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DRY FINE SYSTEM
CB-035 5
IAGD3
IAGD4
IAGD5
AVB
MVB
OGD
MGD
PGM
AGD
AVB
AVB
P
AVB
P
AVB
AVB
RC2000
2F
FCS
2F
Clean room
PGM
1F
IAGD4
1F
Utility area
PT
IAGD4
AGD012R
P.6
AGD112R AGD212R
P.10
P.12
OGD120R
P.26
MGD120R
P.28
P.30
VG
P.36
P.38
PGM
P.44
IAGD3
P.54
IAGD4
P.62
IAGD5
P.72
FCS500/FCS1000
FCS500
P.86
FCS1000
P.90
RC2000
P.96
AVB
7
P.116
AVB
3
P.128
AVB
2
P.136
AVB
3
P.132
AVP
2
P.144
MVB 17
P.150
MVB 0
P.152
MVP 0
P.154
EVB 17
P.156
HVB212
P.166
HVB312
P.166
AC100V
AC200V
HVB412
DC 12V
DC 24V
P.166
HVB512
P.166
HVB112
P.172
HVB41
AC100V
AC200V
P.174
DC 24V
HVB6712
P.176
HVL 142
AC100V
AC200V
DC 24V
P.180
CONTENTS
CONTENTS
AGD
R·MGD R·OGD
R Series
AGD012R Series
AGD012R Series
AGD0 1 R
AGD0
R-4RM
AGD0
R-4R
4R
AGD112R Series
AGD212R Series
AGD1122s!'$12R Series
AGD1 1 R
AGD1
AGD2
R-4RM
R-6RM
AGD1
AGD2
R-4R
R-6R
4RM
AGD2 1 R
AGD1
AGD2
6R
R-4S
R-6S
AGD
AGD0
AGD1
AGD2
AGD 1
1 R
R Series
R
R
R
4
RJ
FFF
AGD0
AGD 1
1R
Y
11
4
RJ
FFF
R Series
AGD0
R Series
AGD0
AGD0
AGD0
R-4RJ
R-4S
R-4W
AGD0
AGD0
R-4RJ-FM
MF
R-4R-FM
MF
AGD0
AGD0
AGD0
AGD0
AGD0
R-4RJR-4RR-4RM-MMM
R-4W-
R Series
AGD0
AGD01RAGD01RAGD01R-
R Series
-4RJ-4R-4RM-MMM
AGD1
AGD1
AGD1
R-4RJ
R-4W
AGD1
AGD1
R-4RJ-FM
MF
R-4R-FM
MF
R Series
AGD1
AGD1
AGD1
AGD1
AGD1
R Series
R-4RJR-4RR-4RM-MMM
R-4W-
AGD1
AGD11RAGD11RAGD11R-
-4RJ-4R-4RM-MMM
R Series
AGD2
AGD2
AGD2
AGD2
AGD2
AGD2
AGD2
AGD2
R Series
R-6RJ
R-6W
R-8S
R-8RM
R-8R
R-8RJ
R-8W
AGD2
AGD2
AGD2
R-6RJ-FM
MF
R-6R-FM
MF
AGD2
AGD2
R-8RJ-FM
MF
R-8R-FM
MF
R Series
AGD2
AGD2
AGD2
AGD2
AGD2
R Series
R-6RJR-6RR-6RM-MMM
R-6W-
AGD2
AGD21RAGD21RAGD21R-
-6RJ-6R-6RM-MMM
R Series
AGD Series
AGD Series
OGD120R Series
OGD120R Series
OGD10R
4RM
K
OGD20R
6RM
K
OGD10R-4RMOGD20R-6RM-
OGD10R-4ROGD20R-6R-
OGD10R-4SOGD20R-6S-
MGD120R Series
MGD120R Series
MGD10R
4RM
MGD20R
6RM
MGD10R-4RM
MGD20R-6RM
MGD10R-4R
MGD20R-6R
MGD10R-4S
MGD20R-6S
OGD
0R MGD 0R Series
OGD10R
OGD20R
MGD10R
MGD20R
O GD 1 0R
4
RJ
MF
K
OGD10R Series
MGD10R Series
OGD10R-4RJ-K
OGD10R-4W-K
MGD10R-4RJ-K
MGD10R-4R-K
MGD10R-4RM-K
MGD10R-4W-K
MGD10R-4S-K
OGD10R-4RJ-FM
MF -K
OGD10R-4R-FM
MF -K
MGD10R-4RJ-FM
MF -K
MGD10R-4R-FM
MF -K
OGD10R Series
MGD10R Series
OGD10R-4RJ-K
OGD10R-4R-K
OGD10R-4RM-MMM-K
OGD10R-4W-K
MGD10R-4RJ-K
MGD10R-4R-K
MGD10R-4RM-MMM-K
MGD10R-4W-K
OGD20R Series
MGD20R Series
OGD20R-6RJ-K
OGD20R-6W-K
MGD20R-6RJ-K
MGD20R-6R-K
MGD20R-6RM-K
MGD20R-6W-K
MGD20R-6S-K
OGD20R-6RJ-FM
MF -K
FM
OGD20R-6R-MF -K
MGD20R-6RJ-FM
MF -K
FM
MGD20R-6R-MF -K
OGD20R Series
MGD20R Series
OGD20R-6RJOGD20R-6ROGD20R-6RM-MMM
OGD20R-6WMGD20R-6RJMGD20R-6RMGD20R-6RM-MMM
MGD20R-6W-
MGD Series
MGD
MGD
VG Series
1
2
3
4
5
6
VG Series
VG
05
F
CONTENTS
PGM Series
PGM series
PGM Series
0.1
0
0.1
0.2
0.3
0.4
PGM-30V
PGM-30
PGM-50
PGM-100
PGM-H-60
PGM-H-100
0.5
0.6
0.7
0.8
PGM Series
PGM Series
PGM
H
30
4R
S
1
2
3
4
5
PGM Series
PGM Series
CONTENTS
Integrated
Gas
System Series
IAGD3 IAGD4 IAGD5 Series
Integrated Gas System Series
Integrated Gas System Series
1992
1994
1996
1998
2000
2002
2004
2006
2008
IAGD5
W
IAGD4
W
IAGD3
CS
IAGD2
CS
IAGD
CS
Integrated Gas System Series
Integrated Gas System Series
IAGD3
MAGD3
IAGD3
04A
MAGD3-03A-12C-A
1
1
2
C
A
MAGD3 Series
Integrated Gas System Series
IAGD3
MOGD3
IAGD3
11C
MOGD3-11C-KA-S1
K
A
S1
MOGD3 Series
Integrated Gas System Series
IAGD3
MFGD3
IAGD3
11D
MFGD3-11D-1
1
Integrated Gas System Series
IAGD3
MCGP3
01D
MCGP3-01D 023-KA
IAGD3
023
KA
Integrated Gas System Series
IAGD3
IAGD3
IAGD3 Series
Integrated Gas System Series
IAGD4
IAGD4
NEW
MAGD4
R
02A
MAGD4-R-02A-W-12
W
1
2
MAGD4 Series
Integrated Gas System Series
IAGD4
MFGD4
IAGD4
11D
MFGD4-11D-W-1
W
1
Integrated Gas System Series
IAGD4
MCGP4
01D
IAGD4
W
MCGP4-01D-W-023-KA
023
KA
Integrated Gas System Series
IAGD4
IAGD4
IAGD4 Series
Integrated Gas System Series
IAGD4
MAGD4
IAGD4
02A
MAGD4-02A-W-12
W
1
2
Integrated Gas System Series
IAGD4
MOGD4
11D
IAGD4
W
MOGD4-11D-W-KA-S1
K A
S1
Integrated Gas System Series
IAGD5
IAGD5
NEW
MAGD5
R
02A
MAGD5-R-02A-W-12
W
1
2
MAGD5 Series
Integrated Gas System Series
IAGD5
MFGD5
IAGD5
11D
MFGD5-11D-W-1
W
1
Integrated Gas System Series
IAGD5
MCGP5
01D
IAGD5
W
MCGP5-01D-W-023-KA
023
KA
Integrated Gas System Series
IAGD5
IAGD5
IAGD5 Series
Integrated Gas System Series
IAGD5
MAGD5
IAGD5
02A
MAGD5-02A-W-12
W
1
2
Integrated Gas System Series
IAGD5
MMGD5
11D
IAGD5
W
K A
MMGD5-11D-W-KA-S1
MMGD5
1DV2
MMGD5-1DV2-D-K
D
K
S1
Integrated Gas System Series
NEW
CONTENTS
FCS500 Series
FCS500 Series
FCS500
H4 H4
FCS500
88
FCS500-B
B
P90
FCS500 Series
FCS500 Series
FCS1000 Series
FCS1000 Series
FCS1000
H8 H8
FCS1000
8
8
P90
FCS1000-E
FCS1000-E-P90
FCS1000-E-P94
FCS1000 Series
FCS1000 Series
FCS Series
FCS500
FCS500
FCS500
FCS1000
FCS
RC2000 Series
RC2000
8
LN
GY49B3E1
P90
RC2000 Series
RC2000 Series
RC2000 Series
G49D
RC
6
P02
P90
CONTENTS
EVB Series
EVB Series
EVB Series
AVB
7·MVB
17 Series
AVB
17 Series
AVB 17 Series
AVB 4 17
40K
AVB417-40K-4-DT5H3-H
4
D T5H 3
H
AVB 17 Series
AVB 17 Series
AVB
37 Series
AVB 37 Series
AVB 4 37
40K
AVB437-40K-4-DT5H3-H
4
D T5H 3
H
AVB 37 Series
AVB 37 Series
AVB
47 Series
AVB 47 Series
AVB 4 47
40K
AVB447-40K-4-DT5H3-H
4
D T5H 3
H
AVB 47 Series
S
M
AVB 47 Series
AVB
5
6
7
8
3 Series
AVB
5
6
7
8
3 Series
–
–
–
–
–
–
–
AVB
AVB
5
6
7
8
6
3 Series
1 3-
AVB613-40K-T5H3-H
40K
-
T5H
3 - H
AVB
AVB
3- K-
5
6
7
8
3 Series
MAIN
OPERATE
SERIAL
CKDCorporation
ORIFICE
MODEL
AIR OPERATED VALVE
for VACUUM
AVB
3 Series
AVB
3 Series
AVB
3 Series
AVB
3 Series
AVB
5
6
7
8
2 Series
AVB
5
6
7
8
2 Series
AVB
5
6
7
8
AVB 5
2 Series
1
2 - 25K -
AVB512-25K-T2H3D
- T2H
3
D -
AVB
AVB21-8T
AVB21-8T
5
6
7
8
2 Series
AVB
5
6
7
8
2 Series
AVB
2-
K
AVB
2-
K
AVB
2 Series
AVB932-X
AVB932-X0070
Series
AVP
5
6
7
8
2 Series
AVP
5
6
7
8
2 Series
AVP
5
6
7
8
AVP 6
2 Series
1
2 - 40K -
AVP612-40K-T2H3H
- T2H
3
H -
AVP
AVP21-8T
AVP21-8T
5
6
7
8
2 Series
AVP
5
6
7
8
AVP
2- K
AVP
2- K
2 Series
MVB
MVB
4 17
MVB417-40K
40K
17 Series
MVB
17 Series
5
6
7
MVB 0 Series
5
6
7
MVB 0 Series
5 0
MVB
MVB
0
25K
5
6
7
MVP 0 Series
5
6
7
MVP 0 Series
MVP
MVP 0
6 0
40K
EVB Series
EVB
EVB
4 17
40K
4D
S
05
2
17 Series
EVB Series
EVB Series
EVB Series
HVB Series
2
3
4
5
HVB 12 Series
2
3
4
5
HVB 12 Series
HVB
2 12
4RM
2
HVB212-4RM-2-2CB-DC24V
2C
B
DC24V
2
3
4
5
HVB 12 Series
2
3
4
5
HVB 12 Series
2
3
4
5
HVB 12 Series
2
3
4
5
HVB 12 Series
HVB112 Series
HVB112 Series
HVB 112
6N
5
AC100V
1
2
3
4
5
6
7
HVB112
HVB41 Series
HVB41 Series
HVB 41
HVB41
8N
5
3M
AC100V
HVB 67 12 Series
HVB6712 Series
HVB
6 12
12F
8
B
3N
AC100V
HVB6712 Series
HVB6712 Series
HVL 14 2 Series
HVL 14 2 Series
HVL
1
2
4S
6
5
AC100V
HVL 14 2 Series
HVL12-6-5
1
3
2
4
5
6
7
8
9
HVL42-6-5
9
8
7
6
5
4
3
2
1
HVL 14 2 Series
HVL12-6-5
DELAY ADJ.
HVL42-6-5
CONTENTS
MN3E000s-.%000 Series
MN3E000s-.%000 Series
MN3E000s-.%000 Series
MN4E0
4E00
MN3E000s-.%000 Series
N3E0010/N3E010
N3E00110/N3E0110
N3E0020/N3E020
N3E00210/N3E0210
N3E00660/N3E0660
N3E0066S0/N3E066S0
N3E00670/N3E0670
N3E0067S0/N3E067S0
N3E00770/N3E0770
N3E0077S0/N3E077S0
N3E00760/N3E0760
N4E0010/N4E010
N4E030
N3E0076S0/N3E076S0
N4E0020/N4E020
N4E040
N4E050
MN3E000s-.%000 Series
-.%s-.% Series
-.%s-.% Series
P70
-.%s-.% Series
N 3 E00 1 0
C3
MN 4 E00 1 0
C3
M
R
M T53
W EF
E
3
5
3
-.%s-.% Series
-.%s-.%Series
N 3 E00 1 0
C3
MN 4 E00 1 0
C3
M
R
M T6G1
W EF
E
3
5
3
-.%s-.%Series
MEMO
MN 3 E00-T30 Series
N4E0-MPD
N4E0-MPD
N4E0-MPD
N4E0-MPD
MN 3 E00-T50 Series
N4E0-MPD
N4E0-MPD
N4E0-MPD
N4E0-MPD
MN 3 E00-TM Series
N4E0-MPD
N4E0-MPD
Series
MN 3 E00-T6
N4E0-MPD
N4E0-MPD
N4E0-MPD
N4E0-MPD
-.%s-.%Series
N4E0-MPD
N4E0-MPD
-.%s-.%Series
-.%s-.%Series
-.%s-.% Series
-.%s-.%Series
P70
-.%s-.%Series
N
3 E0 66 0
C4
M N
4 E0 1 0
C4
M
R
D2
F
M T53 D2 W F
3
5
3
-.%s-.%Series
-.%s-.%Series
N
3 E0 66 0
C4
M N
4 E0 1 0
C4
D2
M
R
M
T6G1
F
D2 W F
3
5
3
-.%s-.%Series
MEMO
MN43E0-T30 Series
N4E0-MPD
N4E0-MPD
MN43E0-T50 Series
N4E0-MPD
N4E0-MPD
MN43E0-TM Series
N4E0-MPD
Series
MN43E0-T6
N4E0-MPD
N4E0-MPD
-.%s-.%Series
3 5R
1P
-.%s-.%Series
N4E0-MPD
N4E0-MPD
-.%s-.%Series
-.%8s-.%8 Series
MN 4 EX0
C4
R
M T53
E
5
3
-.%8s-.%8Series
N4E0-MPD
N4E0-MPD
MN3E000s-.%000 Series
MEMO
MN 4 E0
8
0 - CX - R - M - T50RD2
W
F - 10 - 3
N4E0-T 50R
N4E0-T
N
E00
0-
N
E00
0-
N
E00
0-
N
E00
0-
N 3
E0 1 0- C6
N 4
E0 1 0- C4
N 4
E0 2 0- C4
N 4
E0 3 0- C4
N4E0-MPS
N4E0-MPD
N4E0-Q Z - 8 - S
N4E0-Q-8
N4E0-Q
-
-
-
N4E0-R A - FL - C8
N4E0-R
-
-
N4E0-R
-
-
N4E0-E L
N4E0-E
L2=
N4E0-JOINT-PTN2-M3
N4E0-SOCKET-
-
N4E0-JOINT-PTN2-M5
N4E0-JOINT-PTN2-6
3M0-SOCKET-SET
N4T-CABLE-D0
N4E0-TM-CONNECTOR
-
MN
EX0
MN
E00
0
MN
E0
0
N4E0-T
N4E0-T
N
E00
0-
N
E00
0-
N
E00
0-
N
E00
0-
N
E0
0-
N
E0
0-
N
E0
0-
N
E0
0-
N4E0-MPS
N4E0-MPD
N4E0-Q
-
-
-
N4E0-Q
-
-
-
N4E0-Q
-
-
-
N4E0-R
-
-
N4E0-R
-
-
N4E0-R
-
-
N4E0-E
N4E0-E
L2=
N4E0-JOINT-PTN2-M3
N4E0-SOCKET-
-
N4E0-JOINT-PTN2-M5
N4E0-JOINT-PTN2-6
3M0-SOCKET-SET
N4T-CABLE-D0
N4E0-TM-CONNECTOR
-
MN4GA MN4GB Series
FAC Series
CONTENTS
WET FINE SYSTEM
CB-031 2
P7
P5
P71
P51
P72
P52
P73
P53
CKD
CAD DATA
CKD
1
http://www.ckd.co.jp/
CKD
CKD
1
2
CD-ROM
CAD DATA