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Section 2: Installation
2.7 Cable Installation on Standard Units
Table 2-2 Additional Details About Signals Exchanged via the Gun Control-System I/O Cable
Digital Interlock Inputs (Required)
G1J2
Pins
Wire
Colors
TANK INTERLOCK
13
14
O
BK
Prevents the gun from being switched on unless all vacuum system doors and covers are
closed and locked.
VACUUM GAUGE
INTERLOCK
15
16
W
R
Ensures that product chamber ion gauge is on before gun is switched on.
AUXILIARY
INTERLOCK
18
19
G
R
Customer defined. Generally used with multipocket sources to ensure that the beam is OFF
while the turret is rotating. If no external input is supplied, this input must be jumpered ON.
GUN WATER
INTERLOCK
20
21
BL
R
Prevents the gun from being switched on unless it is receiving sufficient cooling water. Signal
to be supplied by a customer-installed flow switch.
POSITION
INTERLOCK
22
23
Y
R
If supplied by a beam sweep controller, this input switches off the gun if the beam travels
beyond the sweeper’s programmed position limits. If signal is not supplied by a sweep
controller, these pins must be jumpered.
Signal Name
Function
Analog Control Input
Signal Name
REMOTE EMISSION
CURRENT REQUEST
G1J2
Pins
Wire
Colors
56
57
O(+)
R(-)
Function
If the gun control unit's REMote/RANGE switch is in the REMOTE position, this input linearly
controls emission current. 0 V = min. current; +10 V = full scale. On standard FPS units (i.e.,
PN 0620-6604-0), full scale = 600 mA. On units equipped with FPS PN 0620-6604-2, full scale
= 1 A. NOTE: In both cases, the actual maximum emission current output is 600 mA.
Digital Control Inputs
G1J2
Pins
Wire
Colors
REMOTE
GUN GO OFF*
/ENABLE
5
6
G
BK
A momentary open pulse switches off the gun. If all gun control interlocks are made, the gun
can be switched on again. NOTE: If these pins are not connected to a remote contact closure,
they must be jumpered together, or the gun cannot be switched on.
REMOTE
GUN GO ON
7
8
BL
BK
If all gun control interlocks are made and the GUN GO OFF*/ENABLE loop is closed, a 2-sec.
contact closure across these pins switches on the gun.
FILAMENT CURRENT
MONITOR
24
25
Y
BK
A 0 to 7.5 volt signal proportional to 0-75 amperes is available for driving a remote meter.
The impedance should be 1 megohm or higher.
FILAMENT BIAS SET
26
27
BN
BK
This input controls the filament bias current. Range: 0 V dc to +10 V dc. On all FPS units,
0 V dc = 0 A. On standard FPS units (i.e., PN 0620-6604-0), +10 V dc = 50 A. On units
equipped with FPS PN 0620-6604-2, +10 V dc = 100 A.
G1J2
Pins
Wire
Colors
GUN IS READY
1
2
R
BK
Indicates that all gun control interlocks are made and that the GUN GO OFF*/ENABLE loop is
closed, so the gun can be switched on.
GUN IS ON
3
4
W
BK
Indicates that the gun is switched on.
G1J2
Pins
Wire
Colors
50
51
BR(+)
R(-)
Signal Name
Function
Digital Outputs
Signal Name
Function
Analog Output
Signal Name
ACTUAL EMISSION
CURRENT
0101-8241-0, Rev. F
Function
Linearly represents the actual emission current: 0 V = 0 A; 10 V = 600 mA.
2-17
CV-6SLX Technical Manual