Download SunSource™ Round Sputtering Sources

DOCUMENT NO. 251070, REVISON E
INSTALLATION, OPERATION AND
USE OF SUNSOURCE™ ROUND PLANAR
MAGNETRON SPUTTERING SOURCES
22 JANUARY 2009
Application Note -Grounding, Advanced Energy Industries, Inc., 1625 Sharp Point Drive, Fort
Collins, CO 80525, 1991. Tel: (970) 221-4670.
Harold C. Ritchey, Application Note - Tuner Topics, Advanced Energy Industries, Inc., 1625
Sharp Point Drive, Fort Collins, CO 80525, 1988. Tel: (970) 221-4670.
Larry Knipp and Gary Johnson, Application Note - Basic RF Principles, Advanced Energy
Industries, Inc., 1625 Sharp Point Drive, Fort Collins, CO 80525, 1990. Tel: (970) 221-4670.
Technote 34 - Impedance Matching, Advanced Energy Industries, Inc., 1625 Sharp Point Drive,
Fort Collins, CO 80525, 1992. Tel: (970) 221-4670.
Copyright© 1997 by Materials Science, Inc.
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