Download User Manual PZ258E - Physik Instrumente

PZ258E
P-763 Stage
User Manual
Version: 1.0.0
Date: 19.09.2014
This document describes the following
product:

P-763.22C
XY Nanopositioning System with Small
Footprint and Large Aperture, 200 µm ×
200 µm, Direct Metrology, Capacitive
Sensors
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstr. 1, 76228 Karlsruhe, Germany
Phone: +49 721 4846-0, Fax: +49 721 4846-1019, E-mail: [email protected]
Physik Instrumente (PI) GmbH & Co. KG is the owner of the following trademarks:
PI®, PIC®, PICMA®, PILine®, PIFOC®, PiezoWalk®, NEXACT®, NEXLINE®,
NanoCube®, NanoAutomation®, Picoactuator®, PInano®
The products described in this document are in part protected by the following patents:
German patent no. 10021919C2
German patent no. 10234787C1
German patent no. 10348836B3
German patent no. 102005015405B3
German patent no. 102007011652B4
US patent no. 7,449,077
Japanese patent no. 4667863
Chinese patent no. ZL03813218.4
© 2014 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text,
photographs and drawings in this manual are protected by copyright. With regard
thereto, Physik Instrumente (PI) GmbH & Co. KG retains all the rights. Use of said
text, photographs and drawings is permitted only in part and only upon citation of the
source.
Original instructions
First printing: 19.09.2014
Document number: PZ258E, CBo, Version 1.0.0
Subject to change without notice. This manual is superseded by any new release. The
latest release is available for download (p. 3) on our website.
Contents
1
About this Document
1.1
1.2
1.3
1.4
1.5
2
3
Goal and Target Audience of this User Manual ...................................................1
Symbols and Typographic Conventions ...............................................................1
Figures ..................................................................................................................2
Other Applicable Documents ................................................................................2
Downloading Manuals ..........................................................................................3
Safety
2.1
2.2
2.3
5
Intended Use ........................................................................................................5
General Safety Instructions ..................................................................................5
Organizational Measures ......................................................................................7
Product Description
3.1
3.2
3.3
3.4
3.5
1
9
Product View.........................................................................................................9
Product Labeling .................................................................................................10
Scope of Delivery ...............................................................................................11
Recommended Piezo Controllers .......................................................................12
Technical Features .............................................................................................12
3.5.1
PICMA® Piezo Actuators .................................................................12
3.5.2
Flexure Guides .................................................................................12
3.5.3
Capacitive Sensors ...........................................................................13
3.5.4
ID Chip ..............................................................................................13
4
Unpacking
15
5
Installation
17
5.1
5.2
5.3
5.4
6
General Notes on Installation .............................................................................17
Connecting the P­763 to the Protective Earth Conductor ..................................19
Mounting the P­763 ............................................................................................21
Affixing the Load .................................................................................................22
Start-Up and Operation
6.1
6.2
6.3
25
General Notes on Start-Up and Operation .........................................................25
Operating the P­763 ...........................................................................................27
Discharging the P­763 ........................................................................................27
7
Maintenance
7.1
7.2
29
General Notes on Maintenance ..........................................................................29
Cleaning the P­763 .............................................................................................29
8
Troubleshooting
31
9
Customer Service
33
10
Technical Data
35
10.1
10.2
10.3
10.4
10.5
Specifications......................................................................................................35
10.1.1
Data Table ........................................................................................35
10.1.2
Maximum Ratings .............................................................................36
Ambient Conditions and Classifications .............................................................36
Dimensions .........................................................................................................37
Torque for Stainless Steel Screws (A2-70) ........................................................38
Pin Assignment ...................................................................................................38
11
Old Equipment Disposal
41
12
EC Declaration of Conformity
43
1 About this Document
1
About this Document
In this Chapter
Goal and Target Audience of this User Manual ............................................................ 1
Symbols and Typographic Conventions ........................................................................ 1
Figures ........................................................................................................................... 2
Other Applicable Documents ......................................................................................... 2
Downloading Manuals ................................................................................................... 3
1.1 Goal and Target Audience of this User Manual
This manual contains the necessary information on the intended use of the P­763.
Basic knowledge of control technology, drive technologies and suitable safety
measures is assumed.
The latest versions of the user manuals are available for download (p. 3) on our
website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
If not avoided, the dangerous situation will result in minor injury.

Actions to take to avoid the situation.
NOTICE
Dangerous situation
If not avoided, the dangerous situation will result in damage to the equipment.

P-763 Stage
Actions to take to avoid the situation.
PZ258E
Version: 1.0.0
1
1 About this Document
INFORMATION
Information for easier handling, tricks, tips, etc.
Symbol/
Label
Meaning
1.
Action consisting of several steps whose sequential
order must be observed
2.

Action consisting of one or several steps whose
sequential order is irrelevant

List item
p. 5
Cross-reference to page 5
RS-232
Labeling of an operating element on the product
(example: socket of the RS-232 interface)
Warning signs affixed to the product that refer to
detailed information in this manual.
1.3 Figures
For better understandability, the colors, proportions and degree of detail in illustrations
can deviate from the actual circumstances. Photographic illustrations may also differ
and must not be seen as guaranteed properties.
1.4 Other Applicable Documents
The devices and software tools which are mentioned in this documentation are
described in their own manuals.
The latest versions of the user manuals are available for download (p. 3) on our
website.
2
Version: 1.0.0
PZ258E
P-763 Stage
1 About this Document
Device
Document
E-709.CRG/.CHG digital piezo controller
PZ222E User Manual /
E709T0003 Technical Note
E-725 digital piezo controller
PZ197E User Manual
PIMikroMove
SM148E Software Manual
P-5xx / P-6xx / P-7xx Piezo Positioning Systems
PZ240EK Short Instructions
1.5 Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:

Contact our customer service department (p. 33).
INFORMATION
For some products (e.g. Hexapod systems and electronics that are delivered with a
CD), access to the manuals is password-protected. The password is stored on the
CD. Availability of the manuals:


Password-protected manuals: FTP download directory

Follow the corresponding instructions for downloading.
Freely available manuals: PI website
Download freely accessible manuals
1. Open the website http://www.pi-portal.ws.
2. Click Downloads.
3. Click the corresponding product category.
4. Go to the corresponding product code.
The available manuals are displayed.
5. Click the desired manual and save it on the hard disk of your PC or on a data
storage medium.
P-763 Stage
PZ258E
Version: 1.0.0
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1 About this Document
Download password-protected manuals
1. Insert the product CD in the PC drive.
2. Switch to the Manuals directory on the CD.
3. In the Manuals directory, open the Release News (file including releasenews
in the file name).
4. Find the user name and the password in the section "User login for software
download" in the Release News.
5. Open the FTP download directory (ftp://pi-ftp.ws).
−
Windows operating systems: Open the FTP download directory in
Windows Explorer.
6. Log in with the user name and the password from the Release News.
7. In the directory of the corresponding product, go to the Manuals sub-directory.
8. Copy the desired manual to the hard disk of your PC or to a data storage
medium.
4
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PZ258E
P-763 Stage
2 Safety
2
Safety
In this Chapter
Intended Use ................................................................................................................. 5
General Safety Instructions ........................................................................................... 5
Organizational Measures............................................................................................... 7
2.1 Intended Use
The P­763 is a laboratory device as defined by DIN EN 61010-1. It is intended to be
used in interior spaces and in an environment which is free of dirt, oil, and lubricants.
Based on its design and realization, the P­763 is intended for fine positioning as well
as the fast and precise movement of small objects. The specifications of the P­763
apply to horizontal mounting. The motion takes place horizontally in two axes.
The intended use of the P­763 is only possible in combination with suitable drive and
control electronics (p. 12) available from PI. The electronics is not included in the
scope of delivery of the P­763.
The electronics must provide the required operating voltages. To ensure proper
performance of the servo-control system, the electronics must also be able to read out
and process the signals from the position sensors.
2.2 General Safety Instructions
The P­763 is built according to state-of-the-art technology and recognized safety
standards. Improper use can result in personal injury and/or damage to the P­763.
 Only use the P­763 for its intended purpose, and only use it if it is in a good
working order.
 Read the user manual.
 Immediately eliminate any faults and malfunctions that are likely to affect
safety.
The operator is responsible for the correct installation and operation of the P­763.
P-763 Stage
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2 Safety
The P­763 is driven by piezo actuators. Temperature changes and compressive
stresses can induce charges in piezo actuators. After being disconnected from the
electronics, piezo actuators can stay charged for several hours. Touching or shortcircuiting the contacts in the connectors of the P­763 can lead to minor injuries. The
piezo actuators can be destroyed by an abrupt contraction.
 Do not open the P­763.
 Discharge the piezo actuators of the stage before installation:
Connect the stage to the switched-off PI controller, which is equipped with an
internal discharge resistor.
 Do not pull out the connectors from the electronics during operation.
 Do not touch the contacts in the connectors.
 Secure the connectors of the stage with screws against being pulled out of the
controller.
Mechanical forces can damage or misalign the P­763.
 Avoid impacts that affect the P­763.
 Do not drop the P­763.
 Do not exceed the maximum permissible stress and load capacities according
to the specifications (p. 35).
 Only hold the P­763 externally by the base body.
The P­763 is maintenance-free and achieves its positioning accuracy as a result of the
optimum alignment of mechanical components and piezo actuators. Loosened screws
cause a loss in positioning accuracy.
 Only loosen screws according to the instructions in this manual.
 Do not open the P­763.
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2 Safety
2.3 Organizational Measures
User manual
 Always keep this user manual available by the P­763.
The latest versions of the user manuals are available for download (p. 3) on
our website.
 Add all information given by the manufacturer to the user manual, for example
supplements or Technical Notes.
 If you pass the P­763 on to other users, also turn over this user manual as
well as other relevant information provided by the manufacturer.
 Only use the device on the basis of the complete user manual. Missing
information due to an incomplete user manual can result in minor injury and
property damage.
 Only install and operate the P­763 after having read and understood this user
manual.
Personnel qualification
The P­763 may only be installed, started up, operated, maintained and cleaned by
authorized and appropriately qualified personnel.
P-763 Stage
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3 Product Description
3
Product Description
In this Chapter
Product View ................................................................................................................. 9
Product Labeling .......................................................................................................... 10
Scope of Delivery ........................................................................................................ 11
Recommended Piezo Controllers ................................................................................ 12
Technical Features ...................................................................................................... 12
3.1 Product View
The figure serves as an example and can differ from your stage model.
Figure 1: Example of product view
P-763 Stage
1
Base body
2
Moving platform
3
Cable exit (X axis)
4
Protective earth connection
5
Cable exit (Y axis)
X
Positive direction of motion of the X axis
Y
Positive direction of motion of the Y axis
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3 Product Description
3.2 Product Labeling
Figure 2: P-763: Position of the product labeling (example of a view from above)
Position
Labeling
Description
A
P-763.22C
Product name
A
114031266
Serial number (example), individual for each P­763
Meaning of the places (counting from left):
1 = internal information
2 and 3 = manufacturing year
4 to 9 = consecutive numbers
10
A
Manufacturer's logo
A
Warning sign "Observe manual!"
A
Old equipment disposal (p. 41)
A
Country of origin:
Germany
Country of origin
A
WWW.PI.WS
Manufacturer's address (website)
A
CE conformity mark
A
Symbol for the protective earth conductor, marks the
protective earth connection of the P­763
A
X
Cable exit of the X axis
A
Y
Cable exit of the Y axis
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PZ258E
P-763 Stage
3 Product Description
Position
Labeling
Description
B
Arrow and letter X
Positive direction of motion of the X axis
C
Arrow and letter Y
Positive direction of motion of the Y axis
Figure 3: P-763: "Residual voltage" warning sign on connector
Warning sign "Residual voltage": Notice of risk of electric shock (p. 5)
3.3 Scope of Delivery
Item ID
Components
P­763.22C
XY nanopositioning system with small footprint and large
aperture, 200 µm × 200 µm, direct metrology, capacitive
sensors
000036450
M4 screw set for protective earth, consisting of:



PZ240EK
P-763 Stage
1 M4x8 flat-head screw with cross recess, ISO 7045
2 safety washers
2 flat washers
Short instructions for piezo positioning systems
PZ258E
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11
3 Product Description
3.4 Recommended Piezo Controllers
Item ID
Description
E-709.CRG*
Digital piezo controller, 1 channel, OEM module, -30 to 130 V,
capacitive sensor, bench-top device
E-709.CHG*
Digital piezo controller, 1 channel, -30 to 130 V, capacitive
sensor, bench-top device
E-725.3CD**
Digital multi-channel piezo controller, 3 channels, -30 to 135 V,
Sub-D connector(s), capacitive sensors
E-725.3CDA**
Digital multi-channel piezo controller, 3 channels, -30 to 135 V,
Sub-D connector(s), capacitive sensors, analog inputs
* One device per axis
** E-710.3D0 adapter cable required (must be ordered separately)
 To order, contact our customer service department (p. 33).
3.5 Technical Features
3.5.1 PICMA® Piezo Actuators
P­763 stages are driven by PICMA® piezo actuators. PICMA® actuators have
all-ceramic insulation and are therefore far superior to conventional actuators in
respect to performance and lifetime. The monolithic piezoceramic block is protected
against humidity and failure due to increased leakage current by a ceramic insulation
layer. In this way, an especially high reliability is achieved even under extreme
ambient conditions. In contrast to motorized drives, there are no rotating parts or
friction. The piezo actuators are therefore backlash-, maintenance- and wear-free.
3.5.2 Flexure Guides
P­763 stages have flexure guides (flexures) for frictionless motion and high guiding
accuracies.
A flexure guide is an element which is free from static and sliding friction. It is based
on the elastic deformation (bending) of a solid (e.g. steel) and does not have any
rolling or sliding parts. Flexure elements have a high stiffness and load capacity.
Flexure guides are maintenance- and wear-free. They are 100 % vacuum compatible,
function in a wide temperature range and do not require any lubricants.
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P-763 Stage
3 Product Description
3.5.3 Capacitive Sensors
Capacitive sensors measure the position directly on the moving platform (direct
metrology) and work without contact. Neither friction nor hysteresis interferes with the
motion, which allows excellent linearity values to be achieved in combination with the
high position resolution. In connection with suitable electronics, capacitive sensors
achieve the best resolution, stability and bandwidth.
3.5.4 ID Chip
An ID chip is located in the Sub-D connector of the stage. When the stage is
calibrated at the factory with digital electronics, the calibration data is saved together
with specific product information on the ID chip. When switched on, digital electronics
read the data from the ID chip of the connected stage. Stages whose ID chip contains
the calibration data can therefore be connected to any suitable digital electronics
without a new calibration.
For more information on the ID chip, see the manual of the controller used.
P-763 Stage
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4 Unpacking
4
Unpacking
NOTICE
Mechanical overload from incorrect handling!
An impermissible mechanical overload of the moving platform of the P­763 can
cause damage to the piezo actuators, sensors and flexure joints of the P­763 as well
as losses of accuracy.

Only hold the P­763 externally by the base body.
1. Unpack the P­763 with care.
2. Compare the contents against the items covered by the contract and against
the packing list.
3. Inspect the contents for signs of damage. If parts are missing or you notice
signs of damage, contact PI immediately.
4. Keep all packaging materials in case the product needs to be returned.
P-763 Stage
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Version: 1.0.0
15
5 Installation
5
Installation
In this Chapter
General Notes on Installation ...................................................................................... 17
Connecting the P­763 to the Protective Earth Conductor ........................................... 19
Mounting the P­763 ..................................................................................................... 21
Affixing the Load .......................................................................................................... 22
5.1 General Notes on Installation
CAUTION
Dangerous voltage and residual charge on piezo actuators!
The P­763 is driven by piezo actuators. Temperature changes and compressive
stresses can induce charges in piezo actuators. After being disconnected from the
electronics, piezo actuators can stay charged for several hours. Touching or shortcircuiting the contacts in the connectors of the P­763 can lead to minor injuries. The
piezo actuators can be destroyed by an abrupt contraction.

Do not open the P­763.

Discharge the piezo actuators of the stage before installation:
Connect the stage to the switched-off PI controller, which is equipped with an
internal discharge resistor.

Do not pull out the connectors from the electronics during operation.
Touching the contacts in the connectors can lead to an electric shock (max. 130 V
DC) and minor injuries.
P-763 Stage

Do not touch the contacts in the connectors.

Secure the connectors of the stage with screws against being pulled out of the
controller.
PZ258E
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5 Installation
NOTICE
Mechanical overload from incorrect handling!
An impermissible mechanical overload of the moving platform of the P­763 can
cause damage to the piezo actuators, sensors and flexure joints of the P­763 as well
as losses of accuracy.

Only hold the P­763 externally by the base body.
NOTICE
Damage from unsuitable cables!
Unsuitable cables can damage the stage and the electronics.

Only use cables provided by PI for connecting the P­763 to the electronics.
NOTICE
Damage from incorrect mounting!
Incorrect mounting of the P­763 or incorrectly mounted parts can damage the P­763.

Only mount the P­763 and the loads on the mounting fixtures (holes) intended
for this purpose.
NOTICE
Damage due to incorrectly tightened screws!
Incorrectly tightened screws can cause damage.

Observe the torque range (p. 38) given for the screws used during installation.
INFORMATION
Extended cables can reduce the positioning accuracy of the P­763 or affect the
sensor processing by the electronics.

18
Do not use cable extensions. If you need longer cables, contact our customer
service department (p. 33).
Version: 1.0.0
PZ258E
P-763 Stage
5 Installation
5.2 Connecting the P-763 to the Protective Earth
Conductor
INFORMATION
In the case of P­763 stages with Sub-D connectors, ground loops can occur when
the stage is grounded via its protective earth connector as well as by the shield of the
connection cable for the electronics.

If a ground loop occurs, contact our customer service department (p. 33).
INFORMATION

Observe the applicable standards for mounting the protective earth conductor.
The P­763 is equipped with an M4 hole for fastening the protective earth conductor.
This hole is located next to the cable exit and is marked with the protective earth
conductor symbol
(see "Dimensions", p. 37).
Prerequisite

You have read and understood the general notes on installation (p. 17).

The stage is not connected to the electronics.
Tools and accessories
P-763 Stage

Suitable protective earth conductor: Cross-sectional area of the cable
2
≥0.75 mm

Supplied M4 protective earth screw set (p. 11) for connecting the protective
earth conductor

Suitable screwdriver
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5 Installation
Figure 4: Mounting of the protective earth conductor (profile view)
1
Base body of the P-763
2
Flat washer
3
Safety washer
4
Screw
5
Cable lug
6
Protective earth conductor
Connecting the P-763 to the protective earth conductor
1. If necessary, fasten a suitable cable lug to the protective earth conductor.
2. Fasten the cable lug of the protective earth conductor using the M4 screw on
the protective earth connection of the P­763 as shown in the profile view.
3. Tighten the M4 screw with a torque of 1.2 Nm to 1.5 Nm.
4. Make sure that the contact resistance at all connection points relevant for
mounting the protective earth conductor is <0.1 Ω at 25 A.
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P-763 Stage
5 Installation
5.3 Mounting the P-763
NOTICE
Warping of the P-763 due to mounting on uneven surfaces!
Mounting the P­763 on an uneven surface can warp the P­763. Warping reduces the
accuracy.

Mount the P­763 on an even surface. The recommended evenness of the
surface is ≤20 µm.

For applications with great temperature changes:
Only mount the P­763 on surfaces that have the same or similar thermal
expansion properties as the P­763.
NOTICE
Tensile stress on piezo actuator with vertical mounting!
When the stage is mounted vertically, tensile stress can result in particular
alignments that reduces the preload of the piezo actuator and thus destroys it.

If you want to mount the P­763 vertically, contact our customer service
department (p. 33).
The figure below serves as an example and can differ from your stage model.
Figure 5: P-763: Holes at the bottom side for mounting the stage on a surface
P-763 Stage
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5 Installation
Prerequisite

You have read and understood the general notes on installation (p. 17).
Tools and accessories


Four M3 screws of suitable length (p. 37)
Suitable screwdriver
Mounting the stage on a surface
1. Position the stage on an even surface.
2. Mount the stage to the mounting holes (see figure) with suitable screws.
Observe the specified torque range (p. 38) while doing so.
5.4 Affixing the Load
NOTICE
Mechanical overload due to high torques and high loads!
When affixing the load, high torques and high loads can overload the moving
platform of the P­763. Mechanical overload can cause damage to the piezo
actuators, sensors and flexure joints of the P­763 and lead to losses in accuracy.

Observe the torque range (p. 38) given for the screws used during installation.

Avoid torques >100 Ncm on the moving platform.

Do not exceed the maximum permissible stress and load capacities according to
the specifications (p. 35).
NOTICE
Warping of the P-763 due to affixing of loads with uneven contact surface!
Affixing loads with an uneven contact surface can warp the P­763. Warping reduces
the accuracy.
22

Only affix loads on the P­763 whose contact surface with the moving platform of
the stage has an evenness of at least 20 μm.

For applications with great temperature changes:
Only affix loads on the P­763 that have the same or similar thermal expansion
properties as the P­763.
Version: 1.0.0
PZ258E
P-763 Stage
5 Installation
NOTICE
Center of load at unsuitable position!
If the center of load is located far outside of the moving platform (e. g. high set-ups
and long levers), the P­763 can be damaged from high strain on the flexure guides,
high torques and oscillations.

If the center of the load to be affixed is far above or to the side of the moving
platform, adjust the controller settings before start-up or contact our customer
service department (p. 33).
NOTICE
Screws that are too long!
The P­763 can be damaged by screws that are too long.

Note the depth of the mounting holes in the moving platform (p. 37).

Only use screws of the correct length for the respective mounting holes.
INFORMATION
The positive direction of motion of the axes is given in the product view (p. 9).
Center of load at the optimum position:
Figure 6: Example of an optimally placed load
P-763 Stage
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5 Installation
Center of load at an unsuitable position:
Figure 7: High set-up and center of load far above the moving platform
Figure 8: Long lever and center of load on the side of the moving platform
Prerequisite

You have read and understood the general notes on installation (p. 17).
Tools and accessories


Screws of appropriate size and length (p. 37)
Suitable tools
Affixing the load
 Only affix loads to the threaded holes (p. 37) intended for this purpose and
with suitable screws. Observe the specified torque range (p. 38) while doing
so, and avoid torques >100 Ncm on the moving platform.
 Affix the load so that it is centered and that the center of load is on the moving
platform.
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P-763 Stage
6 Start-Up and Operation
6
Start-Up and Operation
In this Chapter
General Notes on Start-Up and Operation .................................................................. 25
Operating the P­763 .................................................................................................... 27
Discharging the P­763 ................................................................................................. 27
6.1 General Notes on Start-Up and Operation
CAUTION
Risk of electric shock if the protective earth conductor is not connected!
If a protective earth conductor is not or not properly connected, dangerous touch
voltages can occur on the P­763 in the case of malfunction or failure of the system.
If touch voltages exist, touching the P­763 can result in minor injuries from electric
shock.

Connect the P­763 to a protective earth conductor (p. 19) before start-up.

Do not remove the protective earth conductor during operation.

If the protective earth conductor has to be removed temporarily (e. g. in the case
of modifications), reconnect the P­763 to the protective earth conductor before
starting it up again.
NOTICE
Destruction of the piezo actuator by electric flashovers!
The use of the P­763 in environments that increase the electrical conductivity can
lead to the destruction of the piezo actuator by electric flashovers. Electric flashovers
can be caused by moisture, high humidity, liquids and conductive materials such as
metal dust. In addition, electric flashovers can also occur in certain air pressure
ranges due to the increased conductivity of the air.
P-763 Stage

Avoid operating the P­763 in environments that can increase the electric
conductivity.

Only operate the P­763 within the permissible ambient conditions and
classifications (p. 36).
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6 Start-Up and Operation
NOTICE
Reduced lifetime of the piezo actuator due to permanently high voltage!
The permanent application of a high static voltage to piezo actuators leads to a
considerable reduction in the lifetime of the piezo ceramic of the actuator.

When the P­763 is not used but the controller remains switched on to ensure
temperature stability, discharge the P­763 (p. 27).
NOTICE
Operating voltage too high or incorrectly connected!
Operating voltages that are too high or incorrectly connected can cause damage to
the P­763.

Only operate the P­763 with controllers/drivers and original accessories from PI.

Do not exceed the operating voltage range (p. 36) for which the P­763 is
specified.

Only operate the P­763 when the operating voltage is properly connected; see
"Pin Assignment" (p. 38).
NOTICE
Uncontrolled oscillation!
Oscillations can cause irreparable damage to the stage. Oscillations are indicated by
a humming and can result from the following causes:

A change in the load and/or dynamics requires the servo-control parameters to
be adjusted.

The stage is operated near its resonant frequency.
If you notice oscillations:

In closed-loop operation, immediately switch off the servo mode.

In open-loop operation, immediately stop the stage.
INFORMATION
The positive direction of motion of the axes is given in the product view (p. 9).
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P-763 Stage
6 Start-Up and Operation
INFORMATION
Sound and vibration (e.g. footfall, impacts) can be transmitted to the stage and can
affect its performance with regard to position stability.

Avoid transmitting sound and vibration while the stage is being operated.
6.2 Operating the P-763
 Follow the instructions in the manual of the controller used for start-up and
operation of the P­763.
6.3 Discharging the P-763
The P­763 must be discharged in the following cases:


Before installation

Before demounting (e.g. before cleaning and transporting the P­763 and for
modifications)
If the P­763 is not used but the controller remains switched on to ensure
temperature stability
The P­763 is discharged through the internal discharge resistor of the controller from
PI.
Discharging a P-763 that is connected to the controller
In closed-loop operation:
1. Switch off the servo mode on the controller.
2. Set the piezo voltage to 0 V on the controller.
In open-loop operation:
 Set the piezo voltage to 0 V on the controller.
Discharging a P-763 that is not connected to the controller
 Connect the stage to the switched-off controller from PI.
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7 Maintenance
7
Maintenance
In this Chapter
General Notes on Maintenance ................................................................................... 29
Cleaning the P­763 ...................................................................................................... 29
7.1 General Notes on Maintenance
NOTICE
Misalignment from loosening screws!
The P­763 is maintenance-free and achieves its positioning accuracy as a result of
the optimum alignment of mechanical components and piezo actuators. Loosened
screws cause a loss in positioning accuracy.

Only loosen screws according to the instructions in this manual.

Do not open the P­763.
7.2 Cleaning the P-763
Prerequisites

You have discharged the piezo actuators of the P­763 (p. 27).

You have disconnected the P­763 from the controller.
Cleaning the P-763
 Clean the surfaces of the P­763 with a cloth that is slightly dampened with a
mild cleanser or disinfectant (e.g. ethanol or isopropanol).
 Do not do any ultrasonic cleaning.
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8 Troubleshooting
8
Troubleshooting
Problem
Possible Causes
Solution
No or limited
motion
The cable is not
connected correctly

Check the cable connections.
Excessive load

Do not exceed the maximum
permissible stress and load
capacities according to the
specifications (p. 35).
Zero shift of the sensor
for the following
reasons:

Perform a zero-point adjustment of
the sensor (see controller manual).

Only mount the P­763 on surfaces
with the following characteristics:
Reduced
accuracy

Load applied in
direction of motion

Ambient/operating
temperature of the
stage far above or
below calibration
temperature
(21°C to 24°C)
Warping of the base
body or the moving
platform
Evenness of at least 20 μm
The thermal expansion
properties are similar to those of
the P­763 (e. g. surfaces made
of aluminum).
Only affix loads with the following
characteristics on the P­763:
−
−

−
−
P-763 Stage
PZ258E
The contact surface of the load
has an evenness of at least
20 μm.
The thermal expansion
properties are similar to those of
the P­763 (e. g. loads made of
aluminum).
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8 Troubleshooting
Problem
Possible Causes
Solution
The stage starts
oscillating or
positions
inaccurately
Servo-control
parameters incorrectly
set because e. g. the
load was changed
1. Immediately switch off the servo
mode of the corresponding stage
axes.
2. Check the settings of the servocontrol parameters on the controller.
3. Adjust the servo-control parameters
on the controller according to the
load change.
Open-loop operation
near the resonant
frequency

In open-loop operation, only operate
the stage with a frequency that is
below the resonant frequency.
If the problem that occurred with your system is not listed in the table above or cannot
be solved as described, contact our customer service department (p. 33).
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9 Customer Service
9
Customer Service
For inquiries and orders, contact your PI sales engineer or send us an e-mail
([email protected]).
If you have questions concerning your system, have the following information ready:




Product codes and serial numbers of all products in the system
Firmware version of the controller (if present)
Version of the driver or the software (if present)
Operating system on the PC (if present)
The latest versions of the user manuals are available for download (p. 3) on our
website.
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10 Technical Data
10 Technical Data
In this Chapter
Specifications .............................................................................................................. 35
Ambient Conditions and Classifications ...................................................................... 36
Dimensions .................................................................................................................. 37
Torque for Stainless Steel Screws (A2-70) ................................................................. 38
Pin Assignment ............................................................................................................ 38
10.1 Specifications
10.1.1 Data Table
Active axes
Motion and positioning
Integrated sensor
Closed-loop travel in X, Y
Open-loop resolution in X, Y
Closed-loop resolution in X, Y
Linearity error in X, Y
Repeatability X, Y
Mechanical properties
Loaded resonant frequency in X
Load capacity
Drive properties
Piezoceramics
Electrical capacitance in X, Y
Miscellaneous
Operating temperature range
Material
Dimensions
Clear aperture
Cable length
Connection
Recommended controller
P-763 Stage
P-763.22C
X, Y
Unit
Capacitive sensors
200
1
2
0.02
±5
µm
nm
nm
%
nm
180 Hz (260 g)
10
Hz
N
PICMA® P-887
12.8
µF
-20 to 80
Aluminum, steel
70 mm × 70 mm × 25 mm
30 mm × 30 mm
1.5
1× Sub-D Mix, 1 channel, for X and Y
respectively
2× E-709.CRG or 2× E-709.CHG (for
high dynamics);
E-725 (plug adapter required)
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m
35
10 Technical Data
10.1.2 Maximum Ratings
P­763 stages are designed for the following operating data in continuous operation:
Stage
Maximum Operating
Voltage
Maximum Operating
Frequency (without
Load)*
Maximum Power
Consumption**
P-763.22C
–20 to +120 V
100 Hz (in X)
37.6 W (18.8 W per
axis)
83 Hz (in Y)
* To prevent damage, it is recommended to operate the stage with maximally one third
of the resonant frequency. If the stage is operated with a load, the values are lower.
** Corresponds to the power provided by the amplifier, which results in heating of the
piezo actuator to approximately 80 °C.
10.2 Ambient Conditions and Classifications
The following ambient conditions and classifications must be observed for the P­763:
Area of application
For indoor use only
Maximum altitude
2000 m
Air pressure
1100 hPa to 0.1 hPa
(corresponds to roughly 825 Torr to 0.075 Torr)
Relative humidity
Highest relative humidity 80 % for temperatures up
to 31 °C
Decreasing linearly to 50 % relative humidity at
40 °C
36
Operating temperature
–20 °C to 80 °C
Storage temperature
–20 °C to 80 °C
Transport temperature
–25 °C to 85 °C
Overvoltage category
II
Protection class
I
Degree of pollution
1
Degree of protection according
to IEC 60529
IP20
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10 Technical Data
10.3 Dimensions
Dimensions in mm. Note that the decimal places are separated by a comma in the
drawings.
Figure 9: P-763.22C
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10 Technical Data
10.4 Torque for Stainless Steel Screws (A2-70)
Screw Size
Minimum Torque
Maximum Torque
M6
4 Nm
6 Nm
M5
2.5 Nm
3.5 Nm
M4
1.5 Nm
2.5 Nm
M3
0.8 Nm
1.1 Nm
M2.5
0.3 Nm
0.4 Nm
M2
0.15 Nm
0.2 Nm
M1.6
0.06 Nm
0.12 Nm
10.5 Pin Assignment
7W2 Sub-D mix connector
Figure 10: Sub-D Mix connector 7W2: Front side with connections
Figure 11: Sub-D mix connector: Exemplary top view
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10 Technical Data
P-763 Stage
Pin
Signal
Function
A1
PZT
Piezo voltage
A2
Probe
Probe sensor signal (moving part of
the capacitive sensor)
1
Data ID chip
Data cable for ID chip
2
GND target and ID chip Ground of target and ID chip
3
GND PZT
Ground of piezo voltage
4
Free
-
5
Target
Target sensor signal (non-moving
part of the capacitive sensor)
Case
-
Shield
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11 Old Equipment Disposal
11 Old Equipment Disposal
In accordance with the applicable EU law, electrical and electronic equipment may not
be disposed of with unsorted municipal wastes in the member states of the EU.
When disposing of your old equipment, observe the international, national and local
rules and regulations.
To meet the manufacturer’s product responsibility with regard to this product, Physik
Instrumente (PI) GmbH & Co. KG ensures environmentally correct disposal of old PI
equipment that was first put into circulation after 13 August 2005, free of charge.
If you have old PI equipment, you can send it postage-free to the following address:
Physik Instrumente (PI) GmbH & Co. KG
Auf der Römerstr. 1
D-76228 Karlsruhe, Germany
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12 EC Declaration of Conformity
12 EC Declaration of Conformity
For the P­763, an EC Declaration of Conformity has been issued in accordance with
the following European directives:
2006/95/EC, Low Voltage Directive
2004/108/EC, EMC Directive
2011/65/EU, RoHS Directive
The applied standards certifying the conformity are listed below.
Safety (Low Voltage Directive): EN 61010-1:2010
EMC: EN 61326-1:2013
RoHS: EN 50581:2012
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