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+5.00V
100.0
(0 ~ +5.00V)
Readout
INT
+15V
Power
~220V
FLOW READOUT BOX
SET
EXT
(0 ~ +5.00V)
Setpoint
Output
Power Com.
Signal Com.
-15V
out
MASS FLOW
CONTROLLER
Amplifier
set
Comparator
+15V
OFF
Drive
I
Valve
AUTO
Override
Ru
PURGE
Rd
-15V
Sensor
Valve
OUTLET
INLET
Bypass
Figure3. Operation Principle of MFC
The outputting flow testing voltage from MFC is a direct ratio with the flow through the bypass, full scale flow rate
testing outputting voltage is +5V. The Flow control ranges of MFC is (2~100)% F.S.. When the set point <2% F.S.
the valve will shut off. MFC and MFM flow resolving power is 0.1% F.S..
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