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Converting Microsoft Excel files into FILMeasure n and k files
For wavelength versus n or wavelength versus k data saved in Excel (*.xls) format, the data can be
directly saved as material files that can be read by FILMeasure.
For .nnn and .kkk files.
For both n and k files, the data should follow the format shown below, where the wavelength
values, in units of nanometers, are in the first column, and the n or k values are in the second. Note
that the version number (cell B1) refers to version of the file. For this cell, you can use 1. The material number (cell B2) refers to what material category the file corresponds to. The material categories (and their corresponding numbers) are: metal (1), semiconductor (2), insulator (3),
photoresist (4), and other (5). By putting the correct value for the material number, the file will automatically be sorted into the correct category when selecting the material in the Edit Recipe window.
To save the file created by Microsoft Excel, go to File>Save As… For Save as Type: choose
CSV (Comma delimited) (*.csv). For n files, save the file as “FILENAME.nnn”, and for k files,
save the file as “FILENAME.kkk” (FILENAME represents the name you wish to call the file;
note that quotation marks must be used to enclose the filename in Excel to force the extension to
.nnn or .kkk). The file can then be saved to the desktop, and Imported using the File>Import>Material File option
For .fitnk files.
The data should follow the format of shown below, where the wavelength values, in units of nanometers, are in the first column, index of refraction (n) in the second, and extinction coefficient (k) in
the third.
The first few columns of the file should be identical to the figure below the only exception being
cell B3 which should contain a number describing the material category. The material categories