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Introduction The EXAxt ZR series of Integrated-type Zirconia High-temperature Humidity Analyzers was developed for humidity control in various industrial processes. There are versions for virtually every application. Optional accessories are also available to improve measurements and automate calibration. An optimal control system can be realized by adding appropriate options. This instruction manual describes installation, operator, inspection and maintenance for almost all of the equipment related to the EXAxt ZR. You may skip any section(s) on the equipment which is/are not included in your system. Regarding the HART communication Protocol, refer to IM 11M12A01-51E. IM11M12A01-51E is titled ''Model EXAxt ZR series HART protocol''. The separate version (sensor and converter separated) is described in IM 11M12A0103E. <Before using the equipment, please read any related descriptions in this manual for the equipment and the system you have, on appropriate use and operation of the EXAxt ZR.> Models and descriptions in this manual are listed below. Product Name Integrated type Oxygen Analyzer ZO21R-L ZA8F ZR20H Probe protector Flow setting unit (for manual calibration use) Automatic Calibration unit s s s s s s - Calibration gas unit case (Part No. E7044KF) Check valve (Part No. K9292DN, K9292DS) s s s s ZO21S Dust filter for the detector (Part No. K9471UA) Standard gas unit s s s CMPL: Customer Maintenance Parts List IM 11M12A01-05E 6th Edition: Sep. 2006 (YK) All Rights Reserved, Copyright © 2000, Yokogawa Electric Corporation IM 1M12A01-05E Specification s Description in this manual Installation Operation Maintenance CMPL s s s s Model ZR202G s s s s s s s T.Int.1E i