Download 10 - Brooks Instrument

Section 1 Introduction
Installation and Operation Manual
X-TMF-5860i-MFM-eng
Part Number: 541B110AAG
November, 2008
Brooks® Model 5860i
1-1 Purpose
The Brooks® Model 5860i Flow Meter is a mass flow measurement device
designed for accurately measuring flows of gases. This instruction manual
is intended to provide the user with all the information necessary to install,
operate and maintain the Brooks 5860i Mass Flow Meter. This manual is
organized into five sections:
Section 1 - Introduction
Section 2 - Installation
Section 3 - Operation
Section 4 - Maintenance
Section 5 - Replacement Parts
It is recommended that this manual be read in its entirety before attempting
to operate or repair the Model 5860i.
1-2 Description
The Brooks Model 5860i Mass Flow Meter is widely used where manual,
electronic or computer controlled gas handling occurs. The Model 5860i
consists of two basic units: a flow sensor and an integral electronic signal
conditioner. This combination produces a stable gas flow indication, which
eliminates the need to continuously monitor and compensate for changing
gas pressures and temperatures. Standard features include:
Fast Response rapidly indicates changes in actual mass flow rate. Refer
to Figure 1-1.
Removable Cleanable Sensor permits the user to clean or replace the
sensor. Refer to Section 4-4.
Output Limiting prevents possible damage to delicate data acquisition
devices by limiting the output to +6.8 Vdc and -.7 Vdc on the voltage
signal output and 0 to 26 mA on the current output.
1-3 Specifications
1-1