunting. Reducing the pressure
differential across the MFC may
eliminate this problem.
Not OK
Check the operation timing and
piping design. Also check the
constants used with the pressure
regulator.
Not OK
Check the operation timing and
piping for all related MFCs.
Not OK
Vapor condensation may cause
output fluctuations. To prevent
condensation, check the
temperature control on the piping
and/or shorten the piping.
Not OK
Leaks from the piping may cause
output fluctuation. See the "Leak
Check" section in Chapter 3.
OK
Check that the pressure
differential between the
inlet and outlet sides of the
MFC is correct.
OK
Check whether MFC is
being used with specified
gas.
OK
Check for interference with
the pressure regulator.
OK
Check for interference
between the pressure
regulator and other MFCs.
OK
Check whether a
temperature gradient may
be causing vapor
condensation in the piping.
OK
Perform an overall leak
check on the system and
MFC.
Figure 5-3. Unstable Flow or Insufficient Output Exists troubleshooting flow
chart
5700512-C
Troubleshooting and Global Customer Support
5-5
Advanced Energy®
AE WORLD WIDE WEB SITE
For additional product information, consult Advanced Energy’s World Wide Web
site:
• http://www.advanced-energy.com
AE GLOBAL SERVICES
Please contact one of the following offices if you have questions.
Note: When calling AE Global Services, make sure to have the unit serial number and
part number. These numbers are available on unit labels.
USA Support Locations
Table 5-1. AE Global Services locations (USA)
USA Offices
AE, World Headquarters
1625 Sharp Point Drive
Fort Collins, CO 80525 USA
Note: For returns and repairs, please
call Global Services to get the
correct shipping address.
Contact Information
Phone (24 hrs/day, 7 days/week):
800.446.9167 or
970.221.0108
FAX (M–F, 7:00 am – 5:30 pm MST):
970.407.5981
Email: [email protected]
(We will respond to email by the next
business day.)
Note: For customers outside the US,
please contact your local AE office.
Austin, Texas
8601 Cross Park Dr, Suite 100
Austin, TX 78754
Phone:
• 800.MFC.AERA
• 512.339.7100
FAX: 512. 339.8889:
5-6
Troubleshooting and Global Customer Support
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Table 5-1. AE Global Services locations (USA) (Continued)
USA Offices
Contact Information
Dallas, Texas
Phone: 972.231.9333
13490 Floyd Rd #108
Dallas, TX 75243
FAX: 972.231.9446
San Jose, California
Phone: 408.281.7772
6389 San Ignacio Avenue
San Jose, CA 95119
FAX: 408.281.7797
European Sales and Service Contacts
Table 5-2. European sales and service offices
European Offices
5700512-C
Contact Information
AE, GmbH
Phone: 49.711.779270
Raiffeisenstrasse 32
70794 Filderstadt
(Bonlanden) Germany
FAX: 49.711.7778700
Dressler HF-Technik GmbH
Phone: 49.2402.98810
Munsterau 168
52224 Stolberg-Vicht
Germany
FAX: 49.2402.98811
AE, United Kingdom
Phone: 44.1869.320022
Unit 5, Minton Place,
Market Court, Victoria Road
Bicester, Oxon OX26 6QB UK
FAX: 44.1869.325004
Troubleshooting and Global Customer Support
5-7
Advanced Energy®
Table 5-3. European sales representative contacts
European Offices
Contact Information
France
Phone: 33(0) 476.99.22.60
Omicron Technologies
ZA de Font Ratel
30 rue de l’Europe
F-38640
FAX: 33(0) 476.99.22.66
Ireland
Phone: 353.(0).6.60.3504
Valley Products and Service, Ltd.
FAX: 353.(0)6.68.9657
Italy
Phone/FAX: 39.039.322351
MCU s.r.l.
Sweden
Phone: 46.(0)40.41.1023
Air Vac
FAX: 46.(0)40.41.1318
Poland
Phone: 48.(0)22.720.4511
Vak-Pol
FAX: 48.(0)22.720.3965
Slovakia
Phone/FAX: 42.(0)7.396609
Labway, spol. s.r.o.
Middle East Sales and Service Contacts
Table 5-4. Middle East sales and service contacts
Middle Eastern Offices
5-8
Contact Information
Israel
Phone: 972.(3).922.83.15
Scientific Products & Technology
Ltd.
PO Box 3629
49130 Petah Tikva
FAX: 972.(3).922.84.04
Troubleshooting and Global Customer Support
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Asian Sales and Service Contacts
Table 5-5. Pacific Rim sales and service offices
Pacific Rim Offices
Contact Information
AE China
Phone: 86-21-58579011
469 Huaxia Dong Road
Zhang Jiang Town
Shanghai, China 201203
FAX: 86-21-58579003
AE Japan K.K.
Phone: 81.426.45.8125
2971-8 Ishikawa-cho
Hachioji, Tokyo
192-0032
Japan
FAX: 81.426.44.0779
AE, Korea Ltd. (sales office)
Phone: 82.(0)31.622.0555
#613 Amigo Tower
358-2 Yatop-dong, Bundang-ku
Sungam Si
Kyunggi, 463-070 Korea
FAX: 82.(0)31.622.0556
AE, Korea Ltd. (service office)
Phone: 82.(0)31.705.2100
Gongduk Building, 4th floor
272-6 Seohyun-Dong,
Bundang-Gu, Sungam Si
Kyunggi, 463-050 Korea
FAX: 82.(0)31.705.2766
Malaysia (Penang and Kuching
service office)
Phone: 604.6467758
APP Systems Services Pte Ltd.
1048, Jalan Dato Ismail Hashim
(Sungei Ara)
11900 Bayan Lepas, Penang,
West Malaysia
5700512-C
Singapore (sales and service office)
Phone: 65.64256611
APP Systems Services Pte Ltd.
11 Toh Guan Road East
#03-01 APP Enterprise Building
Singapore 608603
FAX: 65.65606616
AE, Taiwan, Ltd. Hsin-Chu Branch
Phone: 886.(0)3.516.9301
5F-12, No. 81, Shui Li Road
Hsin-Chu, Taiwan
FAX: 886.(0)3.516.9305
Troubleshooting and Global Customer Support
5-9
Advanced Energy®
RETURNING MFCS FOR REPAIR
Before returning any product for repair and/or adjustment, first follow all
troubleshooting procedures. If, after following these procedures, you still have a
problem, or if the procedure instructs you to, contact AE Global Services and discuss
the problem with a representative. Be prepared to give the model number and serial
number of the MFC, as well as the reason for the proposed return. This consultation
call allows Global Services to determine whether the problem can be corrected in the
field or if the MFC needs to be returned. Such technical consultation is always free of
charge.
If you return an MFC without first getting authorization from Global Services
and that MFC is found to be functional, you will be charged a re-test and
calibration fee plus shipping charges.
If you have received authorization for return, see “Packing an MFC for Shipping” on
page 5-10 for more information on packing the MFC for shipping.
To ensure years of dependable service, Advanced Energy® products are thoroughly
tested and designed to be among the most reliable and highest quality systems
available worldwide.
Packing an MFC for Shipping
Prior to shipping an MFC back to AE for repair or return, you must
receive authorization from AE Global Services. For more information,
see “Returning MFCs for Repair” on page 5-10.
Observe the following requirements when packing an MFC for shipment:
• Obtain a return authorization number from Global Services.
• Include the appropriate material safety data sheet (MSDS) information. Without
this information, AE will return the MFC to you without repair.
• Follow your company procedures for purging and removal of an MFC.
• Seal the MFC end-fittings for shipping.
• Place the MFC in two plastic bags (double-bag packaging) for shipment. Be sure
to vacuum seal each bag.
Pack the MFC with sufficient shock absorbent material to prevent damage to MFC’s
plastic bag from vibration or impact during shipment.
5-10
Troubleshooting and Global Customer Support
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
WARRANTY
All MFC warranties are void if the seal on the MFC cover is broken or
removed.
Advanced Energy® (AE) products are warranted to be free from failures due to defects
in material and workmanship for 12 months after they are shipped from the factory
(please see warranty statement below for details).
In order to claim shipping or handling damage, you must inspect the delivered goods
and report such damage to AE within 30 days of your receipt of the goods. Please note
that failing to report any damage within this period is the same as acknowledging that
the goods were received undamaged.
For a warranty claim to be valid, it must:
• Be made within the applicable warranty period
• Include the product serial number and a full description of the circumstances
giving rise to the claim
• Have been assigned an RMA (return material authorization) number (see below)
by AE Global Services
All warranty work will be performed at an authorized AE service center (see list of
contacts at the beginning of this chapter). You are responsible for obtaining
authorization (see details below) to return any defective MFCs, prepaying the freight
costs, and ensuring that the MFCs are returned to an authorized AE service center. AE
will return the repaired MFC (freight prepaid) to you by second-day air shipment (or
ground carrier for local returns); repair parts and labor will be provided free of charge.
Whoever ships the MFC (either you or AE) is responsible for properly packaging and
adequately insuring the MFC. See “Packing an MFC for Shipping” on page 5-10 for
more information on packing the MFC for shipping.
Authorized Returns
Before returning any product for repair and/or adjustment, call AE Global Services
and discuss the problem with them. Be prepared to give them the model number and
serial number of the MFC as well as the reason for the proposed return. This
consultation call will allow Global Services to determine if the MFC must actually be
returned for the problem to be corrected. Such technical consultation is always
available at no charge.
MFCs that are returned without authorization from AE Global Services and that are
found to be functional will not be covered under the warranty (see warranty statement,
below). That is, you will have to pay a retest and calibration fee, and all shipping
charges.
5700512-C
Troubleshooting and Global Customer Support
5-11
Advanced Energy®
Warranty Statement
Attention: All MFC warranties are void if the seal on the MFC cover is broken or
removed.
Aera warrants that for a period of one year after shipment, products
manufactured by Aera shall be free from defects in material and workmanship
when installed, serviced, and operated with the specifications for which they
were designed. Aera will replace or repair any equipment or parts returned
provided that factory inspection shows that such defect developed under normal
and proper use by the original user. Aera’s liability under this warranty is
limited to such replacement or repair and they shall not be held in any form of
action for any incidental or consequential damages to property or person. The
foregoing is in lieu of all other warranties, expressed or implied, including the
warranties of merchantability and fitness for particular purpose.
Representations and warranties by any person, including dealers and
representatives of seller, which are inconsistent or in conflict with the terms of
this warranty (including but not limited to limitations of liability as set forth
above), shall not be binding unless produced in writing and approved by an
authorized representative of Aera.
5-12
Troubleshooting and Global Customer Support
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Chapter
6
Specifications and Reference
Information
This chapter contains information on the specifications of models covered by this
manual, the dimensions of each model, and reference information (including
information about calibration and labeling).
MODEL SPECIFICATIONS
The following sections list the specifications for the MFC models covered in this
manual.
5700512-C
Specifications and Reference Information
6-1
Advanced Energy®
Specifications for Model FC-770 MFCs
The following table lists specifications for the FC-770 MFCs.
Table 6-1. Specifications for FC-770 series MFCs
Specification
FC-770A
Full-scale range (N2 equivalent)
Valve type
10 sccm to 5000 sccm
Normally open
Response time
Accuracy
FC-770AC
Normally closed
Maximum ±2% of full scale, within 2 seconds
Note 1
Maximum ±1% of full scale
Linearity
Maximum ±0.5% of full scale
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-7 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
2% to 100%
Operating pressure range
49 to 275 kPa(D); 7 to 40 psi(D)
Note 2
Proof pressure
981 kPa(G); 142 psi(G)
Operating temperature
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
Supply power
Power consumption
Gas-wetted surface material
Standard fitting
0 VDC to 5.0 VDC
Minimum +15 VDC ±2% 25 mA,
Minimum -15 VDC ±2% 180 mA
Maximum 3.1 W
SUS316, SUS316L, KM-45, Viton, or Chloroprene rubber
1/4″ VCR, 1/4″ SW, 1/4″ VCO
Mounting position
Any direction
Weight
0.9 kg (2.0 lb)
Options
Current output (0 mA to 2.5 mA), 1/4″ MCG fitting
Standard equipment
Error detection function
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service
gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified
operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
6-2
Specifications and Reference Information
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Specifications for Model FC-771 MFCs
The following table lists specifications for the FC-771 MFCs.
Table 6-2. Specifications for FC-771 series MFCs
Specification
FC-771A
FC-771AC
Full-scale range (N2 equivalent)
6 slm to 20 slm
6 slm to 50 slm
Valve type
Normally open
Normally closed
Response time
Accuracy
Maximum ±2% of full scale, within 2 seconds
Note 1
Under 20 slm, maximum ±1% of full scale (over 20 slm,
maximum, ±2% of full scale)
Linearity
Under 20 slm, maximum ±0.5% of full scale (over 20 slm,
maximum, ±1% of full scale)
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-7 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
2% to 100%
Operating pressure range
69 to 275 kPa(D); 10 to 40 psi(D)
at ≥20 slm 98 to 275 kPa(D); 14 to 40 psi(D)
Proof pressureNote 2
981 kPa(G); 142 psi(G)
Operating temperature
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
Supply power
Power consumption
Gas-wetted surface material
Standard fitting
0 VDC to 5.0 VDC
Minimum +15 VDC ±2% 25 mA,
Minimum -15 VDC ±2% 180 mA
Maximum 3.1 W
SUS316, SUS316L, KM-45, Viton, or Chloroprene rubber
1/4″ VCR, 1/4″ SW, 1/4″ VCO, 3/8″ VCR, 3/8″ SW, 3/8″ VCO
Mounting position
Any direction
Weight
0.9 kg (2.0 lb)
Options
Current output (0 mA to 2.5 mA), 1/4″ MCG fitting
Standard equipment
Error detection function
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service
gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified
operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
5700512-C
Specifications and Reference Information
6-3
Advanced Energy®
Specifications for Model FC-772 MFCs
The following table lists specifications for the FC-772 MFCs.
Table 6-3. Specifications for FC-772 series MFCs
Specification
FC-772
FC-772C
Full-scale range (N2 equivalent)
Valve type
Normally open
Response time
Accuracy
35 slm to 150 slm
Normally closed
Within 3 s (typical) ±2% at 50% to 100% and 100% to 50%
Note 1
Maximum ±2% of full scale
Linearity
Maximum ±1% of full scale
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-7 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
2% to 100%
Operating pressure range
147 to 275 kPa(D); 21 to 40 psi(D)
Note 2
Proof pressure
981 kPa(G); 142 psi(G)
Operating temperature
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
Supply power
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 220 mA
Power consumption
Gas-wetted surface
Standard fitting
0 VDC to 5.0 VDC
Maximum 3.7 W
materialNote 3
SUS316, SUS316L, PTFE, KM-45, Viton, or Chloroprene
rubber
1/4″ VCR, 3/8″ VCR, 1/4″ SW, 3/8″ SW
Mounting position
Any direction
Weight
2.6 kg (5.7 lb)
Options
Current output (0 mA to 2.5 mA), error detection function,
1/4″ VCO fitting, 3/8″ VCO fitting, TC surface treatment
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service
gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified
operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
Note 3—PTFE may be required, depending on your intended flow rate range.
6-4
Specifications and Reference Information
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Specifications for Model FC-780HT MFCs
The following table lists specifications for the FC-780HT MFCs.
Table 6-4. Specifications for FC-780HT series MFCs
Specification
FC-780HT
Full-scale range (N2 equivalent)
Valve type
Response
timeNote 4
AccuracyNote 1
10 sccm to 5000 sccm
Normally open
Normally closed
Maximum ±2% of full scale,
within 2 s
Maximum ±2% of full scale,
within 1 s
Maximum ±1% of full scale
Linearity
Maximum ±0.5% of full scale
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-11 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
2% to 100%
Operating pressure range
Proof pressure
FC-780CHT
49 to 275 kPa(D); 7 to 40 psi(D)
Note 2
981 kPa(G); 142 psi(G)
Operating temperature
MFC unit: 50ºC to 80ºC (122ºC to 176ºF)
PCB unit: 5ºC to 50ºC (41ºF to 122ºF)
Flow rate setting and output signal
Supply power
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 180 mA
Power consumption
Gas-wetted surface
Standard fitting
0 VDC to 5.0 VDC
Maximum 3.1 W
materialNote 3
SUS316, SUS316L, PTFE, Ni, KM-45
1/4″ VCR, 1/4″ SW
Mounting position
Any direction
Weight
1.3 kg (2.9 lb)
Options
Either current output (0 mA to 2.5 mA) or error detection
function, 1/4″ MCG fitting
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC
in temperature is obtained for the primary reference in the specified operating pressure range. If the service gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the
specified operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
Note 3—The range or response times may vary depending on the vapor or gas properties.
5700512-C
Specifications and Reference Information
6-5
Advanced Energy®
Specifications for Model FC-780 MFCs
The following table lists specifications for the FC-780 MFCs.
Table 6-5. Specifications for FC-780 series MFCs
Specification
FC-780
Full-scale range (N2 equivalent)
Valve type
Maximum ±1% of full scale
Linearity
Maximum ±0.5% of full scale
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-11 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
2% to 100%
Operating pressure range
49 to 275 kPa(D); 7 to
40 psi(D)
Proof pressureNote 2
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
Gas-wetted surface material
Standard fitting
29.4 to 294 kPa(D); 4 to
43 psi(D)
981 kPa(G); 142 psi(G)
Operating temperature
Power consumption
Normally closed
Maximum ±2% of full scale, within 1 s
Note 1
Supply power
10 sccm to 5000 sccm
Normally open
Response time
Accuracy
FC-780C
0 VDC to 5.0 VDC
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 180 mA
Maximum 3.1 W
SUS316, SUS316L, PTFE, Ni, KM-45
1/4″ VCR, 1/4″ SW,
1/4″ MCG, 1/4″ S-JSK
1/4″ VCR, 1/4″ SW,
Mounting position
Any direction
Weight
1.2 kg (2.6 lb)
Options
Current output (0 mA to
2.5 mA), error detection
function, TC surface
treatment
Current output (0 mA to
2.5 mA), error detection
function, TC surface
treatment, 1/4″ VCO fitting
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC
in temperature is obtained for the primary reference in the specified operating pressure range. If the service gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the
specified operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
6-6
Specifications and Reference Information
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Specifications for Model FC-780X MFCs
The following table lists specifications for the FC-780X MFCs.
Table 6-6. Specifications for FC-780X series MFCs
Specification
FC-780X
Full-scale range (N2 equivalent)
Valve type
Maximum ±1% of full scale
Linearity
Maximum ±0.5% of full scale
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-11 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
2% to 100%
Operating pressure range
49 to 275 kPa(D); 7 to
40 psi(D)
Proof pressureNote 2
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
Gas-wetted surface material
Standard fitting
29.4 to 294 kPa(D); 4 to
43 psi(D)
981 kPa(G); 142 psi(G)
Operating temperature
Power consumption
Normally closed
Maximum ±2% of full scale, within 1 s
Note 1
Supply power
10 sccm to 5000 sccm
Normally open
Response time
Accuracy
FC-780XC
0 VDC to 5.0 VDC
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 180 mA
Maximum 3.1 W
SUS316, SUS316L, PTFE, KM-45
1/4″ VCR, 1/4″ SW,
Mounting position
Any direction
Weight
1.2 kg (2.6 lb)
Options
Current output (0 mA to 2.5 mA), error detection function,
TC surface treatment
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC
in temperature is obtained for the primary reference in the specified operating pressure range. If the service gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the
specified operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
5700512-C
Specifications and Reference Information
6-7
Advanced Energy®
Specifications for Model FC-781HT MFCs
The following table lists specifications for the FC-781HT MFCs.
Table 6-7. Specifications for FC-781HT series MFCs
Specification
FC-781HT
FC-781CHT
Full-scale range (N2 equivalent)
6 slm to 30 slm
6 slm to 20 slm
Valve type
Normally open
Normally closed
Response
Accuracy
timeNote 3
Maximum ±2% of full scale, within 2 s
Note 1
Maximum ±1% of full scale
Linearity
Maximum ±0.5% of full scale
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-11 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
2% to 100%
Operating pressure range
69 to 275 kPa(D); 10 to 40 psi(D)
Note 2
Proof pressure
981 kPa(G); 142 psi(G)
Operating temperature
MFC unit: 50ºC to 80ºC (122ºC to 176ºF)
PCB unit: 5ºC to 50ºC (41ºF to 122ºF)
Flow rate setting and output signal
Supply power
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 180 mA
Power consumption
Gas-wetted surface
Standard fitting
0 VDC to 5.0 VDC
Maximum 3.1 W
materialNote 4
SUS316, SUS316L, PTFE, Ni, KM-45, Viton, Chloroprene
rubber
1/4″ VCR, SW, 3/8″ VCR
Mounting position
Any direction
Weight
1.8 kg (4.0 lb)
Options
Either current output (0 mA to 2.5 mA) or error detection
function, 1/4″ MCG fitting
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC
in temperature is obtained for the primary reference in the specified operating pressure range. If the service gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the
specified operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
Note 3—The range or response times may vary depending on the vapor or gas properties.
Note 4—Use of Viton or Chloroprene rubber may be required depending on the intended flow rate
range.
6-8
Specifications and Reference Information
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Specifications for Model FC-781 MFCs
The following table lists specifications for the FC-781 MFCs.
Table 6-8. Specifications for FC-781 series MFCs
Specification
FC-781
FC-781C
Full-scale range (N2 equivalent)
6 slm to 20 slm
6 slm to 50 slm
Valve type
Normally open
Normally closed
Maximum ±2% of full scale,
within 1 s
Maximum ±2% of full scale,
within 2 s
Response time
AccuracyNote 1
Under 20 slm, maximum ±1% of full scale (over 20 slm, maximum,
±2% of full scale)
Linearity
Under 20 slm, maximum ±0.5% of full scale (over 20 slm, maximum,
±1% of full scale)
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-11 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
2% to 100%
Operating pressure range
69 to 275 kPa(D); 10 to
40 psi(D)
Proof pressureNote 2
981 kPa(G); 142 psi(G)
Operating temperature
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
Supply power
Standard fitting
0 VDC to 5.0 VDC
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 180 mA
Power consumption
Gas-wetted surface
69 to 294 kPa(D); 10 to
43 psi(D)
≥20 slm: 98 to 294 kPa(D); 14 to
43 psi(D)
Maximum 3.1 W
materialNote 3
SUS316, SUS316L, PTFE, Ni, KM-45
1/4″ VCR
Mounting position
Any direction
Weight
1.5 kg (3.3 lb)
Options
Current output (0 mA to 2.5 mA), error detection function,
TC surface treatment
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service gas
and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
Note 3—Use of Viton or Chloroprene rubber may be required depending on the intended flow rate range.
5700512-C
Specifications and Reference Information
6-9
Advanced Energy®
Specifications for Model FC-782 MFCs
The following table lists specifications for the FC-782 MFCs.
Table 6-9. Specifications for FC-782 series MFCs
Specification
FC-782
FC-782C
Full-scale range (N2 equivalent)
Valve type
Normally open
Response time
Accuracy
35 slm to 150 slm
Normally closed
Within 3 s (typical), ±2%
Note 1
Maximum ±2% of full scale
Linearity
Maximum ±1% of full scale
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-11 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
2% to 100%
Operating pressure range
147 to 275 kPa(D); 21 to 40 psi(D)
Note 2
Proof pressure
981 kPa(G); 142 psi(G)
Operating temperature
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
Supply power
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 220 mA
Power consumption
Gas-wetted surface
Standard fitting
0 VDC to 5.0 VDC
Maximum 3.7 W
materialNote 3
Note 4
SUS316, SUS316L, PTFE, KM-45
1/4″ VCR, 3/8″ VCR, 1/4″ UJR, 3/8″ UJR
Mounting position
Any direction
Weight
2.8 kg (6.2 lb)
Options
Current output (0 mA to 2.5 mA), error detection function
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service gas
and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
Note 3—Use of PTFE, Viton, or Chloroprene rubber may be required depending on the intended flow rate
range.
Note 4—3/8″ VCR or 3/8″ UJR fitting is required if 100 slm or more is derived from full-scale range N2
equivalent.
6-10
Specifications and Reference Information
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Specifications for Model FC-785 MFCs
The following table lists specifications for the FC-785 MFCs.
Table 6-10. Specifications for FC-785 series MFCs
Specification
FC-785
Full-scale range (N2 equivalent)
Valve type
Normally closed
Maximum ±2% of full scale, within 1 s
Note 1
Maximum ±1% of full scale
Linearity
Maximum ±0.5% of full scale
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-11 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
2% to 100%
Operating pressure range
Proof pressure
10 sccm to 5000 sccm
Normally open
Response time
Accuracy
FC-785C
49 to 275 kPa(D); 7 to 40 psi(D)
Note 2
981 kPa(G); 142 psi(G)
Operating temperature
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
Supply power
Power consumption
Gas-wetted surface material
Standard fitting
0 VDC to 5.0 VDC
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 180 mA
Maximum 3.1 W
SUS316, SUS316L, PTFE, Ni, KM-45
Equivalent to 1/4″ VCR
Mounting position
Any direction
Weight
1.0 kg (2.2 lb)
Options
Current output (0 mA to 2.5 mA), error detection function,
electropolishing
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC
in temperature is obtained for the primary reference in the specified operating pressure range. If the service gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the
specified operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
5700512-C
Specifications and Reference Information
6-11
Advanced Energy®
Specifications for Model FC-785T-B MFCs
The following table lists specifications for the FC-785T-B MFCs.
Table 6-11. Specifications for FC-785T-B series MFCs
Specification
FC-785T-B
Full-scale range (N2 equivalent)
Valve type
10 sccm to 5000 sccm
Normally open
Response time
Accuracy
FC-785CT-B
Normally closed
Maximum ±2% of full scale, within 1 s
Note 1
Maximum ±1% of full scale
Linearity
Maximum ±0.5% of full scale
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-11 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
2% to 100%
Operating pressure range
69 to 275 kPa(D); 10 to 40 psi(D)
Note 2
Proof pressure
981 kPa(G); 142 psi(G)
Operating temperature
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
Supply power
Power consumption
Gas-wetted surface material
0 VDC to 5.0 VDC
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 180 mA
Maximum 3.1 W
SUS316, SUS316L, PTFE, Ni, KM-45
Mounting position
Any direction
Weight
1.3 kg (2.9 lb)
Options
Current output (0 mA to 2.5 mA), error detection function,
TC surface treatment
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC
in temperature is obtained for the primary reference in the specified operating pressure range. If the service gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the
specified operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
6-12
Specifications and Reference Information
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Specifications for Model FC-785X-B MFC
The following table lists specifications for the FC-785X-B MFC.
Table 6-12. Specifications for model FC-785X-B MFC
Specification
FC-785XC-B
Full-scale range (N2 equivalent)
Valve type
Normally closed
Response time
Accuracy
Maximum ±2% of full scale, within 1 s
Note 1
Maximum ±1% of full scale
Linearity
Maximum ±0.5% of full scale
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-11 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
2% to 100%
Operating pressure range
Proof pressure
10 sccm to 5000 sccm
49 to 275 kPa(D); 7 to 40 psi(D)
Note 2
981 kPa(G); 142 psi(G)
Operating temperature
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
Supply power
Power consumption
Gas-wetted surface material
0 VDC to 5.0 VDC
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 180 mA
Maximum 3.1 W
SUS316, SUS316L, PTFE, KM-45
Mounting position
Any direction
Weight
1.0 kg (2.2 lb)
Options
Current output (0 mA to 2.5 mA), error detection function,
TC surface treatment
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service
gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified
operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
5700512-C
Specifications and Reference Information
6-13
Advanced Energy®
Specifications for Model FC-785Y-B MFCs
The following table lists specifications for the FC-785Y-B MFCs.
Table 6-13. Specifications for FC-785Y-B series MFCs
Specification
FC-785Y-B
Full-scale range (N2 equivalent)
Valve type
10 sccm to 5000 sccm
Normally open
Response time
Accuracy
FC-785CY-B
Normally closed
Maximum ±2% of full scale, within 1 s
Note 1
Maximum ±1% of full scale
Linearity
Maximum ±0.5% of full scale
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-11 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
2% to 100%
Operating pressure range
49 to 275 kPa(D); 7 to 40 psi(D)
Note 2
Proof pressure
981 kPa(G); 142 psi(G)
Operating temperature
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
Supply power
Power consumption
Gas-wetted surface material
0 VDC to 5.0 VDC
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 180 mA
Maximum 3.1 W
SUS316, SUS316L, PTFE, Ni, KM-45
Mounting position
Any direction
Weight
1.3 kg (2.9 lb)
Options
Current output (0 mA to 2.5 mA), error detection, TC surface
treatment
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC
in temperature is obtained for the primary reference in the specified operating pressure range. If the service gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the
specified operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
6-14
Specifications and Reference Information
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Specifications for Model FC-786 MFCs
The following table lists specifications for the FC-786 MFCs.
Table 6-14. Specifications for FC-786 series MFCs
Specification
FC-786
FC-786C
Full-scale range (N2 equivalent)
6 slm to 30 slm
6 slm to 50 slm
Valve type
Normally open
Normally closed
Response time
Accuracy
Maximum ±2% of full scale, within 1 s
Note 1
Under 20 slm, maximum ±1% of full scale (over 20 slm, maximum,
±2% of full scale)
Linearity
Under 20 slm, maximum ±0.5% of full scale (over 20 slm, maximum
±1% of full scale)
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-11 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
2% to 100%
Operating pressure range
69 to 275 kPa(D); 10 to
40 psi(D)
≥20 slm: 147 to 275 kPa(D); 21
to 40 psi(D)
Proof pressureNote 2
981 kPa(G); 142 psi(G)
Operating temperature
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
Supply power
Standard fitting
0 VDC to 5.0 VDC
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 180 mA
Power consumption
Gas-wetted surface
69 to 275 kPa(D); 10 to
40 psi(D)
≥20 slm: 98 to 275 kPa(D); 14 to
40 psi(D)
Maximum 3.1 W
materialNote 3
SUS316, SUS316L, PTFE, Ni, KM-45
Equivalent to 1/4″ VCR
Mounting position
Any direction
Weight
1.0 kg (2.2 lb)
Options
Current output (0 mA to 2.5 mA), error detection function,
electropolishing
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service gas
and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
Note 3—Use of Viton or Chloroprene rubber may be required depending on the intended flow rate range.
5700512-C
Specifications and Reference Information
6-15
Advanced Energy®
Specifications for Model FC-786T-B MFCs
The following table lists specifications for the FC-786T-B MFCs.
Table 6-15. Specifications for FC-786T-B series MFCs
Specification
FC-786T-B
FC-786CT-B
Full-scale range (N2 equivalent)
6 slm to 30 slm
6 slm to 50 slm
Valve type
Normally open
Normally closed
Response time
Accuracy
Maximum ±2% of full scale, within 1 s
Note 1
Under 20 slm, maximum ±1% of full scale; over 20 slm, maximum
±2% of full scale
Linearity
Under 20 slm, maximum ±0.5% of full scale; over 20 slm, maximum
±1% of full scale
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-11 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
2% to 100%
Operating pressure range
69 to 275 kPa(D); 10 to 40 psi(D)
≥20 slm: 147 to 275 kPa(D); 21 to 40 psi(D)
Proof pressureNote 2
981 kPa(G); 142 psi(G)
Operating temperature
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
Supply power
0 VDC to 5.0 VDC
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 180 mA
Power consumption
Maximum 3.1 W
Note 3
Gas-wetted surface material
SUS316, SUS316L, PTFE, Ni, KM-45
Mounting position
Any direction
Weight
1.3 kg (2.9 lb)
Options
Current output (0 mA to 2.5 mA), error detection function,
TC surface treatment
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service gas
and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
Note 3—Use of Viton or Chloroprene rubber may be required depending on the intended flow rate range.
6-16
Specifications and Reference Information
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Specifications for Model FC-786Y-B MFCs
The following table lists specifications for the FC-786Y-B MFCs.
Table 6-16. Specifications for FC-786Y-B series MFCs
Specification
FC-786Y-B
FC-786CY-B
Full-scale range (N2 equivalent)
6 slm to 30 slm
6 slm to 50 slm
Valve type
Normally open
Normally closed
Response time
Accuracy
Maximum ±2% of full scale, within 1 s
Note 1
Under 20 slm, maximum ±1% of full scale; over 20 slm, maximum
±2% of full scale)
Linearity
Under 20 slm, maximum ±0.5% of full scale; over 20 slm, maximum
±1% of full scale)
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-11 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
2% to 100%
Operating pressure range
69 to 275 kPa(D); 10 to 40 psi(D)
≥20 slm: 147 to 275 kPa(D); 21 to 40 psi(D)
Proof pressureNote 2
981 kPa(G); 142 psi(G)
Operating temperature
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
Supply power
0 VDC to 5.0 VDC
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 180 mA
Power consumption
Maximum 3.1 W
Note 3
Gas-wetted surface material
SUS316, SUS316L, PTFE, Ni, KM-45, Viton, Chloroprene rubber
Mounting position
Any direction
Weight
1.3 kg (2.9 lb)
Options
Current output (0 mA to 2.5 mA), error detection function,
TC surface treatment
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service gas
and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
Note 3—Use of Viton or Chloroprene rubber may be required depending on the intended flow rate range.
5700512-C
Specifications and Reference Information
6-17
Advanced Energy®
Specifications for Model FC-790 MFCs
The following table lists specifications for the FC-790 MFCs.
Table 6-17. Specifications for FC-790 series MFCs
Specification
FC-790
Full-scale range (N2 equivalent)
Valve type
10 sccm to 5000 sccm
Normally open
Response time
Accuracy
FC-790C
Normally closed
Maximum ±2% of full scale, within 1 s
Note 1
Maximum ±1% of full scale
Linearity
Maximum ±0.5% of full scale
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-11 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
Operating pressure
range
2% to 100%
In
49 to 275 kPa(G); 7 to 40 psi(G)
Out
Note 2
Proof pressure
981 kPa(G); 142 psi(G)
Operating temperature
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
Supply power
Power consumption
Gas-wetted surface material
Standard fitting
Atmosphere to vacuum 0 kPa(G), 0 kPa(A)
0 VDC to 5.0 VDC
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 180 mA
Maximum 3.1 W
SUS316, SUS316L, PCTFE
Equivalent to 1/4″ VCR
Mounting position
Any direction
Weight
1.1 kg (2.4 lb)
Options
Current output (0 mA to 2.5 mA), error detection function,
TC surface treatment
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service
gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified
operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
6-18
Specifications and Reference Information
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Specifications for Model FC-791 MFCs
The following table lists specifications for the FC-791 MFCs.
Table 6-18. Specifications for FC-791 series MFCs
Specification
FC-791
FC-791C
Full-scale range (N2 equivalent)
6 slm to 30 slm
6 slm to 50 slm
Valve type
Normally open
Normally closed
Response time
Accuracy
Maximum ±2% of full scale, within 1 s
Note 1
Maximum ±1% of full scale
Linearity
Maximum ±0.5% of full scale
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-11 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
Operating pressure
range
2% to 100%
In
69 to 275 kPa(G); 10 to
40 psi(G)Note 3
Out
Proof
Atmosphere to vacuum 0 kPa(G), 0 kPa(A)
pressureNote 2
981 kPa(G); 142 psi(G)
Operating temperature
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
Supply power
Power consumption
Gas-wetted surface material
Standard fitting
69 to 275 kPa(G); 10 to
40 psi(G) Note 4
0 VDC to 5.0 VDC
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 180 mA
Maximum 3.1 W
SUS316, SUS316L, PCTFE
Equivalent to 1/4″ VCR
Mounting position
Any direction
Weight
1.2 kg (2.4 lb)
Options
Current output (0 mA to 2.5 mA), error detection function,
TC surface treatment
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service
gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified
operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
Note 3—98 to 275 kPa(G) [14 to 40 psi(G)] when full-scale (N2 equivalent) is over 20 slm and less than
30 slm. 147 to 275 kPa(G) [21 to 40 psi(G)] when full-scale (N2 equivalent) is 30 slm.
Note 4—98 to 275 kPa(G) [14 to 40 psi(G)] when full-scale (N2 equivalent) is over 20 slm and less than
30 slm. 147 to 275 kPa(G) [21 to 40 psi(G)] when full-scale (N2 equivalent) is from 30 slm to 50 slm.
5700512-C
Specifications and Reference Information
6-19
Advanced Energy®
Specifications for Model FC-795 MFCs
The following table lists specifications for the FC-795 MFCs.
Table 6-19. Specifications for FC-795 series MFCs
Specification
FC-795
Full-scale range (N2 equivalent)
Valve type
10 sccm to 5000 sccm
Normally open
Response time
Accuracy
FC-795C
Normally closed
Maximum ±2% of full scale, within 1 s
Note 1
Maximum ±1% of full scale
Linearity
Maximum ±0.5% of full scale
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-11 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
Operating pressure
range
2% to 100%
In
49 to 275 kPa(G); 7 to 40 psi(G)
Out
Note 2
Proof pressure
981 kPa(G); 142 psi(G)
Operating temperature
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
Supply power
Power consumption
Gas-wetted surface material
Standard fitting
Atmosphere to vacuum 0 kPa(G), 0 kPa(A)
0 VDC to 5.0 VDC
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 180 mA
Maximum 3.1 W
SUS316, SUS316L, PCTFE
Equivalent to 1/4″ VCR
Mounting position
Any direction
Weight
0.9 kg (2.0 lb)
Options
Current output (0 mA to 2.5 mA), error detection function,
TC surface treatment
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service
gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified
operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
6-20
Specifications and Reference Information
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Specifications for Model FC-795T-B MFCs
The following table lists specifications for the FC-795T-B MFCs.
Table 6-20. Specifications for FC-795T-B series MFCs
Specification
FC-795T-B
Full-scale range (N2 equivalent)
Valve type
Normally closed
Maximum ±2% of full scale, within 1 s
Note 1
Maximum ±1% of full scale
Linearity
Maximum ±0.5% of full scale
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-11 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
Operating pressure
range
Proof pressure
10 sccm to 5000 sccm
Normally open
Response time
Accuracy
FC-795CT-B
2% to 100%
In
49 to 275 kPa(G); 7 to 40 psi(G)
Out
Note 2
981 kPa(G); 142 psi(G)
Operating temperature
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
Supply power
Power consumption
Gas-wetted surface material
Atmosphere to vacuum—0 kPa(G), 0 kPa(A)
0 VDC to 5.0 VDC
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 180 mA
Maximum 3.1 W
SUS316, SUS316L, PCTFE, PTFE
Mounting position
Any direction
Weight
1.2 kg (2.6 lb)
Options
Current output (0 mA to 2.5 mA), error detection function,
TC surface treatment
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service
gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified
operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
5700512-C
Specifications and Reference Information
6-21
Advanced Energy®
Specifications for Model FC-796 MFCs
The following table lists specifications for the FC-796 MFCs.
Table 6-21. Specifications for FC-796 series MFCs
Specification
FC-796
FC-796C
Full-scale range (N2 equivalent)
6 slm to 30 slm
6 slm to 50 slm
Valve type
Normally open
Normally closed
Response time
Accuracy
Maximum ±2% of full scale, within 1 s
Note 1
Maximum ±1% of full scale
Linearity
Maximum ±0.5% of full scale
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-11 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
Operating pressure
range
2% to 100%
In
69 to 275 kPa(G); 10 to
40 psi(G)Note 3
Out
Proof
Atmosphere to vacuum 0 kPa(G), 0 kPa(A)
pressureNote 2
981 kPa(G); 142 psi(G)
Operating temperature
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
Supply power
Power consumption
Gas-wetted surface material
Standard fitting
69 to 275 kPa(G); 10 to
40 psi(G) Note 4
0 VDC to 5.0 VDC
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 180 mA
Maximum 3.1 W
SUS316, SUS316L, PCTFE
Equivalent to 1/4″ VCR
Mounting position
Any direction
Weight
1 kg (2.2 lb)
Options
Current output (0 mA to 2.5 mA), error detection function,
TC surface treatment
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service
gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified
operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
Note 3—98 to 275 kPa(G) [14 to 40 psi(G)] when the full-scale (N2 equivalent) is over 10 slm and less
than 30 slm. 147 to 275 kPa(G) [21 to 40 psi(G)] when the full-scale (N2 equivalent) is 30 slm.
Note 4—98 to 275 kPa(G) [14 to 40 psi(G)] when the full-scale (N2 equivalent) is over 10 slm and less
than 30 slm. 147 kPa(G) to 275 kPa(G)) when the full-scale (N2 equivalent) is from 30 slm to 50 slm.
6-22
Specifications and Reference Information
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Specifications for Model FC-7700 MFCs
The following table lists specifications for the FC-7700 MFCs.
Table 6-22. Specifications for FC-7700 series MFCs
Specification
FC-7700
Full-scale range (N2 equivalent)
Valve type
FC-7700CU
Normally closed
Maximum ±2% of full scale, within 2 seconds
Note 1
Maximum ±1% of full scale
Linearity
Maximum ±0.5% of full scale
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-7 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
5% to 100%
Operating pressure range
Proof pressure
FC-7700CD
10 sccm to 5000 sccm
Normally
open
Response time
Accuracy
FC-7700C
49 to 275 kPa(D); 7 to 40 psi(D)
Note 2
981 kPa(G); 142 psi(G)
Operating temperature
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
Supply power
Power consumption
Gas-wetted surface material
Standard fitting
2% to 100%
0 VDC to 5.0 VDC
Minimum +15 VDC ±2% 25 mA,
Minimum -15 VDC ±2% 180 mA
Maximum 3.1 W
SUS316, SUS316L, KM-45, Viton, or Chloroprene rubber
1/4″ VCR, 1/4″ SW, 1/4″ VCO
Mounting position
Any direction
Weight
0.9 kg (2.0 lb)
Options
1/4″ MCG fitting
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service
gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified
operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
5700512-C
Specifications and Reference Information
6-23
Advanced Energy®
Specifications for Model FC-7710 MFCs
The following table lists specifications for the FC-7710 MFCs.
Table 6-23. Specifications for FC-7710 series MFCs
Specification
Full-scale range (N2 equivalent)
Valve type
FC-7710
FC-7710C
6 slm to
20 slm
6 slm to
50 slm
Normally
open
FC-7710CD
FC-7710CU
6 slm to 30 slm
Normally closed
Response time
Maximum ±2% of full scale, within 2 seconds
AccuracyNote 1
Under 20 slm, maximum ±1% of full scale; over 20 slm, maximum of ±2% of full scale
Linearity
Under 20 slm, maximum ±0.5% of full scale; over 20 slm, maximum of ±1% of full scale
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-7 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
Operating pressure range
69 to 275 kPa(D); 10 to 40 psi(D)
Note 2
Proof pressure
981 kPa(G); 142 psi(G)
Operating temperature
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
Supply power
Power consumption
Gas-wetted surface material
Standard fitting
2% to 100%
5% to 100%
0 VDC to 5.0 VDC
Minimum +15 VDC ±2% 25 mA,
Minimum -15 VDC ±2% 180 mA
Maximum 3.1 W
SUS316, SUS316L, KM-45, Viton, or Chloroprene rubber
Equivalent to 1/4″ VCR,
1/4″ VCR, 1/4″ SW
1/4″ SW
Mounting position
Any direction
Weight
0.9 kg (2.0 lb)
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service
gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified
operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
6-24
Specifications and Reference Information
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Specifications for Model FC-7720 MFCs
The following table lists specifications for the FC-7720 MFCs.
Table 6-24. Specifications for FC-7720 series MFCs
Specification
FC-7720
FC-7720C, FC-7720CD
Full-scale range (N2 equivalent)
Valve type
Normally open
Response time
Accuracy
Normally closed
Maximum ±2% of full scale, within 4 s
Note 1
Maximum ±2% of full scale
Linearity
Maximum ±1% of full scale
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-7 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
2% to 100%
Operating pressure range
Proof pressure
35 slm to 150 slm
147 to 275 kPa(D); 21 to 40 psi(D)
Note 2
981 kPa(G); 142 psi(G)
Operating temperature
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
Supply power
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 220 mA
Power consumption
Gas-wetted surface
Standard fitting
0 VDC to 5.0 VDC
Maximum 3.7 W
materialNote 3
Note 4
SUS316, SUS316L, PTFE, KM-45, Viton, or Chloroprene rubber
1/4″ VCR, 1/4″ SW, 3/8″ VCR, 3/8″ SW
Mounting position
Any direction
Weight
2.3 kg (5.1 lb)
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service
gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified
operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
Note 3—PTFE may be required, depending on the intended flow rate range.
Note 4—3/8″ VCR fitting or 3/8″ UJR fitting is required if 100 slm or more is derived from full-scale
range (N2 equivalent).
5700512-C
Specifications and Reference Information
6-25
Advanced Energy®
Specifications for Model FC-7800 MFCs
The following table lists specifications for the FC-7800 MFCs.
Table 6-25. Specifications for FC-7800 series MFCs
Specification
FC-7800
Full-scale range (N2 equivalent)
Valve type
Accuracy
FC-7800CD
FC-7800CU
10 sccm to 5000 sccm
Normally
open
Response time
FC-7800C
Normally closed
Maximum ±2% of full scale, within 1 s
Note 1
Maximum ±1% of full scale
Linearity
Maximum ±0.5% of full scale
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-11 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
5% to 100%
Operating pressure range
49 to 275 kPa(D); 7 to 40 psi(D)
Note 2
Proof pressure
981 kPa(G); 142 psi(G)
Operating temperature
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
Supply power
Power consumption
0 VDC to 5.0 VDC
Minimum +15 VDC ±2% 25 mA,
Minimum -15 VDC ±2% 180 mA
Maximum 3.1 W
Gas-wetted surface material
SUS316, SUS316L, PTFE, Ni, KM-45
Standard fitting
1/4″ VCR, 1/4″ SW
Mounting position
Any direction
Weight
1.2 kg (2.6 lb)
1/4″ VCR
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service
gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified
operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
6-26
Specifications and Reference Information
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Specifications for Model FC-7810 MFCs
The following table lists specifications for the FC-7810 MFCs.
Table 6-26. Specifications for FC-7810 series MFCs
Specification
FC-7810
FC-7810C
FC-7810CD, FC7810CU
Full-scale range (N2 equivalent)
6 slm to 30 slm
6 slm to 50 slm
6 slm to 30 slm
Valve type
Normally open
Response time
Accuracy
Normally closed
Maximum ±2% of full scale, within 2 seconds
Note 1
Under 20 slm, maximum ±1% of full scale; over 20 slm, maximum of
±2% of full scale
Linearity
Under 20 slm, maximum ±0.5% of full scale; over 20 slm, maximum
of ±1% of full scale
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-11 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
5% to 100%
Operating pressure range
69 to
275 kPa(D); 10
to 40 psi(D)
≥ 20 slm: 147 to
275 kPa(D); 21to
40 psi(D)
Proof pressureNote 2
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
0 VDC to 5.0 VDC
Supply power
Minimum +15 VDC ±2% 25 mA,
Minimum -15 VDC ±2% 180 mA
Power consumption
Standard fitting
69 to 275 kPa(D); 10 to 40
psi(D
≥20 slm: 98 to 275 kPa(D);14
to 40 psi(D)
981 kPa(G); 142 psi(G)
Operating temperature
Gas-wetted surface
69 to
275 kPa(D); 10
to 40 psi(D
≥20 slm: 98 to
294 kPa(D); 14
to 43 psi(D)
Maximum 3.1 W
materialNote 3
SUS316, SUS316L, PTFE, Ni, KM-45, Viton, Chloroprene rubber
1/4″ VCR
1/4″ VCR,
1/4″ SW
Mounting position
Any direction
Weight
1.5 kg (3.3 lb)
Equivalent to 1/4″ VCR
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service gas
and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
Note 3—Use of Viton or Chloroprene rubber may be required, depending on the intended flow rate range
5700512-C
Specifications and Reference Information
6-27
Advanced Energy®
Specifications for Model FC-7820 MFCs
The following table lists specifications for the FC-7820 MFCs.
Table 6-27. Specifications for FC-7820 series MFCs
Specification
FC-7820
FC-7820C
Full-scale range (N2 equivalent)
Valve type
Normally open
Response time
Accuracy
35 slm to 150 slm
Normally closed
Maximum ±2% of full scale, within 4 s
Note 1
Maximum ±2% of full scale
Linearity
Maximum ±1% of full scale
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-11 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
2% to 100%
Operating pressure range
147 to 275 kPa(D); 21 to 40 psi(D)
Note 2
Proof pressure
981 kPa(G); 142 psi(G)
Operating temperature
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
Supply power
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 220 mA
Power consumption
Gas-wetted surface
Standard fitting
0 VDC to 5.0 VDC
Maximum 3.7 W
materialNote 3
Note 4
SUS316, SUS316L, PTFE, KM-45
1/4″ VCR, 3/8″ VCR
Mounting position
Any direction
Weight
2.8 kg (6.2 lb)
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service
gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified
operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
Note 3—PTFE, Viton, or chloroprene rubber may be required, depending on the intended flow rate range.
Note 4—3/8″ VCR fitting or 3/8″ UJR fitting is required if 100 slm or more is derived from full-scale
range (N2 equivalent).
6-28
Specifications and Reference Information
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Specifications for Model FC-7850Y-B MFCs
The following table lists specifications for the FC-7850Y-B MFCs.
Table 6-28. Specifications for FC-7850Y-B series MFCs
Specification
FC-7850Y-B
Full-scale range (N2 equivalent)
Valve type
Normally closed
Maximum ±2% of full scale, within 2 s
Note 1
Maximum ±1% of full scale
Linearity
Maximum ±0.5% of full scale
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-11 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
5% to 100%
Operating pressure range
Proof pressure
10 sccm to 5000 sccm
Normally open
Response time
Accuracy
FC-7850CY-B
49 to 275 kPa(D); 7 to 40 psi(D)
Note 2
981 kPa(G); 142 psi(G)
Operating temperature
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
Supply power
Power consumption
Gas-wetted surface material
0 VDC to 5.0 VDC
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 180 mA
Maximum 3.1 W
SUS316, SUS316L, PTFE, KM-45
Mounting position
Any direction
Weight
1.3 kg (2.9 lb)
Options
TC surface treatment
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC
in temperature is obtained for the primary reference in the specified operating pressure range. If the service gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the
specified operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
5700512-C
Specifications and Reference Information
6-29
Advanced Energy®
Specifications for Model FC-7810 MFCs
The following table lists specifications for the FC-7810 MFCs.
Table 6-29. Specifications for FC-7810 series MFCs
Specification
FC-7810
FC-7810C
FC-7810CD, FC7810CU
Full-scale range (N2 equivalent)
6 slm to 30 slm
6 slm to 50 slm
6 slm to 30 slm
Valve type
Normally open
Response time
Accuracy
Normally closed
Maximum ±2% of full scale, within 2 seconds
Note 1
Under 20 slm, maximum ±1% of full scale; over 20 slm, maximum of
±2% of full scale
Linearity
Under 20 slm, maximum ±0.5% of full scale; over 20 slm, maximum
of ±1% of full scale
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-11 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
5% to 100%
Operating pressure range
69 to
275 kPa(D); 10
to 40 psi(D)
≥ 20 slm: 147 to
275 kPa(D); 21to
40 psi(D)
Proof pressureNote 2
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
0 VDC to 5.0 VDC
Supply power
Minimum +15 VDC ±2% 25 mA,
Minimum -15 VDC ±2% 180 mA
Power consumption
Standard fitting
69 to 275 kPa(D); 10 to 40
psi(D
≥20 slm: 98 to 275 kPa(D);14
to 40 psi(D)
981 kPa(G); 142 psi(G)
Operating temperature
Gas-wetted surface
69 to
275 kPa(D); 10
to 40 psi(D
≥20 slm: 98 to
294 kPa(D); 14
to 43 psi(D)
Maximum 3.1 W
materialNote 3
SUS316, SUS316L, PTFE, Ni, KM-45, Viton, Chloroprene rubber
1/4″ VCR
1/4″ VCR,
1/4″ SW
Mounting position
Any direction
Weight
1.5 kg (3.3 lb)
Equivalent to 1/4″ VCR
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service gas
and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
Note 3—Use of Viton or Chloroprene rubber may be required, depending on the intended flow rate range
6-30
Specifications and Reference Information
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Specifications for Model FC-7820 MFCs
The following table lists specifications for the FC-7820 MFCs.
Table 6-30. Specifications for FC-7820 series MFCs
Specification
FC-7820
FC-7820C
Full-scale range (N2 equivalent)
Valve type
Normally open
Response time
Accuracy
Normally closed
Maximum ±2% of full scale, within 4 s
Note 1
Maximum ±2% of full scale
Linearity
Maximum ±1% of full scale
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-11 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
2% to 100%
Operating pressure range
Proof pressure
35 slm to 150 slm
147 to 275 kPa(D); 21 to 40 psi(D)
Note 2
981 kPa(G); 142 psi(G)
Operating temperature
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
Supply power
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 220 mA
Power consumption
Gas-wetted surface
Standard fitting
0 VDC to 5.0 VDC
Maximum 3.7 W
materialNote 3
Note 4
SUS316, SUS316L, PTFE, KM-45
1/4″ VCR, 3/8″ VCR
Mounting position
Any direction
Weight
2.8 kg (6.2 lb)
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service
gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified
operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
Note 3—PTFE, Viton, or chloroprene rubber may be required, depending on the intended flow rate range.
Note 4—3/8″ VCR fitting or 3/8″ UJR fitting is required if 100 slm or more is derived from full-scale
range (N2 equivalent).
5700512-C
Specifications and Reference Information
6-31
Advanced Energy®
Specifications for Model FC-7850Y-B MFCs
The following table lists specifications for the FC-7850Y-B MFCs.
Table 6-31. Specifications for FC-7850Y-B series MFCs
Specification
FC-7850Y-B
Full-scale range (N2 equivalent)
Valve type
10 sccm to 5000 sccm
Normally open
Response time
Accuracy
FC-7850CY-B
Normally closed
Maximum ±2% of full scale, within 2 s
Note 1
Maximum ±1% of full scale
Linearity
Maximum ±0.5% of full scale
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-11 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
5% to 100%
Operating pressure range
49 to 275 kPa(D); 7 to 40 psi(D)
Note 2
Proof pressure
981 kPa(G); 142 psi(G)
Operating temperature
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
Supply power
Power consumption
Gas-wetted surface material
0 VDC to 5.0 VDC
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 180 mA
Maximum 3.1 W
SUS316, SUS316L, PTFE, KM-45
Mounting position
Any direction
Weight
1.3 kg (2.9 lb)
Options
TC surface treatment
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC
in temperature is obtained for the primary reference in the specified operating pressure range. If the service gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the
specified operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
6-32
Specifications and Reference Information
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Specifications for Model FC-785Y-B MFCs
The following table lists specifications for the FC-785Y-B MFCs.
Table 6-32. Specifications for FC-785Y-B series MFCs
Specification
FC-785Y-B
Full-scale range (N2 equivalent)
10 sccm to 5000 sccm
Valve type
Normally open
Response time
Accuracy
Normally closed
Maximum ±2% of full scale, within 1 s
Note 1
Maximum ±1% of full scale
Linearity
Maximum ±0.5% of full scale
Repeatability
Maximum at ±0.2% of full scale
Maximum 1 x 10-11 [Pa*m3/sec(He)]
External leak rate
Flow rate control range
2% to 100%
Operating pressure range
Proof pressure
FC-785CY-B
49 to 275 kPa(D); 7 to 40 psi(D)
Note 2
981 kPa(G); 142 psi(G)
Operating temperature
5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal
0 VDC to 5.0 VDC
Supply power
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 180 mA
Power consumption
Maximum 3.1 W
Gas-wetted surface material
SUS316, SUS316L, PTFE, Ni, KM-45
Mounting position
Any direction
Weight
1.3 kg (2.9 lb)
Options
Current output (0 mA to 2.5 mA), error detection, TC surface
treatment
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC
in temperature is obtained for the primary reference in the specified operating pressure range. If the service gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the
specified operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
MFC DIMENSIONS
5700512-C
Specifications and Reference Information
6-33
Advanced Energy®
Dimensions for Standard MFC Models
Figure 6-1 and Table 6-33 provide physical dimensions for standard MFC model
numbers.
Figure 6-1. Dimensions for standard MFC models with 1/4″ VCR fitting
Table 6-33. Dimensions for standard models in mm (and inches)
Model
L
S
H
W
L1
L2
FC-770A / 770AC
124 (4.88)
12.7
(0.50)
127
(5.00)
32
(1.26)
22
(0.87)
66
(2.60)
FC-771A / 771AC
124 (4.88)
15
(0.59)
127
(5.00)
32
(1.26)
22
(0.87)
66
(2.60)
15
(0.59)
152.6
(6.01)
37.5
(1.48)
25.5
(1.00)
101.5
(4.00)
FC-772 / 772C
1/4″ VCR fitting:
183.8 (7.24)
3/8″ VCR fitting:
192.3 (7.6)
FC-780 / 780C
124 (4.88)
12.7
(0.50)
122
(4.80)
32
(1.26)
18
(0.71)
69
(2.72)
FC-781 / 781C
151 (5.94)
19
(0.75)
128
(5.04)
38
(1.50)
28
(1.10)
46
(1.81)
15
(0.59)
152
(5.98)
38
(1.50)
25.5
(1.00)
90
(3.54)
12.7
(0.50)
122
(4.80)
32
(1.26)
18
(0.71)
69
(2.72)
FC-782 / 782C
FC-780X / 780XC
6-34
1/4″ VCR fitting:
183.8 (7.24)
3/8″ VCR fitting:
192.3 (7.6)
124 (4.88)
Specifications and Reference Information
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Table 6-33. Dimensions for standard models in mm (and inches) (Continued)
Model
L
S
H
W
L1
L2
FC-790 / 790C
(second numbers
under L1 and L2 refer
to additional mounting holes)
124 (4.88)
12.7
(0.50)
125
(4.92)
38
(1.50)
18.6
(0.73)
38.2
(1.50)
18
(0.71)
69
(2.72)
FC-791 / 791C
(second numbers
under L1 and L2 refer
to additional mounting holes)
124 (4.88)
18.6
(0.73)
38.2
(1.50)
18
(0.71)
69
(2.72)
FC-795 / 795C
106 (4.17)
12.7
(0.50)
125
(4.92)
38
(1.50)
16
(0.63)
29
(1.14)
FC-796 / 796C
106 (4.17)
12.7
(0.50)
131.6
(5.18)
38
(1.50)
16
(0.63)
29
(1.14)
FC-7700 / 7700C
124 (4.88)
12.7
(0.50)
127
(5.00)
32
(1.26)
22
(0.87)
66
(2.60)
FC-7700CD / 7700CU
124 (4.88)
12.7
(0.50)
125
(4.92)
32
(1.26)
18.3
(0.72)
69
(2.72)
FC-7710 / 7710C
124 (4.88)
15
(0.59)
127
(5.00)
32
(1.26)
22
(0.87)
66
(2.60)
FC-7710CD / 7710CU
124 (4.88)
12.7
(0.50)
125
(4.92)
32
(1.26)
18.3
(0.72)
69
(2.72)
15
(0.59)
152.6
(6.01)
37.5
(1.48)
25.5
(1.00)
101.5
(4.00)
FC-7720 / 7720C /
7720CD
1/4″ VCR fitting:
183.8 (7.24)
3/8″ VCR fitting:
192.3 (7.6)
12.7
(0.50)
131.6
(5.18)
38
(1.50)
FC-7800 / 7800C
124 (4.88)
12.7
(0.50)
122
(4.80)
32
(1.26)
18
(0.71)
69
(2.72)
FC-7800CD / 7800CU
124 (4.88)
12.7
(0.50)
125
(4.92)
32
(1.26)
18
(0.71)
69
(2.72)
FC-7810 / 7810C
151 (5.94)
19
(0.75)
128
(5.04)
38
(1.50)
28
(1.10)
46
(1.81)
FC-7810CD / 7810CU
124 (4.88)
12.7
(0.50)
131
(5.16)
38
(1.50)
18.3
(0.72)
69
(2.72)
15
(0.59)
152
(5.98)
38
(1.50)
25.5
(1.00)
90
(3.54)
FC-7820 / 7820C
5700512-C
1/4″ VCR fitting:
183.8 (7.24)
3/8″ VCR fitting:
192.3 (7.6)
Specifications and Reference Information
6-35
Advanced Energy®
Table 6-33. Dimensions for standard models in mm (and inches) (Continued)
Model
L
S
H
W
L1
L2
FC-785 / 785C
106 (4.17)
12.7
(0.50)
123.8
(4.87)
36
(1.42)
16
(0.63)
29
(1.14)
FC-786 / 786C
106 (4.17)
12.7
(0.50)
123.8
(4.87)
36
(1.42)
16
(0.63)
29
(1.14)
6-36
Specifications and Reference Information
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Dimensions For Block-Type MFC Models
Figure 6-2 and Table 6-34 provide physical dimensions for block-type MFC model
numbers.
Figure 6-2. Dimensions of block-type MFC models
Table 6-34. Dimensions for block-type models in mm (and inches)
Model
a
b
c
d
e
f
g
FC-7850Y-B
FC-7850CY-B
FC-785Y-B
FC-785CY-B
FC-786Y-B
FC-786CY-B
FC-785T-B
FC-785CT-B
FC-786T-B
FC-786CT-B
FC-795T-B
FC-795CT-B
63.6
(2.50)
180 (7.09)
maximum
40 (1.57)
maximum
99.5 ±6.5
(3.92 ±0.26)
38
(1.50)
15
(0.59)
39.9
(1.57)
FC-785X-B
FC-785XC-B
68
(2.68)
180 (7.09)
maximum
40 (1.57)
maximum
99.5 ±6.5
(3.92 ±0.26)
38
(1.50)
15
(0.59)
39.9
(1.57)
5700512-C
Specifications and Reference Information
6-37
Advanced Energy®
Dimensions for High Temperature MFC Models
Figure 6-3, Table 6-35, and Table 6-36 provide physical dimensions for the high
temperature MFC model numbers (for both the MFC unit and the PCB unit).
Figure 6-3. Dimensions for high temperature MFC models
Table 6-35. Dimensions of high temperature MFC units in mm (and inches)
Model
L
S
H
W
L1
L2
FC-780HT / 780CHT
124
(4.88)
12.7
(0.50
107
(4.21)
32
(1.26)
18
(0.71)
69
(2.72)
FC-781HT / 781CHT
151
(5.94)
19
(0.75)
113
(4.45)
38
(1.50)
28
(1.10)
46
(1.81)
Table 6-36. Dimensions of high temperature PCB units in mm (and inches)
Model
6-38
L3
H1
W1
L4
L5
FC-780HT / 780CHT
102
(4.02)
84
(3.31)
32
(1.26)
22
(0.87)
92
(3.62)
FC-781HT / 781CHT
102
(4.02)
84
(3.31)
32
(1.26)
22
(0.87)
92
(3.62)
Specifications and Reference Information
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
REFERENCE INFORMATION
The following sections contain calibration references, as well as MFC label and model
code information for the MFC.
Calibration References
In order to ensure MFC cleanliness, AE may use a surrogate calibration gas rather
than the gas indicated on the label. The calibration ambient temperature is 22ºC. (If
the MFC requires a different ambient calibration temperature, that temperature is
indicated on the MFC label.)
Note: The calibration gas and its conversion factors are subject to change due to
technological innovation or changes in environmental regulations.
Table 6-37. Calibration references
Description
Specification
Calibration method
Primary, secondary, or rate of rise of N2 (or other
surrogate gas)
Reference conditions
0ºC / 760 Torr per SEMI E12-96
Traceablity
All calibrations are traceable to Japan standards
and/or United States standards (NIST)
FLOW INDICATION
Flow rate is indicated by standard cubic centimeters per minute (sccm), cubic
centimeters per minute (ccm), standard liters per minute (slm), and liters per minute
(lm) as follows:
• For sccm and slm, gas flow rates at 0ºC, 101.3 kPa
• For ccm and lm, gas flow rate at customer-defined temperature, 101.3 kPa
Note: Unless otherwise noted, sccm and slm are used for calibration.
5700512-C
Specifications and Reference Information
6-39
Advanced Energy®
Product Label
The MFC product label displays the following: model number, serial number,
calibration gas, surface treatment, and full-scale flow. Figure 6-4 is an example of a
MFC single-gas model label.
Surface treatment
designation
Model number
TC
Serial number
FC-780-C
500 sccm
Full-scale flow
79GN006
N2
Calibration gas
Figure 6-4. MFC label example
6-40
Specifications and Reference Information
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Index
A
E
AE customer support 5-6
AE web site 5-6
alarm output signal 4-7
authorization return number 5-11
authorized returns 5-11
electrical connections 3-5, 4-1
electrical connector
9-pin subminiature-D 4-5
alarm output signal 4-7
control valve (purge) signal 4-8
signal descriptions 4-2, 4-5
electronics
assembly 2-4
overview 2-4
error (alarm) output signal 4-7
C
calibration information 6-39
card edge connector 4-1
CE marking 1-7
certification 1-7
communication
20-pin connector 4-1
9-pin connector 4-5
alarm output signal 4-7
connections 4-1
control valve (purge) signal 4-8
components of MFC 2-2
conditions of use 1-7
connecting, see installation
connections
20-pin card edge 4-1
20-pin Honda 4-1
communication 4-1
electrical 3-5, 4-1
ground 3-5
mechanical 3-4
peripheral equipment 3-6
contact information
AE Global Support 5-6
sales and service 5-6
control valve signal 4-8
customer support 5-6
customer support contact 5-6
D
description
bypass 2-4
electronics 2-4
flow sensor 2-3
general 2-1
valve 2-4
dimensions 6-33
DSub connector 4-5
5700512-C
F
first-time operation 3-9
flow
no gas, troubleshooting 5-2
reference information 6-39
unstable or insufficient, troubleshooting 5-4
flow sensor, description 2-3
G
gas flow, troubleshooting 5-2
general description 2-1
global customer support 5-6
ground connections 3-5
guidelines
safety 1-6
H
Honda connector 4-1
I
icons
in user manual 1-5
on unit 1-5
initial operation 3-9
installation
confirm MFC model 3-3
connecting to peripheral equipment 3-6
ground connections 3-5
leak test 3-6
making mechanical connection 3-4
mounting the MFC 3-4
positioning the MFC 3-3
Index
i
Advanced Energy®
preparing to install 3-1
safety requirements 3-1
site preparation 3-3
unpack MFC 3-3
power supply requirements 3-5
product
certification 1-7
purge signal 4-8
L
R
label
MFC label 6-40
labels on unit 1-5
leak test 3-6
reference information
calibration references 6-39
flow indication 6-39
MFC label 6-40
repair, returning MFCs for 5-10
requirements, power supply 3-5
return authorization number 5-11
returns
authorized 5-11
returning MFCs for repair 5-10
warranty statement 5-11
M
maintenance 3-11
manual, see user manual
marking, CE 1-7
mechanical connections 3-4
MFC
bypass assembly 2-4
calibration references 6-39
components of 2-2
dimensions 6-33
electronics assembly 2-4
flow sensor assembly 2-3
general description 2-1
label 6-40
models covered by manual 1-1
packing to ship 5-10
reference information 6-39
specifications 6-1
theory of operation 2-1
valve assembly 2-4
zeroing 3-9
model numbers 1-1
model specifications 6-1
mounting the MFC 3-4
O
operation
first-time operation 3-9
zeroing the MFC 3-9
P
packing the MFC to ship 5-10
part number on label 6-40
peripheral equipment, connecting 3-6
physical dimensions 6-33
pin descriptions
20-pin connector 4-2
9-pin connector 4-5
positioning the MFC 3-3
ii
S
safety
conditions of use 1-7
guidelines 1-6
requirements for installation 3-1
service contact information 5-6
service, customer 5-6
set point, troubleshooting 5-3
shipping container 3-3
shipping the MFC 5-10
signal descriptions
20-pin connector 4-2
9-pin connector 4-5
size 6-33
specifications 6-1
subminiature-D connector 4-5
support, customer 5-6
symbols
in user manual 1-5
on unit 1-5
T
terminal descriptions
20-pin connector 4-2
9-pin connector 4-5
test, leak 3-6
theory of operation 2-1
troubleshooting
alarm/error signal 5-1
no gas 5-2
overview 5-1
procedures 5-1
Index
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
set point and flow 5-3
unstable or insufficient flow 5-4
U
unit
icons and symbols used 1-5
unit, see MFC
unpacking the MFC 3-3
user manual
interpreting 1-4
models covered by 1-1
symbols and icons used 1-5
type conventions 1-4
V
valve assembly 2-4
W
Warranty 5-11
warranty
authorized returns 5-11
filing a claim 5-11
returning MFCs 5-11
statement 5-12
web site, AE 5-6
Z
zeroing the MFC 3-9
5700512-C
Index
iii
Advanced Energy®
iv
Index
5700512-C