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Contents
Table of Contents
2.3
2.4
Removing the Cryopump......................................................................................................... 2-13
Re-Installing the Cryopump..................................................................................................... 2-14
CHAPTER 3
Operation .............................................................................................................................. 3-1
3.1
3.2
Introduction................................................................................................................................ 3-1
Cryopump Operation ................................................................................................................. 3-1
3.2.1 Using the Contact Baffle .................................................................................................. 3-2
3.2.2 Initiating High Vacuum .................................................................................................... 3-2
3.2.3 Ending High Vacuum ....................................................................................................... 3-3
3.2.4 Regenerating the Sorption Pump ...................................................................................... 3-4
3.3 Using the "Wait" Sequence Command ...................................................................................... 3-4
CHAPTER 4
Troubleshooting and Maintenance..................................................................................... 4-1
4.1
4.2
Introduction................................................................................................................................ 4-1
Troubleshooting ......................................................................................................................... 4-1
4.2.1 Failure to Reach High Vacuum ........................................................................................ 4-1
4.2.2 Exposure to Atmosphere................................................................................................... 4-2
4.2.3 Flapper Valve Fails to Open ............................................................................................. 4-2
4.2.4 Flapper Valve Fails to Close............................................................................................. 4-2
4.2.5 System Fails to Regenerate............................................................................................... 4-3
4.2.6 Leak in the System............................................................................................................ 4-3
4.2.7 Vacuum Gauge Does Not Power Up ................................................................................ 4-3
4.2.8 Cryopump Pumping Tube Fits Poorly in Dewar .............................................................. 4-3
4.3 Out-of-Dewar Regeneration Procedure ..................................................................................... 4-4
4.3.1 Remove the Cryopump from the Dewar........................................................................... 4-4
4.3.2 Perform the Out-of-Dewar Regeneration ......................................................................... 4-5
4.3.3 Re-Install the Cryopump................................................................................................... 4-6
4.4 Wiring Diagram ......................................................................................................................... 4-7
INDEX........................................................................................................................... Index-1
Figures.................................................................................................................................... vii
Tables ..................................................................................................................................... vii
vi
PPMS Cryopump User’s Manual, Rev. C-2
June 2005
Quantum Design