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Download Automatic supervised classifier setup tool for semiconductor defects
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U.S. Patent Apr. 15, 2008 US 7,359,544 B2 Sheet 7 0f 11 Classifier Creation 122 / 601 0 manual codes exist? Supervised mode’? Use existing Issue warning that manual classes and training set will be lost Execute Manual Classification Process (102 of Fig. 1) 616 ‘ N613 Create training set for Automatically classi?er based on group defects into implementing max/ groups and assign min procedure on classi?ed defects unique class code Determine and present information regarding accuracy and purity of 3 608 ‘ Determine and present information 614 regarding accuracy ~/\/ and purity of existing classifiers classi?cation r 609 User selects one of 3 classi?ers FIG. 6 each group a
