Download Model 5850E Mass Flow Controller

Contents
Installation and Operation Manual
X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September, 2009
Brooks® Model 5850E
Section 5
Parts List
5-1
General ............................................................................. 5-1
Section A
CE Certification
CE Certification of Mass Flow Equipment ................................... A-1
Warranty, Sales/Service Contact Information ...................... Back Cover
Figures
Figure
Number
Page
1-1
Command Steps, Soft Start Disabled ................................ 1-2
1-2
0-100% Command Step, Soft Start Enabled ..................... 1-2
2-1
2-2
2-3
2-4
Model 5850E Dimensions ................................................. 2-3
Model 5850E Card Edge Connector Comparison Guide ... 2-4
Model 5850E Card Edge Connector Hookup Diagram ...... 2-5
D-Type Connector Pin Arrangement ................................. 2-5
3-1
3-2
3-3
3-4
3-5
3-6
3-7
Flow Sensor Operational Diagram .................................... 3-2
Flow Control System Block Diagram ................................. 3-3
Card Edge PC Board Jumper Location & Function ........... 3-4
D-Connector PC Board Jumper Location & Function ........ 3-5
Model 5850E Calibration Connections .............................. 3-6
Adjustment Potentiometer Location .................................. 3-9
Fast Response Adjustment .............................................. 3-11
4-1
4-2a
4-2b
4-3
4-4
Torque Sequence for the Valve Retainer Plate .................. 4-7
Valve Adjusting Spacer Locations (N.C.) .......................... 4-11
Valve Adjusting Spacer Locations (N.O.) .......................... 4-12
Voltmeter Connections for Valve Adjustment ................... 4-14
Example Nomograph ....................................................... 4-18
5-1
Model 5850E Parts Drawing .............................................. 5-1
Tables
Table
Number
ii
Page
2-1
Recommended Filter Size ................................................. 2-6
4-1
4-2
4-3
4-4
4-5
Bench Troubleshooting ...................................................... 4-4
Sensor Troubleshooting .................................................... 4-5
Conversion Factors (Nitrogen Base) ................................ 4-15
Model 5850E Orifice Sizing Nomograph .......................... 4-19
Model 5850E Standard Restrictors ................................... 4-23
5-1
5-2
Model 5850E Replacement Parts List ............................... 5-2
Tool and Spare Part Kits for 5850E Series ........................ 5-4