Download HP T100 Operating instructions

Operating Instructions
HPT 100
High Vacuum Transmitter
PG0004KJL/G (0509)
Contents
Page
1.
2.
Safety Instructions ............................................................................................... 3
Understanding The HPT 100 ............................................................................... 4
2.1. For Your Orientation ........................................................................................................................ 4
2.2. Product Identification ..................................................................................................................... 4
Package Contents ........................................................................................................................... 4
2.3. Product Description ........................................................................................................................ 5
Connection Options ......................................................................................................................... 5
Proper Use ........................................................................................................................................ 5
Improper Use ................................................................................................................................... 5
3.
Installation ............................................................................................................ 6
3.1.
3.2.
3.3.
3.4.
3.5.
Preparation For Installation ........................................................................................................... 6
Vacuum Connection ........................................................................................................................ 6
Electrical Connection ..................................................................................................................... 7
Connections Plan ............................................................................................................................. 8
Disassembly ...................................................................................................................................... 9
4.
Operation ............................................................................................................ 10
4.1. General............................................................................................................................................. 10
4.2. Communication............................................................................................................................... 11
4.3. Transmitter Equalization ............................................................................................................... 13
5.
6.
7.
Degas ................................................................................................................... 14
Error Signals ...................................................................................................... 14
Maintenance, Service ....................................................................................... 15
8.
Technical Data ................................................................................................... 16
8.1. Data List .................................................................................................................................. 16
8.2. Dimensions ............................................................................................................................. 17
8.3. Gas Correction Factor ........................................................................................................... 17
9. Accessories ....................................................................................................... 18
10. Supplementary Information .............................................................................. 19
Please note:
Current operating instructions are also available at www.Lesker.com
2
1. Safety Instructions
☞ Read and follow all the instructions in this manual.
☞ Inform yourself regarding:
- Hazards which can be caused by the unit
- Hazards which can arise in your system
☞ Comply with all safety and accident prevention regulations.
☞ Check regularly that all safety requirements are being complied with.
☞ Take account of the ambient conditions when installing the HPT 100. The protection type is
IP40/ IP 54. The unit is protected against the ingress of foreign bodies.
☞ Adhere to the applicable regulations and take the necessary precautions for the process
media used.
☞ Consider possible reactions between the materials and the process media.
☞ Consider possible reactions of the process media due to the heat generated by the
product.
☞ Do not carry out any unauthorised conversions or modifications on the unit.
☞ When returning the unit to us please note the shipping instructions.
☞ Before you begin to work, find out whether any vacuum components are contaminated.
☞ Adhere to the relevant regulations and take the necessary precautions when handling
contaminated parts.
☞ Communicate the safety instructions to other users.
This document is based on the component software version 010500.
Pictogram Definition
WARNING
WARNING
CAUTION
Danger of an electric shock.
Danger of personal injury.
Danger of damage to the unit or system.
3
2. Understanding The HPT 100
2.1. For Your Orientation
Abbreviations used
HPT = Hot Cathode Pirani Transmitter
CPT = Compact Ceramic Transmitter
RPT = Resistive Piezo Pirani Transmitter
PPT = Pirani Pressure Transmitter
DPG = Digital Pressure Gauge
DPS = Digital Power Supply
Operating Instruction In The Text
➡ Here, you have to do something.
Validity
These operating instructions describe the installation and operation of the Digital High
Vacuum Transmitter HPT 100 with the part numbers KTR34130 and KTR34330. The part number
is shown on the rating plate. Technical modifications are reserved without prior
notification.
2.2. Product Identification
Please state the information contained on the rating plate when corresponding with
the Kurt J. Lesker Company.
Product Identification HPT 100
RS 232
RS 485
2
14
12
10
4
8
6
Package Contents
The following items are included in the package:
– HPT 100
– Protective cover
– Operating instructions
4
2.3. Product Description
The digital Transmitter HPT 100 enables total pressure measurements in the range of
7.5 x 10-10 ... 750 Torr (1x10-9 ... 1000 mbar).
The transmitter can be operated in conjunction with the Lesker Digital Measuring and Control
Units, with the Digital Power Pack and the Windows Measuring Software DokuStar (please
see "Accessories") on a PC or with customer related, digital signal evaluation.
The transmitter communicates optionally via a Serial Interface RS 232 or RS 485.
The individual functions are described in more detail in the section "Communication" .
The Transmitter HPT 100 has been tested and accepted in compliance with EN 61010/VDE
0411 ”Safety Equipment For Electrical Components” .
Connection Options
The HPT 100 provides connection options for:
– RS 232/485 (for communication with the display unit) or
– Voltage supply
Proper Use
The Digital Transmitter HPT 100 serves exclusively to provide total pressure measurements in
the range (7.5 x 10-10 ... 750 Torr (1 x 10-9 ... 1000 mbar). It may only be connected to
components specifically provided for this purpose.
Improper Use
The following is regarded as improper:
– The use for purposes not covered above and, in particular,
– The connection to components not allowed for in their operating instructions;
– The connection to components containing touchable, voltage carrying parts.
No liability will be accepted for claims arising from improper use.
The user bears the responsibility with respect to the process media.
5
3. Installation
3.1. Preparation For Installation
CAUTION
Unauthorized modifications or alterations to the unit are not allowed and will
void the warranty.
Installation location: Indoor; max. 2000 m above mean sea level.
The following is applicable for open buildings and operations rooms which are not fully air
conditioned:
Temperature:
+5°C - +40°C (+ 41°F ... +100 °F)
Relative humidity:
5 - 85%, non-condensing.
Air pressure:
86 kPa - 106 kPa (12.5 psi - 15.4 psi)
3.2. Vacuum Connection
CAUTION
Dirt and damage have an adverse effect on the function of these vacuum
components.
Please take account of the instructions with regard to cleanliness and damage
prevention when using vacuum components.
Set-Up Configuration
The gauge may be mounted in any orientation. A horizontal to upright orientation is to be
preffered to keep condensates and particles from getting into the measuring chamber.
Connection
➡ Remove the protective cover. Do not discard the protective cover as it is required during
maintenance work.
➡ Make vacuum connection via a small flange QF16 (DN 40 KF) with version KTR34130 or
DN 40 CF with version KTR34330.
WARNING
Where excess pressure is involved in the vacuum system > 750 Torr (1 bar):
Inadvertent opening of elements under stress can lead to parts flying around.
➡ Only use stressed elements which can be opened and closed (for example QF16 (DN 16KF)
clamp).
6
WARNING
With excess pressure in the vacuum system of 1125 to 3000 Torr (1.5 to 4 bar):
With QF (KF) flange connections elastomer washers (for example O-rings)
cannot withstand the pressure and this can lead to personal injury resulting
from the emission of process media.
➡ Use centering rings with an outer over pressure ring (such as the QF40-075-OPR).
3.3. Electrical Connection
CAUTION
Only connect/disconnect the cable to/from the gauge when the power is
disconnected.
Kurt J. Lesker Company model DPG 101 controller:
➡ First make the connection to the Kurt J. Lesker Company DPG 101 controller by means of
Data Cable, part number KT348203T (please see "Accessories") on the RS 232 Serial
Interface of the controller.
➡ Rotate the transmitter address switch to RS232 operation (factory default setting). The
transmitter address switch can be found on the rating plate side of the unit.
Kurt J. Lesker Company model DPS 101 power pack:
➡ To connect a transmitter to a PC, use the Kurt J. Lesker Company Power Pack Model
DPS 101 and set the transmitter to RS 232.
Kurt J. Lesker Company model DPG 109 controller:
Up to nine transmitters in series can be connected to this controller.
➡ Integrate the transmitter using Data Cable part number KT348403T (please see
"Accessories") into the measuring chain.
➡ Rotate the Transmitter Address switch to RS485 operation with the appropriate address.
The transmitter address switch can be found on the rotating plate side of the unit (please
also refer to DPG 109 Operating Instructions).
Kurt J. Lesker Company model DPS 109 power pack:
➡ To connect up to nine transmitter to a PC, use the Kurt J. Lesker Company Power Pack
Model DPS 109 and set the transmitter to RS 485.
Set address switch
7
3.4. Connection Plan
Connection Plan HPT 100 (optional)
RS 485
or
RS 232
DPS 101
or 24V DC
Transmitter
DPG 101
Vacuum
chamber
DPG 109
PC
Sub-D socket arrangement on the transmitter casing
54321
9876
8
PIN
Settings
Pin 1:
Pin 2:
Pin 3:
Pin 4:
Pin 5:
Pin 6:
Pin 7:
Pin 8:
Pin 9:
n.c.
RS232, RxD
RS232, TxD
n.c.
gnd
VCC
RS485, DRS485, D+
n.c.
DPS 109
3.5. Disassembly
WARNING
Possible contaminated parts.
Contaminated parts can cause personal injuries.
➡ Inform yourself regarding possible contamination before beginning work.
➡ When working with contaminated parts be sure to follow the relevant instructions and
take the necessary protection measures.
CAUTION
Dirt and damage have an adverse effect on the function of these vacuum
components.
➡ Please take account of the instructions with regard to cleanliness and damage prevention
when using vacuum components.
➡ Shut down the gauge head.
➡ Disconnect the connecting cable.
➡ Detach the gauge heads from the vacuum apparatus.
➡ Place the protective cover in position.
9
4. Operation
4.1. General
Once voltage has been supplied the transmitter is ready to operate. A stabilization time of 510 minutes must be considered of. It is usually better to ensure that the transmitter remains in
operation all the time.
Use Of The Filament Protective Panel
During normal UHV applications, the transmitter can be operated without the filament
protection.
When applications are involved where greater levels of contamination are anticipated, the
protective panel, which is included, must be used. It is important to observe the necessity for
cleanliness when fitting the panel. The conductance value of the transmitter is reduced when the
panel is used. In this case, operations should be restricted to 7.5 x 10-6 Torr (1 x 10-5 mbar).
The measured pressure depends on the type of gas. For matching to various types of gas a
respective gas correction factor for the Pirani or Bayard-Alpert unit can be set; this generates the
correct measurement value in the pressure range below 7.5 x 10-3 Torr (1x 10-2 mbar). The gas
type correction factor for air and N2 has been set in the works to 1.00 (please also refer to Section
8.3.”Gas Correction Factor”).
The transmitter has been factory adjusted. Re-adjustment may be necessary in the event of
extreme temperatures or ageing etc. and is carried out with a connected vacuum controller
via the PC-Software "DokuStar" or customer specific in accordance with the communication
instructions.
Please note that before equalization the transmitter must have been in operation for
approximately 5 minutes (warm-up time) at the respective pressure. For correct zero point
equalization, the pressure in the vacuum chamber must be below 3.75 x 10-5 Torr (5 x 10-5 mbar).
Baking out
If the bakeout temperature is higher than 60°C (140°F) the electronic unit must be removed.
To avoid some mistakes the serial number of the complete unit is fixed up to the transmitter
print.
10
4.2. Communication
The transmitter communicates via the serial interface with the respective display units (please see "Accessories"), but alternatively can also be controlled directly via the RS 232 or
RS 485 by means of the interface protocol.
The Interface protocol is in ASCII format which means that all data bytes are representable
symbols with an ASCII code ≥ 32 with the exception of the telegram final symbol carriage
return (CR, 13).
For example the character string and the ASCII code corresponds as follows:
0
1
2
0
0
7
4
0
0
2
=
?
1
0
8
CR
48
49
50
48
48
55
52
48
48
50
61
63
49
48
56
13
The following possible telegrams are transferred with 9600 baud, 8 data bits, no parity and 1
stop bit.
Write request to transmitter
a1
a2
a3
1
0
p1
p2
p3
I1
I2
0
p1
p2
p3
0
2
0
p1
p2
p3
I1
I2
data
c1
c2
c3
c2
c3
c2
c3
CR
Read request to transmitter
a1
a2
a3
0
=
?
c1
CR
Answer of transmitter
a1
a2
a1, a2, a3:
p1, p2, p3:
I1, I2:
data:
c1, c2, c3:
cR:
a3
1
data
c1
CR
Unit address (“001” ... “015”, also see chapter 3.3 )
number (see table)
data length (see table)
see table or “NO_DEF”: wrong parameter number, “_LOGIC”: Access fault,
“_RANGE”: Out of range
checksum, sum of all ASCII up to checksum modulo (remainder) 256,
for example “0120074002=?” => 48+49+50+ ... +61+63=620,
620 modulo 256 = 108 => “108”
Carriage return (ASCII code 13)
11
#
040 1)
Name
DeGas
303
Error code
•
“06”
312
349
Software version
Transmitter type
•
•
“06”
“06”
740
Current pressure value
in mbar
•
“06”
741
Adjustment low/high
pressure
Correction factor
(Pirani)
Correction factor
(Bayard-Alpert)
742
743 1)
writable readable I1, I2
•
•
“01”
• 2)
•
“03”
•
•
“06”
•
•
“06”
Date
“0”: abort respectively is not activ
“1”: activate respectively is activ
“000000”:
no error
“Err001”:
transmitter defective
“Err002”:
memory defective
character string; six signs long
“.... A1” (32 32 32 32 65 49): CPT 100
“.... A2” (32 32 32 32 65 50): RPT 100
“.... A3” (32 32 32 32 65 51): PPT 100
“.... A4” (32 32 32 32 65 52): HPT 100
“aaaabb” for a.aaa · 10 (bb-20)
e.g. “123423” => 1.234 · 10 (23-20) =>
1.234 · 103 => 1234 mbar
“000”:
low pressure
“001”:
high pressure
“abcdef” for abcd,ef
e.g. “000123” => 1.23
“abcdef” for abcd,ef
e.g. “000123” => 1.23
1) only HPT 100
2) see transmitter adjustment
DeGas (only for HPT 100)
The degassing mode can be activated/canceled with a write request and the status be
queried with a read request as well.
While the transmitter is in the degassing mode, no valid measuring values are transmitted.
Transmitter adjustment
To equalize a transmitter there must first be set a pressure adjustment point and then the
actual pressure value. If the setting for the pressure adjustment point is missing or if another
telegram is inserted between the two steps, an error signal is generated when writing the
pressure value.
Handling
Set correction factor to 4.2
of transmitter 2
Read current pressure value
of transmitter 12
Adjust transmitter 1 at
atmosphere (high pressure)
12
Telegram to Transmitter
Write request to transmitter
Answer (O.K)
Read request to transmitter
Answer represents 4.234 10-5 mbar
Write request to transmitter
Answer (O.K)
Write request to transmitter
Answer (O.K)
Telegram from Transmitter
"0021074206000420028CR"
"0021074206000420028CR"
“0120074002=?108CR“
“0120074006423415040CR“
"0011074103001130CR"
"0011074103001130CR"
"0011074006100023025CR"
"0011074006100023025CR"
4.3. Transmitter Equalization
Automatic alignment in the "ur" range (under range)
Starting with instrument version 010500, the alignment is run automatically while
simultaneously the following conditions apply:
– the pressure of the Bayard-Alpert component is < 5.0 • 10-5 mbar.
– the measured value of the Pirani component does not change for one minute and does
deviate too much from the most recent calibration value.
Manually operated alignment when operations via display unit DPG 101 or DPG 109:
➡ Equalization of the transmitter as described in section 4.4. or 4.5. of the DPG instructions.
Manually operated alignment communication via RS 232 or RS 485:
➡ Evacuate the vacuum system to the pressure of p<1 x 10-5 mbar.
➡ Set the adjusting pressure point [P:741] to «000» for low pressure and transmit.
➡ Transmit the actual pressure value ([P:740] with «000000» ) for low pressure
(represents p < 1.0 • 10-5); ==> ‘’ur’’ (under Range).
➡ Vent to atmospheric pressure with air or N2; afterwards wait about 10 minutes.
➡ Set the adjusting pressure point [P:741] to «001» for high pressure and transmit.
➡ Set the actual pressure value to the atmospheric pressure (e.g. «100023» for 1000 mbar).
13
5. Degas
Deposits on the electrode of the hot cathode tubes can cause instability in the
measurement signals and lead also to increased desorption in the ultra high vacuum range
which, in turn, can lead to a too high measured pressure.
In such cases it is desirable, at pressures of below 1.5 x 10-6 Torr (2 x 10-6 mbar), to clean the
anode of the transmitter by baking out the adsorbed gas particles. This is carried out (via the
connected measuring unit) by starting the Windows Software DokuStar in accordance with
the
communication instructions relating to the degassing procedure. In this way the anode is
warmed up by ohmic heat up to 800 °C (1500°F). Although baking out lasts approximately 3
minutes, the process can be discontinued at any time beforehand.
No transmission of measurement values is possible during the time the transmitter is in
degassification mode.
6. Error Signals
Error
Transmitter does not respond
A too high measuring value is
printed out in the high vacuum
Possible Cause
No supply voltage
Elimination
Connect data cable or power pack
Incorrect serial interface type
or incorrect address set
Remove rubber stoppers on rating
plate side and set address switch to
the serial interface to be used
and/or set the correct address
(see Section 3.3.).
Replace transmitter
Degas (see Section 5.)
Transmitter defective
High transmitter degassing
Adjustment necessary,
contamination
Transmitter defective
14
Re-adjust (see Section 4.1.)
Replace transmitter
7. Maintenance, Service
The unit requires no maintenance. A damp cloth can be used to wipe away any dirt. Ensure
that the unit is first disconnected from the mains power supply.
Do Make Use Of Our Service Facilities
➡ "Should a defect occur on the HPT 100 contrary to expectations, please send the transmitter to
the authorized service center for repair and for replacement with a new exchange unit."
CAUTION
Cannot be field serviced.
Please note:
Units returned to us for repair or maintenance are covered by our general conditions of sale
and supply.
Products returned to the Kurt J. Lesker Company for service or repair should, if possible, be
free of harmful substances (e.g. radioactive, toxic, caustic or microbiological).
➡ Adhere to the forwarding regulations of all involved countries and forwarding companies.
➡ Enclose a completed contamination declaration.
Products that are not clearly declared as "free of harmful substances" are decontaminated at
the expense of the customer.
15
8. Technical Data
8.1. Data List
Description
Measurement method
Material in contact with media
Sealing
Feedthrough
Filaments
Number of filaments
Measuring range
Pressure
Repeatability % of
measurement
Accuracy % of
measurement
Measuring cycles
Temperature: Operating:
Temperature: Storage
Temperature: Bake-out
Supply: Voltage
Supply:
Power consumption max.
Output
Serial interface
Unit
Torr (mbar)
Torr (bar)
Torr (mbar)
7.5 x 10-8 ... 0.75 (1 x 10-7 ... 1) +/- 10 %
ms
°C (°F)
°C (°F)
°C (°F)
40
+5 ... +50 (+40 ... +120)
-40 ... +60 (-40 ... +140)
max. 356
VDC
24
W
7.5
digital RS 232 / RS 485
9600 baud, 8 databits,
no parity, 1 stopbit
9 poles Sub-D socket,
screwable
with display unit or software
to atmosphere and zero if pressure
< 3.75 • 10-5 Torr ( < 5 • 10-5 mbar)
IP 40/IP 54
0.4 (0.88)
1.0
147 x 85 x 35 (5.8 x 3.4 x 1.4)
156 x 85 x 35 (6.2 x 3.4 x 1.4)
QF16 (DN 40 KF)
DN 40 CF
max. 1000 (3280), only for RS 485
Electrical connection
Adjustment Pirani
Protection type
Weight
Internal volume, approx.
Dimensions: KTR34130
KTR34330
Flange:
KTR34130
KTR34330
Measuring cable length
16
Value
Comments
Pirani / Bayard-Alpert
Tungsten, Stainless Steel,
Nickel
Metal
Glass, Ceramics
Yttriated Iridium, double
2
7.5 x 10-10 ... 750 (1 x 10-9 ... 1000)
max. 4
7.5 x 10-8 ... 0.75 (1 x 10-7 ... 1) +/- 5 %
kg (lbs.)
cm3
mm (inch)
mm (inch)
m (ft)
without
electronics
incl. flange
8.2. Dimensions
Dimensions HPT 100
35.0 mm (1.4")
ø 55.0 mm (2.2")
85.0 mm (3.4")
147.0 mm (5.8 ")
8.3. Gas Correction Factor
Relative sensitivity in the
molecular range (1x10-1 mbar)
Measuring diagram HPT 100 (Pirani)
HPT 100
1E3
Correction factor Pirani
N2
1.00
Air
1.00
H2
0.58
He
1.02
Ar
1.59
CO2
0.89
displayed pressure (mbar)
1E2
1E1
1E0
1E-1
H2
He
1E-2
N2
Ar
1E-3
1E-4
1E-4
Kr
1E-3
1E-2
1E-1
1E0
real pressure (mbar)
1E1
1E2
1E3
Correction factor BayardAlpert
He
5.93
H2
2.39
Ar
0.80
CO2
0.74
C3H8
0.32
Ne
3.50
Kr
0.60
Xe
0.41
R12
0.28
17
9. Accessories
Description
DPS 101, plug power pack with
PC connecting cable for one transmitter
DPS 109, switching power pack with
integrated PC adapter for
up to 9 transmitters
DPG 101 Controller
DPG 109 Controller
Data cable for connection to
Controller DPG 101 (RS 232)
Data cable for connection to Controller
DPG 109 or
Switching Power Pack DPS 109 (RS 485)
Bus termination RS 485
TIC 002 Level converter
Software “Dokustar “
Software “Dokustar Plus“
18
Unit
Pieces
Number
Comments
1
KTG20011
US version
3m (10 ft)
1
1
1
1
KTG25010
KTG10010
KTG15010
KT348203T
3m (10 ft)
1
KT348403T
1
1
1
1
KT348100
KT051519AT
KT882500
KT882501
10. Supplementary Information
Depending on the configuration of your components further operating instructions are
included in the package (please see the table). If, despite every effort by us, information on
your products is missing please get in touch with your local Kurt J. Lesker Company
representative or contact us using the information on the back cover page.
The following operating instructions are available for digital transmitters and accessories:
Product
CPT 100
PPT 100
RPT 100
HPT 100
DPG 101
DPS 101
DPG 109
DPS 109
TIC 002
Software “DokuStar Plus”
Definition
Rough vacuum transmitter
Medium vacuum transmitter
Combination vacuum transmitter
High vacuum transmitter
Display unit
Switching power pack
Display unit
Switching power pack
Level Converter
Software for PC data evaluation
No. Operating Instructions
PG0001KJL
PG0002KJL
PG0003KJL
PG0004KJL
PG0006KJL
PG0007KJL
PG0005KJL
PG0008KJL
PT0076KJL
PG0012KJL
19
Kurt J. Lesker Company
1925 Worthington Ave
Clairton, PA 15025
www.Lesker.com