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This manual consists of twelve chapters. Please refer to the reference chapters for installation, operation and maintenance. Chapter Outline 1. Overview Equipment models and system configuration examples 2. Specifications Standard specification, model code (or part number), dimension drawing for each equipment Installation method for each equipment 3. Installation 4. Piping 5. Wiring Examples of piping in three standard system configurations Wiring procedures such as Power supply wiring , output signal wiring or others 6. Components 7. Startup These are described in this manual Basic procedure to start operation of EXAxt ZR. Chapter 7 enables you to operate the equipment immediately. 8. Detailed Data Setting 9. Calibration 10. Other Functions 11. Inspection and Maintenance 12. Troubleshooting CMPL (parts list) References Operation Maintenance s n s s s s s n s n s n n s s s Details of key operations and displays Describes the calibration procedure required in the course of operation. s n s n Other functions described How to conduct maintenance of EXAxt ZR and procedures for replacement of deteriorated parts This chapter describes measures to be taken when an abnormal condition occurs. User replaceable parts list s n s s n s n s s : Read and completely understand before operating the equipment. s : Read before operating the equipment, and refer to whenever necessary. n : Recommended to read at least once. ii Installation n T.Int.2E IM 1M12A01-05E