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Hummer6.2
summary
Plating--operating
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1.
2.
3.
4.
5.
MainPoweroff.
lnstallsputtersource.
on stage.
Putspecimens
Installglasschamberandlowertopplate.
Set operatingcontrols:
Set to
Control
off
Main PowerSwitch
off
VoltageSwitch
0
VoltageControl
off
Gas On/OffSwitch
Manual
Manual/AutoSwitch
off
Pu l se
Plate
Mode Switch
6. MainPoweron.
7. Flushchamber
withprocessgasthreetimes.
8. Stabilizevacuumat 40 to 60 millitorr.
9. Gas OniOffSwitchon. VoltageSwitchon.
of 15 milliamps
10.AdjustFineGasControlandVoltageControlfor stableconditions
at 60 to 80 millitor.
Switchto
timing:setTimerto desiredtimeand set Manual/Auto
11. Forautomatic
Auto.
12. Forpulseoperation:
set PulseSwitchon.
shutdownsystem:
13. Whendesiredplatingtimehasbeenreached,
a. VoltageControlto O.
b. VoltageSwitchoff.
c. Gas OnlOffSwitchoff.
d. Manual/Auto
Switchto Manual.
e. PulseSwitchoff.
f. MainPoweroff.
g. Allowsystemto ventto atmosphere.
14. Removespecimens.
II
"l
[ul
Afterprocessing
all yourspecimens:
. Turnoff processgas mainvalveat tank.
. Cleandeposition
chambercomponents.
granted
to copythispage.
@1993,
AnatechLtd. Permission
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