Download GateKeeper Inert Gas Purifiers
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GATEKEEPER® INERT GAS PURIFIERS Cost-effective, environmentally friendly gas purification GATEKEEPER® INERT GAS PURIFIERS cost-effective, environmentally friendly gas purification Overview Available for point-of-use, area and bulk applications, GateKeeper® inert gas purifiers are designed for use with N2 , He, Ne, Kr, Xe, Ar, halocarbons and light hydrocarbons. The purifiers remove O2, H2, CO, CO2 and H2O to sub-ppb (part-per-billion) levels; SO2 to sub-ppt (part-per-trillion) levels. Features and Benefits Cost-effective • Regenerable for low cost of ownership • Gas purification improves process consistency, increases product yields and lengthens tool life • Transforms low-purity gas into UHP grade, reducing process costs Environmentally Friendly • Regenerable – eliminates disposal issues Process Protection • Consistently delivers ultrapure gas • Guards against bulk gas purifier breakthrough, impurity spikes from liquid storage tanks, cylinder changeouts and unexpected contaminants in the process • Does not release hydrocarbons that may contaminate the process • Low pressure drop across purifiers • CE certified to the Pressure Equipment Directive (PED) and manufactured in an ISO 9001:2000 facility • Backed by global service and support staff Safe and Simple to Use • Easy to install • Uses ambient temperature purification technology – no power or heat required • No moving parts General Specifications Materials of construction: 316L stainless steel, electropolished 10 Ra, except for the 45M model (Cr-Mo steel, SA 372, Grade F, Class 70) Gases purified: N2, He, Ne, Kr, Ar, halocarbons, light hydrocarbons Outlet purity: <1 ppb H2 , CO and CO2 ; <100 ppt H2O, O2 ; the 45M model is <100 ppb for all contaminants Outlet particle filtration: 30KF to 75KF, 300KF to 10MH 0.003 µm 316L stainless steel 100KF 0.003 µm nickel 45M, 200M 20 µm 316L stainless steel Media: Nickel metallic/metal oxide Maximum differential pressure: 1379 kPa (200 PSID) Minimum operating pressure: 101 kPa (14.7 PSIA) Leak rating: 30KF to 10MH 1 ×10 -9 atm-cc/sec 45M 1 ×10 -3 atm-cc/sec 200M 4 ×10 -9 atm-cc/sec Maximum inlet challenge of contaminant to maintain product efficiency: 10 ppm (part-per-million) Lifetime: One year at nominal flow rate with 1 ppm inlet challenge of moisture Maximum operating temperature: 65°C (149°F) Operating Specifications Model Maximum Nominal Flow Rate Flow Rate (SLPM) (SLPM) Maximum Operating Pressure Purifier Only 1 Maximum Operating Pressure Purifier with Options 2 Pressure Drop 3 35KF 1 0.5 19995 kPa (2900 PSIG) 1724 kPa (250 PSIG) 3.4 kPa (0.5 PSID) 70KF 3 1 19995 kPa (2900 PSIG) 1724 kPa (250 PSIG) 4.8 kPa (0.7 PSID) 100KF 20 2 6895 kPa (1000 PSIG) 1724 kPa (250 PSIG) 27.6 kPa (4 PSID) 300KF 50 7 4826 kPa (700 PSIG) 1724 kPa (250 PSIG) 34.5 kPa (5 PSID) 500KF 60 12 4826 kPa (700 PSIG) 1724 kPa (250 PSIG) 48.3 kPa (7 PSID) 500KFHP 60 12 19995 kPa (2900 PSIG) 19995 kPa (2900 PSIG) 48.3 kPa (7 PSID) 700KF 120 18 4826 kPa (700 PSIG) 1724 kPa (250 PSIG) 48.3 kPa (7 PSID) 2500KH 300 60 1724 kPa (250 PSIG) 1724 kPa (250 PSIG) 17.2 kPa (2.5 PSID) 5000K 500 130 1724 kPa (250 PSIG) 1724 kPa (250 PSIG) 62.1 kPa (9 PSID) 1724 kPa (250 PSIG) 1⁄2″– 62 10MH 1000 220 1724 kPa (250 PSIG) 45M 4 5000 1100 20684 kPa (3000 PSIG) 20684 kPa (3000 PSIG) <758 kPa (<110 PSID) 200M 5 20000 3500 1379 kPa (200 PSIG) 1379 kPa (200 PSIG) 27.6 kPa (4 PSID) kPa (9 PSID) kPa (5.3 PSID) 3⁄4″– 36.5 Drop-in Replacements for Waferpure® Purifiers 30KF (Micro) 1 0.5 19995 kPa (2900 PSIG) 1724 kPa (250 PSIG) 3.4 kPa (0.5 PSIG) 75KF (Mini-XL) 5 1 19995 kPa (2900 PSIG) 1724 kPa (250 PSIG) 10.3 kPa (1.5 PSIG) 300KF (Megaline) 50 7 4826 kPa (700 PSIG) 1724 kPa (250 PSIG) 34.5 kPa (5 PSIG) 1 Do not use under vacuum. Minimum pressure should be 1 atm (14.7 PSIA). 2 Pressure limited by standard valves, higher pressures available; please consult your local sales representative. 3 Pressure drop at maximum flow rate and 90 PSIG (620 kPa) inlet pressure. For a detailed pressure drop curve and other pressures or flows, please consult your local sales representative or visit www.entegris.com. 4 Model only available for countries that recognize ASTM US standards and certifications; not CE certified; not a UHP product. 5 Model only available for countries that recognize ASTM US standards; not currently CE certified; contact Entegris if needed for EU application. All product information is subject to change without notice. Facility Specifications Configuration (inlet/outlet) Approximate Weight Model Fitting Sizes 35KF 1⁄4″ face seal Length Diameter male/male 70KF 1⁄4″ face seal male/male 100KF 1⁄4″ face seal male/male 0.5 kg (1.1 lb) 300KF 1⁄4″ face seal male/male 500KF 1⁄4″ face seal male/male 500KFHP 1⁄4″ face seal male/male 700KF 1⁄4″ face seal male/male 2500KH 1⁄4″ face seal 1⁄2″ face seal 5000K 0.3 kg (0.66 lb) 8.4 cm (3.31″) 3.8 cm (1.5″) Centered 0.4 kg (0.88 lb) 11.4 cm (4.5″) 3.8 cm (1.5″) Centered 8.4 cm (3.31″) 15.2 cm (6″) 6 1.12 cm (0.44″) 1.8 kg (4 lb) 20.8 cm (8.2″) 5.1 cm (2″) Centered 1.6 kg (3.5 lb) 20.2 cm (7.94″) 7.6 cm (3″) Centered 2.5 kg (5.5 lb) 25.4 cm (10″) 7.6 cm (3″) Centered 1.6 kg (3.5 lb) 25.4 cm (10″) 7.6 cm (3″) Centered male/male male/male 9.5 kg (20.9 lb) 9.5 kg (20.9 lb) 43.9 cm (17.3″) 44.7 cm (17.6″) 10.2 cm (4″) 10.2 cm (4″) Centered Centered 1⁄2″ face seal female/male 15.5 kg (34.2 lb) 115.8 cm (45.6″) 10.2 cm (4″) Centered 10MH 1⁄2″ face seal 3⁄4″ face seal female/male 27 kg (59.5 lb) female/female 41 kg (90.3 lb) 97.4 cm (38.36″) 143.3 cm (56.4″) 15.2 cm (6″) 15.2 cm (6″) Centered Centered 45M 1⁄2″ NPT female/female 360 kg (794 lb) 147.3 cm (58″) 24.4 cm (9.6″) Centered 200M 2″ tube stub — 454 kg (1000 lb) 165.9 cm (63.3″) 6 111.8 cm (44″) 7 Fitting Offset 81.8 cm (32.2″) 8 Drop-in Replacements for Waferpure® Purifiers 30KF (Micro) 1⁄4″ face seal male/male 0.3 kg (0.66 lb) 8.4 cm (3.31″) 3.8 cm (1.5″) 0.97 cm (0.38″) 75KF (Mini-XL) 1⁄4″ face seal male/male 0.4 kg (0.88 lb) 12.7 cm (5″) 3.8 cm (1.5″) 0.97 cm (0.38″) 300KF (Megaline) 1⁄4″ face seal male/male 1.8 kg (4 lb) 20.8 cm (8.2″) 5.1 cm (2″) Centered 6 Height 7 Depth 8 Width Options GC 300 Manifold 3 Valve Bypass Manifold 5 Valve Bypass Manifold 4 Valve Changeover Manifold 8 Valve Changeover Manifold Moisture Breakthrough Indicator 9 Model Isolation Valves 35KF Yes Yes Yes Yes 70KF Yes Yes Yes Yes 100KF Yes 300KF Yes 500KF Yes Yes Yes Yes Yes Yes 500KFHP Yes 700KF Yes 2500KH Yes 5000K included 10MH included Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes 45M 200M included Drop-in Replacements for Waferpure® Purifiers 30KF (Micro) Yes Yes Yes Yes 75KF (Mini-XL) Yes Yes Yes Yes 300KF (Megaline) Yes 9 External to purifier for models 30KF – 700KF. Yes Yes Ordering Information GateKeeper ® Gas Purifiers Part Number CE* XXXXX X XX XXX R Additional Processing R = Regeneration Fitting Gas Series Filter Model 35K 70K 100K 300K 500K 700K 2500K SS5000K 10M F = 0.003 µm H = 0.003 µm (low pressure drop) 4R = 8R = 8Y = 12W = C = Corrosive H = Hydrogen I = Inert N = Nonreactive 0 = Optics SK = Hydride LK = Carbon monoxide * For all models except 45M and 200M. To order 45M and 200M: 45MI SS200MI Note: Not all models are available with all gas series or fittings; contact your salesperson for more information. Note : For Mykrolis® replacement, specify 30K, 75K or 300K for model. Note : This product is considered a dangerous good for shipping purposes under IATA/ICAO regulations. 1⁄4″ face seal male-to-male face seal male-to-male 1⁄2″ face seal female-to-male 3⁄4″ face seal female-to-female 1⁄2″ Example: CE2500KHI8RR Model = 2500K Filter = 0.003 µm (low pressure drop) Gas series = Inert Fitting = 1⁄2″ face seal male-to-male Additional processing = Regeneration For dimensional drawings, pressure drop curves and more, refer to the user manual or go to www.entegris.com, click on Products and Services, and click on the link to Gas Microcontamination. An online “Product Wizard” is available to help you specify the ideal purifier for your application or you can contact our Gas Purification Specialists directly at 1-858-452-0124 or 1-800-511-9761 toll free in the U.S. All products with the exception of the 45M, SS5000K and 200M models meet CE Directive 97/23/EC requirements. Contact Customer Service to learn about our regeneration service. For More Information Please call your Regional Customer Service Center today to learn what Entegris can do for you. Visit www.entegris.com and select “Regional Customer Service Centers” for the center nearest you. Terms and Conditions of Sale All purchases are subject to Entegris’ “Terms and Conditions of Sale.” To view and print this information, visit Entegris’ website at www.entegris.com and select the Legal Notices link from the footer found on the home page. Entegris®, Mykrolis®, Waferpure® and GateKeeper® are registered trademarks of Entegris, Inc. ENTEGRIS, INC. Corporate Headquarters / 3500 Lyman Boulevard / Chaska, Minnesota 55318 USA Customer Service Tel. 952-556-4181 / Customer Service Fax 952-556-8022 www.entegris.com The materials integrity management company ©2007 Entegris, Inc. All rights reserved Printed in USA 4506-5120ENT-0807