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Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Brooks® Digital MFC's & MFM's Brooks® SLA5800 Series Elastomer Sealed, Digital, Thermal Mass Flow Meters and Controllers Model SLA5850S Analog I/O MFC with RS-485 Brooks® Digital MFC's & MFM's Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Brooks® Digital MFC's & MFM's Dear Customer, We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more. The Brooks product you have just received is of the highest quality available, offering superior performance, reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements and hostile process environments in mind to provide you with a lifetime of dependable service. We recommend that you read this manual in its entirety. Should you require any additional information concerning Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover of this manual or visit www.BrooksInstrument.com Yours sincerely, Brooks Instrument Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Brooks® Digital MFC's & MFM's THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Paragraph Number Contents Brooks® Digital MFC's & MFM's Page Number Section 1 Introduction 1-1 Scope ......................................................................................................................................... 1-1 1-2 Purpose ...................................................................................................................................... 1-1 1-3 Description ................................................................................................................................. 1-1 1-4 Specifications ............................................................................................................................. 1-2 Section 2 Installation 2-1 General ...................................................................................................................................... 2-1 2-2 Receipt of Equipment ................................................................................................................. 2-1 2-3 Recommended Storage Practice ............................................................................................... 2-1 2-4 Return Shipment ........................................................................................................................ 2-2 2-5 Transit Precaution ...................................................................................................................... 2-2 2-6 Removal from Storage ............................................................................................................... 2-2 2-7 Gas Connections ........................................................................................................................ 2-2 2-8 In-Line Filter ............................................................................................................................... 2-3 2-9 Installation .................................................................................................................................. 2-3 2-10 Electrical Interface ...................................................................................................................... 2-5 2-11 Operation Check Procedure (Analog I/O) .................................................................................. 2-9 2-12 Digital I/O: DeviceNet or Profibus .............................................................................................. 2-10 2-13 DeviceNet I/O Assemblies ......................................................................................................... 2-10 Section 3 Operation 3-1 Overview .................................................................................................................................... 3-1 3-2 Theory of Operation for Flow Measurement .............................................................................. 3-1 3-3 Features ..................................................................................................................................... 3-3 3-4 Analog I/O Mode of Operation .................................................................................................... 3-4 3-5 Communications Features ......................................................................................................... 3-5 3-5-1 RS485 Communications Features (Analog versions only) ......................................................... 3-5 3-5-2 DeviceNet Communications Features ........................................................................................ 3-6 3-5-3 Profibus Communications Features ........................................................................................... 3-6 3-6 Alarms and Warnings (Analog versions only) ............................................................................ 3-7 3-6-1 Alarms and Warnings (Analog versions only) ............................................................................ 3-7 3-6-2 Diagnostic Alarms (Analog versions only) .................................................................................. 3-9 3-6-3 General Alarms and Warnings (Analog versions only) .............................................................. 3-11 3-7 Calibration/Configuration Sets ................................................................................................... 3-11 3-8 Special Features ....................................................................................................................... 3-11 3-8-1 Setpoint Ramping ...................................................................................................................... 3-11 3-8-2 Low Setpoint Command Cutoff ................................................................................................. 3-12 3-8-3 Low Flow Output Cutoff ............................................................................................................. 3-12 3-8-4 Flow Output Damping ............................................................................................................... 3-12 3-8-5 Adaptive Control ........................................................................................................................ 3-12 3-8-6 Flow Totalizer ............................................................................................................................ 3-12 3-8-7 Flow Output Conditioning .......................................................................................................... 3-12 3-8-8 Flow Signal Lock-in ................................................................................................................... 3-12 3-9 PC-based Support Tools ........................................................................................................... 3-12 i Contents Brooks® Digital MFC's & MFM's Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Section 4 Maintenance & Troubleshooting 4-1 Maintenance and Troubleshooting ............................................................................................. 4-1 4-1-1 Troubleshooting Analog or Digital Version .................................................................................. 4-2 4-1-2 System Checks .......................................................................................................................... 4-3 4-1-3 Cleaning Procedures .................................................................................................................. 4-6 4-1-4 Calibration Procedure ................................................................................................................ 4-6 Section A Essential Instructions ............................................................................................................ A-1 Warranty, Local Sales/Service Contact Information....................................................................... Back Cover Figures Figure Page Number Number 1-1 General Wiring ........................................................................................................................... 1-6 1-2 Response Performance of Brooks Digital MFC ......................................................................... 1-7 1-3 Linear Ramp-up and/or Ramp-down from 200% Per Second Down to 0.5% Per Second Setpoint Change ..................................................................................................... 1-7 1-4 SLA5800 Series RS485 15-Pin Analog Connector and Pinouts ................................................. 1-8 1-5 SLA5800 Series Profibus Connections and Pinouts .................................................................. 1-9 1-6 SLA5800 Series DeviceNet Connections and Pinouts .............................................................. 1-10 1-7 Dimensions - Model SLA5850, Thru-Flow, RS485 .................................................................... 1-11 1-8 Dimensions - Model SLA5850, Downport, RS485..................................................................... 1-11 1-9 Dimensions - Model SLA5860, Thru-Flow, RS485 .................................................................... 1-12 1-10 Dimensions - Model SLA5860, Thru-Flow, Profibus .................................................................. 1-12 1-11 Dimensions - Model SLA5851, Thru-Flow, DeviceNet ............................................................... 1-13 1-12 Dimensions - Model SLA5861, Thru-Flow, RS485 ..................................................................... 1-13 1-13 Dimensions - Model SLA5853, Thru-Flow, Profibus .................................................................. 1-14 1-14 Dimensions - Model SLA5863, Thru-Flow, DeviceNet ............................................................... 1-14 2-1 RS485 D-Connector Shielded Cable Hookup Diagram, Voltage I/O Version .............................. 2-6 2-2 Common Electrical Hookups, Voltage I/O Version ...................................................................... 2-6 2-3 Recommended Wiring Configuration for Current Signals (Non-Isolated Power Supply) ............ 2-7 2-4 Recommended Wiring Configuration for Current Signals (Isolated Power Supply) .................... 2-7 2-5 RS485 Multidrop Interconnection TMFs and PC ......................................................................... 2-8 3-1 Flow Sensor Operational Diagram (VCRTM End Connections Shown) ........................................ 3-2 3-2 Externally Accessible Adjustment (Zero Button) for all Meters/Controllers ................................. 3-3 3-3 Open Collector Alarm Output. .................................................................................................... 3-8 4-1 Bench Troubleshooting Circuit .................................................................................................... 4-2 Tables Table Page Number Number 1-1 SLA5800 Series Specifications .................................................................................................. 1-3 1-2 SLA5800 Series Electrical Specifications ................................................................................... 1-4 2-1 Recommended Filter Size .......................................................................................................... 2-3 3-1 Typical Resistor Values for Calibration Selection ....................................................................... 3-5 4-1 Sensor Troubleshooting ............................................................................................................. 4-4 4-2 Troubleshooting.......................................................................................................................... 4-7 ii Section 1 Introduction Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Brooks® Digital MFC's & MFM's 1-1 Scope Thank you for purchasing a Brooks Instrument Mass Flow Product. This manual, X-TMF-SLA5800-Series-RevB-MFC-eng is an installation and operation manual for your instrument. If you have purchased a Brooks® Digital Mass Flow Product with RS485, DeviceNet or Profibus communicatons, a separate Instruction Manual shall also be provided as part of the operating documentation. 1-2 Purpose The Brooks Digital Products are mass flow measurement devices designed for accurately measuring (MFM's) and rapidly controlling (MFC's) flows of gases. This instruction manual is intended to provide the user with all the information necessary to install, operate and maintain the Brooks MFC and MFM. This manual is organized into the following sections. Section 1 Section 2 Section 3 Section 4 Section A Back Cover Introduction Installation Operation Maintenance Essential Instructions Warranty, Local Sales/Service Contact Information It is recommended that this manual be read in its entirety before attempting to operate or repair these Brooks Digital products. 1-3 Description The SLA5800 Series provides a highly configurable platform based on a simple modular architecture. The SLA5800 Series feature set was carefully selected to enable drop-in replacement and upgrade of many brands of mass flow controllers. With the wide range of options and features available, the SLA5800 Series provides users with a single platform to support a broad range of applications. Industrial Multi-gas/Multi-range Capabilities The SLA5800 Series allows multi-gas and multi-range capabilities to reduce customer inventory. Storage and pre-programming of up to 6 gas calibrations easily permits users to switch between different gasses and ranges on a single device. Wide Flow Range The SLA5800 Series covers an extremely broad range of flow rates. Model SLA5850 can have a full scale flow as low as 3 ccm. With a high turndown ratio of 100:1 for any full scale range from 1-50 lpm N2 equivalent and 50:1 turndown for all other flow rates, accurate gas flow can be measured or controlled down to 0.06 ccm! Model SLA5853 can monitor or control gas flows up to 2500 lpm Fast Response Performance The all-digital electronics and superior mechanical configuration in the SLA5800 Series provide for ultra fast response characteristics. 1-1 Section 1 Introduction Brooks® Digital MFC's & MFM's Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Broad Array of Communication Options Brooks offers traditional 0-5 volt and 4-20mA analog options as well as RS485 digital communications (“S-protocol”, based on HART). Brooks also offers control interfaces via digital network protocols like DeviceNet, a high speed (up to 500k baud) digital communication network, and Profibus. Brooks' communication capabilities and device-profiles have been certified by the ODVA (Open DeviceNet Vendor's Association) and the ITK (Interoperability Test Kit). Other network protocols are in development. Talk to your Brooks representative about your specific needs. Advanced Thermal Flow Measurement Sensor Brooks' sensor technology combines: • Excellent signal to noise performance for improved accuracy at low setpoints • Superior long-term stability through enhanced sensor manufacturing and burn in process • Isothermal packaging to reduce sensitivity to external temperature changes • Corrosion resistant sensor flow path Advanced Diagnostics The mass flow controller remains the most complex and critical component in gas delivery systems. When dealing with highly toxic or corrosive gases, removing the mass flow controller to determine if it is faulty should be the last resort. In response to this, Brooks pioneered smarter mass flow controllers with embedded self test routines and introduced an independent diagnostic/service port to provide the user with a simple interface, for troubleshooting without disturbing flow controller operation. 1-4 Specifications (Reference Tables 1-1 and 1-2) 1-2 Section 1 Introduction Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Brooks® Digital MFC's & MFM's Table 1-1 SLA5800 Series Specifications Flow Ranges and Pr essur Pressur essuree Ratings: Mass Flow Controller Model Mass Flow Meter Model Flow Ranges N2 Eq. Ratings Max. F.S. Min. F.S. Pressure Unit psi/bar PED Module H Category Standard Optional SLA5850 SLA5860 0.003 50 lpm 1500 psi/100 bar 4500 psi/310 bar SEP SLA5851 SLA5861 15 100 lpm* 1500 psi/100 bar NA** SEP SLA5853 SLA5863 100 2500 lpm 1000 psi/70 bar NA 1 for all 150 lb flanges 2 for all other connections * 200 lpm of H2 possible, 600 lpm of H2 possible with decreased accuracy ** 4500 psi/310 bar available as a special on the SLA5861 only SLA5850/60 Performance Flow Accuracy* SLA5851/61 SLA5853/63 +0.9% of S.P. (20-100% F.S.), +0.18% of F.S. (2-20% F.S., 1-20% F.S. from 1-50 lpm) Control Range ±0.9% of S.P. (20-100% F.S.), ±0.18% of F.S. (2-20% F.S.) up to 1100 lpm ±1.0% of F.S. from 1100 lpm up to 2500 lpm 100:1 for F.S. from 1-50 lpm (50:1 for all other F.S. flows) Repeatability & Reproducibility 0.20% S.P. Linearity Included in accuracy Response Time ((Settling Settling Time within ±2% F.S. for 0-100% command step)** < 1 second Zero Stability < 3 seconds < + 0.2% F.S. per year Temperature Coefficient Zero: <0.05% of F.S. per °C. Span: <0.1% of S.P. per °C Pressure Coefficient ±0.03% per psi (0-200 psi N2) Attitude Sensitivity <0.2% F.S. maximum deviation from specified accuracy after re-zeroing Ratings Operating Temperature Range 0-65oC (32-149 oF) Minimum Pressure Differential (Controllers) 5 psi/0.35 bar 10 psi/0.69 bar Min.: 7.5 psi/0.52 bar at 500 lpm Min.: 14.5 psi/1.00 bar at 1000 lpm Min.: 35.0 psi/2.41 bar at 2500 lpm Maximum Pressure Differential (Controllers) Application specific up to 1500 psi/103.4 bar 50 psi/3.45 bar 300 psi/20.0 bar Leak Integrity (external) 1x10-9 atm. cc/sec He Mechanical Valve Type Normally Closed, Normally Open, Meter Primary Wetted Materials * Flow accuracy N 2 equivalent typical 316L Stainless Steel, High Alloy Stainless Steel, Viton® fluoroelastomers, Buna-N, Kalrez®, Teflon®/Kalrez®, and EPDM ** Response time can be improved upon request Diagnostics Status Lights MFC Health, Network Status Alarms* Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption Diagnostic/Service Port RS485 via 2.5mm jack * Alarm modes are dependent on the communications interface. These are described in the corresponding digital communication interface manual. Certifications Mark Agency Certification Applicable Standard Status CE EMC Directive 2004/108/EC EN:61326-1:2006 Pass UL (Recognized) Class I, Div 2, Group A, B, C, D CSA C22.2 NO. 213-M1987 Pending ATEX II 3 G Ex nA IIC T4 Gc EN 60079-0:2012 Pending EN 60079-15:2010 IECEx II 3 G Ex nA IIC T4 Gc IEC 60079-0:2011 Pending IEC 60079-15:2010 1-3 Section 1 Introduction Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Brooks® Digital MFC's & MFM's Table 1-2 SLA5800 Series Electrical Specifications Communication Protocol Electrical Connection RS485 1 x 15-pin Male Sub-D, (A) Analog I/O Power Max./Purge Power Requirements Watts, Max. Profibus® 1 x 15-pin Male Sub-D/ 1 x 9-pin Female Sub-D DeviceNetTM 1 x M12 with threaded coupling nut (B) 0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA N/A From +13.5 Vdc to +27 Vdc From +11 Vdc to +25 Vdc Valve Orifice > 0.032”: 8 W Valve Orifice ≤ 0.032”: 5 W Without Valve: 2 W Valve Orifice > 0.032”: 10 W Valve Orifice ≤ 0.032”: 7 W Without Valve: 4 W Voltage Set Point Input Specifications Nominal Range 0-5 Vdc, 1-5 Vdc or 0-10 Vdc Full Range Absolute Max. Input Impedence Required Max. Sink Current N/A (-0.5)-11 Vdc N/A 18 V (without damage) N/A >990 kOhms N/A 0.002 mA N/A 4-20 mA or 0-20 mA N/A Current Set Point Input Specifications Nominal Range Full Range Absolute Max. Input Impedence 0-22 mA N/A 24 mA (without damage) N/A 100 Ohms N/A Flow Output (Voltage) Specifications Nominal Range 0-5 Vdc, 1-5 Vdc or 0-10 Vdc Full Range Min Load Resistance N/A (-1)-11 Vdc N/A 2 kOhms N/A 0-20 mA or 4-20 mA N/A Flow Output (Current) Specifications Nominal Range Full Range 0-22 mA (@ 0-20 mA); 3.8-22 mA (@ 4-20 mA) N/A Max. Load 380 Ohms (for supply voltage: < 16 Vdc) 580 Ohms (for supply voltage: ≥ 16 Vdc) N/A Analog I/O Alarm Ouput* Type Open Collector N/A Max. Closed (On) Current 25 mA N/A Max. Open (Off) Leakage 1μA N/A Max. Open (Off) Voltage 30 Vdc N/A Analog I/O Valve Override Signal Specifications** Floating/Unconnected 1-4 Instrument controls valve to command set point N/A VOR < 0.3 Vdc Valve Closed N/A 1 Vdc < VOR < 4 Vdc Valve Normal N/A VOR > 4.8 Vdc Valve Open N/A Input Impedence 800 kOhms N/A Absolute Max. Input (-25 Vdc) < VOR < 25 Vdc (without damage) N/A *The Alarm Output is an open collector or "contact type" that is CLOSED (on) whenever an alarm is active. The Alarm Output may be set to indicate any one of various alarm conditions. ** The Valve Override Signal (VOR) is implemented as an analog input which measures the voltage at the input and controls the valve based upon the measured reading as shown in this section. Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Section 1 Introduction Brooks® Digital MFC's & MFM's Reference Conditions Due to effects of pressure and temperature on the compressibility of gases, specific reference conditions must be used when reporting volumetric flow rates in mass flow terms. For example, the unit of measure SCCM (standard cubic centimeters per minute) refers to a volumetric gas flow at a standard reference condition, NOT the actual volumetric gas flow at the actual operating pressure and temperature. The key point is that the MASS FLOW of the gas is fixed, but the reference volumetric flow can be reported differently based upon the standard reference condition used in the calculation. Throughout the world, there are differences in terminology when describing reference conditions for gases. The words “normal conditions” and “standard conditions” are sometimes used interchangeably to describe the reference STP (Standard Temperature and Pressure) for gases. Further note that temperature and pressure values for standard or normal reference conditions vary in countries and industries worldwide. For example, the Semiconductor Equipment Manufacturing Industry (SEMI) defines standard temperature and pressure conditions as 273.15 K (0 °C) and 101,325 Pa (760 torr). The main concern is that no matter what words are used for descriptive purposes, a gas mass flow rate must have a defined standard pressure and temperature reference condition when performing a volumetric conversion. 1-5 Section 1 Introduction Brooks® Digital MFC's & MFM's Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 PC-based Support Tools Brooks Instrument offers a variety of PC-based process control and service tools to meet the needs of our customers. Smart Interface may be used with any unit supporting RS485 in a multidrop configuration, thus allowing users to control and monitor their Brooks devices. The Brooks Service ToolTM (BST) may be used to monitor, diagnose, tune and calibrate Brooks devices equipped with DeviceNet communications. The Brooks Service ToolTM interfaces with Brooks products via a special service port. Figure 1-1 General Wiring Fast Response Performance The curves in Figure 1-2 depict the MFC output signal and actual transitional flow to steady-state when gas flow enters into process chamber, under a step response command condition. Brooks devices also feature adaptive (optimized) PID control, including fast response. and linear ramp-up and/or ramp-down control characteristics. Selectable Soft Start Processes requiring injection of gases can be adversely affected by excessive initial gas flow. This abrupt injection of gas can result in process damage from explosion or initial pressure impact. These problems are virtually eliminated with the soft start feature. Traditional soft start or linear ramp-up and/or ramp-down (See Figure 1-3) can be factory selected or are available via the Brooks Service SuiteTM. 1-6 Linear ramp-up is adjustable at 200% per second down to 0.5% per second setpoint change. Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Section 1 Introduction Brooks® Digital MFC's & MFM's Figure 1-2 Response Performance of Brooks Digital MFC Figure 1-3 Linear Ramp-up and/or Ramp-down from 200% Per Second Down to 0.5 % Per Second Setpoint Change 1-7 Section 1 Introduction Brooks® Digital MFC's & MFM's Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Function Setpoint: Common Input (-) Flow Signal: 0(1) -5 Vdc, 0-10 Vdc (Option), Output (+) TTL Alarm: Open collector, Output (+) Flow Signal: 0(4)-20 mA, Output (+) Power Supply: +13.5 Vdc to +27 Vdc(+) Not Connected Setpoint: 0(4)-20 mA, Input (+) Setpoint: 0(1)-5 Vdc, 0-10 Vdc, Input (+) Power Supply: Common (-) Flow Signal: Common, Output, (-) Not Connected Valve Override: Input Auxilliary: RT Input, 0-15 Vdc, 0-10 Vdc, Input (+) RS-485: Common B (-) RS-485: Common A (+) PIN 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Figure 1-4 SLA5800 Series RS485 15-Pin Analog Connector and Pinouts RS485 Communications The Brooks Digital Series is equipped with RS485 communication capability. Refer to Table 1-3 (Analog I/O pin connections), that enables the device to communicate via a personal computer for process control. Baud rate selections for the Brooks Digital Series related to RS485 are: 1200, 2400, 4800, 9600, 19200 and 38400 baud and can be selected via the Brooks Service SuiteTM. 1-8 The RS485 is essentially a multidrop connection. It allows a maximum of 32 devices to be connected to a computer system. IBM-compatible PC's are not equipped with RS485 ports as standard. An RS232/USB to RS485 converter or RS485 interface board is therefore required to connect an RS485 network to a standard pc. The RS485 bus, a daisy chain network, meaning that the wires are connected at the units as in Figure 1-1. Section 1 Introduction Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Brooks® Digital MFC's & MFM's Figure 1-5 SLA5800 Series Profibus Connections and Pinouts Profibus Communications The Brooks SLA5800 is now equipped to support the Profibus communication protocol. Profibus is a fieldbus-based automation standard of Profibus and Profinet International (PI). Via a single bus cable, Profibus links controller or control systems with decentralized field devices (sensors and actuators) on the field level and also enables consistent data exchange with higher ranking communication systems. A 9-pin sub-D connector is included on every device and is galvanic isolated from the main electronics as defined by the EN 50170 Profibus standard to allow easy network connection separate from the main connector. The main 15-pin sub-D connector or termination board is still needed for the power supply, but also allows for the standard analog I/O signals, analog valve override, and (open-collector) alarm signaling to be used separate from the network connection. The communication electronics allows for automatic baud rate detection ranging from 9600 baud to 12 Mbaud, thus making the need for any hardware baud rate selection methods not required. For selecting the device address, which must be unique on the network, two rotary switches are provided. This allows a user to easily select any address number ranging from 0 to 126. This can provide fast device replacement without complex network configurations. The Profibus-DP piggyback board is equipped with a zero command pushbutton, allowing the user to give a manual command to the device to (re)balance the flow sensor electronics. This command can also be issued through the protocol. The Profibus-DP communication option supports the following message types: • Cyclic data exchange (Write/Read data). • Read inputs (e.g. status, flow, temperature, totalizer, etc.). • Read outputs (e.g. commands, setpoint). • Global control commands (e.g. fail safe, sync). • Get configuration (i.e. read number of I/O bytes and composition). • Read diagnostics information (i.e. get error and alarm status). • Set parameters (i.e. select gas number, engineering units, I/O configuration • Set parameters (i.e. select gas number, engineering units, I/O configuration etc.). • Check configuration (i.e. check I/O composition). 1-9 Section 1 Introduction Brooks® Digital MFC's & MFM's Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Figure 1-6 SLA5800 Series DeviceNet Connection and Pinouts DeviceNet Communications The Brooks SLA5800 Digital Series is also available with DeviceNetTM communication capability. DeviceNet is an open digital protocol capable of high speeds and easy system connectivity. Brooks Instrument has several of its devices available on this popular networking standard, and is a member of ODVATM (Open DeviceNet Vendors Association), the governing standard body for DeviceNet. DeviceNet is similar to the RS485 standard in that it is a multi-drop connection that allows a maximum of 64 devices to be connected on the same network. Baud rate selections for DeviceNet products are 125K, 250K and 500K and can be selected via MAC ID switches mounted on the device. The DeviceNet communication link also provides access to many of the Brooks SLAMf Digital Series functions for “control and monitor” operations, including: • Accurate setpoint adjustment and flow output measurement (including units of measure selection) • PID Settings (controller only) • Valve Override (controller only) • Calibration Gas Select • Soft Start Control (controller only) 1-10 Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Section 1 Introduction Brooks® Digital MFC's & MFM's Figure1-7 Dimensions - Model SLA5850, Thru-Flow, RS485 Figure 1-8 Dimensions - Model SLA5850, Downport, RS485 1-11 Section 1 Introduction Brooks® Digital MFC's & MFM's Figure 1-9 Dimensions - Model SLA5860, Thru-Flow, RS485 1-12 Figure 1-10 Dimensions - Model SLA5860, Thru-Flow, Profibus Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Section 1 Introduction Brooks® Digital MFC's & MFM's Figure 1-11 Dimensions - Model SLA5851, Thru-Flow, DeviceNet Figure 1-12 Dimensions - Model SLA5861, Thru-Flow, RS485 1-13 Section 1 Introduction Brooks® Digital MFC's & MFM's Figure 1-13 Dimensions - Model SLA5853, Thru-Flow, Profibus 1-14 Figure 1-14Dimensions - Model SLA5863, Thru-Flow, DeviceNet Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Section 2 Installation Brooks® Digital MFC's & MFM's 2-1 General This section provides installation instructions for the Brooks® Digital MFC's and MFM's. Section 1, Figures 1-7 thru 1-14 show the dimensions and electrical connections. 2-2 Receipt of Equipment When the instrument is received, the outside packing case should be checked for damage incurred during shipment. If the packing case is damaged, the local carrier should be notified at once regarding his liability. A report should be submitted to your nearest Product Service Department. Brooks Instrument 407 W. Vine Street P.O. Box 903 Hatfield, PA 19440 USA Toll Free (888) 554 FLOW (3569) Tel (215) 362 3700 Fax (215) 362 3745 E-mail: [email protected] www.BrooksInstrument.com Brooks Instrument Neonstraat 3 6718 WX Ede, Netherlands P.O. Box 428 6710 BK Ede, Netherlands Tel +31 (0) 318 549 300 Fax +31 (0) 318 549 309 E-mail: [email protected] Brooks Instrument 1-4-4 Kitasuna Koto-Ku Tokyo, 136-0073 Japan Tel +81 (0) 3 5633 7100 Fax +81 (0) 3 5633 7101 Email: [email protected] Remove the envelope containing the packing list. Carefully remove the instrument from the packing case. Make sure spare parts are not discarded with the packing materials. Inspect for damaged or missing parts. 2-3 Recommended Storage Practice If intermediate or long-term storage of equipment is required, it is recommended that the equipment be stored in accordance with the following: a. Within the original shipping container. b. Stored in a sheltered area, preferably a warm, dry, heated warehouse. c. 32°C (90°F) maximum,45°F (7°C) minimum. d. Relative humidity 45% nominal, 60% maximum, 25% minimum. Upon removal from storage a visual inspection should be conducted to verify the condition of equipment is "as received". 2-1 Section 2 Installation Brooks® Digital MFC's & MFM's Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 2-4 Return Shipment Prior to returning any instrument to the factory, contact your nearest Brooks location for a Return Materials Authorization Number (RMA#). This can be obtained from one of the following locations: Brooks Instrument 407 W. Vine Street P.O. Box 903 Hatfield, PA 19440 USA Toll Free (888) 554 FLOW (3569) Tel (215) 362 3700 Fax (215) 362 3745 E-mail: [email protected] www.BrooksInstrument.com Brooks Instrument Neonstraat 3 6718 WX Ede, Netherlands P.O. Box 428 6710 BK Ede, Netherlands Tel +31 (0) 318 549 300 Fax +31 (0) 318 549 309 E-mail: [email protected] Brooks Instrument 1-4-4 Kitasuna Koto-Ku Tokyo, 136-0073 Japan Tel +81 (0) 3 5633 7100 Fax +81 (0) 3 5633 7101 Email: [email protected] Any instrument returned to Brooks requires completion of Form RPR003-1, Brooks Instrument Decontamination Statement, as well as, a Material Safety Data Sheet (MSDS) for the fluid(s) used in the instrument. This is required before any Brooks Personnel can begin processing. Copies of the form can be obtained from any Brooks Instrument location listed above. 2-5 Transit Precautions To safeguard against damage during transit, transport the instrument to the installation site in the same container used for transportation from the factory if circumstances permit. 2-6 Removal from Storage Upon removal from storage, a visual inspection should be conducted to verify the condition of the equipment is “as received.” If the equipment has been in storage in conditions in excess of those recommended (See Section 2-3), the device should be subjected to a pneumatic pressure test in accordance with applicable vessel codes. 2-7 Gas Connections Prior to installation ensure all piping is clean and free from obstructions. Install piping in such a manner that permits easy access to the instrument if removal becomes necessary. 2-2 Section 2 Installation Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Brooks® Digital MFC's & MFM's 2-8 In-Line Filter Unless an integrated (internal) filter is already installed, it is recommended that an in-line filter be installed upstream from the mass flow controller or meter to prevent the possibility of any foreign material entering the flow sensor or control valve MFC. The filtering element should be replaced periodically or ultrasonically cleaned. Table 2-1 Recommended Filter Size Models SLA5850/60 SLA5850/60 SLA5850/60 SLA5850/60 SLA5851/61 SLA5853/63 Maximum Flow Rate 100 ccm 500 ccm 1 to 5 lpm 10 to 100 lpm 10 to 30 lpm > 100 lpm Recommended Filter 2 micron 2 micron 10 micron 40 micron 40 micron Consult factory Note: Brooks provides many filter options. For those not listed here, please contact factory. 2-9 Installation Recommended installation procedures: a. The Brooks Digital MFC or MFM should be located in a clean, dry atmosphere relatively free from shock and vibration. b. Leave sufficient room for access to Self-zero function push-button. c. Install in such a manner that permits easy removal if the instrument requires servicing. d. The Brooks Digital MFC or MFM can be installed in any position. However, mounting in orientations other than the original factory calibration(see calibration data sheet supplied with the instrument) can result in a<±0.2% maximum full scale shift after re-zeroing. 2-3 Section 2 Installation Brooks® Digital MFC's & MFM's Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 e. When installing a mass flow controller or meter with full scale flow rates of 10 lpm or greater, be aware that sharp, abrupt angles in the system piping directly upstream of the controller may cause a small shift in accuracy. If possible, have at least ten pipe diameters of straight tubing upstream of the mass flow controller or meter. This is not required for meters with an integrated filter. Special considerations to be taken when installing the SLA5853 MFC: The Model SLA5853 has a valve design that is different from the standard low flow Brooks TMFC's. The SLA5853 consists of a dual stage, pilot operated valve. The pilot valve (located on the top of the MFC) controls a differential pressure across the main valve which, in turn controls the flow through the device. The main valve is a pressure operated valve that utilizes a bellows spring and diaphragm to control flow. This bellows and diaphragm assembly can be susceptible to damage by pressure spikes or surges. For this reason, it is recommended that process line startups are handled with care. The bellows spring is offered in two levels. A low force for low differential pressures (Delta P < 30psig), and a high force (delta P >30 and <300 psig). The selection of the bellows spring is mainly determined by the differential pressure as specified on the customer order. This should reflect your actual process conditions.The low force bellows consists of a softer bellows spring which is required to allow flow control at lower differential pressures. During startup conditions, when a process line is being pressurized, the pressure and/or pressure differentials that the SLA5853 is exposed to may be different from the final process conditions. For higher pressure applications, and especially those with the low force bellows, it is important to bring the pressure up in a controlled manner in order to prevent a possible pressure spike to the bellows spring and main valve diaphragm. A pressure spike could deform the bellows, damage the diaphragm or blow out the bellows O-ring seal. This typically results in a failure to shutoff (leakby at zero setpoint). One method to assure successful startups is to set a 100% setpoint command or valve override open command and then gently ramp the pressure up to operating conditions. This will allow you to bring your process pressures up to normal process conditions and the SLA5853 will then function as specified. Another method is to utilize a bypass valve to allow pressure around the device while ramping up pressure to proper operating conditions. 2-4 The main point is to not instantly open a ball valve and allow a high upstream pressure or high back pressure surge into the SLA5853 main valve. Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Section 2 Installation Brooks® Digital MFC's & MFM's Proper process line venting is also important. If operating at pressures greater than 50 psig, be sure to perform a controlled pressure release from inlet and back pressure simultaneously in order to prevent bellows damage from excesssive back pressure. Following careful startup and venting procedures will contribute to a long problem free life of your SLA5853 controller. Stable Operating Conditions: As stated above, the SLA5853 model utilizes a pressure operated main valve. Valve performance is dependant on stable system pressures. Oscillating or unstable upstream or downstream pressures are likely to cause the device flow control to become unstable. For the best performance, it is important to create a stable pressure environment by utilizing quality inlet and back pressure regulators in your process design. In many cases, the addition of a back pressure regulator will isolate the SLA5853 from the unstable downstream pressures inherent in many process designs. All thermal mass flow controllers are factory tested with stable and equal ambient and process temperatures. If the process temperature does not equal the ambient temperature, the bypass ratio/accuracy will be affected. When a hot or cold process fluid is being measured, ensure that the piping system is designed to allow the gas temperature to equalize with the flow controller ambient temperature. For more information, please contact the Brooks Technical Service group. 2-10 Electrical Interface The setpoint signal is supplied as a 0(1) to 5 Vdc, 0 to 10 Vdc or 0(4)-20 mA analog signal. All signals are supplied via the 15-pin D-Connector. For an analog unit the minimum set of connections which must be made to the MFC and MFM includes +13.5 - 27 Vdc, supply common, and a setpoint signal. The Brooks Digital electrical interface is designed to facilitate low-loss, quiet signal connections. Separate returns (commons) are supplied for the analog setpoint, analog flow signal, and the power supply. These commons are electrically connected together on the PC board. Analog I/O Versions • Signal Common • Signal Output (Voltage or Current) • +13.5 - 27 Vdc Supply • Setpoint Input (Voltage or Current) • Setpoint Common • Supply Common • Chassis Ground (via unit body) Refer to Figures 2-1, 2-2, 2-3, 2-4 and 2-5 for pin connections and electrical I/O connections. (The Brook’s MFC acts as a current sink to a setpoint input signal. The 0/4-20 mA setpoint signal should be “driven” into the MFC input by a controlled current source. Reference Brook’s device specifications for the setpoint input impedance.) (The Brook’s MFC acts as the current source when providing a 0/4-20 mA output signal to the load. The output signal is “driven” by the MFC into the customer load. Reference Brook’s device specifications for maximum load capacity.) 2-5 Section 2 Installation Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Brooks® Digital MFC's & MFM's *BROOKS READ OUT MFC / MFM SIDE SUB D (15 PIN) PIN 6 10 9 2 13 14 3 5 12 8 4 7 1 11 15 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 FUNCTION Setpoint, Common Input (-) Flow Signal, 0(1)-5 volt, Output (+) TTL Alarm, Open Collector, Output (+) Flow Signal, 0(4)-20 mA, Output (+) Power Supply, +13.5 Vdc to +27 Vdc (+) Not Connected Setpoint, 0(4)-20 mA, Input (+) Setpoint, 0(1)-5 volt, Input (+) Power Supply, Common (-) Flow Signal, Common, Output (-) Reference, +5 Vdc, Output (+) Valve Override, Input Calibration Select, Input RS-485, Common B (-) Input/Output RS-485, Common A (+) Input/Output * Brooks Read Out Models 0151, 0152, 0154, 0254 See Table 3-1 for Resistor values Figure 2-1 RS485 D-Connector Shielded Cable Hookup Diagram, Voltage I/O Version 2-6 WIRE COLOR Figure 2-2 Common Electrical Hookups, Voltage I/O Version BLACK WHITE RED GREEN ORANGE BLUE WHT/BLK RED/BLK GRN/BLK ORG/BLK BLU/BLK BLK/WHT RED/WHT GRN/WHT BLU/WHT Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Section 2 Installation Brooks® Digital MFC's & MFM's Figure 2-3 Recommended I/O Wiring Configuration for Current Signals (Non-Isolated Power Supply) Figure 2-4 Recommended I/O Wiring Configuration for Current Signals (Isolated Power Supply) 2-7 Section 2 Installation Brooks® Digital MFC's & MFM's Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Figure 2-5 RS485 Multidrop Interconnection TMFs and PC The RS485 is a multidrop connection and allows a maximum of 32 devices to be connected to a computer system. IBM-compatible PCs are not equipped with RS485 ports as standard. An RS232/USB to RS485 converter or RS485 interface board is therefore required to connect an RS485 to a standard PC. Figure 2-5 is an interconnection diagram showing two TMFs linked to an IBM-compatible PC, via RS485 and RS485 to RS232/USB converter. The RS485 bus, a daisy-chain network, meaning that the wires are connected at the units as in Figure 2-5. 2-8 Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Section 2 Installation Brooks® Digital MFC's & MFM's 2-11 Operation Check Procedure (Analog I/O) a. Mount the MFC/MFM in its final orientation. b. Apply power to the MFC/MFM and allow approximately 45 minutes for the instrument to completely warm up and stabilize its temperature. c. Do NOT supply gas to the MFC/MFM. Ensure that the differential pressure across the MFC/MFM is zero. d. Apply a setpoint of: 0.000 Vdc ± 10 mV (0 - 5 Vdc or 0 - 10 Vdc setpoint) 1.000 Vdc ± 10 mV (1 - 5 Vdc setpoint) 0.000 mA ± 100 μA (0 - 20 mA setpoint) 4.000 mA ± 100 μA (4 - 20 mA setpoint) e. If the zero exceeds one of these limits, follow the re-zeroing procedure in Section 3-4. The analog output signal should be: 0.000 Vdc ± 10 mV (0 - 5 Vdc or 0 - 10 Vdc output) 1.000 Vdc ± 10 mV (1 - 5 Vdc output) 0.000 mA ± 40 μA (0 - 20 mA output) 4.000 mA ± 40 μA (4 - 20 mA output) f. Turn on the gas supply. A positive flow signal may be present due to slight valve leak-thru (MFC only). g. Supply a setpoint signal between: 0 to 5 Vdc (0 - 5 Vdc setpoint) or 0 to 10 Vdc (0 - 10 Vdc setpoint) 1 to 5 Vdc (1 - 5 Vdc setpoint) 0 to 20 mA (0 - 20 mA setpoint) 4 to 20 mA (4 - 20 mA setpoint) h. Check the analog output signal. The output signal should match the setpoint signal in accordance with the accuracy specifications provided in Section 1-4 of this document. i. If flow output signal does not match the setpoint, and pressure settings are correct, this could indicate a problem in the MFC. A secondary issue could be the gas type. When checking with a surrogate gas, ensure that there is enough pressure to the MFC in order to flow the correct amount of the surrogate gas. Example: Checking an MFC calibrated for 100 ccm SF6 (sulfur hexafluoride). The sensor factor N2 (nitrogen) is 0.27, therefore the eqivalent N2 needed is 100/0.27 = 370.4 ccm. This may require a pressure increase to make this flow rate. 2-9 Section 2 Installation Brooks® Digital MFC's & MFM's Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 2-12 Digital I/O: DeviceNet a. Mount the MFC/MFM in its final orientation. b. Apply power to the MFC/MFM and allow approximately 45 minutes for the instrument to completely warm up and stabilize its temperature. c. Turn on the gas supply. A positive flow signal may be present due to slight valve leak-thru (MFC only). d. Provide the proper UOM setpoint between 20% and 100% FS to the MFC via the digital network controller. e. Check the MFC Flow value. It should match the setpoint UOM. Value within ± 0.2% FS in less than 10 seconds after setpoint change. f. If flow output signal does not match the setpoint, and pressure settings are correct, this could indicate a problem in the MFC. A secondary issue could be the gas type. When checking with a surrogate gas, ensure that there is enough pressure to the MFC in order to flow the correct amount of the surrogate gas. Example: Checking an MFC calibrated for 100 ccm SF6 (sulfur hexafluoride). The sensor factor N2 (nitrogen) is 0.27, therefore the equivalent N2 needed is 100/0.27 = 370.4 ccm. This may require a pressure increase to make this flow rate. 2-13 DeviceNet I/O Assemblies Other problems that may occur in an operational checkout of a DeviceNet MFC could be due to data mismatches of Input/Output I/O assemblies. For proper communication over the DeviceNet network, the MFC must be set up with the same I/O Assembly as the network master. The DeviceNet specification defines Input and Output relative to the network (i.e. the data being PRODUCED from the device (MFC) as an INPUT into the network or the data is being CONSUMED by the device (MFC) is an OUTPUT from the network). The Brooks MFC supports 12 instances of Input Assemblies and 4 instances of Output Assemblies. NOTE: This information and all other detailed DeviceNet information is available in the Brooks DeviceNet Supplement Instruction Manual. 2-10 Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Section 3 Operation Brooks® Digital MFC's & MFM's 3-1 Overview This section contains the following information: • Theory of Operation • Features 3-2 Theory of Operation for Flow Measurement The thermal mass flow measurement system consists of two components: the restrictor and the flow sensor. Figure 3-1 contains a diagram of the flow stream through the MFC/MFM with an enlarged view of the flow sensor. Gas flow entering the MFC/MFM is separated into two paths; one straight through the restrictor and the other through the flow sensor. This is represented in Figure 3-1 where the total flow A+B enters the MFC/MFM and is separated into streams A and B. The streams are joined again at the far side of the restrictor. The separation of the flow streams is caused by the restrictor. During flow conditions there will be a pressure differential across the restrictor which forces gas to flow in the sensor. The pressure difference caused by the restrictor varies linearly with total flow rate. The sensor has the same linear pressure difference versus flow relationship. The ratio of sensor flow to the flow through the restrictor remains constant over the range of the MFC/MFM (A/B = constant). The full scale flow rate of the MFC/MFM is established by selecting a restrictor with the correct pressure differential for the desired flow. The flow sensor is a very narrow, thin-walled stainless steel tube. Onto this tube are built upstream and downstream temperature sensing elements on either side of a heating element. Constant power is applied to the heater element, which is located at the midpoint of the sensor tube. During noflow conditions, the amount of heat reaching each temperature sensor is equal, so temperatures T1 and T2 (Fig. 3-1) are equal. Gas flowing through the tube carries heat away from the upstream temperature sensor and toward the downstream sensor. The temperature difference, T2 - T1, is directly proportional to the gas mass flow. The equation is: DT = A x P x Cp x m Where, DT = Temperature difference T2 - T1 (°K) A = Constant of proportionality (s2-°K2/kJ2) P = Heater Power (kJ/s) Cp = specific heat of the gas at constant pressure (kJ/kg - °K) m = Mass Flow (kg/s) A bridge circuit and a differential amplifier interpret the temperature difference and generate an electrical signal directly proportional to the gas mass flow rate. 3-1 Section 3 Operation Brooks® Digital MFC's & MFM's Figure 3-1 Flow Sensor Operational Diagram (VCRTM End Connections Shown) 3-2 Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Section 3 Operation Brooks® Digital MFC's & MFM's 3-3 Features Note: All Brooks Digital Series mass flow meters are configured at the factory according to customer order and do not require adjustment. Not all features are available on all instruments. The Brooks Digital MFC/MFMs are full-featured digital devices. The Brooks Digital MFC/MFMs perform much like traditional analog MFCs, but with improved accuracy, step response and valve control. The analog interface matches that of Brooks' popular analog MFCs so it can be retrofitted into tools using analog MFCs. Other versions of the Delta Class can provide a variety of digital protocols, for example DeviceNet and RS485. The Brooks Digital equipment is capable of storing up to 6 different sets of gas calibration data. Each set includes a calibration curve, PID controller settings, valve performance data, and information about the calibration conditions. The Brooks Digital equipment can contain calibrations for different gases or for the same gas at multiple conditions (pressures, fullscale flow rates). Section 3-4 Analog I/O Mode of Operation describes more information about the data contained in the calibration table and how to access the data. The DeviceNet, Profibus and RS485 Instruction Manuals describe further details on specific communication features. Calibrations will appear in the calibration table in the same order as they appeared on the customer order, unless otherwise specified. The first listed gas will appear as calibration #1 the second as calibration #2 and so on. Note that unless specified otherwise on the customer order any unit containing a single calibration will have that calibration stored in calibration position 1. Zero Button Figure 3-2 Externally Accessible Adjustment (Zero Button) for all Meters/Controllers. 3-3 Section 3 Operation Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Brooks® Digital MFC's & MFM's 3-4 Analog I/O Mode of Operation The following paragraphs describe the basic features of the Brooks Digital Series Mass Flow Meters/Controllers. NOTE: Read Section 3-3, Features, before reading this section. See DeviceNet Supplemental Instruction Manual for specific details on communication features. Functional Description The analog interface may include any of the following I/O options as specified by the user: 0 - 5 Vdc setpoint, 0 - 5 Vdc flow output 1 - 5 Vdc setpoint, 1 - 5 Vdc flow Output 0 - 20 mA setpoint, 0 - 20 mA flow output 4 - 20 mA setpoint, 4 - 20 mA flow output 0 - 10 Vdc setpoint, 0 - 10 Vdc flow output Also included is the Valve Override input pin. All analog signals available are on the 15 pin D-Connector. (See Fig. 2-1 for connections). The contents of the ten calibrations are determined from the customer order. Only those calibrations ordered will be available in the instrument. Unless otherwise specified, a Brooks Digital MFC/MFM ordered with only one calibration will have that calibration stored in calibration #1. Before operating the MFC/MFM, apply power and warm-up the instrument for approximately 45 minutes. After warm-up, apply gas pressure then proceed by following the instructions in the following sections. Analog I/O Setpoint (MFC Only) This input allows the user to establish the MFC setpoint,. Several input types are available as follows: Setpoint Signal Type 0 to 5 Vdc 1 to 5 Vdc 0 to 20 mA 4 to 20 mA 0 to 10 Vdc Full Scale 5 Vdc 5 Vdc 20 mA 20 mA 10 Vdc Minimum Signal 0V 1 V 0 mA 20 mA 0V Maximum Signal 5.5 Vdc = 110% 5.5 Vdc = 111% 22 mA = 110% 22 mA = 111% 11 Vdc = 110% Analog I/O Flow Signal This output is used to indicate the flow signal. A negative flow signal indicates reverse flow through the device, but is NOT calibrated. Several flow signal types are available: Analog I/O Type 0 to 5 Vdc 1 to 5 Vdc 0 to 20 mA 4 to 20 mA 0 to 10 Vdc 3-4 Full Scale 5 Vdc 5 Vdc 20 mA 20 mA 10 Vdc Minimum Signal -0.5 V 0.5 V 0 mA 3.8 mA 0V Maximum Signal 5.5 Vdc = 110% 5.5 Vdc = 111% 22 mA = 110% 22 mA = 111% 11 Vdc = 110% Section 3 Operation Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Brooks® Digital MFC's & MFM's Valve Override (MFC Only) Connector Pin 12 on the 15 pin D-Connector allows the valve to be forced to its most closed state or its most open state, regardless of setpoint. If this input is not electrically connected, the MFC will operate according to the current values of the other MFC inputs. If this input is held at 0 Vdc or -15 Vdc the valve will be forced to its most closed state. If this input is held at +5 Vdc or greater (max. = 24 Vdc), the valve will be forced to its open state. Zeroing the MFC (Self-zero) It may be desirable to re-zero the flow sensor if it is operated at its temperature extremes or if it is positioned in an attitude other than that specified on the customer order. Note: Before zeroing the instrument, zero pressure differential MUST be established across the device. If there is pressure across the instrument during the zero process, any detected flow through the sensor will be misinterpreted as the zero flow reading. This will result in calibration inaccuracy during normal operation. Once zero differential pressure is established and verified, press the recessed, momentary push-button (self-zero button) located on the side of the device (See Figure 3-2) to start the self-zero function. The zeroing process requires approximately 10 mseconds. 3-5 Communications Features 3-5-1 RS485 Communications Features (Analog versions only) Digital communication, designed to emulate the Brooks S-series "S-protocol" or pseudo-HART communications is available on the Brooks Digital Series via RS485. This form of multi-drop capable communication provides access to many of the Brooks Digital Series functions for "control and monitor" operations, including: • Accurate setpoint adjustment flow output measurement (including units of measure selection) • • • • Valve Override (controller only) Flow Totalizer Alarm status and settings Soft Start Control (controller only) RS485 equipped units support the following baud rates. Please specify the desired baud rate when ordering (default is 19200 baud). Alternately, baud rate may be changed using the Brooks Service SuiteTM. Baud Rates: 1200, 2400, 4800, 9600, 19200 and 38400 Reference the Brooks document "Supplemental Manual for RS485 Communications for Brooks® MFCs/MFMs, for SLA5800/SLAMf Revsion B Series" (X-DPT-RS485-SLA5800-SLAMf-Series-RevB-MFC-eng) for more details regarding the capabilities of this communication interface. 3-5 Section 3 Operation Brooks® Digital MFC's & MFM's Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 3-5-2 DeviceNet Communications Features The Brooks SLA5800 Digital Series is also available with DeviceNetTM communication capability. DeviceNet is an open digital protocol capable of high speeds and easy system connectivity. Brooks Instrument has several of its devices available on this popular networking standard, and is a member of ODVATM (Open DeviceNet Vendors Association), the governing standard body for DeviceNet. DeviceNet is similar to the RS485 standard in that it is a multi-drop connection that allows a maximum of 64 devices to be connected on the same network. Baud rate selections for DeviceNet products are 125K, 250K and 500K and can be selected via MAC ID switches mounted on the device. The DeviceNet communication link also provides access to many of the Brooks SLAMf Digital Series functions for “control and monitor” operations, including: • Accurate setpoint adjustment and flow output measurement (including units of measure selection) • PID Settings (controller only) • Valve Override (controller only) • Calibration Gas Select • Soft Start Control (controller only) 3-5-3 Profibus Communications Features The Brooks SLA5800 is now equipped to support the Profibus communication protocol. The communication electronics allows for automatic baud rate detection ranging from 9600 baud to 12 Mbaud, thus making the need for any hardware baud rate selection methods not required. For selecting the device address, which must be unique on the network, two rotary switches are provided. This allows a user to easily select any address number ranging from 0 to 126. This can provide fast device replacement without complex network configurations. The Profibus-DP piggyback board is equipped with a zero command pushbutton, allowing the user to give a manual command to the device to (re)balance the flow sensor electronics. This command can also be issued through the protocol. The Profibus-DP communication option supports the following message types: • Cyclic data exchange (Write/Read data). • Read inputs (e.g. status, flow, temperature, totalizer, etc.). • Read outputs (e.g. commands, setpoint). • Global control commands (e.g. fail safe, sync). • Get configuration (i.e. read number of I/O bytes and composition). • Read diagnostics information (i.e. get error and alarm status). • Set parameters (i.e. select gas number, engineering units, I/O configuration • Set parameters (i.e. select gas number, engineering units, I/O configuration etc.). • Check configuration (i.e. check I/O composition). 3-6 Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Section 3 Operation Brooks® Digital MFC's & MFM's 3-6 Alarms and Warnings (Analog versions only) This section outlines alarms and warnings associated with the Analog versions of the Brooks Digital Series. For information describing alarms and warnings for Brooks DeviceNetTM units, reference the Brooks DeviceNetTM Supplemental Manual. 3-6 -1 Alarms and Warnings (Analog versions only) Connector Pin 3, on the 15 pin D-Connector provides an open collector TTL output that will close depending on the alarm/warning situation and the alarm settings. Alarms and Warnings are a user configurable feature. This feature may be adjusted via the Diagnostics Port using a special software application available from Brooks. Reference the Brooks Service Suite FlowSoft User Manual for more information about the Diagnostic Port and Service Tool software applications. Each alarm has the following common user configurable traits: Severity - The options are Off, Warning and Alarm. When set to Off, the conditions are not monitored and no actions will be taken. When set to Warning, the Alarm LED will flash Green when the monitored value exceeds the specified conditions. (See Alarm Code attribute). When set to Alarm, the Alarm LED will flash Red and the Analog Outputs will act based on the assigned Output Alarm Behavior when the monitored value exceeds the specified conditions. Alarm Code - The alarm code specifies the code to be flashed on the LED to indicate that an alarm/warning condition has occurred. When more than one alarm/warning is active, then the LED will indicate the most severe alarm with the highest Alarm Code. An Alarm is more severe than a Warning. Alarm Codes do not have to be unique, i.e., more that one alarm/ warning type can use the same alarm code. Latching Enable - When an alarm/warning is set to non-latching, that means the alarm is indicated only when the monitored value exceeds the specified conditions. When the alarm/warning is set to latching, this means that the alarm/warning will be indicated when the monitored value first exceeds the specified conditions, and will be indicated until the user clears the alarm. If the user clears the alarm while the monitored value still exceeds the specified conditions, then the alarm will be re-latched and continue to be indicated. Contact Enable - If the alarm condition is detected and the severity is alarm or warning, and the alarm contact is enabled, then the alarm contact is “closed”. Low Limit - The value of the monitored value below which is considered an alarm/warning condition. (This attribute not valid for alarms that monitor a state condition of the device.) High Limit - The value of the monitored value above which is considered an alarm/warning condition.(This attribute not valid for alarms that monitor a state condition of the device.) Delay - The time in seconds that the value must remain above the high limit or below the low limit before an alarm/warning condition is indicated. 3-7 Section 3 Operation Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Brooks® Digital MFC's & MFM's Alarm Summary The following table summarizes the parameters for each alarm type and the respective default values. Alarm Severity Diagnostic Flow 1 Alarm Off Flow 2 No Flow Indication Setpoint Deviation Totalizer Overflow User Power Supply Setpoint Input Out of Range Flow Output Out of Range Flow Output Loop Open Flow Sensor Out of Range Off Alarm Alarm Off Alarm Alarm Alarm Off Alarm Alarm Latching Contact Low Code Enable Enable Limit 12 n/a Off n/a 11 Off Off 0% 10 9 8 7 6 5 4 3 1 Off Off Off n/a Off Off Off Off Off Figure 3-3 Open Collector Alarm Output 3-8 Off Off Off Off Off Off Off Off Off 0% 2% -10% n/a 13.5 n/a n/a n/a n/a High Limit n/a 120% Delay 120% n/a +10% n/a 27.0 n/a n/a n/a n/a 1.0 1.0 1.0 n/a 1.0 1.0 1.0 1.0 1.0 n/a 1.0 Section 3 Operation Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Brooks® Digital MFC's & MFM's 3-6-2 Diagnostic Alarms (Analog versions only) A Diagnostic Alarm will be indicated when any of the diagnostics below detect a failure providing a visual indication via the red and/or green LED, and activating the TTL open collector output located on the 15 pin D-Connector. The diagnostic test or tests that have detected a problem and caused the Diagnostic Alarm to occur can be determined only by reading a parameter via the Diagnostics Port. When a diagnostic alarm occurs, the device will automatically reset after approximately 5 seconds. Diagnostic RAM Flash (Program Memory) Non-Volatile Memory Temperature Sensor Power Supply (Internal) Failure Description Byte by byte test of RAM detects bad memory location 8-bit Checksum of the entire Flash not zero. Byte by byte test of Non-Volatile Memory detects bad memory location Temperature Sensor reports a value outside the designed range of 0° C to 100° C Any internally generated power supply voltage outside operational limits. (3.3 Volt and 7.6 Volt internal supply voltages must be within ± 5% of nominal value.) Safe Mode When the Device is in Safe Mode, the following behavioral characteristics of the device apply: Flow Output Signal will be set to its defined Safe State for the following output signal types: 0 to 5 Vdc: 0 Vdc 1 to 5 Vdc: 1 Vdc 0 to 20 mA: 0 mA 4 to 20 mA: 0 mA 0 to 10 Vdc: 0 Vdc In the Safe State, the valve will be unpowered. This means that for Normally Closed valves, the valve will stay closed and for Normally Open valves, the valve will stay open. 3-9 Section 3 Operation Brooks® Digital MFC's & MFM's Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 3-6-3 General Alarms and Warnings (Analog versions only) Several alarms are available to indicate unexpected process control events as follows: Flow Alarms Two flow alarms will be provided. Each will allow the user to set a minimum and maximum flow limit range. Whenever flow is not within the range, the alarm will occur. These two general flow alarms provide more flexibility than having specific low and high flow alarms. These two alarms may be used to create separate low and high flow alarms, or maybe used to provide banding around a flowrate. If the device is a controller, then this alarm is disabled if the setpoint is not within the specified flow limits or if the valve override is active. User Power Supply Alarm The User Power Supply Alarm monitors the Power Input to the device for values outside the device specification of 13.5 to 27 Vdc. The user can configure the voltage limits that activate this alarm in order to monitor their supply voltage for a tighter specification than the device requires. Setpoint Deviation Alarm The Setpoint Deviation Alarm monitors the difference between Setpoint and Flow and sets the alarm when the difference exceeds the specified limits for more than the specified delay period. The user specifies a minimum and maximum limit in percent of Setpoint. This alarm is disabled if the valve override is active. No Flow Indication Alarm The No Flow Indication Alarm will occur when the measurement of flow indicates flow less than a value that can be configured to 0 - 2%. If the device is a controller, setpoint must exceed the configured limit and valve override must not be active for this alarm to occur. Totalizer Overflow Alarm The Totalizer Overflow Alarm will occur when the Flow Totalizer reaches its maximum value and resets to zero. This alarm is permanently configured as a latching type alarm which requires the user to reset the alarm via the Diagnostics Port or the RS-485 interface. Flow Analog Output Loop Open Alarm The Flow Analog Output Loop Open Alarm will occur when the device detects that there is no current flowing on the current loop. This alarm could be the fault of an open connection on the analog output current loop. Setpoint Analog Input Out of Range Alarm The Setpoint Analog Input Out of Range Alarm will occur when the Voltage Input exceeds the maximum allowable 5.5 V (or 11 V), when the 4 – 20 mA input is less than 3.8 mA or greater than 22 mA, or when the 0 – 20 mA input is greater than 22 mA. 3-10 Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Section 3 Operation Brooks® Digital MFC's & MFM's Flow Analog Output Out of Range Alarm The Flow Analog Output Out of Range Alarm will occur when the measured flow results in an Analog Output which exceeds the specified range for either the Voltage or Current Output. See Section 1. Flow Sensor Out of Range The Flow Sensor Out of Range Alarm will occur when the device detects that the signal received from the sensor is not within the allowable tolerance band. This alarm could be the result of a flow sensor failure. 3-7 Calibration/Configuration Sets All Flow Calibration parameters and some of the device configuration parameters are saved in the device Non-Volatile Memory as “sets”. Up to 6 sets of calibration/configuration sets can be saved in order to have a unit pre-configured for multiple gas calibration, different pressure conditions, multiple scalings of the same gas. Calibration and configuration data sets may be adjusted by an advanced user via the Diagnostics Port using a special software application available from Brooks. Reference the Brooks Service Suite FlowSoft User Manual for more information about the Diagnostics Port and Service Tool software applications. Flow Calibration Options In addition to the factory calibration polynomial, the following calibration options are provided to modify the factory calibration: - Gas Correction Factor - Calibration Scaling - User Calibration Polynomial Configuration Options The following configuration parameters are stored in the Calibration/ Configuration Sets: - P, I, and D - Valve Offset, Span, and Leaktight Offset - Pole Compensation and filtering 3-8 Special Features Special Features may be adjusted by an advanced user via the Diagnostics Port using a special software application available from Brooks. Reference the Brooks Service Suite FlowSoft User Manual for more information about the Diagnostics Port and Service Tool software applications. 3-8-1 Setpoint Ramping The following Setpoint Ramping Options are provided: Off – The device responds immediately to Setpoint changes. Time – The device will Ramp Flow from the old Setpoint to the new Setpoint in the time specified by the user in seconds. 3-11 Section 3 Operation Brooks® Digital MFC's & MFM's Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 3-8-2 Low Setpoint Command Cutoff When the Setpoint is derived from analog input, the Low Setpoint Command Cutoff parameter sets the minimum valid value of Setpoint. If the Setpoint value reported by the analog input is below the Low Setpoint Command Cutoff parameter value, then the Setpoint will be set to zero. 3-8-3 Low Flow Output Cutoff Whenever the measured flow is below the Low Flow Output Cutoff parameter, the Flow Output will be set to zero. 3-8-4 Flow Output Damping The Flow Output can be damped from 0 to 10 seconds. 3-8-5 Adaptive Control Adaptive Valve Control is a means of dynamically adjusting valve offset and span in response to changing process conditions. Options for Adaptive Control are: On/Off, Adjust Offset Only, Adjust Offset and Span. 3-8-6 Flow Totalizer A Flow Totalizer will be provided and maintained in Non-Volatile Memory. The update rate of the totalizer in Non-Volatile Memory will be 5 seconds. 3-8-7 Flow Output Conditioning When this feature is enabled and a change in setpoint is detected, the Flow Out signal will equal setpoint for a configurable time period. At the end of the time period, the Flow Out signal will indicate actual flow. A change of setpoint is defined as a change of more than 1% of full scale. 3-8-8 Flow Signal Lock-in When this feature is enabled, the Flow Out signal will “lock-in” to the setpoint value whenever the error between measured Flow and Setpoint is less than a configurable value. 3-9 PC-based Support Tools Brooks Instrument offers a variety of PC-based process control and service tools to meet the needs of our customers. Smart Interface may be used with any unit supporting RS485 in a multidrop configuration, thus allowing users to control and monitor their Brooks devices. The Brooks Service Suite FlowSoft (Analog I/O versions only) may be used to monitor, diagnose, tune and calibrate Brooks devices. The Brooks Service Suite FlowSoft interfaces with Brooks products via a special diagnostics port. 3-12 Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Section 4 Maintenance & Troubleshooting Brooks® Digital MFC's & MFM's 4-1 Maintenance and Troubleshooting No routine maintenance is required on the Brooks Digital MFC's and MFM's. If an in-line filter is used, the filtering elements should be periodically replaced or cleaned. 4-1 Section 4 Maintenance & Troubleshooting Brooks® Digital MFC's & MFM's Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 4-1-1 Troubleshooting Analog or DeviceNet version This section contains suggestions to help diagnose MFC related problems in the gas distribution system and answers commonly asked questions. Failure of the flow rate or flow signal to achieve setpoint. 1. Insufficient pressure drop across the MFCs (low or no pressure). If there is not enough pressure differential across the MFC, it is impossible for the MFC's orifice to pass the full scale flow rate. To check for this condition, compare the actual inlet/outlet pressure drop with that specified on the order. Increase the pressure if necessary. 2. If pressure settings are correct and flow signal does not match setpoint, a secondary issue could be the gas type. If checking the MFC with a surrogate gas, ensure that there is enough pressure to the MFC in order to flow the correct amount of the surrogate gas. 3. Setpoint is below minimum. MFCs may have a settable low flow cutoff for the setpoint command. If setpoint is below this value, then the MFC will not attempt to control. 4. Clogged sensor tube. If the MFC sensor tube is clogged, the flow signal will be very low or zero while the actual flow will be at the valve's maximum rate. 5. Flow signal matched setpoint but, actual flow is not correct. Clogged restrictor. If the MFC's restrictor becomes clogged, a much larger flow stream will pass through the sensor rather than going straight through the restrictor. The symptom of this condition is a substantially reduced actual flow with a flow signal which matches the setpoint. 6. Flow rate in excess of 100% at zero setpoint. Valve Override pin set to open or sensor tube is clogged (see above). If Valve Override (VOR) pin is active, the valve will be forced open or closed. Set this pin to its normal level before setting a setpoint. 7. Flow/Flow signal 'Unstable' Model SL5800 Series MFC performance is tuned during calibration at the conditions specified on the order. If the conditions in use (inlet and outlet pressure, temperature, attitude, gas or mixture type) are different or become different over time, the MFC may not perform as it did when it left the factory. DeviceNet Version Only 8. Failure of the flow rate or flow signal to achieve setpoint. Specifically for a DeviceNet MFC, there may be problems associated with the network communication link. One common problem is due to data mismatches of the Input/Output (I/O) Assemblies. For proper communication over the DeviceNet network, the MFC must be set up with the same I/O assembly as the network master. Confirm these I/O settings are correct. 4-2 Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Section 4 Maintenance & Troubleshooting Brooks® Digital MFC's & MFM's NOTE: This information and all other detailed DeviceNet information is available in the Brooks DeviceNet Supplement Instruction Manual. Questions Analog Version Q: What is purpose of the LED on top of the MFC? A: The LED on top of the MFC should normally be lit GREEN, This signifies the MFC is in proper working mode. If the LED is lit RED, this signifies a critical fault has occurred in the MFC. Please contact the factory for instructions. Questions DeviceNet Version Q: What is purpose of the LED on top of the MFC? A: There are two LEDs on top of a DeviceNet version MFC. The LED labeled 'MOD' is used to indicate module status. This LED should normally be lit GREEN. If the 'MOD' LED is lit RED, this signifies a critical fault has occurred in the MFC. Please contact the factory for instructions. The LED labeled 'NET' is used to indicate NETWORK status. Note the 'NET' LED can have 4 distinct operational states. For more complete details on these LEDs, reference the Brooks DeviceNet Supplement Instruction Manual. Q: What is purpose of the Rotary Switches on top of the MFC? A: Two of the rotary switches are labeled 'ADDRESS'. These two switches are used to configure the MAC ID of the MFC when used on the DeviceNet network. MAC ID stands for Media Access Control Identifier and is used to set the unique address of the device on the network. The possible range of addresses is 00 to 63. The out-of-box MAC ID setting is 63. The third rotary switch is labeled 'RATE'. This switch sets the baud rate of the MFC for communicating over the DeviceNet network. The out-of-box default setting is 125K baud. For more complete details on these switches, reference the Brooks DeviceNet Supplement Instruction Manual. Analog or DeviceNet Version Q: What is the purpose of the recessed push-button on the side of the MFC? A: This push-button is used to start a self-zero function. DO NOT press this button unless you are performing this function as described in Section 3-5 of this manual. 4-1-2 System Checks The Brooks Digital Series Flowmeters and Controllers are generally used as a component in gas handling systems, which can be complex in nature. It can therefore be very difficult to isolate a malfunction in the system. An inaccurately diagnosed malfunction can cause many hours of unnecessary downtime. If possible, perform the following system checks before removing a suspect Mass Flow Meter or Controller for bench troubleshooting or return to the factory. (especially if the system is new): 1. Verify a low resistance common connection and that the correct power supply voltage and signals are present of the connector of the Smart TMF. 4-3 Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Brooks® Digital MFC's & MFM's Table 4-1 Sensor Troubleshooting SENSOR SCHEMATIC PIN NO. 1 2 3 4 5 6 7 FUNCTION Heater Upstream Temperature Sensor (Su) Downstream Temperature Sensor (Sd) Sensor Common Heater Common Thermistor Thermistor Remove the sensor connector from the PC Board for this procedure. OHMMETER CONNECTION Pin 1 or 4 to meter body Pin 4 to Pin 2 Pin 4 to Pin 3 RESULT IF ELECTRICALLY FUNCTIONAL Open circuit on ohmmeter. If either heater (1) or sensor common (4) are shorted, an ohmmeter reading will be obtained. Nominal 1100 ohms reading, depending on temperature and ohmmeter current. Pin 5 to Pin 1 Nominal 1000 ohm reading. Pin 6 to Pin 7 Nominal 580 ohm reading. 2. Verify that the process gas connections have been made correctly, and that they have been tested for leaks. 3. If the Mass Flow Controller appears to be functioning but cannot achieve Setpoint, verify that there is sufficient inlet pressure and pressure drop at the controller to provide the required flow. This section contains suggestions to help diagnose simple MFC/MFM related problems in the gas distribution system and answers commonly asked questions. 4-4 Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Section 4 Maintenance & Troubleshooting Brooks® Digital MFC's & MFM's Bench Troubleshooting 1. Establish a proper connection between the Brooks Digital Series Mass Flow Meter or Controller (using Figure 4-1 as a reference) Switch on the power and allow the instrument to warm-up for 45 minutes. In case of a Controller model, adjust the Setpoint to zero. Do not connect the device to a gas source yet. Observe the output signal and, if necessary, perform the zero adjustment procedure (See Section 3-4 zeroing function). If the output signal does not zero properly, please contact Brooks Instrument. 2. Connect the instrument to a source of the same gas used for it's original calibration. Regulate the Setpoint to 100% flow and adjust the inlet and outlet pressures to calibration conditions. Verify that the output signal reaches its full scale value and stabilizes at that value. Vary the command voltage over the 1 to 100% range and verify that the output signal follows the Setpoint If possible, connect a flow measurement device to monitor the actual flow behavior and verify the accuracy of the mass flow instrument. If the mass instrument performs as described above, then it is functioning correctly and the problem may lie elsewhere. Table 4-2 lists possible malfunctions which may be encountered during bench troubleshooting. For Controller Models Only: Apply +5 Vdc to the +15 Vdc valve override pin (pin 12) and verify that the output exceeds 100%. Connect the valve override pin to earth and verify that the output signal falls below 2%. Figure 4-1 Bench Troubleshooting Circuit 4-5 Section 4 Maintenance & Troubleshooting Brooks® Digital MFC's & MFM's Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 4-1-3 Cleaning Procedures When deposition makes it necessary to clean the Brooks Digital Series Mass Flow Controller or Mass Flow Meter, use the following procedures: 1. Remove the unit from the system. 2. Purge with dry nitrogen gas, which removes virtually all particulate matter from the device. Should contamination persist, subject all wetted1 components to ultrasonic cleaning. Following this, purge the device thoroughly with dry nitrogen gas once again. 3. If the sensor is contaminated, remove the sensor and use a hemostat or tweezers to push a 0.007" diameter piano wire through the flow-sensor tube to remove any contamination (end closest to the control valve). The sensor tube can then be flushed with a solvent that leaves no residue. This can be accomplished conveniently using a hypodermic needle filled with solvent. NOTE: Do not soak the sensor assembly in a cleaning solvent. If solvent seeps into the sensor assembly, it will likely damage or significantly alter the sensor's operating characteristics. 4-1-4 Calibration Procedure The calibration of Brooks Digital Series Mass Flow devices is not described in this manual. Such calibration requires accurate and traceable calibration equipment in addition to digital communications. If your device needs calibration Brooks Instrument can provide this service at one of its service locations. Visit www.BrooksInstrument.com to locate the service location nearest to you. However, if traceable calibration equipment is available at your facility, Brooks Service Suite FlowSoft Calibration software, along with training, is available for purchase. 1 4-6 Wetted components include the body, laminar-flow element, and all valve components including the orifice, process adapters and inlet filters (if so equipped). Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Section 4 Maintenance & Troubleshooting Brooks® Digital MFC's & MFM's Table 4-2 Troubleshooting Trouble Output stays at zero (regardless of Setpoint) and there is flow through the meter/controller Flow cannot be achieved regardless of Setpoint. (applicable to MFC) Output signal stays at approx. 5.5 Vdc or 22 mA (regardless of Setpoint) and there is flow through the meter/controller Output signal follows Setpoint at higher Setpoints but will not go below 2% Output signal follows Setpoint at lower Setpoints, but does not reach full scale Instrument grossly out of calibration. Flow is higher than desired. Instrument grossly out of calibration. Flow is lower than desired. Controller oscillates (applicable to MFC) Possible cause Clogged Sensor Check/Corrective Action Clean sensor. Refer to cleaning procedures (Section 4-1-2). Defective electronic board Clogged Control Valve Contact Brooks Instrument Clean the control valve (Section 4-1-2) or return the device to the factory Valve override input is grounded Check the valve override input (Pin 12) Defective electronic board Valve leaks or is stuck open (applicable to MFC) Contact Brooks Instrument. Clean and/or adjust control valve (Section 4-1-2). +15 V applied to the valve override input (applicable to MFC) Check the valve override terminal (Pin 12) Defective PC board Control valve leaks or is stuck open. Contact Brooks Instrument Clean the control valve or return the device to the factory (Section 4-1-2). Insufficient inlet pressure or pressure drop Adjust pressures, inspect in-line filters and clean/replace as necessary. Partially clogged sensor Clean sensor, see cleaning procedures (Section 4-1-2). Partially clogged valve (applicable to MFC) Clean the control valve (Section 4-1-2) or return the device to the factory, see cleaning proceedures Valve out of adjustment (applicable to MFC) Contact Brooks Instrument Valve guide spring failure (applicable to MFC) Partially clogged sensor Contact Brooks Instrument Partially clogged restrictor Replace or clean restrictor Pressure drop or inlet pressure deviates from calibrated values Adjust pressures to original specifications Valve out of adjustment Contact Brooks Instrument Unstable inlet pressure Check external pressure regulator Defective PC board Contact Brooks Instrument Clean sensor, see cleaning procedures (Section 4-1-2). 4-7 Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Brooks® Digital MFC's & MFM's THIS PAGE WAS INTENTIONALLY LEFT BLANK 4-8 Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Section A Essential Instructions Brooks® Digital MFC's and MFM's Bulgarian Ɉɫɧɨɜɧɢ ɢɧɫɬɪɭɤɰɢɢ ɉɪɨɱɟɬɟɬɟ ɩɪɟɞɢ ɪɚɛɨɬɚ! Brooks Instrument ɩɪɨɟɤɬɢɪɚ, ɩɪɨɢɡɜɟɠɞɚ ɢ ɬɟɫɬɜɚ ɩɪɨɞɭɤɬɢɬɟ ɫɢ ɩɨ ɬɚɤɴɜ ɧɚɱɢɧ, ɱɟ ɬɟ ɞɚ ɨɬɝɨɜɚɪɹɬ ɧɚ ɦɧɨɝɨɛɪɨɣɧɢ ɧɚɰɢɨɧɚɥɧɢ ɢ ɦɟɠɞɭɧɚɪɨɞɧɢ ɫɬɚɧɞɚɪɬɢ. Ɍɟɡɢ ɨɛɨɪɭɞɜɚɧɢɹ ɬɪɹɛɜɚ ɩɪɚɜɢɥɧɨ ɞɚ ɫɟ ɢɧɫɬɚɥɢɪɚɬ, ɟɤɫɩɥɨɚɬɢɪɚɬ ɢ ɩɨɞɞɴɪɠɚɬ ɡɚ ɞɚ ɫɟ ɝɚɪɚɧɬɢɪɚ, ɱɟ ɳɟ ɦɨɝɚɬ ɞɚ ɪɚɛɨɬɹɬ ɫɴɨɬɜɟɬɧɨ ɧɚ ɬɟɯɧɢɬɟ ɧɨɪɦɚɥɧɢ ɫɩɟɰɢɮɢɤɚɰɢɢ. ɋɥɟɞɜɚɳɢɬɟ ɢɧɫɬɪɭɤɰɢɢ ɬɪɹɛɜɚ ɞɚ ɫɟ ɫɩɚɡɜɚɬ ɢ ɬɪɹɛɜɚ ɞɚ ɫɟ ɜɤɥɸɱɚɬ ɜ ɩɪɨɝɪɚɦɚɬɚ ɡɚ ɛɟɡɨɩɚɫɧɨɫɬ ɧɚ ɬɪɭɞɚ ɩɪɢ ɢɧɫɬɚɥɢɪɚɧɟɬɨ, ɟɤɫɩɥɨɚɬɚɰɢɹɬɚ ɢ ɩɨɞɞɪɴɠɤɚɬɚ ɧɚ ɩɪɨɞɭɤɬɢɬɟ ɧɚ Brooks Instrument. x Ɂɚ ɞɚ ɫɟ ɝɚɪɚɧɬɢɪɚ ɯɚɪɚɤɬɟɪɧɚɬɚ ɩɪɨɢɡɜɨɞɢɬɟɥɧɨɫɬ, ɢɧɫɬɚɥɢɪɚɧɟɬɨ, ɟɤɫɩɥɨɚɬɚɰɢɹɬɚ, ɚɤɬɭɚɥɢɡɢɪɚɧɟɬɨ, ɩɪɨɝɪɚɦɢɪɚɧɟɬɨ ɢ ɩɨɞɞɪɴɠɤɚɬɚ ɧɚ ɩɪɨɞɭɤɬɚ ɬɪɹɛɜɚ ɞɚ ɫɟ ɢɡɜɴɪɲɜɚɬ ɫɚɦɨ ɨɬ ɤɜɚɥɢɮɢɰɢɪɚɧ ɩɟɪɫɨɧɚɥ. x ɉɪɨɱɟɬɟɬɟ ɜɫɢɱɤɢ ɢɧɫɬɪɭɤɰɢɢ ɩɪɟɞɢ ɢɧɫɬɚɥɢɪɚɧɟɬɨ, ɟɤɫɩɥɨɚɬɚɰɢɹɬɚ ɢ ɩɨɞɞɪɴɠɤɚɬɚ ɧɚ ɩɪɨɞɭɤɬɚ. Ⱥɤɨ ɬɨɜɚ ɪɴɤɨɜɨɞɫɬɜɨ ɧɟ ɟ ɫɴɨɬɜɟɬɫɬɜɚɳɨɬɨ ɢɡɞɚɧɢɟ, ɜɢɠɬɟ ɧɚ ɡɚɞɧɚɬɚ ɨɛɥɨɠɤɚ ɢɧɮɨɪɦɚɰɢɹɬɚ ɡɚ ɤɨɧɬɚɤɬ ɫ ɦɟɫɬɧɢɹ ɬɴɪɝɨɜɫɤɢ ɨɮɢɫ. Ɂɚɩɚɡɟɬɟ ɬɨɜɚ ɪɴɤɨɜɨɞɫɬɜɨ ɡɚ ɩɨ-ɤɴɫɧɨ ɢɧɮɨɪɦɢɪɚɧɟ. ȼɇɂɆȺɇɂȿ: ɇɟ ɪɚɛɨɬɟɬɟ ɫ ɨɛɨɪɭɞɜɚɧɟɬɨ ɢɡɜɴɧ ɞɢɚɩɚɡɨɧɢɬɟ, ɭɤɚɡɚɧɢ ɜ ɢɧɫɬɪɭɤɰɢɹɬɚ ɢ ɪɴɤɨɜɨɞɫɬɜɨɬɨ ɩɨ ɟɤɫɩɥɨɚɬɚɰɢɹ. ɇɟɢɡɩɴɥɧɟɧɢɟɬɨ ɧɚ ɬɨɜɚ ɦɨɠɟ ɞɚ ɞɨɜɟɞɟ ɞɨ ɫɟɪɢɨɡɧɢ ɬɟɥɟɫɧɢ ɩɨɜɪɟɞɢ ɢ / ɢɥɢ ɩɨɜɪɟɠɞɚɧɟ ɧɚ ɨɛɨɪɭɞɜɚɧɟɬɨ. x Ⱥɤɨ ɧɟ ɪɚɡɛɢɪɚɬɟ ɧɹɤɨɢ ɢɧɫɬɪɭɤɰɢɢɬɟ, ɫɜɴɪɠɟɬɟ ɫɟ ɫ ɩɪɟɞɫɬɚɜɢɬɟɥɹ ɧɚ Brooks Instrument ɡɚ ɢɡɹɫɧɹɜɚɧɟ ɧɚ ɩɪɨɛɥɟɦɚ. x ɋɩɚɡɜɚɣɬɟ ɜɫɢɱɤɢ ɩɪɟɞɭɩɪɟɠɞɟɧɢɹ, ɩɪɢɡɨɜɢ ɢ ɢɧɫɬɪɭɤɰɢɢ ɨɡɧɚɱɟɧɢ ɜɴɪɯɭ ɨɛɨɪɭɞɜɚɧɟɬɨ ɢɥɢ ɞɨɫɬɚɜɟɧɢ ɡɚɟɞɧɨ ɫ ɧɟɝɨ. x ɂɧɫɬɚɥɢɪɚɣɬɟ ɨɛɨɪɭɞɜɚɧɟɬɨ ɫɴɨɬɜɟɬɧɨ ɧɚ ɭɤɚɡɚɧɢɹɬɚ ɜ ɢɧɫɬɪɭɤɰɢɹɬɚ ɡɚ ɢɧɫɬɚɥɢɪɚɧɟ ɢ ɧɚ ɞɟɣɫɬɜɚɳɢɬɟ ɧɚ ɦɟɫɬɧɢ ɢ ɧɚɰɢɨɧɚɥɧɢ ɩɪɟɞɩɢɫɚɧɢɹ. ɋɜɴɪɡɜɚɣɬɟ ɩɪɨɞɭɤɬɢɬɟ ɫɚɦɨ ɤɴɦ ɩɨɞɯɨɞɹɳɢ ɢɡɬɨɱɧɢɰɢ ɧɚ ɟɥɟɤɬɪɢɱɟɫɬɜɨ ɢ ɧɚɥɹɝɚɧɟ. x ɏɨɞ: (1) Ȼɚɜɧɨ ɜɴɜɟɞɟɬɟ ɫɢɫɬɟɦɚɬɚ ɩɨɞ ɧɚɥɹɝɚɧɟ. Ȼɚɜɧɨ ɨɬɜɨɪɟɬɟ ɪɚɛɨɬɧɢɬɟ ɤɥɚɩɚɧɢ ɡɚ ɞɚ ɫɟ ɢɡɛɟɝɧɚɬ ɤɨɥɟɛɚɧɢɹɬɚ ɧɚ ɩɨɬɨɤɚ. (2) ɉɪɨɜɟɪɟɬɟ ɞɚɥɢ ɧɹɦɚ ɢɡɬɢɱɚɧɟ ɩɪɢ ɜɯɨɞɧɨɬɨ ɢ ɢɡɯɨɞɧɨɬɨ ɫɴɟɞɢɧɟɧɢɟ ɧɚ ɪɚɡɯɨɞɨɦɟɪɚ. Ⱥɤɨ ɧɹɦɚ ɢɡɬɢɱɚɧɟ, ɧɚɩɴɥɧɟɬɟ ɫɢɫɬɟɦɚɬɚ ɞɨ ɪɚɛɨɬɧɨ ɧɚɥɹɝɚɧɟ. x ɉɪɟɞɢ ɢɡɜɴɪɲɜɚɧɟ ɧɚ ɩɨɞɞɪɴɠɤɚɬɚ ɧɟɩɪɟɦɟɧɧɨ ɩɪɨɜɟɪɟɬɟ ɞɚɥɢ ɪɚɛɨɬɧɢɹɬ ɬɪɴɛɨɩɪɨɜɨɞ ɧɟ ɫɟ ɧɚɦɢɪɚ ɩɨɞ ɧɚɥɹɝɚɧɟ. Ⱥɤɨ ɫɚ ɧɟɨɛɯɨɞɢɦɢ ɪɟɡɟɪɜɧɢ ɱɚɫɬɢ, ɫ ɨɩɪɟɞɟɥɟɧɢɬɟ ɨɬ Brooks Instrument ɪɟɡɟɪɜɧɢ ɱɚɫɬɢ ɬɪɹɛɜɚ ɞɚ ɛɨɪɚɜɢ ɫɚɦɨ ɤɜɚɥɢɮɢɰɢɪɚɧ ɩɟɪɫɨɧɚɥ. ɇɟɪɚɡɪɟɲɟɧɢɬɟ ɱɚɫɬɢ ɢ ɩɪɨɰɟɞɭɪɢ ɦɨɝɚɬ ɞɚ ɨɤɚɠɚɬ ɜɥɢɹɧɢɟ ɜɴɪɯɭ ɪɚɛɨɬɚɬɚ ɧɚ ɩɪɨɞɭɤɬɚ, ɢ ɫɴɳɨ ɞɚ ɡɚɫɬɪɚɲɚɬ ɛɟɡɨɩɚɫɧɨɫɬɬɚ ɧɚ ɟɤɫɩɥɨɚɬɚɰɢɹɬɚ. Ɂɚɦɟɫɬɜɚɧɟɬɨ ɫ ɧɟɨɪɢɝɢɧɚɥɧɢ ɱɚɫɬɢ ɦɨɠɟ ɞɚ ɞɨɜɟɞɟ ɞɨ ɩɨɠɚɪ, ɨɩɚɫɧɨɫɬ ɨɬ ɬɨɤɨɜ ɭɞɚɪ ɢɥɢ ɧɟɩɪɚɜɢɥɧɚ ɪɚɛɨɬɚ. x ȼɫɢɱɤɢ ɜɪɚɬɢ ɧɚ ɨɛɨɪɭɞɜɚɧɟɬɨ ɧɟɩɪɟɦɟɧɧɨ ɞɚ ɛɴɞɚɬ ɡɚɬɜɨɪɟɧɢ, ɚ ɡɚɳɢɬɧɢɬɟ ɩɨɤɪɢɬɢɹ ɞɚ ɛɴɞɚɬ ɧɚ ɦɹɫɬɨɬɨ ɫɢ, ɡɚ ɞɚ ɫɟ ɢɡɛɟɝɧɚɬ ɬɨɤɨɜɢɬɟ ɭɞɚɪɢ ɢ ɬɟɥɟɫɧɢɬɟ ɩɨɜɪɟɞɢ, ɨɫɜɟɧ ɚɤɨ ɤɜɚɥɢɮɢɰɢɪɚɧɢ ɫɩɟɰɢɚɥɢɫɬɢ ɢɡɜɴɪɲɜɚɬ ɪɚɛɨɬɢ ɩɨ ɧɟɝɨɜɨɬɨ ɩɨɞɞɴɪɠɚɧɟ. ȼɇɂɆȺɇɂȿ: ɉɪɢ ɨɛɨɪɭɞɜɚɧɢɹɬɚ ɫ ɩɪɨɬɢɱɚɳɢ ɬɟɱɧɨɫɬɢ, ɚɤɨ ɩɨ ɧɹɤɚɤɜɚ ɩɪɢɱɢɧɚ ɟ ɧɟɨɛɯɨɞɢɦɨ ɞɚ ɫɟ ɡɚɬɜɨɪɹɬ ɧɚɦɢɪɚɳɢɬɟ ɫɟ ɞɨ ɨɛɨɪɭɞɜɚɧɟɬɨ ɢɡɯɨɞɧɢ ɢ ɜɯɨɞɧɢ ɤɥɚɩɚɧɢ, ɨɛɨɪɭɞɜɚɧɟɬɨ ɬɪɹɛɜɚ ɧɚɩɴɥɧɨ ɞɚ ɫɟ ɢɡɩɪɚɡɧɢ. ɇɟɢɡɩɴɥɧɟɧɢɟɬɨ ɧɚ ɬɨɜɚ ɦɨɠɟ ɞɚ ɩɪɢɱɢɧɢ ɬɨɩɥɢɧɧɨ ɪɚɡɲɢɪɟɧɢɟ ɧɚ ɬɟɱɧɨɫɬɬɚ, ɤɨɟɬɨ ɦɨɠɟ ɞɨ ɫɩɭɤɚ ɨɛɨɪɭɞɜɚɧɟɬɨ ɢ ɞɚ ɞɨɜɟɞɟ ɞɨ ɬɟɥɟɫɧɢ ɩɨɜɪɟɞɢ. ȿɜɪɨɩɟɣɫɤɚ ɞɢɪɟɤɬɢɜɚ ɡɚ ɭɪɟɞɢ ɩɨɞ ɧɚɥɹɝɚɧɟ (PED) ȼɫɢɱɤɢ ɫɴɨɪɴɠɟɧɢɹ ɩɨɞ ɧɚɥɹɝɚɧɟ ɫ ɜɴɬɪɟɲɧɨ ɧɚɥɹɝɚɧɟ ɧɚɞ 0,5 bar (g) ɢ ɫ ɪɚɡɦɟɪ ɩɨ-ɝɨɥɹɦ ɨɬ 25 mm ɢɥɢ 1" (ɢɧɱ), ɩɨɩɚɞɚɬ ɩɨɞ ɞɟɣɫɬɜɢɟɬɨ ɧɚ ɟɜɪɨɩɟɣɫɤɚɬɚ ɞɢɪɟɤɬɢɜɚ ɡɚ ɭɪɟɞɢ ɩɨɞ ɧɚɥɹɝɚɧɟ (PED). x Ƚɥɚɜɚ „Ɍɟɯɧɢɱɟɫɤɢ ɞɚɧɧɢ” ɧɚ ɧɚɫɬɨɹɳɨɬɨ ɪɴɤɨɜɨɞɫɬɜɨ ɫɴɞɴɪɠɚ ɫɜɴɪɡɚɧɢɬɟ ɫ ɞɢɪɟɤɬɢɜɚɬɚ PED ɢɧɫɬɪɭɤɰɢɢ. x ɍɤɚɡɚɧɢɬɟ ɜ ɧɚɫɬɨɹɳɨɬɨ ɪɴɤɨɜɨɞɫɬɜɨ ɢɡɦɟɪɢɬɟɥɧɢ ɭɪɟɞɢ ɫɴɨɬɜɟɬɫɬɜɚɬ ɧɚ ɟɜɪɨɩɟɣɫɤɚɬɚ ɞɢɪɟɤɬɢɜɚ 97/23/ȿɈ. x ȼɫɢɱɤɢ ɪɚɡɯɨɞɨɦɟɪɢ ɧɚ Brooks Instrument ɫɟ ɨɬɧɚɫɹɬ ɤɴɦ ɮɥɭɢɞɢ ɨɬ ɝɪɭɩɚ 1. x ɂɡɦɟɪɢɬɟɥɧɢɬɟ ɭɪɟɞɢ ɩɨ-ɝɨɥɟɦɢ ɨɬ 25 mm ɢɥɢ 1" (ɢɧɱ) ɫɴɨɬɜɟɬɫɬɜɚɬ ɧɚ I, II ɢɥɢ III ɤɚɬɟɝɨɪɢɹ ɫɩɨɪɟɞ PED. x ɂɡɦɟɪɢɬɟɥɧɢɬɟ ɭɪɟɞɢ ɫ ɪɚɡɦɟɪɢ 25 mm ɢɥɢ 1" (ɢɧɱ), ɢɥɢ ɩɨ-ɦɚɥɤɢ, ɫɥɟɞɜɚɬ ɞɨɛɪɚɬɚ ɢɧɠɟɧɟɪɧɚ ɩɪɚɤɬɢɤɚ (SEP). ȿɜɪɨɩɟɣɫɤɚ ɞɢɪɟɤɬɢɜɚ ɡɚ ɟɥɟɤɬɪɨɦɚɝɧɢɬɧɚ ɫɴɜɦɟɫɬɢɦɨɫɬ (EMC) ɇɨɫɟɳɨɬɨ ɡɧɚɤɚ ɋȿ (ɟɥɟɤɬɪɢɱɟɫɤɨ/ɟɥɟɤɬɪɨɧɧɨ) ɨɛɨɪɭɞɜɚɧɟ ɧɚ Brooks Instrument ɟ ɢɡɩɴɥɧɢɥɨ ɭɫɩɟɲɧɨ ɬɟɫɬɨɜɟɬɟ ɡɚ ɩɪɨɜɟɪɤɚ ɧɚ ɢɡɢɫɤɜɚɧɢɹɬɚ ɡɚ ɟɥɟɤɬɪɨɦɚɝɧɢɬɧɚ ɫɴɜɦɟɫɬɢɦɨɫɬ (ɞɢɪɟɤɬɢɜɚ EMC 2004/108/EC). Ɉɫɨɛɟɧɨ ɜɧɢɦɚɧɢɟ ɬɪɹɛɜɚ ɞɚ ɫɟ ɨɛɪɴɳɚ ɨɛɚɱɟ ɧɚ ɢɡɛɢɪɚɧɟɬɨ ɧɚ ɫɢɝɧɚɥɧɢɬɟ ɤɚɛɟɥɢ, ɢɡɩɨɥɡɜɚɧɢ ɫ ɨɛɨɪɭɞɜɚɧɟɬɨ, ɧɨɫɟɳɨ ɡɧɚɤɚ ɋȿ. Ʉɚɱɟɫɬɜɨ ɧɚ ɫɢɝɧɚɥɧɢɬɟ ɤɚɛɟɥɢ, ɤɚɛɟɥɧɢɬɟ ɫɚɥɧɢɰɢ ɢ ɫɴɟɞɢɧɢɬɟɥɢ: Brooks Insturment ɩɪɟɞɥɚɝɚ ɜɢɫɨɤɨɤɚɱɟɫɬɜɟɧɢ ɤɚɛɟɥɢ, ɨɬɝɨɜɚɪɹɳɢ ɧɚ ɢɡɢɫɤɜɚɧɢɹɬɚ ɧɚ CE ɫɟɪɬɢɮɢɤɚɰɢɹɬɚ. Ⱥɤɨ ɢɡɩɨɥɡɜɚɬɟ ɫɨɛɫɬɜɟɧ ɫɢɝɧɚɥɟɧ ɤɚɛɟɥ, ɬɪɹɛɜɚ ɞɚ ɢɡɛɟɪɟɬɟ ɬɚɤɴɜ, ɤɨɣɬɨ ɟ ɧɚɩɴɥɧɨ ɡɚɳɢɬɟɧ ɫɴɫ 100%-ɨɜɨ ɟɤɪɚɧɢɪɚɧɟ. ɋɴɟɞɢɧɢɬɟɥɢɬɟ ɬɢɩ „D” ɢɥɢ „ɤɪɴɝɨɜ” ɬɪɹɛɜɚ ɞɚ ɛɴɞɚɬ ɟɤɪɚɧɢɪɚɧɢ ɫ ɦɟɬɚɥɟɧ ɳɢɬ. ɉɪɢ ɧɟɨɛɯɨɞɢɦɨɫɬ ɡɚ ɮɢɤɫɢɪɚɧɟɬɨ ɧɚ ɳɢɬɚ ɧɚ ɤɚɛɟɥɚ ɬɪɹɛɜɚ ɞɚ ɫɟ ɢɡɩɨɥɡɜɚɬ ɦɟɬɚɥɧɢ ɤɚɛɟɥɧɢ ɫɚɥɧɢɰɢ. ɓɢɬɴɬ ɧɚ ɤɚɛɟɥɚ ɬɪɹɛɜɚ ɞɚ ɫɟ ɫɜɴɪɠɟ ɫ ɦɟɬɚɥɧɨɬɨ ɩɨɤɪɢɬɢɟ ɢɥɢ ɦɟɬɚɥɧɢɹ ɫɚɥɧɢɤ ɢ ɜ ɞɜɚɬɚ ɤɪɚɹ ɞɚ ɫɟ ɟɤɪɚɧɢɪɚ ɜ 360°. ɓɢɬɴɬ ɬɪɹɛɜɚ ɞɚ ɛɴɞɟ ɡɚɡɟɦɟɧ. ɋɴɟɞɢɧɢɬɟɥɢɬɟ ɡɚ ɩɟɱɚɬɧɢ ɩɥɚɬɤɢ ɫɚ ɫɬɚɧɞɚɪɬɧɨ ɧɟɦɟɬɚɥɧɢ. ɂɡɩɨɥɡɜɚɧɢɬɟ ɤɚɛɟɥɢ ɬɪɹɛɜɚ ɞɚ ɛɴɞɚɬ ɡɚɳɢɬɟɧɢ ɫɴɫ 100%-ɨɜɨ ɟɤɪɚɧɢɪɚɧɟ, ɡɚ ɞɚ ɨɬɝɨɜɚɪɹɬ ɧɚ CE ɫɟɪɬɢɮɢɤɚɰɢɹɬɚ. ɓɢɬɴɬ ɬɪɹɛɜɚ ɞɚ ɛɴɞɟ ɡɚɡɟɦɟɧ. Ʉɨɧɮɢɝɭɪɚɰɢɹ ɧɚ ɤɨɧɬɚɤɬɢɬɟ: ȼɢɠ ɩɪɢɥɨɠɟɧɚɬɚ ɢɧɫɬɪɭɤɰɢɹ ɡɚ ɟɤɫɩɥɨɚɬɚɰɢɹ. ȿɥɟɤɬɪɨɫɬɚɬɢɱɟɧ ɪɚɡɪɹɞ (ESD) ȼɇɂɆȺɇɂȿ: ɉɪɢɛɨɪɴɬ ɫɴɞɴɪɠɚ ɟɥɟɤɬɪɨɧɧɢ ɤɨɦɩɨɧɟɧɬɢ, ɤɨɢɬɨ ɫɚ ɱɭɜɫɬɜɢɬɟɥɧɢ ɤɴɦ ɫɬɚɬɢɱɧɨɬɨ ɟɥɟɤɬɪɢɱɟɫɬɜɨ ɢ ɦɨɝɚɬ ɞɚ ɫɟ ɩɨɜɪɟɞɹɬ ɨɬ ɧɟɝɨ. Ɍɪɹɛɜɚ ɞɚ ɫɟ ɫɩɚɡɜɚɬ ɫɴɨɬɜɟɬɧɢɬɟ ɩɪɨɰɟɞɭɪɢ ɩɨ ɜɪɟɦɟ ɧɚ ɢɡɜɚɠɞɚɧɟ, ɫɥɚɝɚɧɟ ɢɥɢ ɞɪɭɝɨ ɛɨɪɚɜɟɧɟ ɫ ɜɴɬɪɟɲɧɢɬɟ ɦɨɧɬɚɠɧɢ ɩɥɚɬɤɢ ɢ ɭɫɬɪɨɣɫɬɜɚ. ɉɪɨɰɟɞɭɪɚ ɡɚ ɪɚɛɨɬɚ: 1. ɂɡɤɥɸɱɟɬɟ ɨɛɨɪɭɞɜɚɧɟɬɨ. 2. ɉɟɪɫɨɧɚɥɴɬ ɬɪɹɛɜɚ ɞɚ ɫɟ ɡɚɡɟɦɢ ɫ ɝɪɢɜɧɚ ɢɥɢ ɞɪɭɝɨ ɛɟɡɨɩɚɫɧɨ ɢ ɩɨɞɯɨɞɹɳɨ ɡɚ ɰɟɥɬɚ ɫɪɟɞɫɬɜɨ, ɩɪɟɞɢ ɞɚ ɢɧɫɬɚɥɢɪɚ, ɢɡɜɚɠɞɚ ɢɥɢ ɪɟɝɭɥɢɪɚ ɦɨɧɬɚɠɧɚ ɩɥɚɬɤɚ ɢɥɢ ɞɪɭɝɨ ɜɴɬɪɟɲɧɨ ɭɫɬɪɨɣɫɬɜɨ. 3. ɉɟɱɚɬɧɢɬɟ ɦɨɧɬɚɠɧɢ ɩɥɚɬɤɢ ɬɪɹɛɜɚ ɞɚ ɫɟ ɬɪɚɧɫɩɨɪɬɢɪɚɬ ɜ ɩɪɨɜɨɞɹɳɚ ɨɩɚɤɨɜɤɚ. ɉɟɱɚɬɧɢɬɟ ɩɥɚɬɤɢ ɦɨɝɚɬ ɞɚ ɫɟ ɢɡɜɚɠɞɚɬ ɨɬ ɡɚɳɢɬɧɨɬɨ ɩɨɤɪɢɬɢɟ ɫɚɦɨ ɧɟɩɨɫɪɟɞɫɬɜɟɧɨ ɩɪɟɞɢ ɢɧɫɬɚɥɢɪɚɧɟɬɨ. Ɉɬɫɬɪɚɧɟɧɢɬɟ ɩɟɱɚɬɧɢ ɩɥɚɬɤɢ ɧɟɡɚɛɚɜɧɨ ɬɪɹɛɜɚ ɞɚ ɫɟ ɫɥɨɠɚɬ ɜ ɡɚɳɢɬɧɚ ɨɩɚɤɨɜɤɚ, ɫɥɭɠɟɳɚ ɡɚ ɬɪɚɧɫɩɨɪɬɢɪɚɧɟ, ɫɤɥɚɞɢɪɚɧɟ ɢɥɢ ɜɪɴɳɚɧɟ ɧɚ ɩɪɨɢɡɜɨɞɢɬɟɥɹ. Ɂɚɛɟɥɟɠɤɢ: ɇɟ ɟ ɭɧɢɤɚɥɧɨ ɹɜɥɟɧɢɟ, ɱɟ ɬɨɡɢ ɩɪɢɛɨɪ ɫɴɞɴɪɠɚ ɱɭɜɫɬɜɢɬɟɥɧɢ ɤɴɦ ɟɥɟɤɬɪɨɫɬɚɬɢɱɧɢɹ ɡɚɪɹɞ (ESD) ɤɨɦɩɨɧɟɧɬɢ. Ȼɨɥɲɢɧɫɬɜɨɬɨ ɨɬ ɫɴɜɪɟɦɟɧɧɢɬɟ ɟɥɟɤɬɪɨɧɧɢ ɩɪɢɛɨɪɢ ɫɴɞɴɪɠɚɬ ɤɨɦɩɨɧɟɧɬɢ, ɢɡɝɨɬɜɟɧɢ ɩɨ ɬɟɯɧɨɥɨɝɢɹ ɦɟɬɚɥ-ɨɤɢɫ (NMOS, SMOS ɢ ɬ.ɧ.). Ɉɩɢɬɴɬ ɞɨɤɚɡɜɚ, ɱɟ ɞɚɠɟ ɢ ɦɚɥɤɨ ɤɨɥɢɱɟɫɬɜɨ ɫɬɚɬɢɱɟɫɤɨ ɟɥɟɤɬɪɢɱɟɫɬɜɨ ɦɨɠɟ ɞɚ ɩɨɜɪɟɞɢ ɢɥɢ ɫɴɫɢɩɟ ɬɟɡɢ ɩɪɢɛɨɪɢ. ɉɨɜɪɟɞɟɧɢɬɟ ɤɨɦɩɨɧɟɧɬɢ ɞɚɠɟ ɚɤɨ ɩɪɢɜɢɞɧɨ ɪɚɛɨɬɹɬ ɩɪɚɜɢɥɧɨ, ɩɪɨɹɜɹɜɚɬ ɧɚɱɚɥɧɢ ɧɟɢɡɩɪɚɜɧɨɫɬɢ. A-1 Section A Essential Instructions Installation and Operation Manual Brooks® Digital MFC's and MFM's X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Czech Základní instrukce PĜed instalací si pĜeþtČte následující instrukce! Spoleþnost Brooks Instrument konstruuje, vyrábí a testuje tento produkt tak, aby splnil mnoho národních a mezinárodních standardĤ. PĜístroje musí být ĜádnČ nainstalovány, používány a udržovány tak, aby byl zajištČn jejich nepĜetržitý provoz v rámci normálních technických specifikací. Musíte dodržovat následující pokyny a integrovat jejich obsah do svého bezpeþnostního programu pĜi instalování, používání a udržování produktĤ spoleþnosti Brooks. x Pro zajištČní správné funkce zaĜízení mohou jeho instalaci, obsluhu, programování, údržbu a aktualizace firmwaru provádČt výhradnČ kvalifikované osoby. x PĜed instalací, provozem a údržbou produktu si prostudujte všechny pokyny. Pokud tato pĜíruþka není tou správnou pĜíruþkou pro dané zaĜízení, informujte se na zadní stranČ obálky o kontaktu na místní prodejní kanceláĜ. Uchovejte si tuto pĜíruþku pro pozdČjší potĜebu. UPOZORNċNÍ: Neprovozujte zaĜízení v rozsahu mimo daný rozsah v provozní pĜíruþce. Porušení tohoto upozornČní mĤže mít za následek vážné újmy na zdraví a vést k poškození zaĜízení. x x x x x x Pokud nČkterým pokynĤm nerozumíte, kontaktujte svého prodejního zástupce spoleþnosti Brooks a vyžádejte si objasnČní. Dodržujte všechny výstrahy, upozornČní a pokyny, uvedené a vyznaþené na produktu, nebo s ním dodané. Namontujte zaĜízení specifikovaným zpĤsobem podle správné montážní pĜíruþky a podle platných místních a národních pĜedpisĤ. PĜipojte všechny produkty ke správným zdrojĤm elektrické energie a stlaþených médií. Postup: (1) Pomalu do systému pĜivádČjte médium. Pro zabránČní vzniku rázĤ v systému otvírejte procesní ventily postupnČ. (2) PĜekontrolujte tČsnost vstupního a výstupního pĜipojení prĤtokomČru. Pokud nezjistíte žádné netČsnosti, postupnČ zvedejte tlak na provozní hodnotu. PĜed provádČním servisních prací zkontrolujte, zda systém není pod tlakem. V pĜípadČ potĜeby výmČny dílĤ zajistČte, aby byly použity náhradní souþásti specifikované spoleþností Brooks Instrument a výmČnu provádČla kvalifikovaná osoba. Použití neschválených dílĤ a postupĤ mĤže negativnČ ovlivnit efektivitu a bezpeþnost procesu. Použití náhrad za originální díly mĤže zpĤsobit požár, úraz elektrickým proudem nebo nesprávnou funkci. Pokud není zrovna provádČna údržba kvalifikovanou osobou, ujistČte se, že zaĜízení je opatĜeno všemi pĜedepsanými kryty. UPOZORNċNÍ: Pokud je u zaĜízení s prĤtokem kapalin nutno z jakéhokoli dĤvodu uzavĜít vstupní a výstupní ventily, je nutné zaĜízení kompletnČ vyprázdnit. Pokud tak neuþiníte, mĤže z dĤvodu teplotní roztažnosti zbytkĤ média v zaĜízení dojít k jeho poškození nebo k ohrožení zdraví osob. Evropská smČrnice pro tlakové zaĜízení (PED) Na veškerá tlaková zaĜízení s vnitĜním tlakem vyšším než 0,5 baru (g) a velikosti vČtší než 25 mm nebo 1" (palec) se vztahuje platnost smČrnice o tlakovém zaĜízení (PED). Kapitola „Technické údaje“ v této pĜíruþce obsahuje dĤležité bezpeþnostní a provozní pokyny související se smČrnicí PED. x MČĜicí pĜístroje popsané v této pĜíruþce jsou v souladu se smČrnicí EN 97/23/ES. x Všechny prĤtokomČry spoleþnosti Brooks Instrument spadají do rámce Kapaliny, skupina I. x MČĜicí pĜístroje vČtší než 25 mm nebo 1" (palec) jsou v souladu se smČrnicí PED, kategorii I, II nebo III x MČĜicí pĜístroje s velikostí 25 mm nebo 1" (palec) a menší spadají do rámce Správných technických postupĤ (SEP). Evropská smČrnice pro elektromagnetickou kompatibilitu (EMC) Elektrické/elektronické zaĜízení Brooks Instrument nesoucí znaþku CE bylo úspČšnČ testováno dle pĜedpisĤ pro elektromagnetickou kompatibilitu (smČrnice EMC þ. 2004/108/EC). VýbČru signálních kabelĤ pro použití se zaĜízením oznaþeném CE je nutné vČnovat zvláštní pozornost. Kvalita signálních kabelĤ, kabelových prĤchodek a konektorĤ: Brooks Instrument dodává vysoce jakostní kabely splĖující požadavky kvalitativního zaĜazení CE. Pokud chcete použít vlastní signální kabely, zvolte typy s kvalitním stínČním všech žil a v celé délce trasy. V pĜípadČ použití konektorĤ kruhových nebo tvaru „D“, musí mít tyto kovové stínČní. V pĜípadČ jejich použití, musí kovové kabelové prĤchodky být propojeny se stínČním kabelu. StínČní by mČlo být pĜipojené ke kovovému tČlesu pĜístroje nebo krytu, na obou koncích kabelu a po celém jeho obvodu. StínČní by mČlo být uzemnČno. PĜípojky vedoucí ke kartám podle norem jsou nekovová. Pro splnČní požadavkĤ pĜedpisĤ CE musí být použité kabely kompletnČ stínČny. StínČní by mČlo být uzemnČno. Konfigurace kontaktĤ je uvedena v pĜiloženém návodu k obsluze. Elektrostatický výboj (ESD) UPOZORNċNÍ: Tento pĜístroj obsahuje komponenty citlivé na poškození statickou elektĜinou. PĜi montáži, demontáži þi jiné manipulaci s vnitĜními elektronickými obvody je potĜeba dodržovat pĜíslušné postupy. Postup ošetĜování: 1. Odpojte pĜístroj od napájení. 2. Osoba provádČjící údržbu má být pĜi instalaci, vyjímání þi práci na desce plošných spojĤ nebo jiné vnitĜní elektronice uzemnČna zemnícím náramkem, nebo jiným vyhovujícím zpĤsobem. 3. Desky plošných spojĤ je nutné pĜepravovat v elektricky vodivém obalu. Plošné spoje vyjímejte z vodivého obalu až bezprostĜednČ pĜed instalací do pĜístroje! Plošné spoje vyjmuté z pĜístroje a urþené pro další využití, opČt neprodlenČ umístČte do ochranného obalu. Poznámky: Existence prvkĤ, citlivé na elektrostatické výboje (ESD) v pĜístrojích je þastým jevem. Prvky s technologií oxidu kovĤ (NMOS,SMOS) jsou používány u vČtšiny moderních elektronických zaĜízení. Zkušenosti dokazují, že i jen malé elektrostatické výboje mohou poškodit nebo zniþit tyto zaĜízení. U poškozených souþástek, jakkoli zdánlivČ pracujících bezchybnČ, dochází brzy k poruše. A-2 Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Section A Essential Instructions Brooks® Digital MFC's and MFM's Dansk Grundlæggende vejledninger Læs disse før anvendelse! Brooks Instruments designer, fremstiller og afprøver sine produkter således, at de tilpasser sig både de indenrigs og internationale standarder. Disse udstyr bør installeres, bruges og repareres omhyggeligt, så at de kan virke tilsvarende deres normale anvendelsesperiode. De følgende regler skal overholdes og implementeres under installeringen samt ved brug og reparation. x For at garantere den passende kapacitet, er udstyrets installation, anvendelse, opdatering, programmering kun tilladt for kvalificeret personale. Alle vejledninger skal læses før produktets installation, anvendelse og reparation. x Hvis denne manual ikke er den passende udgave, kontakt venligst jeres leverandør for yderligere information. x Det anbefales at gemme denne manual for senere brug. OBS.: Udstyret må ikke anvendes til andet end det er angivet i brugsanvisningen. Hvis denne regel brydes, kan der forekomme alvorlige personskader eller brist på udstyret. Hvis vejledningerne ikke er forståelig, kontakt venligst Deres Brooks repræsentant for at afklare problemet som er opstået. x Overhold alle regler, som er markeret eller leveret sammen med udstyret. x Installer udstyret efter den angivne installationsvejledning og gældende lovgivning for anvendelsesområde. Udstyret må kun tilsluttes med kabler og stik som overholder kravspecifikationerne i vejledningen. x Ibrugtagning: (1) Åbn langsomt for trykket i systemet.. Åbn langsomt for alle procesventiler for at forhindre ustabil gas flow. (2) Tjek systemet for lækage ved tilsluttet måleinstrumenter, samlinger og andet tilsluttet udstyr. Derefter øg trykket i systemet indtil arbejdstrykket er opnået. x Før reparation tjek altid at procesledningen ikke står under tryk. Hvis der er brug for at udskifte defekte dele må kun kvalificeret personale udføre arbejdet og af sikkerhedsmæssige årsager må der kun anvendes originale Brooks reservedele. Det er ikke tilladt at anvende reservedele eller udføre arbejde der på nogen måde kan ændre produktet fra dens oprindelige specifikationer. Manglende overholdelse af de foreskrevne procedurer kan resultere i brænd, og fare for elektrisk stød eller kortslutning. x Af sikkerhedsmæssige årsager sørg for at alle sikkerhedsforanstaltninger er overholdt. Eksempelvis at alle afskærmninger eller anden form for installationsbeskyttelse er lukket eller installeret ved normal drift. Advarsel.: Ved brug af udstyr som anvendes til væske skal det sikres at indgangsventilen og udgangsventilen ikke bliver lukket på samme tid i forbindelse med aftapning. Såfremt dette ikke overholdes, er der risiko for at væsken på grund af varmeudvikling ekspanderer og dette kan forårsage skade på udstyr og personer. Det Europæiske direktiv for trykudstyr (PED) På alt udstyr hvis indgangstryk er større end 0,5bar (g) og større end 25 mm eller en tomme, gælder det europæiske direktiv for trykapparater. Manualens afsnit ”tekniske data” indeholder anvisninger om PED direktivet. x I manualen angives måleinstrumenter der er tilpasset direktivet 97/23/EK EU. x Alle Brooks gennemstrømningsmålere tilhører væskegruppen nr. 1. x Alle målinstrumenter som er større end 25 mm eller en tomme beskrives i direktivet PED´s kategorier I, II eller III. x Alle målinstrumenter som er på 25 mm eller en tomme, eller mindre, beskrives i Sound Engineering Practice (SEP). Det europæiske direktiv for elektromagnetisk kompatibilitet (EMC) Alle Brooks instrumenter (elektrisk/elektronisk) som har CE markering er godkendt og testet ifølge om elektromagnetiske kompatibilitets forskrifter (EMC direktiv 2004/108/EC). OBS: Man skal være opmærksom på hvilken type kabler der bruges til CE mærket udstyr.. Om kvalitet af signalkabler, kabeltilslutninger og koblinger: Brooks tilbyder kabler af højest kvalitet, som er tilpasset CEE kvalificeringens forskrifter. Hvis man vælger at bruge egne kabler, skal man vælge et kabel som har den nødvendige afskærmning for at sikre 100 % mod udefra kommende støj. Tilslutningerne ”D” eller rundformede tilslutninger skal være afskærmet med skal af metal. Stikket skal være afskærmet på alle sider. Al afskærmning skal jordes.. Card Edge tilslutninger er ifølge standarden ikke metalliske.. De anvendte kabler og stik skal være 100 % afskærmet for at opfylde CE kravene.. De skal ligeledes jordes. For stik konfigurationen se vedlagte brugsvejledning. Elektrostatisk afladning (ESD) OBS.: Udstyret indeholder tilbehør som kan skades ved elektrostatisk elektricitet. Alle forskrifter skal overholdes ved kontakt med alle elektriske komponenter både under drift og vedligeholdelse.. Behandlingsproceduren: 1. Sluk for al strømtilførsel til udstyret. 2. Personer som skal i kontakt med udstyret skal være jordet eller bære anden form for elektrisk beskyttende udstyr. Manglende overholdelse af dette kan medføre skader på alle elektriske komponenter. 3. Alle elektriske komponenter skal opbevares eller transporteres i deres originale indpakning for at sikre komponenter mod statiske elektriske skader. Emballagen må ikke åbnes før komponenten skal installeres i udstyret. Ved afslutning af vedligeholdelse/reparation af udstyret, skal udstyret installeres med det samme eller pakkes forsvarligt hvis det skal på lager eller transporteres. Bemærkninger: Dette udstyr er ikke unik i den hensigt, at det indeholder for elektrostatisk afladning (ESD) sensitive reservedel. I de fleste elektronisk udstyr findes der metaloxyd teknologiske reservedel (NMOS, SMOS m.m.). Erfaringerne viser at selv den mindste statiske elektricitet kan skade, eller ødelægge disse instrumenter. Selv en fungerende elektrisk del kan have levetiden markant reduceret på grund af statisk elektricitet.. A-3 Section A Essential Instructions Installation and Operation Manual Brooks® Digital MFC's and MFM's X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Dutch Essentiële instructies Leeszevoordatuverdergaat! Brooks Instrument ontwerpt, produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen. Deze producten moeten correct worden geïnstalleerd, bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken. De volgende instructies moeten worden toegevoegd aan en geïntegreerd in uw veiligheidsprogramma als u producten van Brooks Instrument installeert, bedient en onderhoudt. • Om de juiste prestaties te kunnen garanderen mag alleen gekwalificeerd personeel het product installeren, bedienen, updaten, programmeren en onderhouden. • Lees alle instructies voordat u het product gaat installeren, bedienen en onderhouden. Als dit niet de juiste handleiding is, kijk dan op de achterzijde voor contactinformatie van uw vertegenwoordiger. Bewaar deze handleiding voor later. WAARSCHUWING: gebruik dit instrument niet als niet is voldaan aan de specificaties in de handleiding. Het niet naleven van deze waarschuwing kan ernstig letsel en/of schade aan de apparatuur tot gevolg hebben. • • • Als u één of meer instructies niet begrijpt, vraag dan om uitleg aan uw vertegenwoordiger van Brooks Instrument. Neem alle waarschuwingen, voorschriften en instructies in acht die op het product zijn aangebracht of bij het product zijn geleverd. Installeer uw apparatuur volgens de instructies in de bijgeleverde handleiding en in overeenstemming met de geldende lokale en nationale voorschriften. Sluit alle producten aan op de juiste elektrische voedings- en drukbronnen. • Bediening: (1) Laat het systeem langzaam volstromen. Open de procesafsluiters langzaam om drukstoten te voorkomen. (2) Controleer op lekkages rondom de inlaat- en uitlaataansluitingen van de stromingsmeter. Als er geen lekkages zijn, kan het systeem op de bedrijfsdruk worden gebracht. • Zorg ervoor dat de procesleiding drukvrij is gemaakt voordat u servicewerkzaamheden gaat uitvoeren. Als vervangingsonderdelen nodig zijn, zorg er dan voor dat gekwalificeerd personeel de door Brooks Instrument gespecificeerde vervangingsonderdelen gebruikt. Niet goedgekeurde onderdelen en procedures kunnen de prestaties van het product en de veilige werking van uw proces in gevaar brengen. Niet goedgekeurde vervangingsonderdelen kunnen brand, elektrische schokken of een onjuiste werking tot gevolg hebben. • Zorg ervoor dat alle deksels van de apparatuur gesloten zijn en de afdekkingen gemonteerd zijn om elektrische schokken en lichamelijk letsel te voorkomen, behalve als gekwalificeerd personeel de onderhoudswerkzaamheden uitvoert. WAARSCHUWING: bij vloeistofstroomapparaten waarvan de inlaat- en uitlaatkleppen om welke reden dan ook gesloten zijn, moet de vloeistof volledig worden afgetapt. Als dat wordt nagelaten, kan dit leiden tot thermische expansie van de vloeistof waardoor het apparaat kan barsten en lichamelijk letsel kan veroorzaken. PED-richtlijn (Pressure Equipment Directive) Alle drukapparatuur met een interne druk van meer dan 0,5 barg en een diameter van meer dan 25 mm valt onder de PED-richtlijn. x In het hoofdstuk Specificaties van deze handleiding staan aanwijzingen die verband houden met de PED-richtlijn. x De meters die in deze handleiding worden beschreven, voldoen aan de Europese richtlijn 97/23/EG. x Alle stromingsmeters van Brooks Instrument vallen in groep 1. x Meters met een diameter van meer dan 25 mm voldoen aan de categorieën I, II of III van de PED-richtlijn. x Meters met een diameter van 25 mm of kleiner voldoen aan de regels van goed vakmanschap. Elektromagnetische compatibiliteit (EMC) De elektronische apparatuur van Brooks Instrument met de CE-markering is succesvol getest in overeenstemming met de EMC-voorschriften (richtlijn EMC 2004/108/EC). De keuze van de signaalkabel voor gebruik in combinatie met apparatuur met CE-markering verdient speciale aandacht. Kwaliteit van de signaalkabel, kabelafdichtingen en stekkers: Brooks Instrument levert hoogwaardige kabels die voldoen aan de specificaties voor de CE-markering. Als u zelf voor signaalkabel zorgt, moet u altijd een volledig afgeschermde kabel gebruiken. Stekkers van het type “D” of ronde stekkers moeten zijn voorzien van een metalen afscherming. Indien nodig moeten metalen kabelafdichtingen worden gebruikt waarvan de afscherming voor het klemmen van de kabel kan worden gebruikt. Het kabelscherm moet met het metalen omhulsel of de metalen afdichting worden verbonden en aan beide uiteinden rondom volledig worden afgeschermd. De afscherming moet aan de aardpotentiaal worden aangesloten. Card Edge Connectors zijn standaard niet van metaal. De gebruikte kabels moeten volledig zijn afgeschermd om te voldoen aan de CE-markering. De afscherming moet aan de aardpotentiaal worden aangesloten. Voor de pinconfiguratie: Raadpleeg de bijgevoegde handleiding. Elektrostatische ontlading VOORZICHTIG: Dit instrument bevat elektronische componenten die gevoelig zijn voor statische elektriciteit. Neem de juiste procedures in acht bij het verwijderen en installeren of bij andere werkzaamheden aan de interne printplaten of apparaten. Procedure: 1. Schakel de voeding van de eenheid uit. 2. Het personeel moet zich met een polsbandje of ander veilig en geschikt hulpmiddel aarden voordat een printplaat of ander intern apparaat mag worden geïnstalleerd, verwijderd of aangepast. 3. Printplaten moeten in een geleidende verpakking worden vervoerd. De platen mogen pas vlak voor de eigenlijke installatie uit de beschermende verpakking worden gehaald. Verwijderde printplaten moeten onmiddellijk in de beschermende verpakking worden geplaatst om te worden getransporteerd, opgeslagen of teruggestuurd naar de fabriek. Opmerkingen Dit instrument is niet uniek als het gaat om componenten die gevoelig zijn voor elektrostatische ontlading. De meeste moderne elektronische apparaten bevatten componenten die gebruik maken van de metaaloxidetechnologie (NMOS, SMOS, enz.). Uit ervaring blijkt dat zelfs kleine hoeveelheden statische elektriciteit deze apparaten al dan niet onherstelbaar kunnen beschadigen. Beschadigde componenten, zelfs als ze goed lijken te functioneren, raken eerder defect. A-4 Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Section A Essential Instructions Brooks® Digital MFC's and MFM's Estonian Olulised juhised Enne kasutamist lugege hoolikalt läbi! Brooks Instrument konstrueerib, valmistab ja katsetab oma tooteid selliselt, et need vastaksid paljude erinevate riiklike ja rahvusvaheliste standardite nõuetele. Ainult nõuetekohane paigaldamine, kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames. Brooks Instrument'i toodete paigaldamisel, kasutamisel ja hooldamisel tuleb täita alljärgnevaid juhiseid ja integreerida need asjakohasesse ohutusprogrammi. x Nõuetekohase talitluse tagamiseks tohib toodet paigaldada, kasutada, täiustada, programmeerida ja hooldada ainult kvalifitseeritud personal. x Enne toote paigaldamist, kasutamist ja hooldamist lugege kõik kasutusjuhised hoolikalt läbi. Kui käesolev kasutusjuhend ei vasta teie tootele, pöörduge kohaliku edasimüüja poole, kelle kontaktandmed leiate kasutusjuhendi tagakaanelt. Hoidke see kasutusjuhend edaspidiseks alles. HOIATUS: ärge kasutage seda instrumenti väljaspool kasutusjuhendis spetsifitseeritud piirväärtusi. Selle hoiatuse eiramine võib põhjustada tõsiseid kehavigastusi ja/või kahjustada seadet. x Kui te saa mõne juhise mõttest aru, pöörduge selgituste saamiseks kohaliku Brooks Instrument’i edasimüüja poole. x Järgige kõiki hoiatusi, tähelepanule manitsusi ja juhiseid, mis on tootele peale kantud või tootega kaasa antud. x Seadme paigaldamisel järgige vastavas kasutusjuhendis toodud paigaldusjuhiseid ning asjakohaseid kohalikke ja riiklikke eeskirju. Ühendage tooted nõuetekohaste toite- ja surveallikatega. x Talitlus: (1) Avage aeglaselt vool süsteemi. Vooluimpulsside vältimiseks avage tööventiilid aeglaselt. (2) Kontrollige, et voolukulumõõturi sisend- või väljundühenduste ümber ei ole lekkeid. Kui lekkeid ei ole, laske süsteemil saavutada töösurve. x Enne seadme hooldamist veenduge, et kogu süsteem on surve alt vabastatud. Varuosasid tohib vahetada ainult kvalifitseeritud personal, kasutades selleks Brooks Instrument’i poolt heakskiidetud varuosi. Mitteoriginaalvaruosade kasutamine ja ebapädev toimingute tegemine võivad kahjustada toote tööomadusi ja põhjustada riski tootmistegevuse ohutuse tagamisel. Originaalvaruosadele sarnaste osade kasutamine võib põhjustada tule- või elektrilöögiohtu või seadme väärtalitlust. x Elektrilöögi- ja vigastuseohu vältimiseks peavad seadme luugid olema alati suletud ja kaitsekatted oma kohal, va seadme hooldamisel kvalifitseeritud isikute poolt. HOIATUS: voolava vedelikuga seadmete kasutamisel – kui seadmega külgnevad sisend- ja väljundklapid on vaja mingil põhjusel sulgeda, tuleb seadmed vedelikust täiesti tühjaks lasta. Vastasel korral võib vedelik soojuse mõjul paisuda niivõrd, et seade puruneb. See võib põhjustada tõsiseid kehavigastusi. Euroopa surveseadmete direktiiv (PED) Euroopa surveseadmete direktiiv kohaldub kõikidele surveseadmetele, mille sisesurve on üle 0,5 baari (g) ja läbimõõt üle 25 mm või 1 tolli. x Käesoleva kasutusjuhendi spetsifikatsiooniosa sisaldab surveseadmete direktiiviga seonduvaid juhiseid. x Käesolevas kasutusjuhendis kirjeldatud mõõturid vastavad EN direktiivi 97/23/EÜ nõuetele. x Brooks Instrument’i voolukulumõõturid kuuluvad vedelike 1. gruppi. x Mõõturid läbimõõduga üle 25 mm või 1 tolli vastavad surveseadmete direktiivi kategooriale I, II või III. x Mõõturitele läbimõõduga alla 25 mm või 1 tolli kohaldatakse häid inseneritavasid. Euroopa elektromagnetilise ühilduvuse direktiiv (EMÜ) Brooks Instrument’i (elektrilised/elektroonilised) seadmed, millele on omistatud CE-tähis, on edukalt läbinud asjakohased katsed ja vastavad elektromagnetilise ühilduvuse nõuetele (EMÜ direktiiv 2004/108/EC). Kuid signaalkaabli valimisel on vaja pöörata suurt tähelepanu CE-tähisega seadmetele. Signaalkaabli, läbiviigutihendite ja konnektorite kvaliteet Brooks Instrument turustab kõrgekvaliteedilisi kaableid, mis vastavad CE-sertifikaadi nõuetele. Olemasoleva kaabli kasutamisel jälgige, et kaabel oleks täielikult ümbritsetud varjestusega. „D” või „Ring“-tüüpi konnektorid peavad olema varustatud metallvarjestusega. Kus kohaldatav, tuleb kasutada metallist läbiviike, mis tagavad kaabli varjestuse ühenduse. Kaabli varjestus ühendatakse metallkesta või läbiviigutihendiga ja on mõlemast otsast kaitstud 360° ulatuses. Varjestus peab olema maandatud. Mikroskeemide servaühendused on üldjuhul mittemetallist. Vastavuse tagamiseks CE-sertifikaadi nõuetele peavad kasutatud kaablid olema 100% varjestatud. Varjestus peab olema maandatud. Klemmide konfigureerimine: vt komplekti kuuluvat kasutusjuhendit. Elektrostaatiline laeng TÄHELEPANU: seade sisaldab staatilise elektri suhtes tundlikke elektroonikakomponente. Seadmesse paigaldatud trükkplaatide eemaldamisel ja paigaldamisel, samuti trükkplaadi või seadmega muude toimingute teostamisel järgige nõuetekohase käsitsemise juhiseid. Käsitsemisjuhised 1. Lahutage seade toiteallikast. 2. Enne trükkplaadi või mõne muu siseelemendi paigaldamist, eemaldamist või konfigureerimist peab personal olema maandatud läbi randmepaela või mõne muu sobiva vahendi. 3. Trükkplaate transporditakse voolujuhtivas konteineris. Võtke trükkplaat kaitsvast konteinerist välja vahetult enne selle paigaldamist. Seadmest eemaldatud trükkplaadid tuleb viivitamatult asetada kaitsvasse konteinerisse kas siis edasiseks transportimiseks, hoiustamiseks või tehasesse tagasisaatmiseks. Kommentaarid See seade ei ole ainus, mis sisaldab staatilise elektri suhtes tundlikke elemente. Enamik kaasaegsetest elektroonikaseadmetest sisaldavad komponente, mille valmistamiseks on kasutatud metalloksiidtehnoloogiat (NMOS, SMOS jne). Kogemused näitavad, et isegi väike kogus staatilist elektrit võib neid seadmeid kahjustada või isegi hävitada. Kuigi võib näida, et kahjustatud komponendid töötavad nõuetekohaselt, hakkavad talitlushäired ilmnema juba varakult. A-5 Section A Essential Instructions Brooks® Digital MFC's and MFM's Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Finnish Perusohjeet Lue ensin ohjeet huolellisesti! Brooks Instrument suunnittelee, valmistaa ja testaa laitteensa vastaamaan useimpien kotimaisten ja kansainvälisten standardien vaatimuksia. Tuotteet tulee asentaa, käyttää ja huoltaa käyttöohjeiden mukaan jotta niiden toimivuus taataan. Brooks Instrumentin laitteiden asennuksessa, käytössä ja huollossa on noudatettava soveltuvia määräyksiä ja ohjeita, lisäksi mainitut ohjeet on huomioitava työsuojelun ohjeistuksessa. x x x x x x Oikean toiminnan varmistamiseksi vain valtuutettu huoltohenkilö saa asentaa, käynnistää, päivittää, ohjelmoida ja huoltaa laitteita. Lue kaikki käyttöohjeet koskien tuotteen asennusta, käyttöä ja huoltoa. Jos käyttöohje on puutteellinen, lisätietoja saa paikalliselta jälleenmyyjältä. Yhteystiedot löytyvät oppaan kansilehdestä. Säilytä ohjeet. VAROITUS!: Käyttöohjeessa ilmoitettujen standardien mukaisia ohjeita ja raja-arvoja ei saa ylittää. Rajoitusten laiminlyönti voi aiheuttaa tuotteen rikkoutumisen ja/tai vakavan henkilövahingon vaaran. Jos ohjeissa on epäselvyyttä, ota yhteyttä Brooks Instrumentin edustajaan ongelman selvittämiseksi. Noudata kaikkia laitteessa olevia tai siihen liittyviä ohjeita, määräyksia ja varoituksia. Laittteen asennuksessa on noudatettava erityisiä asennusohjeita sekä voimassa olevia paikallisia ja kansainvälisiä määräyksiä. Laitteet saa yhdistää vain soveltuvaan sähkö- ja paineverkkoon. Asennusohjeita: (1) Päästä virtaus hitaasti järjestelmään. Avaa venttiilit hitaasti, jotta virtaus pysyy tasaisena. (2) Tarkista, ettei virtausmittarin sisään- ja ulosmenon vieressä ole vuotoa. Jos järjestelmässä ei ole vuotoa, aseta oikea käyttöpaine. Tarkista, että laitteeseen menevä paine on katkaistu ennen laitteen korjaamista välttääksesi äkillisen painepäästön aiheuttaman loukkaantumisriskin. Mahdollisten varaosien tulee olla Brooks Instrumentin hyväksymiä. Vain valtuutettu huoltohenkilö saa asentaa varaosat. Ei-hyväksyttyjen varaosien käyttö voi vahingoittaa tuotteen toimintaa ja aiheuttaa turvallisuusriskin. Samoin eihyväksyttyjen varaosien käyttö voi aiheuttaa tulipalon, sähköiskun tai virhetoiminnan riskin. Varmista että kaikki kaikki laitteen ovet/luukut ovat suljettuina ja tarkista että suojakannet ovat paikoillaan estääksesi mahdollisen sähköisku- ja loukkaantumisvaaran. VAROITUS!: Jos järjestelmässä virtaa neste ja laitteen sisään- ja ulosmenoventtiilit pitää sulkea, laite on ensin tyhjennettävä kokonaan. Tyhjentämisen laiminlyönti aiheuttaa nesteen lämpölaajenemista, joka saattaa johtaa laitteen rikkoutumiseen ja henkilövahingon vaaraan. Eurooppalainen painelaitedirektiivi (PED) Painelaitteet, joidenpaine on suurempi kuin 0,5 bar ja joiden koko on suurempi kuin 25 mm tai 1 tuuma , kuuluvat eurooppalaiseen painelaitedirektiiviin (PED). x PED direktiiviä koskevat määräykset löytyvät käyttöoppaan ’’Tekniset tiedot” -luvusta. x Käyttöoppaassa kuvatut mittarit ovat 97/23/EC EU-direktiivin mukaisia. x Kaikki Brooks Instrumentin virtausmittarit kuuluvat virtausryhmään 1. Laitteet jotka ovat suurempia, kuin 25 mm tai 1 tuuma, ovat PED I, II, III kategorien mukaisia. x Mittarit joiden koko on alle 25 mm tai 1 tuuma ovat hyvän konepajakäytännön (SEP) mukaisia. Eurooppalainen direktiivi sähkömagneettisesta yhteensopivuudesta (EMC) Brooks Instrumentin CE-merkin saaneet (sähkö/sähköiset) laitteet täyttävät EMC direktiivin vaatimukset ja testit sähkömagneettisesta yhteensopivuudesta (2004/108/EC EMC direktiivi). Erityistä huomioita on kiinnitettävä CE-merkittyjen laitteiden käytössä olevien kaapelien valintaan. Kaapelien, kiinnikkeiden ja liittimien laatu: Brooks Insturmentin kaapelit ovat korkealaatuisia ja täyttävät CE-merkintä direktiivin vaatimukset. Muun valmistajan kaapelia käytettäessä on käytettävä 100% suojattua kaapelia. Liittimien tulee olla häiriösuojattua tyyppiä. Tarvittaessa käytetään metallisia kiinnikkeitä kaapelin suojuksen kiinnittämiseen. Kaapelin o suojakuoren pitää olla yhdistettynä metallisuojukseen tai laippaan ja sen pitää olla molemmista päistä suojattuna 360 . Suojaus päättyy maadoitukseen. Standardin mukaan korttien liittimet eivät ole metallisia. Käytettyjen kaapelien suojaus on oltava 100%, jotta se täyttäisi CEmerkinnän direktiivin vaatimukset. Suojaus päättyy maadoitukseen. Napojen järjestys: Katso liitteenä oleva käyttöopas. Elektrostaattinen purkaus (ESD) VAROITUS!: Tuote sisältää elektroniikkakomponentteja jotka voivat vahingoittua staattisesta sähköstä. Sisäisten piirilevyjen purkamisessa,asennuksessa ja käsittelyssä tulee noudattaa kaikkia määräyksiä ja ohjeita. Asennusohjeet: 1. Järjestelmän sähköt katkaistaan. 2. Laitteen kanssa työskentelevä henkilö on suojattava sähköiskuilta rannehihnalla tai muulla suojavarustuksella ennen piirilevyn tai muun sisäosan asennusta, poistamista tai korjaamista. 3. Piirilevyt kuljetetaan konduktiivisessa pakkauksessa. Piirilevyt puretaan paketista juuri ennen asennusta. Poistettu piirilevy on heti pakattava soveltuvaan suojapakkaukseen kuljettamista, varastoimista tai palautusta varten. Huomautukset: Tuotteen herkkyys elektrostaattiselle purkaukselle (ESD) ei ole epätavallista. Suurin osa elektroniikkatuotteista sisältää komponentteja jotka hyödyntävät metallioksiditekniikkaa (NMOS, SMOS jne.) Kokemusten mukaan pienikin elektrostaattinen purkaus voi aiheuttaa laitteiden virhetoiminnan tai vahingoittumisen. Vahingoittuneet komponentit saattavat aiheuttaa laitteen ennenaikaisen rikkoutumisen vaikka laite näyttäisi toimivan normaalisti. A-6 Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Section A Essential Instructions Brooks® Digital MFC's and MFM's French Instructions essentielles A lire avant de commencer ! Brooks Instrument conçoit, fabrique et teste ses produits pour répondre à de nombreuses normes nationales et internationales. Ces produits doivent être correctement installés, utilisés et entretenus pour pouvoir fonctionner dans le cadre de leurs spécifications normales. Les instructions qui suivent doivent être respectées et intégrées à votre programme de sécurité lors de l’installation, l’utilisation et l’entretien des produits Brooks Instrument. • Afin d’assurer un fonctionnement correct, faites appel à du personnel qualifié pour l’installation, l’utilisation, la mise à jour, la programmation et l’entretien du produit. • Lisez toutes les instructions avant l’installation, l’utilisation et l’entretien du produit. Si le présent manuel d’utilisation n’est pas le bon, consultez la dernière page de la couverture pour connaître le point de vente le plus proche. Conservez ce manuel d’utilisation pour pouvoir vous y reporter par la suite. AVERTISSEMENT : n’utilisez pas cet instrument au-delà des spécifications énumérées dans le manuel d’utilisation. Le non-respect de cet avertissement peut entraîner de graves blessures et / ou endommager l’équipement. • Si vous ne comprenez pas l’une des instructions, prenez contact avec un représentant de Brooks Instrument pour obtenir des explications. • Tenez compte de tous les avertissements, précautions et instructions marquées sur le produit et fournies avec celui-ci. • Installez votre équipement de la façon indiquée dans les instructions d’installation du manuel d’utilisation et conformément à la législation en vigueur au niveau local et national. Branchez tous les produits aux sources d’électricité et de pression agréées. • Utilisation : (1) Faites lentement entrer le débit dans le système. Ouvrez progressivement les vannes de procédé pour éviter des pics de débits. (2) Vérifiez qu’il n’y a pas de fuite au niveau des branchements d’entrée et de sortie du débitmètre. S’il n’y a pas de fuite, amenez le système à sa pression d’utilisation. • Avant de procéder à l’entretien, assurez-vous que la conduite de procédé n’est plus sous pression. Lorsqu’il faut remplacer une pièce, assurez-vous que les pièces de rechange sont celles indiquées par Brooks Instrument et que des personnes qualifiées effectuent le remplacement. Les pièces et procédures non autorisées peuvent porter atteinte au fonctionnement du produit et mettre en péril la sécurité de votre procédé. Les remplacements par des pièces d’apparence similaire peuvent entraîner des incendies, des risques électriques ou un mauvais fonctionnement. • Vérifiez que toutes les trappes de l’équipement sont fermées et que les couvercles de protection sont en place pour éviter les chocs électriques et les blessures, sauf lorsque l’entretien est réalisé par des personnes qualifiées. AVERTISSEMENT : dans le cas d’appareils à écoulement liquide, si les vannes d’entrée et de sortie adjacentes aux appareils doivent être fermées pour une raison quelconque, les appareils doivent être complètement vidangés. Si cela n’est pas fait, une éventuelle dilatation thermique du fluide peut casser l’appareil et provoquer des blessures. Directive européenne « équipements sous pression » (PED) Tous les équipements sous pression dont la pression interne est supérieure à 0,5 bar (pression relative) et dont la taille dépasse 25 mm ou un pouce entrent dans le cadre de la directive PED. • La section « Spécifications » de ce manuel contient les instructions relatives à la directive PED. • Les appareils de mesure de ce manuel sont conformes à la directive EN 97/23/EC. • Tous les débitmètres Brooks Instrument fonctionnent avec des fluides de groupe 1. • Les appareils de mesure d’une taille supérieure à 25 mm ou un pouce entrent dans la catégorie PED I, II ou III. • Les appareils de mesure d’une taille inférieure ou égale à 25 mm ou un pouce relèvent des « bonnes pratiques d’ingénierie » (SEP). Compatibilité électromagnétique européenne (CEM) L’équipement Brooks Instrument (électrique / électronique) portant le marquage CE répond à la réglementation en matière de compatibilité électromagnétique (directive CEM 2004/108/EC). Il faut cependant prêter une grande attention au choix du câble d’interconnexion à utiliser avec l’équipement marqué CE. Qualité du câble d’interconnexion, des presse-étoupes et connecteurs : Brooks Instrument fournit un ou des câbles de qualité supérieure qui répondent aux spécifications exigées pour la certification CE. Si vous utilisez votre propre câble d’interconnexion, ce câble doit être protégé par un blindage intégral. Les connecteurs rectangulaires ou circulaires utilisés doivent avoir un blindage métallique. S’il y a lieu, des presse-étoupes métalliques doivent faire office de serre-écran de câble. L’écran du câble doit être raccordé à l’enveloppe métallique ou au presse-étoupe et blindé aux deux extrémités sur 360 degrés. Le blindage doit s’achever sur une prise de terre. Les connecteurs de carte standards sont non métalliques. Les câbles utilisés doivent être protégés par un blindage intégral pour se conformer à la certification CE. Le blindage doit s’achever sur une prise de terre. En ce qui concerne la configuration des broches, veuillez vous reporter au manuel d’utilisation joint. ESD (décharge électrostatique) ATTENTION : cet instrument contient des composants électroniques sensibles à l’électricité statique. Des procédures de manipulation adéquates doivent être respectées pendant le retrait, l’installation ou la manipulation des cartes de circuits imprimés ou des dispositifs internes. Procédure de manipulation : 1. L’alimentation électrique de l’appareil doit être coupée. 2. Le personnel doit être mis à la terre, au moyen d’une bande de poignet ou d’un autre moyen sûr et adéquat, avant l’installation, le retrait ou le réglage de toutes les cartes de circuits imprimés ou autres dispositifs internes. 3. Les cartes de circuits imprimés doivent être transportées dans un récipient conducteur. Les cartes ne doivent enlevées de cette enveloppe protectrice qu’au dernier moment, juste avant l’installation. Les cartes retirées doivent être immédiatement placées dans un récipient de protection pour le transport, le stockage ou le retour à l’usine. Observations Brooks Instrument n’est pas le seul à proposer des produits comportant des composants sensibles aux décharges électrostatiques. La plupart des produits électroniques modernes contiennent des composants qui utilisent des technologies à oxydes métalliques (NMOS, SMOS, etc.). L’expérience démontre que d’infimes quantités d’électricité statique suffisent à endommager ou détruire ces appareils. Les composants endommagés, même s’ils semblent fonctionner correctement, tombent rapidement en panne. A-7 Section A Essential Instructions Installation and Operation Manual Brooks® Digital MFC's and MFM's X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 German Wichtige Anweisungen Bitte zuerst lesen! Brooks Instrument entwickelt, produziert und testet seine Produkte derart, dass sie viele nationale und internationale Standards erfüllen. Nur bei korrektem Einbau sowie richtiger Bedienung und Wartung dieser Produkte ist ein Betrieb unter Einhaltung der Standardvorgaben sichergestellt. Die folgenden Anweisungen müssen eingehalten werden und in Ihr Sicherheitsprogramm integriert werden, wenn Sie Brooks Produkte installieren, bedienen und warten. • Um die entsprechende Leistung zu gewährleisten, setzen Sie qualifiziertes Personal für die Installation, den Betrieb, die Aktualisierung, Programmierung und Wartung des Produkts ein. • Lesen Sie alle Anweisungen, bevor Sie das Produkt installieren, in Betrieb nehmen und warten. Falls es sich bei diesem Handbuch nicht um das richtige Handbuch handelt, schauen Sie bitte auf der Rückseite nach den Kontaktdaten Ihres Vertriebsbüros vor Ort. Bewahren Sie dieses Handbuch auf, falls Sie später etwas nachschauen möchten. WARNUNG: Dieses Gerät nicht außerhalb der in Bedienungsanleitung und Handbuch angegebenen Grenzen betreiben. Wird diese Warnung nicht beachtet, kann dies zu schweren Personenschäden bzw. Schäden des Gerätes führen. • Falls Sie Anweisungen nicht verstehen, wenden Sie sich zur Klärung an Ihren Brooks Instrument Vertreter. • Befolgen Sie alle Warnhinweise und Anweisungen, die auf dem Produkt markiert sind oder zusammen mit diesem geliefert werden. • Installieren Sie Ihr Gerät, wie in den Installationsanweisungen des entsprechenden Handbuchs angegeben und gemäß der gültigen regionalen und nationalen Gesetze. Schließen Sie alle Produkte an eine geeignete Strom- und Druckluftversorgung an. • Bedienung: (1) Langsam den Zufluss zum System starten. Die Ventile langsam öffnen, um einen sprunghaften Anstieg der Durchflussmenge zu verhindern. (2) Bereich der Anschlüsse (Zufluss und Ausfluss) des Durchflussmessers auf Undichtigkeiten überprüfen. Wenn das System dicht ist, auf Betriebsdruck hochfahren. • Sicherstellen, dass der Leitungsdruck vor Wartungsarbeiten heruntergefahren wird. Wenn Ersatzteile benötigt werden, stellen Sie sicher, dass qualifizierte Personen Ersatzteile verwenden, die von Brooks Instrument vorgegeben sind. Nicht genehmigte Teile und Verfahren können die Leistungsfähigkeit des Produkts beeinträchtigen und den sicheren Betrieb Ihres Prozesses gefährden. Ähnlich aussehende Austauschteile können zu Bränden, elektrischen Gefahren oder nicht sachgerechtem Betrieb führen. • Stellen Sie sicher, dass alle Türen der Anlage geschlossen sind und dass alle Schutzabdeckungen angebracht sind, um Stromschläge und Personenschäden zu vermeiden, es sei denn die Wartungsaufgaben werden von qualifizierten Personen durchgeführt. WARNUNG: Werden die Ein- und Auslassventile neben Durchflussmessgeräten aus irgendwelchen Gründen geschlossen, so müssen die Geräte komplett entleert werden. Durchflussmessgeraete muessen vor dem Schliessen von Ein- und Auslassventilen komplett entleert werden, anderenfalls kann es zu einer thermischen Ausdehnung der Flüssigkeit und damit zum Bruch des Gerätes kommen; Personenschäden können die Folge sein. Europäische Druckgeräterichtlinie (PED) Alle Druckgeräte mit einem internen Druck von mehr als 0,5 bar (g) und einer Größe von mehr als 1in ( 1 in = 25,4 mm) unterliegen der Druckgeräterichtlinie. x Das Kapitel zu den technischen Daten in dieser Anleitung enthält wichtige Sicherheits- und Betriebsanweisungen in Bezug auf die Druckgeräterichtlinie. x Messgeräte, die in diesem Handbuch beschrieben sind, erfüllen die europäische Richtlinie 97/23/EG. x Alle Durchflussmesser von Brooks Instrument fallen unter die Fluidgruppe 1. x Messgeräte, die größer als 25 mm oder 1“ (inch) sind, erfüllen die Kategorien I, II oder III der Druckgeräterichtlinie (PED). x Messgeräte mit einer Größe von 25 mm oder 1“ (inch) oder kleiner sind Sound Engineering Practice (SEP). Europäische Verordnung zur elektromagnetischen Verträglichkeit (EMV) Geräte von Brooks Instrument (elektrischer und elektronischer Art) mit CE-Zeichen haben den Test auf Einhaltung der Verordnung zur elektromagnetischen Verträglichkeit (EMV Richtlinie 2004/108/EC) erfolgreich bestanden. Dennoch muss bei der Wahl des Signalkabels für das Gerät mit CE-Zeichen auf folgende Dinge geachtet werden. Qualität von Signalkabel, Kabeldurchführung und Anschlüsse: Brooks Instrument liefert qualitativ hochwertige Kabel, die den Anforderungen für eine CE-Zertifizierung entsprechen. Sollten Sie eigene Kabel einsetzen, so sollte das Kabel überall mit einer 100%-Abschirmung versehen sein. D- oder Rundstecker sollten eine Metallabschirmung aufweisen. Wenn möglich, müssen Kabeldurchführungen aus Metall mit Kabelschirmgeflechts-Klemmen verwendet werden. Der Kabelschirm sollte an die Metallhülle oder -durchführung angeschlossen werden und an beiden Enden rundherum (360 °) abgeschirmt werden. Die Abschirmung sollte geerdet werden. Randstecker auf Platinen sind standardmäßig nicht aus Metall. Die verwendeten Kabel müssen mit einer 100 % Abschirmung versehen werden, um die CEVorgaben zu erfüllen. Die Abschirmung sollte geerdet werden. Klemmenbelegung: Siehe beigefügtes Handbuch. ESD (Elektrostatische Entladung) ACHTUNG: Dieses Gerät enthält elektronische Komponenten, die durch elektrostatische Entladungen beschädigt werden können. Ordnungsgemäße Verfahrensanweisungen müssen während des Ausbaus, der Installation oder anderer Handhabung der eingebauten Platinen oder Geräte eingehalten werden. Verfahrensanweisung: 1. Trennen Sie das Gerät von der Stromversorgung. 2. Das Personal ist vor dem Einbau, Ausbau oder der Einstellung von Platinen oder anderen internen Komponenten durch ein entsprechendes Armband mit dem Erdpotential zu verbinden. 3. Platinen sind in speziellen Behältern mit Schutz gegen elektrostatische Spannungen zu transportieren oder zu lagern. Platinen dürfen erst kurz vor dem Einbau aus der Schutzhülle entfernt werden. Ausgebaute Platinen müssen umgehend in Schutzbehälter zum Transport, zur Lagerung oder Rücksendung an das Werk gelegt werden. Anmerkung Dieses Gerät ist wie viele andere elektronische Geräte auch mit Komponenten bestückt, die anfällig für elektrostatische Entladung sind. Die meisten modernen, elektronischen Geräte enthalten Komponenten, die die Metalloxidtechnologie (NMOS, SMOS etc.) verwenden. Die Erfahrung hat gezeigt, dass schon geringe Mengen elektrostatischer Energie ausreichen, um diese Geräte zu beschädigen oder zu zerstören. Beschädigte Teile fallen früh aus, obwohl sie funktionsfähig zu sein scheinen. A-8 Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Section A Essential Instructions Brooks® Digital MFC's and MFM's Greek ǺĮıȚțȑȢ ȠįȘȖȓİȢ ǻȚĮȕȐıIJİ ʌȡȚȞ ıȣȞİȤȓıİIJİ! Ǿ Brooks Instrument ıȤİįȚȐȗİȚ, ʌĮȡȐȖİȚ țĮȚ įȠțȚȝȐȗİȚ IJĮ ʌȡȠȧȩȞIJĮ IJȘȢ ıİ ıȣȝȝȩȡijȦıȘ ȝİ ʌȜȒșȠȢ İșȞȚțȫȞ țĮȚ įȚİșȞȫȞ ʌȡȠIJȪʌȦȞ. Ǿ ıȦıIJȒ İȖțĮIJȐıIJĮıȘ, ȤȡȒıȘ țĮȚ ıȣȞIJȒȡȘıȒ IJȠȣȢ ĮʌȠIJİȜİȓ ĮʌĮȡĮȓIJȘIJȘ ʌȡȠȨʌȩșİıȘ IJȘȢ ȜİȚIJȠȣȡȖȓĮȢ İȞIJȩȢ IJȦȞ țĮȞȠȞȚțȫȞ ȠȡȓȦȞ. ȅȚ ʌĮȡĮțȐIJȦ ȠįȘȖȓİȢ ʌȡȑʌİȚ ȞĮ IJȘȡȠȪȞIJĮȚ țĮȚ ʌȡȑʌİȚ ȞĮ İȞıȦȝĮIJȦșȠȪȞ ıIJȠ ʌȡȩȖȡĮȝȝĮ ĮıijȐȜİȚĮȢ IJȘȢ İȡȖĮıȓĮȢ ıĮȢ țĮIJȐ IJȘȞ İȖțĮIJȐıIJĮıȘ, ȤȡȒıȘ țĮȚ ıȣȞIJȒȡȘıȘ ʌȡȠȧȩȞIJȦȞ IJȘȢ Brooks Instrument. x īȚĮ ıȦıIJȩ ĮʌȠIJȑȜİıȝĮ Ș İȖțĮIJȐıIJĮıȘ, ȜİȚIJȠȣȡȖȓĮ, İȞȘȝȑȡȦıȘ, ʌȡȠȖȡĮȝȝĮIJȚıȝȩȢ țĮȚ ıȣȞIJȒȡȘıȘ ʌȡȑʌİȚ ȞĮ ȖȓȞİIJĮȚ Įʌȩ İȚįȚțİȣȝȑȞȠ ʌȡȠıȦʌȚțȩ. x ǻȚĮȕȐıIJİ ȩȜİȢ IJȚȢ ȠįȘȖȓİȢ ʌȡȚȞ İȖțĮIJĮıIJȒıİIJİ, ȜİȚIJȠȣȡȖȒıİIJİ țĮȚ ıȣȞIJȘȡȒıİIJİ IJȠ ʌȡȠȧȩȞ. ǼȐȞ IJȠ ʌĮȡȩȞ İȖȤİȚȡȓįȚȠ įİȞ İȓȞĮȚ IJȠ ıȦıIJȩ İȖȤİȚȡȓįȚȠ, ıȣȝȕȠȣȜİȣșİȓIJİ IJȠ ʌȓıȦ İȟȫijȣȜȜȠ ȖȚĮ IJĮ ıIJȠȚȤİȓĮ İʌȚțȠȚȞȦȞȓĮȢ IJȠȣ IJȠʌȚțȠȪ ĮȞIJȚʌȡȠıȫʌȠȣ. ĭȣȜȐȟIJİ IJȠ İȖȤİȚȡȓįȚȠ ĮȣIJȩ ȖȚĮ ȝİȜȜȠȞIJȚțȒ ĮȞĮijȠȡȐ. ȆȇȅǼǿǻȅȆȅǿǾȈǾ: ȂȘ ȜİȚIJȠȣȡȖİȓIJİ IJȘ ıȣıțİȣȒ ĮȣIJȒ țĮș’ ȣʌȑȡȕĮıȘ IJȦȞ ȠȡȓȦȞ ʌȠȣ ĮȞĮȖȡȐijȠȞIJĮȚ ıIJȠ ǼȖȤİȚȡȓįȚȠ ȅįȘȖȚȫȞ țĮȚ ȁİȚIJȠȣȡȖȓĮȢ. Ǿ ȝȘ ıȣȝȝȩȡijȦıȘ ȝİ IJȘȞ ʌȡȠİȚįȠʌȠȓȘıȘ ĮȣIJȒ ȝʌȠȡİȓ ȞĮ ȠįȘȖȒıİȚ ıİ ıȠȕĮȡȩ ʌȡȠıȦʌȚțȩ IJȡĮȣȝĮIJȚıȝȩ Ȓ/țĮȚ ȗȘȝȚȐ ıIJȠȞ İȟȠʌȜȚıȝȩ. x Ȉİ ʌİȡȓʌIJȦıȘ ȝȘ țĮIJĮȞȩȘıȘȢ țȐʌȠȚĮȢ Įʌȩ IJȚȢ ȠįȘȖȓİȢ ȗȘIJȒıIJİ įȚİȣțȡȚȞȓıİȚȢ Įʌȩ IJȠȞ IJȠʌȚțȩ ĮȞIJȚʌȡȩıȦʌȠ IJȘȢ Brooks Instrument. x ȉȘȡİȓIJİ ȩȜİȢ IJȚȢ ʌȡȠİȚįȠʌȠȚȒıİȚȢ, ʌȡȠijȣȜȐȟİȚȢ țĮȚ ȠįȘȖȓİȢ ʌȠȣ ĮȞĮȖȡȐijȠȞIJĮȚ Ȓ ıȣȞȠįİȪȠȣȞ IJȠ ʌȡȠȧȩȞ. x ǼȖțĮIJĮıIJȒıIJİ IJȘ ıȣıțİȣȒ ȩʌȦȢ ʌȡȠȕȜȑʌİIJĮȚ ıIJȚȢ ȠįȘȖȓİȢ İȖțĮIJȐıIJĮıȘȢ IJȠȣ ıȦıIJȠȪ İȖȤİȚȡȚįȓȠȣ ȠįȘȖȚȫȞ țĮȚ ıIJȚȢ țİȓȝİȞİȢ IJȠʌȚțȑȢ țĮȚ İșȞȚțȑȢ įȚĮIJȐȟİȚȢ. ȈȣȞįȑıIJİ IJĮ ʌȡȠȧȩȞIJĮ ıIJȚȢ İțȐıIJȠIJİ ıȦıIJȑȢ ʌĮȡȠȤȑȢ ȡİȪȝĮIJȠȢ țĮȚ ʌȓİıȘȢ. x ǻȚĮįȚțĮıȓĮ: (1) ǹijȒıIJİ ȞĮ ȟİțȚȞȒıİȚ ĮȡȖȐ Ș ȡȠȒ ıIJȠ ıȪıIJȘȝĮ. ǹȞȠȓȟIJİ ĮȡȖȐ IJȚȢ ȕĮȜȕȓįİȢ ȜİȚIJȠȣȡȖȓĮȢ ȖȚĮ ȞĮ ĮʌȠijȪȖİIJİ IJȚȢ ĮʌȩIJȠȝİȢ ĮȣȟȠȝİȚȫıİȚȢ ȡȠȒȢ. (2) ǼȜȑȖȟIJİ ȖȚĮ įȚĮȡȡȠȑȢ IJȚȢ ıȣȞįȑıİȚȢ İȚıȩįȠȣ țĮȚ İȟȩįȠȣ IJȠȣ ȡȠȩȝİIJȡȠȣ. ǹȞ įİȞ ȣʌȐȡȤȠȣȞ įȚĮȡȡȠȑȢ, ȖİȝȓıIJİ IJȠ ıȪıIJȘȝĮ ȝȑȤȡȚ Ș ʌȓİıȘ ȞĮ ijIJȐıİȚ IJȘȞ țĮȞȠȞȚțȒ ʌȓİıȘ İȡȖĮıȓĮȢ. x ȆȡȚȞ Įʌȩ IJȘ ıȣȞIJȒȡȘıȘ ȕİȕĮȚȦșİȓIJİ ȩIJȚ ȖȡĮȝȝȒ İȡȖĮıȓĮȢ ȑȤİȚ IJİșİȓ İțIJȩȢ ʌȚȑıİȦȢ. Ȉİ ʌİȡȓʌIJȦıȘ ĮȞIJȚțĮIJȐıIJĮıȘȢ ĮȞIJĮȜȜĮțIJȚțȫȞ ȕİȕĮȚȦșİȓIJİ ȩIJȚ IJȠ ʌȡȠıȦʌȚțȩ İȓȞĮȚ İȚįȚțİȣȝȑȞȠ țĮȚ ȤȡȘıȚȝȠʌȠȚİȓ ĮȞIJĮȜȜĮțIJȚțȐ ʌȠȣ ʌȡȠȕȜȑʌİȚ Ș Brooks Instrument. ȂȘ İȖțİțȡȚȝȑȞĮ ĮȞIJĮȜȜĮțIJȚțȐ țĮȚ İʌİȝȕȐıİȚȢ İȞįȑȤİIJĮȚ ȞĮ İʌȘȡİȐıȠȣȞ IJȚȢ İʌȚįȩıİȚȢ IJȠȣ ʌȡȠȧȩȞIJȠȢ țĮȚ ȞĮ ʌȡȠțĮȜȑıȠȣȞ țȓȞįȣȞȠ ȖȚĮ IJȘȞ ĮıijĮȜȒ ȜİȚIJȠȣȡȖȓĮ. ǹȞIJȚțĮIJĮıIJȐıİȚȢ ȝİ ijĮȚȞȠȝİȞȚțȐ ȩȝȠȚĮ ĮȞIJĮȜȜĮțIJȚțȐ İȞįȑȤİIJĮȚ ȞĮ ʌȡȠțĮȜȑıȠȣȞ ʌȣȡțĮȖȚȐ, țȓȞįȣȞȠ ȘȜİțIJȡȠʌȜȘȟȓĮȢ Ȓ ĮȞİʌĮȡțȒ ȜİȚIJȠȣȡȖȓĮ. x ǺİȕĮȚȦșİȓIJİ ȩIJȚ ȩȜĮ IJĮ ĮȞȠȓȖȝĮIJĮ IJȠȣ İȟȠʌȜȚıȝȠȪ İȓȞĮȚ țȜİȚıIJȐ țĮȚ IJĮ ʌȡȠıIJĮIJİȣIJȚțȐ țĮȜȪȝȝĮIJĮ İȓȞĮȚ ıIJȘ șȑıȘ IJȠȣȢ ʌȡȠțİȚȝȑȞȠȣ ȞĮ ĮʌȠijİȣȤșİȓ Ƞ țȓȞįȣȞȠȢ ȘȜİțIJȡȠʌȜȘȟȓĮȢ țĮȚ ʌȡȠıȦʌȚțȫȞ IJȡĮȣȝĮIJȚıȝȫȞ, İțIJȩȢ İȐȞ İțIJİȜȠȪȞIJĮȚ İȡȖĮıȓİȢ ıȣȞIJȒȡȘıȘȢ Įʌȩ İȚįȚțİȣȝȑȞȠ ʌȡȠıȦʌȚțȩ. ȆȇȅǼǿǻȅȆȅǿǾȈǾ: ȆȡȠțİȚȝȑȞȠȣ ȖȚĮ ıȣıțİȣȑȢ ȝİ ȡȠȒ ȡİȣıIJȠȪ, ȩIJĮȞ ȖȚĮ ȠʌȠȚȠȞįȒʌȠIJİ ȜȩȖȠ ʌȡȩțİȚIJĮȚ ȞĮ țȜİȓıȠȣȞ ȠȚ ȕĮȜȕȓįİȢ İȚıĮȖȦȖȒȢ țĮȚ İȟĮȖȦȖȒȢ țȠȞIJȐ ıIJȚȢ ıȣıțİȣȑȢ, ȠȚ ıȣıțİȣȑȢ ʌȡȑʌİȚ ȞĮ ĮʌȠıIJȡĮȖȖȚıIJȠȪȞ İȞIJİȜȫȢ. Ǿ ȝȘ ıȣȝȝȩȡijȦıȘ ȝʌȠȡİȓ ȞĮ ʌȡȠțĮȜȑıİȚ șİȡȝȚțȒ įȚĮıIJȠȜȒ IJȠȣ ȣȖȡȠȪ ʌȠȣ ʌİȡȚȑȤȠȣȞ, ȝİ ĮʌȠIJȑȜİıȝĮ ȞĮ ȡĮȖȓıİȚ Ș ıȣıțİȣȒ țĮȚ ȞĮ ʌȡȠțȜȘșȠȪȞ ʌȡȠıȦʌȚțȠȓ IJȡĮȣȝĮIJȚıȝȠȓ. ǼȣȡȦʌĮȧțȒ ȅįȘȖȓĮ ȖȚĮ IJȠȞ İȟȠʌȜȚıȝȩ ȣʌȩ ʌȓİıȘ (PED) ȀȐșİ İȟȠʌȜȚıȝȩȢ ȣʌȩ ʌȓİıȘ ȝİ İıȦIJİȡȚțȒ ʌȓİıȘ ȐȞȦ IJȠȣ 0,5 bar (g) țĮȚ ȝİȖȑșȠȣȢ ȝİȖĮȜȪIJİȡȠȣ IJȦȞ 25 mm Ȓ IJȘȢ 1 ȓȞIJıĮȢ İȝʌȓʌIJİȚ ıIJȚȢ įȚĮIJȐȟİȚȢ IJȘȢ İȣȡȦʌĮȧțȒȢ ȅįȘȖȓĮȢ ȖȚĮ IJȠȞ İȟȠʌȜȚıȝȩ ȣʌȩ ʌȓİıȘ (PED). x ȉȠ țİijȐȜĮȚȠ ȆȡȠįȚĮȖȡĮijȑȢ IJȠȣ ʌĮȡȩȞIJȠȢ İȖȤİȚȡȚįȓȠȣ ʌİȡȚȜĮȝȕȐȞİȚ ȠįȘȖȓİȢ ıȤİIJȚțȐ ȝİ IJȘȞ ȅįȘȖȓĮ PED. x ȅȚ ȝİIJȡȘIJȑȢ ʌȠȣ ʌİȡȚȖȡȐijȠȞIJĮȚ ıIJȠ ʌĮȡȩȞ İȖȤİȚȡȓįȚȠ ıȣȝȝȠȡijȫȞȠȞIJĮȚ ȝİ IJȘȞ İȣȡȦʌĮȧțȒ ȅįȘȖȓĮ 97/23/ǼȀ. x ǵȜĮ IJĮ ȡȠȩȝİIJȡĮ IJȘȢ Brooks Instrument ĮȞȒțȠȣȞ ıIJȘȞ ȠȝȐįĮ ȡİȣıIJȫȞ 1. x ȂİIJȡȘIJȑȢ ȝİȖĮȜȪIJİȡȠȚ Įʌȩ 25 mm Ȓ 1 ȓȞIJıĮ ıȣȝȝȠȡijȫȞȠȞIJĮȚ ȝİ IJȚȢ țĮIJȘȖȠȡȓİȢ ǿ, ǿǿ țĮȚ ǿǿǿ IJȘȢ ȅįȘȖȓĮȢ PED. x ȂİIJȡȘIJȑȢ ȝİȖȑșȠȣȢ 25 mm Ȓ 1 ȓȞIJıĮȢ Ȓ țĮȚ ȝȚțȡȩIJİȡȠȚ țĮIJĮıțİȣȐȗȠȞIJĮȚ ıȪȝijȦȞĮ ȝİ IJȠȣȢ țĮȞȩȞİȢ IJȘȢ IJȑȤȞȘȢ (SEP). ǼȣȡȦʌĮȧțȒ ȅįȘȖȓĮ ȖȚĮ IJȘȞ ȘȜİțIJȡȠȝĮȖȞȘIJȚțȒ ıȣȝȕĮIJȩIJȘIJĮ (EMC) ȅ (ȘȜİțIJȡȚțȩȢ/ȘȜİțIJȡȠȞȚțȩȢ) İȟȠʌȜȚıȝȩȢ IJȘȢ Brooks Instrument ʌȠȣ ijȑȡİȚ IJȠ ıȒȝĮ CE ȑȤİȚ ȣʌȠıIJİȓ İʌȚIJȣȤȫȢ IJȚȢ įȠțȚȝȑȢ ʌȠȣ ʌȡȠȕȜȑʌȠȣȞ ȠȚ įȚĮIJȐȟİȚȢ IJȘȢ ȅįȘȖȓĮȢ ȖȚĮ IJȘȞ ȘȜİțIJȡȠȝĮȖȞȘIJȚțȒ ıȣȝȕĮIJȩIJȘIJĮ (ȅįȘȖȓĮ 2004/108/EC ȖȚĮ IJȘȞ EMC). ȆȐȞIJȦȢ ȤȡİȚȐȗİIJĮȚ ȚįȚĮȓIJİȡȘ ʌȡȠıȠȤȒ ıIJȘȞ İʌȚȜȠȖȒ IJȠȣ țĮȜȦįȓȠȣ ıȒȝĮIJȠȢ ȖȚĮ IJȠȞ İȟȠʌȜȚıȝȩ ʌȠȣ ijȑȡİȚ IJȠ ıȒȝĮ CE. ȆȠȚȩIJȘIJĮ IJȦȞ țĮȜȦįȓȦȞ ıȒȝĮIJȠȢ, ıIJȣʌȚȠșȜȚʌIJȫȞ țĮȚ ȕȣıȝȐIJȦȞ țĮȜȦįȓȦȞ: Ǿ Brooks Instrument ʌȡȠıijȑȡİȚ ȣȥȘȜȒȢ ʌȠȚȩIJȘIJĮȢ țĮȜȫįȚĮ IJĮ ȠʌȠȓĮ ʌȜȘȡȠȪȞ IJȚȢ ʌȡȠįȚĮȖȡĮijȑȢ CE. Ȉİ ʌİȡȓʌIJȦıȘ ʌĮȡȠȤȒȢ įȚțȠȪ ıĮȢ țĮȜȦįȓȠȣ ıȒȝĮIJȠȢ, ȤȡȘıȚȝȠʌȠȚİȓIJİ țĮȜȫįȚȠ ȝİ ʌȜȒȡȘ șȦȡȐțȚıȘ 100% ıİ ȩȜĮ IJĮ ıȘȝİȓĮ. ǺȪıȝĮIJĮ IJȪʌȠȣ «D» Ȓ țȣțȜȚțȐ ʌȡȑʌİȚ ȞĮ ȑȤȠȣȞ ȝİIJĮȜȜȚțȒ șȦȡȐțȚıȘ. ȃĮ ȤȡȘıȚȝȠʌȠȚȘșȠȪȞ țĮIJȐ ʌȡȠIJȓȝȘıȘ ȝİIJĮȜȜȚțȠȓ ıIJȣʌȚȠșȜȓʌIJİȢ țĮȜȦįȓȦȞ ȖȚĮ IJȘ ıIJİȡȑȦıȘ IJȘȢ șȦȡȐțȚıȘȢ. ȃĮ ıȣȞįİșİȓ Ș șȦȡȐțȚıȘ IJȠȣ țĮȜȦįȓȠȣ ıIJȠ ȝİIJĮȜȜȚțȩ țȑȜȣijȠȢ Ȓ ıIJȣʌȚȠșȜȓʌIJȘ țĮȚ ȞĮ șȦȡĮțȚıIJİȓ țĮȚ ıIJĮ įȪȠ ȐțȡĮ țĮIJȐ 360 ȝȠȓȡİȢ. Ǿ șȦȡȐțȚıȘ ʌȡȑʌİȚ ȞĮ IJİȡȝĮIJȓȗİȚ ıİ ȖİȓȦıȘ İįȐijȠȣȢ. ȉĮ ȕȪıȝĮIJĮ ȐțȡȠȣ IJȘȢ ʌȜĮțȑIJĮȢ İȓȞĮȚ İț țĮIJĮıțİȣȒȢ ȝȘ ȝİIJĮȜȜȚțȐ. ȉĮ ȤȡȘıȚȝȠʌȠȚȠȪȝİȞĮ țĮȜȫįȚĮ ʌȡȑʌİȚ ȞĮ ȑȤȠȣȞ 100% șȦȡȐțȚıȘ ȖȚĮ ıȣȝȝȩȡijȦıȘ ȝİ IJȘȞ ʌȚıIJȠʌȠȓȘıȘ CE. Ǿ șȦȡȐțȚıȘ ʌȡȑʌİȚ ȞĮ IJİȡȝĮIJȓȗİȚ ıİ ȖİȓȦıȘ İįȐijȠȣȢ. īȚĮ IJȘ įȚȐIJĮȟȘ IJȦȞ ĮțȓįȦȞ: ȈȣȝȕȠȣȜİȣșİȓIJİ IJȠ ıȣȞȘȝȝȑȞȠ İȖȤİȚȡȓįȚȠ ȠįȘȖȚȫȞ. ǾȜİțIJȡȠıIJĮIJȚțȒ İțțȑȞȦıȘ (ESD) ȆȇȅĭȊȁǹȄǾ: Ǿ ıȣıțİȣȒ ĮȣIJȒ ʌİȡȚȑȤİȚ ȘȜİțIJȡȠȞȚțȐ İȟĮȡIJȒȝĮIJĮ IJĮ ȠʌȠȓĮ ȝʌȠȡȠȪȞ ȞĮ ȣʌȠıIJȠȪȞ İȪțȠȜĮ ȕȜȐȕİȢ Įʌȩ IJȠȞ ıIJĮIJȚțȩ ȘȜİțIJȡȚıȝȩ. ȆȡȑʌİȚ ȞĮ ĮțȠȜȠȣșȠȪȞIJĮȚ ȠȚ ȠȡșȑȢ įȚĮįȚțĮıȓİȢ ȤİȚȡȚıȝȠȪ țĮIJȐ IJȘȞ ĮijĮȓȡİıȘ, IJȠʌȠșȑIJȘıȘ Ȓ ȐȜȜȠ ȤİȚȡȚıȝȩ IJȦȞ İıȦIJİȡȚțȫȞ ʌȜĮțİIJȫȞ țĮȚ įȚĮIJȐȟİȦȞ. ǻȚĮįȚțĮıȓĮ ȤİȚȡȚıȝȠȪ: 1. ĬȑıIJİ IJȘ ıȣıțİȣȒ İțIJȩȢ IJȐıİȦȢ. 2. ĭȡȠȞIJȓıIJİ ȖȚĮ IJȘ ȖİȓȦıȘ IJȠȣ ʌȡȠıȦʌȚțȠȪ ȝİ ʌİȡȚțȐȡʌȚȠ Ȓ ȐȜȜȠ ĮıijĮȜȑȢ țĮȚ țĮIJȐȜȜȘȜȠ ȝȑıȠ ʌȡȚȞ IJȠʌȠșİIJȒıİIJİ, ĮijĮȚȡȑıİIJİ Ȓ ȡȣșȝȓıİIJİ țȐȡIJİȢ IJȣʌȦȝȑȞȦȞ țȣțȜȦȝȐIJȦȞ Ȓ ȐȜȜȘ İıȦIJİȡȚțȒ įȚȐIJĮȟȘ. 3. ȅȚ țȐȡIJİȢ IJȣʌȦȝȑȞȦȞ țȣțȜȦȝȐIJȦȞ ʌȡȑʌİȚ ȞĮ ȝİIJĮijȑȡȠȞIJĮȚ ıİ ıȣıțİȣĮıȓĮ Įʌȩ ĮȖȫȖȚȝȠ ȣȜȚțȩ. ȅȚ țȐȡIJİȢ įİȞ ʌȡȑʌİȚ ȞĮ ĮijĮȚȡİșȠȪȞ Įʌȩ IJȠ ʌȡȠıIJĮIJİȣIJȚțȩ ʌİȡȓȕȜȘȝĮ ʌĮȡȐ ȝȩȞȠ ĮȝȑıȦȢ ʌȡȚȞ Įʌȩ IJȘȞ IJȠʌȠșȑIJȘıȘ. ȅȚ țȐȡIJİȢ ʌȠȣ ĮijĮȚȡȑșȘțĮȞ ʌȡȑʌİȚ ȞĮ IJȠʌȠșİIJȘșȠȪȞ ĮȝȑıȦȢ ıİ ʌȡȠıIJĮIJİȣIJȚțȒ ıȣıțİȣĮıȓĮ ȖȚĮ ȝİIJĮijȠȡȐ, ĮʌȠșȒțİȣıȘ Ȓ İʌȚıIJȡȠijȒ ıIJȠ İȡȖȠıIJȐıȚȠ. ȆĮȡĮIJȘȡȒıİȚȢ: Ǿ ȪʌĮȡȟȘ İȟĮȡIJȘȝȐIJȦȞ İȣĮȓıșȘIJȦȞ ıIJĮ ijĮȚȞȩȝİȞĮ ESD (ȘȜİțIJȡȠıIJĮIJȚțȒȢ İțțȑȞȦıȘȢ) įİȞ İȓȞĮȚ ȝȠȞĮįȚțȩ ȤĮȡĮțIJȘȡȚıIJȚțȩ IJȘȢ ıȣıțİȣȒȢ ĮȣIJȒȢ. ȅȚ ʌİȡȚııȩIJİȡİȢ ıȪȖȤȡȠȞİȢ ȘȜİțIJȡȠȞȚțȑȢ ıȣıțİȣȑȢ ʌİȡȚȑȤȠȣȞ İȟĮȡIJȒȝĮIJĮ IJİȤȞȠȜȠȖȓĮȢ ȝİIJĮȜȜȚțȫȞ ȠȟİȚįȓȦȞ (NMOS, SMOS țȐ.). Ǿ ʌİȓȡĮ ȑȤİȚ ĮʌȠįİȓȟİȚ ȩIJȚ ȝȚĮ ȝȚțȡȒ ʌȠıȩIJȘIJĮ ıIJĮIJȚțȠȪ ȘȜİțIJȡȚıȝȠȪ Įȡțİȓ ȖȚĮ ȞĮ ʌȡȠțĮȜȑıİȚ ȕȜȐȕİȢ Ȓ ȞĮ țĮIJĮıIJȡȑȥİȚ IJȚȢ ıȣıțİȣȑȢ ĮȣIJȑȢ. ǼȟĮȡIJȒȝĮIJĮ ʌȠȣ ȣʌȑıIJȘıĮȞ ȕȜȐȕȘ, ĮțȩȝȘ țĮȚ ĮȞ ȝȠȚȐȗȠȣȞ ȞĮ ȜİȚIJȠȣȡȖȠȪȞ ıȦıIJȐ, țȚȞįȣȞİȪȠȣȞ Įʌȩ ʌȡȫȚȝȘ ĮıIJȠȤȓĮ. A-9 Section A Essential Instructions Installation and Operation Manual Brooks® Digital MFC's and MFM's X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Hungarian AlapvetĘ utasítások ElĘször olvassa el ezeket! A Brooks Instrument olyan módon tervezi, gyártja és teszteli termékeit, hogy azok megfeleljenek számos belföldi és nemzetközi szabványnak. Ezeket a berendezéseket megfelelĘen kell telepíteni, üzemeltetni és karbantartani ahhoz, hogy mindenképpen a normál mĦködési tartományuknak megfelelĘen üzemelhessenek. Az alábbi utasításokat be kell tartani, és be kell építeni a munkavédelmi programba a Brooks Instrument termékeinek telepítése, üzemeltetése és karbantartása során. A megfelelĘ teljesítmény garantálása érdekében kizárólag szakképzett személyzet végezze a termék telepítését, üzemeltetését, frissítését, programozását és karbantartását. Valamennyi utasítást el kell olvasni a termék telepítése, üzemeltetése és szervizelése elĘtt. Amennyiben ez a kézikönyv nem a megfelelĘ kiadvány, a hátsó borítón keresse meg a helyi forgalmazót, és további tájékoztatásért lépjen kapcsolatba vele. ėrizze meg ezt a kézikönyvet késĘbbi tájékoztatásként. FIGYELEM: Ne mĦködtesse a berendezést az üzemeltetési utasításban megadott üzemi tartományokon túl. Ennek megsértése súlyos személyi sérüléshez vagy a berendezés meghibásodásához vezethet. x Amennyiben a gépkönyv utasításai nem egyértelmĦek, lépjen kapcsolatba Brooks Instrument képviselĘjével, hogy tisztázzák a problémát. x Tartsa be a berendezésen feltüntetett vagy azzal együtt szállított összes figyelmeztetést, felhívást és utasítás. x A megfelelĘ telepítési utasításban megadott utasítások valamint a hatályos helyi és nemzeti elĘírások szerint telepítse a berendezést. A termékeket kizárólag a megfelelĘ elektromos és nyomásellátó forrásra kösse. x Menete: (1) Lassan helyezze nyomás alá a rendszert. Lassanként nyissa ki az üzemi szelepeket az áramlásingadozás elkerülése érdekében. (2) EllenĘrizze, nincs-e szivárgás az áramlásmérĘ be-, és kimeneti bekötéseinél. Ha nincs szivárgás, töltse fel a rendszert az üzemi nyomásra. x Szervizelés elĘtt mindenképpen ellenĘrizze, hogy az üzemi vezeték nincs-e nyomás alatt. Amennyiben cserealkatrészekre van szükség, mindenképpen szakképzett személynek kell kezelnie a Brooks Instrument által meghatározott cserealkatrészeket. A nem engedélyezett alkatrészek és tevékenységek befolyásolhatják a termék teljesítményét, illetve veszélyeztethetik a biztonságos üzemeltetést. A pusztán hasonló alkatrészekkel történĘ helyettesítés tüzet, áramütésveszélyt vagy elégtelen mĦködést eredményezhet. x A berendezés összes ajtaja mindenképpen legyen zárva, a védĘburkolatok pedig legyenek a helyükön az áramütés és a személyi sérülések elkerülése érdekében, kivéve, ha szakképzett szakember végez rajta karbantartási munkákat. FIGYELEM: Folyadékot áramoltató berendezések esetében, ha bármilyen okból el kell zárni a berendezés melletti ki-, és belépĘ szelepeket, a berendezést teljesen le kell üríteni. Ennek elmulasztása a folyadék hĘtágulását okozhatja, ami károsíthatja a berendezést, és személyi sérüléshez vezethet. Nyomástartó berendezésekre vonatkozó európai irányelv (PED) Minden 0,5 bar-nál (g) magasabb belsĘ nyomású és 25 mm-nél vagy 1 hüvelyknél nagyobb nyomástartó berendezés a nyomástartó berendezésekre vonatkozó európai irányelv (PED) hatálya alá tartozik. x A gépkönyv „MĦszaki adatok” fejezete tartalmaz a PED irányelvre vonatkozó utasításokat. x A gépkönyvben megadott mérĘeszközök megfelelnek a 97/23/EK EU irányelvnek. x Minden Brooks átfolyásmérĘ az 1-es folyadékcsoportba tartozik. x A 25 mm-nél vagy 1 hüvelyknél nagyobb mérĘeszközök megfelelnek a PED I, II, vagy III kategóriának. x A 25 mm-es illetve 1 hüvelykes vagy kisebb mérĘeszközök az elfogadott mérnöki gyakorlatot (SEP) követik. Elektromágneses kompatibilitásra vonatkozó európai irányelv (EMC) A Brooks Instrument CE jelölést kiérdemelt (elektromos/elektronikus) berendezései sikeresen teljesítették az elektromágneses kompatibilitási követelményeket (2004/108/EC sz. EMC irányelv) vizsgáló teszteket. Ugyanakkor különös figyelmet kell fordítani a CE jelölésĦ berendezésekhez felhasznált jelkábelek kiválasztására. A jelkábelek, kábelösszekötĘk, csatlakozók minĘsége: A Brooks Insturment magas minĘségĦ kábeleket kínál, melyek megfelelnek a CE minĘsítés követelményeinek. Amennyiben saját jelkábelt alkalmaznak, olyat kell választani, amely 100%-os árnyékolással, teljes mértékben szĦrt. A „D” vagy „kör alakú” csatlakozóknak fémárnyékolóval árnyékoltnak kell lennie. Szükség esetén fém kábelösszekötĘket kell alkalmazni a kábelszĦrĘ rögzítésére. A kábelszĦrĘt a fém házhoz vagy hüvelyhez kell csatlakoztatni és mindkét felén 360°-ban le kell árnyékolni. Az árnyékolásnak földelésben kell végzĘdnie. A kártyákhoz tartozó csatlakozók szabványosan nem fémesek. Az alkalmazott kábeleknek 100%-és árnyékolással szĦrteknek kell lenniük, hogy megfeleljenek a CE minĘsítésnek. Az árnyékolásnak földelésben kell végzĘdnie. ÉrintkezĘ konfiguráció: Lásd a mellékelt kezelési utasítást. Elektrosztatikus kisülés (ESD) VIGYÁZAT: A készülék olyan alkatrészeket tartalmaz, melyek hajlamosak a sztatikus elektromosság okozta károsodásra. Be kell tartani a megfelelĘ eljárásokat a belsĘ áramköri kártyák és eszközök eltávolítása, behelyezése vagy egyéb kezelése során. Kezelési eljárás: 1. A berendezést áramtalanítani kell. 2. A személyt földelni kell csuklópánttal vagy egyéb biztonságos és a célra alkalmas eszközzel, mielĘtt áramköri kártyát vagy egyéb belsĘ eszközt telepítene, venne ki, vagy állítana be. 3. A nyomtatott áramköri kártyákat vezetĘképes csomagolásban kell szállítani. A kártyák kizárólag közvetlenül a behelyezés elĘtt vehetĘk ki a védĘburkolatból. A kiszerelt kártyát haladéktalanul el kell helyezni a mozgatásra, raktározásra vagy a gyári visszaszállításra szolgáló védĘcsomagolásba. Megjegyzések: Nem egyedi jelenség, hogy a készülékben elektrosztatikus kisülésre (ESD) érzékeny alkatrészek találhatók. A legtöbb korszerĦ elektronikus eszközben fémoxid technológiás alkatrészek (NMOS, SMOS stb.) találhatók. A tapasztalatok azt igazolják, hogy még kis mértékĦ sztatikus elektromosság is károsíthatja, vagy tönkreteheti ezeket az eszközöket. A károsodott alkatrészek, még ha látszólag megfelelĘen mĦködnek is, kezdĘdĘ hibára utalnak. A-10 Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Section A Essential Instructions Brooks® Digital MFC's and MFM's Italian Istruzioni fondamentali Leggerle subito! La Brooks Instrument progetta, fabbrica e collauda i propri prodotti in maniera tale che siano conformi ai vari standard nazionali ed internazionali. Tali apparecchiature devono essere installate, messe in esercizio e tenute in manutenzione in maniera adeguata affinché operino in conformità alle loro normali specifiche di funzionamento. Le seguenti istruzioni devono essere rispettate ed inserite nel programma di tutela sul lavoro durante l’installazione, il funzionamento e la manutenzione dei prodotti Brooks Instrument. x Per garantire un adeguato rendimento l'installazione, il funzionamento, l’aggiornamento, la programmazione e la manutenzione del prodotto devono essere eseguiti esclusivamente da personale specializzato. x Leggere tutte le istruzioni prima dell’installazione, utilizzo e manutenzione del prodotto. Se questo manuale non è quello relativo al Vostro prodotto, cercare sul retro della copertina il distributore locale e contattarlo per ulteriori informazioni. Conservare il presente manuale per future consultazioni. ATTENZIONE: Non utilizzare questo strumento in condizioni che eccedono le specifiche riportate nel Manuale d’Uso. L’inosservanza può causare gravi lesioni alle persone e/o danni all’apparecchiatura. x Qualora le istruzioni del manuale non siano chiare, contattare un rappresentante della Brooks Instrument per chiarire il problema. x Rispettare tutti gli avvisi, le istruzioni e gli avvertimenti riportati sull’apparecchiatura o forniti insieme ad essa. x Installare l’apparecchiatura in base alle istruzioni riportate nel Manuale d’Uso e alle prescrizioni locali e nazionali in vigore. Collegare i prodotti esclusivamente ad un’adeguata sorgente di pressione ed alimentazione elettrica. x Procedimento: (1) mettere lentamente sotto pressione il sistema. Aprire lentamente le valvole di servizio per evitare l’oscillazione del flusso. (2) Controllare che non ci siano perdite nei punti di connessione in entrata e in uscita del misuratore di flusso. Se non ci sono perdite, caricare il sistema alla pressione d’esercizio. x Prima di effettuare manutenzione controllare che la linea di processo non sia sotto pressione. Se avete bisogno di pezzi di ricambio, il personale specializzato deve usare i pezzi di ricambio definiti dalla Brooks Instrument. Attività e pezzi di ricambio non autorizzati possono influire sul rendimento del prodotto e comprometterne il funzionamento in sicurezza. La sostituzione con pezzi di ricambio non originali può causare incendi, pericolo di scosse elettriche o funzionamento improprio. x Tutti gli sportelli dell’impianto devono essere chiusi, le cappe di protezione devono essere al loro posto per evitare scosse elettriche e lesioni personali, tranne quando il personale specializzato esegue lavori di manutenzione. ATTENZIONE: In caso di apparecchiature in cui scorre un liquido, se per qualsiasi motivo bisogna chiudere le valvole d’entrata e d’uscita accanto all’apparecchiatura, allora si deve svuotare completamente l’apparecchiatura. L’inosservanza può causare la dilatazione termica del liquido che può danneggiare l’apparecchiatura e provocare lesioni alle persone. Direttiva europea relativa alle apparecchiature a pressione (PED) Ogni apparecchiatura a pressione con pressione interna maggiore di 0,5 bar (g) e più grande di 25 mm o di 1 pollice ricade nell’ambito della Direttiva Europea relativa alle apparecchiature a pressione (PED). x Il capitolo „Dati tecnici” del manuale contiene le disposizioni relative alla direttiva PED. x Gli strumenti di misura descritti nel presente manuale sono conformi alla Direttiva UE 97/23/CE. x Ogni flussimetro Brooks appartiene al gruppo di fluidi 1. x Gli strumenti di misura maggiori di 25 mm o di 1 pollice sono conformi alla categoria I, II o III della PED. x Gli strumenti di misurazione minori di 25 mm o di 1 pollice rientrano nella categoria SEP (Sound Engineering Practice). Direttiva europea relativa alla compatibilità elettromagnetica (EMC) Le apparecchiature (elettriche/elettroniche) Brooks Instrument dispongono del marchio CE ed hanno superato positivamente i test per i requisiti di compatibilità elettromagnetica (Direttiva EMC 2004/108/EC). In ogni caso bisogna prestare particolare attenzione alla scelta dei cavi di segnale utilizzati per le apparecchiature con marchio CE. Qualità dei cavi di segnale, dei pressacavi e dei connettori: La Brooks Instrument offre cavi d’alta qualità conformi ai requisiti della certificazione CE. Qualora vengano utilizzati cavi di segnale propri, devono essere scelti con schermatura al 100% e interamente filtrati. I connettori „D” o „rotondi” devono essere schermati con schermatura metallica. In caso di necessità bisogna utilizzare pressacavi metallici di collegamento per fissare la schermatura del cavo. La schermatura del cavo deve far contatto col guscio metallico o col pressacavo; il cavo deve essere schermato su entrambi i lati a 360°. La schermatura deve essere effettuata con messa a terra. I connettori Card Edge normalmente non sono di metallo. I cavi utilizzati devono essere filtrati con schermatura al 100% per essere conformi alla marcatura CE. La schermatura deve essere effettuata con messa a terra. Configurazione pin: Vedi Manuale d’uso allegato. Scarica elettrostatica (ESD) ATTENZIONE: Il dispositivo contiene componenti elettronici che possono essere danneggiati da elettricità statica. Bisogna rispettare le adeguate procedure durante la rimozione, l’installazione o altra manovra delle schede del circuito elettrico interno. Procedura di manovra: 1. Togliere alimentazione elettrica all’apparecchiatura. 2. La persona deve essere collegata a terra con una cerniera o con altri strumenti di sicurezza e adeguati allo scopo prima di installare, togliere o impostare la scheda del circuito elettrico o altri dispositivi interni. 3. Le schede del circuito stampato devono essere spedite in contenitori conduttivi. Le schede devono essere tolte dal rivestimento protettivo esclusivamente prima dell’installazione. Le schede confezionate devono essere collocate immediatamente nell’imballaggio protettivo per la movimentazione, l’immagazzinamento o resa alla fabbrica. Note: È un fenomeno comune che nei dispositivi di questo tipo si trovino componenti sensibili alla scarica elettrostatica (ESD). Nella maggior parte degli strumenti elettronici moderni si trovano componenti tecnologici metallo-ossido (NMOS, SMOS, ecc.). Le esperienze dimostrano che l’elettrostaticità anche in piccola misura può danneggiare o rovinare gli strumenti. I componenti danneggiati, anche se all’apparenza funzionano correttamente, potrebbero manifestare il difetto rapidamente. A-11 Section A Essential Instructions Installation and Operation Manual Brooks® Digital MFC's and MFM's X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Latvian SvarƯga instrukcija Pirms turpinƗt izlasiet! „Brooks Instrument” projektƝ, ražo un pƗrbauda savus ražojumus atbilstoši daudziem nacionƗlajiem un starptautiskajiem standartiem. Lai nodrošinƗtu šo izstrƗdƗjumu turpmƗku darbƯbu atbilstoši noteiktajiem parametriem, tie ir pareizi jƗuzstƗda, jƗlieto un jƗapkopj. UzstƗdot, lietojot „Brooks Instrument” izstrƗdƗjumus un veicot to apkopi, ir jƗievƝro šie norƗdƯjumi un jƗiekƺauj tie jnjsu drošƯbas programmƗ. x Lai nodrošinƗtu pienƗcƯgu izstrƗdƗjuma sniegumu, izstrƗdƗjuma uzstƗdƯšanu, lietošanu, atjauninƗšanu, programmƝšanu un apkopi uzticiet veikt tikai kvalificƝtam personƗlam. x Pirms izstrƗdƗjuma uzstƗdƯšanas, lietošanas un apkalpošanas izlasiet visus norƗdƯjumus. Ja šƯ instrukciju rokasgrƗmata nav pareizƗ, izstrƗdƗjumam atbilstošƗ rokasgrƗmata, lnjdzu skat. aizmugurƝjo vƗku, kur ir sniegta vietƝjƗ tirdzniecƯbas biroja kontaktinformƗcija. BRƮDINƖJUMS! Nelietot instrumentu Ɨrpus Instrukciju un lietošanas rokasgrƗmatƗ norƗdƯtajiem parametriem. ŠƯ brƯdinƗjuma neievƝrošanas rezultƗtƗ var rasties traumas un / vai aprƯkojuma bojƗjumi. x Ja jnjs nesaprotat kƗdu no instrukcijƗm, sazinieties ar „Brooks Instrument” pƗrstƗvi un lnjdziet izskaidrot to. x IevƝrojiet visus brƯdinƗjumus, piesardzƯbas mƝrus un instrukcijas, kas norƗdƯti uz izstrƗdƗjuma vai piegƗdƗti kopƗ ar to. x UzstƗdiet aprƯkojumu tƗ, kƗ tas norƗdƯts attiecƯgajƗ instrukciju rokasgrƗmatƗ iekƺautajƗ uzstƗdƯšanas instrukcijƗ un atbilstoši piemƝrojamajƗm vietƝjƗm un nacionƗlajƗm normƗm. Pievienojiet visus izstrƗdƗjumus pareiziem elektriskajiem un spiediena avotiem. x Lietošana: (1) LƝnƗm uzsƗciet plnjsmu sistƝmƗ. Lai izvairƯtos no straujiem plnjsmas kƗpumiem, lƝnƗm atveriet procesa vƗrstus. (2) PƗrbaudiet, vai nav noplnjdes ap plnjsmas mƝrƯtƗja ieplnjdes un izplnjdes savienojumiem. Ja noplnjdes nav, uzstƗdiet sistƝmƗ darba spiedienu. x PƗrliecinieties par to, lai pirms instrumenta tehniskƗs apkopes bnjtu likvidƝts procesa lƯnijas spiediens. Ja ir nepieciešams veikt kƗdu daƺu nomaiƼu, nodrošiniet, lai tiktu izmantotas „Brooks Instrument” norƗdƯtƗs daƺas un daƺu nomaiƼu veiktu kvalificƝts personƗls. Neatƺautu daƺu un procednjru izmantošana var ietekmƝs ražojuma sniegumu un samazinƗt procesa drošƯbu. LƯdzƯgu, bet ne identisku daƺu nomaiƼas lietošana var izraisƯt ugunsgrƝka, elektrisko traucƝjumu riskus un nepareizu izstrƗdƗjuma darbƯbu. x Nodrošiniet, lai bnjtu aizvƝrtas visas durvis un bnjtu pareizi uzstƗdƯti visi aizsargpƗrsegumi, tƗdƝjƗdi novƝršot elektrošoka un traumu risku. IzƼƝmums ir gadƯjumi, kad kvalificƝts personƗls veic ražojuma apkopi. BRƮDINƖJUMS! Ja šƷidrƗs plnjsmas ierƯþu tuvumƗ esošos ieplnjdes un izplnjdes vƗrstus kƗda iemesla dƝƺ ir jƗaizver, no ierƯcƝm ir jƗizlaiž viss šƷidrums. PretƝjƗ gadƯjumƗ šƷidrums var termiski izplesties, pƗrraut ierƯci un radƯt traumas. Eiropas spiedieniekƗrtu direktƯva (PED) Uz visƗm spiedieniekƗrtƗm, kuru iekšƝjais spriegums pƗrsniedz 0,5 bar (g) un ir lielƗkas par 25 mm jeb 1” (collu), attiecas Eiropas spiedieniekƗrtu direktƯva (PED). x ŠƯs rokasgrƗmatas tehnisko parametru nodaƺƗ ir sniegtas a PED DirektƯvu saistƯtƗs instrukcijas. x ŠajƗ rokasgrƗmatƗ aprakstƯtie mƝrƯtƗji atbilst EN DirektƯvas 97/23/EK prasƯbƗm. x Visi „Brooks Instrument” plnjsmas mƝrƯtƗji ietilpst 1. šƷidrumu grupƗ. x Uz 25 mm jeb 1” (collu) maziem un mazƗkiem mƝrƯtƗjiem attiecas labas inženierijas prakse (SEP). x 25 mm jeb 1” (collu) mazi vai mazƗki mƝrƯtƗji atbilst PED kategorijai I, II vai III. Eiropas elektromagnƝtiskƗs savietojamƯbas direktƯva (EMS) Brooks Instrument” (elektriskƗs / elektroniskƗs) iekƗrtas ar CE zƯmi ir izturƝjušas pƗrbaudi un atzƯtas par atbilstošƗm Eiropas elektromagnƝtiskƗs savietojamƯbas direktƯvas (EMS) prasƯbƗm (EMS 2004/108/EC) TomƝr, izvƝloties signƗlkabeli, kas tiks lietots kopƗ ar CE marƷƝjuma iekƗrtu, ir jƗievƝro Ưpaša uzmanƯbaSignƗlkabeƺa, kabeƺa blƯvslƝgu un savienotƗju kvalitƗte: „Brooks Instrument” piegƗdƗ augstas kvalitƗtes kabeƺus, kas atbilst CE sertifikƗcijas tehniskajiem parametriem. Ja jnjs lietojat pats savu signƗlkabeli, tam ir jƗbnjt pilnƯbƗ, 100% ekranizƝtam. „D” un „apaƺƗ” tipa savienotƗjiem ir jƗbnjt aprƯkotiem ar metƗla ekranizƝjumu. Ja nepieciešams, ir jƗizmanto metƗla blƯvslƝgi ar kabeƺa ekranizƝjuma skavojumu. Kabeƺa ekranizƝjumam ir jƗbnjt savienotam ar metƗla apvalku un abƗs pusƝs aizsargƗtam 360 grƗdu diapazonƗ. EkranizƝjumam ir jƗbeidzas pie iezemƝjuma. „Card Edge” savienotƗji standarta izpildƯjumƗ ir nemetƗla. Kabeƺiem ir jƗbnjt pƗrklƗtiem ar 100% ekranizƝjumu, lai tie atbilstu CE sertifikƗcijas prasƯbƗm. EkranizƝjumam ir jƗbeidzas pie iezemƝjuma. AttiecƯbƗ uz tapu konfigurƗciju: skat. pievienoto instrukciju rokasgrƗmatu. ESD (elektrostatiskƗ izlƗde) IEVƜROT PIESARDZƮBU! Šis instruments satur elektriskos komponentus, kas ir jutƯgi pret statisko elektrƯbu. IzƼemot un uzstƗdot iekšƝjƗs ƷƝdes plates un ierƯces vai kƗ citƗdi darbojoties ar tƗm, ir jƗievƝro noteikta darba kƗrtƯba. Darba kƗrtƯba: 1. IekƗrta jƗatslƝdz no barošanas. 2. Pirms jebkƗdas drukƗtas shƝmas kartes vai citas iekšƝjƗs ierƯces uzstƗdƯšanas, izƼemšanas vai regulƝšanas personƗlam, kas veiks šos darbus, ir jƗbnjt iezemƝtam, piem., izmantojot aproces vai citus drošus, piemƝrotus lƯdzekƺus. 3. DrukƗtƗs shƝmas kartes ir jƗtransportƝ vadošƗ iepakojumƗ. PlƗksnes no aizsargkorpusa drƯkst izƼemt tikai tieši pirms uzstƗdƯšanas. TransportƝjot, uzglabƗjot vai atgriežot rnjpnƯcƗ no izƼemtƗs plƗksnes ir nekavƝjoties jƗievieto aizsargiepakojumƗ. KomentƗri Instruments nav unikƗls tajƗ aspektƗ, ka tas satur pret ESD (elektrostatisko izlƗdi) jutƯgus komponentus. Vairums mnjsdienu elektroiekƗrtu satur komponentus, kuru ražošanƗ izmantota metƗla oksƯdu tehnoloƧijas (NMOS, SMOS u.c.). Pieredze rƗda, ka pat neliels daudzums statiskƗs elektrƯbas var nodarƯt bojƗjumus šƗdƗm ierƯcƝm vai pilnƯbƗ sabojƗt tƗs. BojƗtie komponenti pat tad, ja tie šƷietami darbojas pareizi, ir pakƺauti ƗtrƗkai atteicei. A-12 Section A Essential Instructions Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Brooks® Digital MFC's and MFM's Lithuanian Pagrindinơs instrukcijos Perskaitykite prieš tĊsdami! „Brooks Instrument“ projektuoja, gamina ir išbando savo gaminius, kad jie atitiktǐ Ƴvairius nacionalinius ir tarptautinius standartus. Šie gaminiai turi bnjti tinkamai montuojami, eksploatuojami ir prižinjrimi, kad ir toliau veiktǐ pagal jiems bnjdingus techninius parametrus. Toliau pateiktǐ nurodymǐ reikia laikytis ir Ƴtraukti juos Ƴ saugos programą montuojant, eksploatuojant ir prižinjrint „Brooks Instrument“ produktus. x Siekiant užtikrinti tinkamą veikimą, montuoti, eksploatuoti, naujinti, programuoti ir prižinjrơti gaminƳ turi tik kvalifikuoti darbuotojai. x Perskaitykite visus nurodymus prieš montuodami, eksploatuodami ir prižinjrơdami gaminƳ. Jei gavote netinkamą instrukciją, galiniame jos viršelyje žinjrơkite vietinơs prekybos atstovybơs kontaktinĊ informaciją. Išsaugokite šią instrukciją pasižinjrơjimui ateityje. x x x x x x ƲSPƠJIMAS: nenaudokite šio prietaiso viršydami instrukcijoje ir eksploatacijos vadove nurodytus techninius duomenis. Nesilaikydami šio Ƴspơjimo galite sunkiai susižeisti ir (arba) sugadinti Ƴrangą. Jei nesuprantate kokiǐ nors nurodymǐ, kreipkitơs Ƴ „Brooks Instrument“ atstovą, kad paaiškintǐ. Paisykite visǐ Ƴspơjimo, perspơjimǐ ir nurodymǐ, pažymơtǐ ant gaminio arba pateiktǐ su juo. Ʋrangą montuokite taip, kaip nurodyta atitinkamos instrukcijos montavimo nurodymuose arba taikomuose vietiniuose ar nacionaliniuose kodeksuose. Visus gaminius junkite prie tinkamǐ elektros ir slơgio šaltiniǐ. Eksploatacija: (1) lơtai Ƴjunkite srautą Ƴ sistemą. Lơtai atidarykite proceso vožtuvus, kad išvengtumơte srauto antplnjdžiǐ. (2) Patikrinkite, ar nơra nuotơkiǐ aplink srauto matuoklio Ƴleidimo ir išleidimo jungtis. Jei nuotơkiǐ nơra, sukurkite sistemoje darbinƳ slơgƳ. Prieš atlikdami priežinjros darbus bnjtinai pašalinkite slơgƳ proceso linijoje. Jei reikia pakeisti dalis, užtikrinkite, kad kvalifikuoti darbuotojai naudotǐ „Brooks Instrument“ nurodytas pakaitines dalis. Netinkamos dalys ir procednjros gali pakenkti gaminio veikimui ir kelti pavojǐ saugiai jnjsǐ proceso eksploatacijai. Tik panašiai atrodantys pakaitalai gali sąlygoti gaisrą, elektros pavojus ar netinkamą veikimą. Užtikrinkite, kad visos Ƴrangos durelơs bnjtǐ uždarytos, o apsauginiai dangþiai uždơti, kad išvengtumơte elektros smnjgio ir sužeidimǐ, išskyrus kai kvalifikuoti darbuotojai atlieka priežinjros darbus. ƲSPƠJIMAS: naudojant skysto srauto Ƴrenginius, jei dơl kokios nors priežasties prireikia uždaryti šalia Ƴrenginio esanþius Ƴleidimo ir išleidimo vožtuvus, iš Ƴrenginio reikia išleisti visą skystƳ. To nepadarius galimas šiluminis skysþio plơtimasis, galintis sugadinti ƳrenginƳ ir sužeisti žmonơs. Europos slơginơs Ƴrangos direktyva (PED) Visa slơginơ Ƴranga, kurios vidinis slơgis didesnis nei 0,5 bar (g), o dydis didesnis nei 25 mm arba 1 colis, yra reglamentuojama slơginơs Ƴrangos direktyvos (PED). x Šios instrukcijos dalyje „Techniniai duomenys“ pateikiami nurodymai, susijĊ su PED direktyva. x Šioje instrukcijoje aprašyti matuokliai atitinka Europos Sąjungos direktyvą 97/23/EB. x Visi „Brooks Instrument“ srauto matuokliai priklauso 1 skysþiǐ grupei. x Didesni nei 25 mm arba 1 colis matuokliai atitinka PED I, II arba III kategoriją. x 25 mm arba 1 colio ar mažesni matuokliai atitinka tinkamą inžinerijos praktiką (SEP). Europoje taikomi elektromagnetinio suderinamumo (EMC) reikalavimai CE ženklu pažymơta „Brooks Instrument“ (elektrinơ / elektroninơ) Ƴranga buvo sơkmingai išbandyta pagal elektromagnetinio suderinamumo reikalavimus (EMC direktyvą 2004/108/EC). Bet reikia ypatingo dơmesio renkantis signalizavimo kabelƳ, kuris bus naudojamas su CE ženklu pažymơta Ƴranga. Signalizavimo kabelio, kabeliǐ riebokšliǐ ir jungþiǐ kokybơ: „Brooks Instrument“ tiekia kokybiškus kabelius, kurie atitinka CE sertifikavimo specifikacijas. Jei naudojate savo signalizavimo kabelƳ, jis turi bnjti visiškai ir visas ekranuotas 100 % ekranu. Naudojamos „D“ arba „apskrito“ tipo jungtys turi bnjti ekranuotos metaliniu ekranu. Jei taikoma, reikia naudoti metalinius kabeliǐ riebokšlius, užtikrinanþius kabelio ekrano suspaudimą. Kabelio ekraną reikia jungti prie metalinio apvalkalo ar riebokšlio ir ekranuoti abiejuose galuose 360 laipsniǐ. Ekranas turi baigtis Ƴžeminimu. Standartinơs kraštinơs jungtys yra ne metalinơs. Naudojami kabeliai turi bnjti ekranuoti 100 % ekranu, kad atitiktǐ CE sertifikavimą. Ekranas turi baigtis Ƴžeminimu. Keturiǐ kontaktǐ konfignjracija: žr. pridơtą instrukciją. ESD (elektrostatinis išlydis) PERSPƠJIMAS: šiame prietaise yra elektroniniǐ komponentǐ, kuriuos gali sugadinti statinơ elektra. Išimant ar Ƴdedant vidines spausdintines plokštes ar Ƴrenginius, arba atliekant su jomis kitus darbus, reikia laikytis tinkamǐ darbo procednjrǐ. Darbo procednjra: 1. Atjunkite Ƴrenginio maitinimą. 2. Darbuotojai turi pasirnjpinti Ƴžeminimu naudodami riešo juostelĊ ar kitas saugias tinkamas priemones prieš Ƴdơdami, išimdami ar reguliuodami bet kokią spausdintinơs plokštơs kortelĊ ar kitą vidinƳ komponentą. 3. Spausdintinơs plokštơs korteles reikia transportuoti laidžiame konteineryje. Neleidžiama išimti plokštơs iš apsauginio dơklo, nebent prieš pat Ƴdơjimą. Išimtas plokštes reikia nedelsiant Ƴdơti Ƴ apsauginƳ konteinerƳ transportavimui ar saugojimui arba grąžinti Ƴ gamyklą. Pastabos Šis instrumentas nơra unikalus dơl jame esanþiǐ ESD (elektrostatiniam išlydžiui) jautriǐ komponentǐ. Daugelyje šiuolaikiniǐ elektroniniǐ gaminiǐ yra komponentǐ, kuriuose naudojama metalo oksidǐ technologija (NMOS, SMOS ir pan.). Patirtis rodo, kad net ir mažas statinơs elektros kiekis gali pakenkti tokiems gaminiams ar juos sugadinti. Sugadinti komponentai, net jei atrodo, kad jie veikia tinkamai, anksti nustoja veikti. A-13 Section A Essential Instructions Brooks® Digital MFC's and MFM's Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Polish Zalecenia wstĊpne Prosimy przeczytaü przed rozpoczĊciem uĪytkowania! Brooks Instrument projektuje, wytwarza i testuje swoje produkty tak, aby speániaáy wymagania licznych norm krajowych i miĊdzynarodowych. Te produkty muszą byü poprawnie instalowane, obsáugiwane oraz konserwowane, aby zapewniü ich prawidáowe dziaáanie zgodnie ze specyfikacją techniczną. Podczas instalowania, obsáugiwania i konserwowania produktów firmy Brooks Instrument naleĪy przestrzegaü nastĊpujących zaleceĔ: x Aby zapewniü wáaĞciwe dziaáanie sprzĊtu, instalacja, obsáuga, aktualizacje, programowanie i konserwacja powinny byü wykonywane przez przeszkolony personel. x Przed instalacją, obsáugą i czynnoĞciami serwisowymi naleĪy zapoznaü siĊ ze wszystkimi zaleceniami producenta. Aby uzyskaü instrukcjĊ obsáugi odpowiednią dla danego sprzĊtu naleĪy skontaktowaü siĊ z lokalnym przedstawicielem handlowym producenta. InstrukcjĊ obsáugi naleĪy zachowaü do póĨniejszego uĪycia. OSTRZEĩENIE: Nie wolno przekraczaü podanych w instrukcji zakresów dziaáania urządzenia. Nieprzestrzeganie tego zalecenia moĪe doprowadziü do powaĪnego zagroĪenia Īycia lub zdrowia personelu i / lub uszkodzenia sprzĊtu. x x x x x x JeĪeli jakieĞ zalecenia w instrukcji obsáugi urządzenia są niezrozumiaáe, prosimy o skontaktowanie siĊ z przedstawicielem firmy Brooks Instrument, aby wyjaĞniü problem. NaleĪy postĊpowaü biorąc pod uwagĊ wszystkie ostrzeĪenia, uwagi i zalecenia umieszczone na produkcie lub doáączone do niego. InstalacjĊ urządzenia naleĪy przeprowadziü zgodnie z zaleceniami zawartymi w instrukcji instalacji oraz z obowiązującymi lokalnymi i narodowymi oznaczeniami. Wszystkie urządzenia moĪna podáączaü wyáącznie do odpowiednich Ĩródeá energii elektrycznej oraz ciĞnienia. Pierwsze czynnoĞci obsáugowe: (1) NaleĪy powoli wáączyü przepáyw w instalacji. NastĊpnie powoli otworzyü zawory robocze tak, aby uniknąü wahaĔ przepáywu. (2) NaleĪy teraz sprawdziü, czy nie wystĊpują nieszczelnoĞci przy podáączeniach wejĞciowym i wyjĞciowym miernika przepáywu. JeĪeli nie ma Īadnych nieszczelnoĞci, moĪna zwiĊkszyü ciĞnienie w instalacji do wartoĞci ciĞnienia roboczego. Przed przystąpieniem do czynnoĞci serwisowych naleĪy upewniü siĊ, Īe ciĞnienie robocze jest odáączone. JeĪeli konieczna jest wymiana czĊĞci zamiennych, naleĪy zawsze stosowaü czĊĞci zamienne specyfikowane przez firmĊ Brooks Instrument a czynnoĞci ich wymiany powinien w kaĪdym przypadku dokonywaü przeszkolony personel. Stosowanie nieautoryzowanych czĊĞci i procedur serwisowych moĪe niekorzystnie wpáynąü na dziaáanie produktu oraz zagroziü bezpieczeĔstwu instalacji. Korzystanie z podobnie wyglądających zamienników moĪe doprowadziü do poĪaru, poraĪenia prądem lub nieprawidáowego dziaáania urządzenia. NaleĪy upewniü siĊ, Īe wszystkie otwory urządzenia są zamkniĊte a osáony umocowane na swoich miejscach, aby zapobiec obraĪeniom ciaáa lub poraĪeniu prądem personelu. Zalecenie to nie dotyczy przeszkolonego pracownika wykonującego prace serwisowe lub konserwacyjne. OSTRZEĩENIE: W przypadku mierników przepáywu cieczy, jeĪeli znajdujące siĊ na nich zawory wejĞciowe i wyjĞciowe mają byü z jakiegoĞ powodu zamkniĊte, to urządzenie musi zostaü caákowicie opróĪnione z ciekáego medium. Niedopeánienie tego zalecenia moĪe doprowadziü do termicznego zwiĊkszenia objĊtoĞci cieczy, co z kolei moĪe spowodowaü uszkodzenie urządzenia i obraĪenia personelu. Europejska dyrektywa dotycząca urządzeĔ ciĞnieniowych (PED) Wszystkie urządzenia ciĞnieniowe pracujące przy ciĞnieniu wewnĊtrznym wzglĊdnym wiĊkszym niĪ 0.5 bara i wielkoĞci powyĪej 25 mm lub 1 cala podlegają dyrektywie europejskiej dotyczącej urządzeĔ ciĞnieniowych (PED). x Rozdziaá „Specyfikacja techniczna” niniejszej instrukcji zawiera zalecenia dotyczące dyrektywy PED. x Mierniki opisane w tej instrukcji są zgodne z dyrektywą EN 97/23/EC. x Wszystkie mierniki przepáywu firmy Brooks Instrument naleĪą do 1-szej grupy cieczy. x Urządzenia pomiarowe o wielkoĞci powyĪej 25 mm lub 1 cala naleĪą do kategorii I, II lub III dyrektywy PED. x Urządzenia pomiarowe o wielkoĞci 25 mm lub 1 cala lub mniejsze podlegają zaleceniom „Uznanej Praktyki InĪynierskiej” (SEP). Europejska dyrektywa dotycząca kompatybilnoĞci elektromagnetycznej (EMC) Urządzenia elektryczne / elektroniczne firmy Brooks Instrument posiadające oznaczenie CE, przeszáy pozytywnie testy pod kątem speániania przez nich wymogów kompatybilnoĞci elektromagnetycznej (Dyrektywa EMC 2004/108/EC). JednakĪe szczególną uwagĊ naleĪy poĞwiĊciü przy doborze przewodów sygnaáowych, które mają byü stosowane z urządzeniami ze znakiem CE. JakoĞü przewodu sygnaáowego, dáawic oraz záączy przewodu: Firma Brooks Instrument dostarcza wysokiej jakoĞci przewody, które speániają wymagania zawarte w specyfikacji dla certyfikatu CE. JeĪeli stosuje siĊ wáasne przewody sygnaáowe, to powinny one byü w caáoĞci w peáni ekranowane. Záącza typu „D” lub okrągáe powinny zawieraü metalowy ekran. JeĞli to moĪliwe, naleĪy stosowaü metalowe dáawice przewodu zapewniające mocowanie jego ekranu. Ekran przewodu powinien byü poáączony z metalową osáoną lub dáawicą zapewniając caákowite, dookólne ekranowanie na obu koĔcach przewodu. Ekran przewodu powinien byü uziemiony. Záącza krawĊdziowe są standardowo niemetaliczne. Stosowane przewody muszą byü w peáni ekranowane zgodnie z certyfikatem CE. Ekran przewodu powinien byü uziemiony. Konfiguracja styków jest podana w niniejszej instrukcji obsáugi. Wyáadowania elektrostatyczne (ESD) UWAGA: Urządzenie zawiera czĊĞci elektroniczne podatne na uszkodzenia spowodowane áadunkami elektrostatycznymi. Przy obchodzeniu siĊ z wewnĊtrznymi podzespoáami i czĊĞciami elektronicznymi naleĪy przestrzegaü nastĊpujących zasad postĊpowania: 1. NaleĪy odáączyü zasilanie od urządzenia. 2. Osoba wykonująca czynnoĞci musi zostaü uziemiona za pomocą opaski na przegubie dáoni lub w inny, bezpieczny sposób, zanim przystąpi do instalacji, wyjĊcia lub regulacji obwodów drukowanych lub innych wewnĊtrznych podzespoáów elektronicznych urządzenia. 3. Obwody drukowane naleĪy transportowaü w przewodzącym pojemniku. Páytki drukowane naleĪy wyjmowaü z opakowania ochronnego bezpoĞrednio przed ich montaĪem. Wymontowane páytki naleĪy niezwáocznie umieĞciü w opakowaniu ochronnym sáuĪącym do transportowania, skáadowania lub odsyáania do producenta. Uwagi: Fakt, Īe urządzenie zawiera czĊĞci nieodporne na wyáadowania elektrostatyczne (ESD) jest rzeczą normalną. WiĊkszoĞü nowoczesnych urządzeĔ elektronicznych zawiera komponenty wykonane w technologii tlenków metali (NMOS, SMOS itp.). Jak pokazuje praktyka, nawet niewielkie wyáadowanie elektrostatyczne moĪe uszkodziü lub zniszczyü takie urządzenie. Uszkodzone czĊĞci, nawet jeĪeli na pozór dziaáają poprawnie, szybko doprowadzają do nieprawidáowej pracy urządzenia. A-14 Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Section A Essential Instructions Brooks® Digital MFC's and MFM's Portuguese Instruções Básicas Ler antes de proceder! A Brooks Instrument projecta, fabrica e testa os seus produtos de forma a satisfazer numerosas normas nacionais e internacionais. Estes equipamentos devem ser instalados, utilizados e mantidos de forma adequada, e devem funcionar dentro da sua gama de utilização. As instruções seguintes devem ser, durante a instalação, uso e/ou manutenção dos equipamentos da Brooks Instrument, apreendidas e integradas no plano de protecção e segurança no trabalho. x Para assegurar o desempenho adequado, a instalação, exploração, actualização e/ou manutenção do equipamento deve ser realizada, exclusivamente, por pessoal qualificado. x Antes de instalar, utilizar e/ou executar operações de manutenção devem ser lidas todas as instruções do equipamento. No caso do presente manual não ser apropriado procure, na capa traseira, o distribuidor mais próximo e contacte-o para obter informações adicionais. Guarde este manual para futura referência. ATENÇÃO: não sujeite o equipamento a condições fora das gamas de serviços indicadas. Ao não respeitar esta advertência poderá provocar avarias no equipamento e/ou danos pessoais. x Se as instruções deste manual não estiverem suficientemente claras, contacte o representante Brooks Instrument para esclarecer as suas dúvidas. x Tenha sempre presente todas as advertências, apelos e instruções indicadas no equipamento e/ou fornecidas junto com o mesmo. x A instalação do equipamento deverá ser efectuada cumprindo todas as instruções indicadas no manual assim como as normas e regulamentos locais e nacionais vigentes. Ligue o equipamento exclusivamente a fontes de energia eléctrica e/ou pneumática adequadas. x Procedimento: (1) Pressurize lentamente o sistema. Abra lentamente as válvulas para evitar variações bruscas de caudal. (2) Verifique se há fugas nas ligações de entrada e saída do medidor de caudal. Se não detectar fugas, poderá colocar o sistema à pressão de trabalho. x Antes de efectuar qualquer operação de manutenção verifique sempre a possibilidade do equipamento estar sob pressão. No caso de ser preciso substituir peças, estas devem ser as recomendadas pela Brooks Instrument e o trabalho de substituição deverá ser efectuado por técnicos qualificados. Procedimentos e peças não conformes poderão alterar o desempenho do equipamento, danificá-lo ou colocar em risco a sua segurança ou de outros. Substituir peças por outras não originais, meramente semelhantes, poderá originar choques eléctricos, fogo ou em funcionamento inadequado. x Deverá manter o equipamento intacto e fechado, verificando se as coberturas de protecção estão nos seus lugares devidos, de forma a evitar choques eléctricos e/ou danos pessoais, excepto no caso de se tratar de um técnico qualificado e se estiver a executar trabalhos de manutenção. ATENÇÃO: Se por qualquer razão for necessário fechar as válvulas a montante e jusante do equipamento, tenha em atenção que o mesmo deverá ser previamente esvaziado do fluído que o atravessa. Esta obrigação surge do facto de existir a possibilidade de ocorrer dilatação térmica do líquido, no interior do aparelho, podendo provocar danos pessoais ou materiais graves. Directiva Europeia para equipamentos sob pressão (PED) Todos os equipamentos sujeitos a pressão interior superior a 0,5 bar (g) e com calibre superior a 25 mm (1 polegada) estão sob a vigência da directiva europeia de equipamentos sob pressão (PED). x O capítulo "Dados técnicos" do manual contém instruções relativas à Directiva PED. x O caudalímetro objecto deste manual satisfaz a directiva 97/23/CE da UE. x Os caudalímetros Brooks pertencem ao grupo 1 de fluidos. x Os caudalímetros com calibre superior a 25 mm (1 polegada) pertencem às categorias PED I, II, ou III. x Os caudalímetros de 25 mm (1 polegada) ou menores seguem as “Boas regras de engenharia” (SEP). Directiva Europeia sobre Compatibilidade electromagnética (EMC) Os equipamentos (eléctricos/electrónicos) da Brooks Instrument que têm a marcação CE passaram os testes comprovativos dos requisitos de compatibilidade electromagnética (Directiva EMC número 2004/108/EC). Todavia, ao utilizar os aparelhos compete-lhe a escolha dos cabos de sinal adequados para os equipamentos com marcação CE. Qualidade dos cabos de sinal, bucins e conectores: A Brooks Instrument fornece cabos de alta qualidade que cumprem todos os requisitos da marcação CE. No caso de utilizar os seus próprios cabos de sinal, assegure uma blindagem a 100%. Os conectores do tipo “D” ou "circular" têm que ser blindados por uma malha metálica. Se precisar de usar bucins, estes têm que permitir a crimpagem da malha/blindagem do cabo. A blindagem do cabo deve ser ligada ao corpo metálico ou bocal e assegurando a blindagem em 360°. A blindagem deve terminar numa ligação à terra. Os conectores ligados a cartões serão, em geral, não-metálicos. Os cabos utilizados devem ter fita de blindagem a 100% para satisfazer a marcação CE. A blindagem, deverá terminar numa ligação à terra. Atribuição de pinos: Veja as instruções de operação anexas. Descarga Electrostática (ESD) ATENÇÃO: Alguns componentes deste equipamento são susceptíveis à acção da electricidade estática, podendo ficar danificados. Ao remover, colocar ou manipular placas de circuitos electrónicos deverá ter em atenção os seguintes procedimentos: 1. Desligar o equipamento da rede. 2. O utilizador, antes de qualquer intervenção que envolva os cartões de circuitos ou outros dispositivos internos, terá que se ligar à terra por meio duma bracelete de pulso ou outro dispositivo adequado. 3. Os circuitos impressos deverão ser transportados numa embalagem condutiva. Os cartões só deverão ser retirados da embalagem protectora imediatamente antes da sua inserção. O cartão retirado deverá ser recolocado imediatamente na embalagem protectora que servirá para o seu transporte, armazenagem ou retorno a fábrica. Observações: Tenha presente que este equipamento poderá não ser o único objecto capaz de ser portador de peças sensíveis a descargas electrostáticas (ESD). Na maioria dos dispositivos electrónicos Brooks encontram-se peças de tecnologia de óxidos metálicos (NMOS, SMOS, etc.). A experiência mostra que até pequenas quantidades de electricidade estática são capazes de danificar ou destruir esses dispositivos. Os componentes danificados, embora inicialmente funcionem aparentemente bem, acabam por ter falhas prematuramente. A-15 Section A Essential Instructions Installation and Operation Manual Brooks® Digital MFC's and MFM's X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Romanian IndicaĠii de referinĠă CitiĠi-le întâi pe acestea! Brooks Instrument îúi proiectează, produce úi testează produsele într-un mod ce respectă un mare număr de standarde autohtone úi internaĠionale. Aceste instalaĠii trebuie amplasate, exploatate úi întreĠinute corespunzător, pentru ca în toate situaĠiile, domeniul lor de lucru să corespundă operării normale. În ceea ce priveúte instalarea, operarea úi întreĠinerea produselor Brooks Instrument, indicaĠiile de mai jos trebuie respectate úi trebuie introduse in programul de protecĠia muncii. x Pentru garantarea prestaĠiei corecte, instalarea, operarea, actualizarea, programarea úi întreĠinerea produsului poate fi realizată doar de către personal calificat. x InstrucĠiunile de instalare ale produsului trebuie citite integral, înainte de punerea în serviciu úi exploatarea sa. În măsura în care ediĠia acestui manual nu este cea adecvată, identificaĠi pe ultima copertă coordonatele distribuitorului local úi pentru lămuriri suplimentare adresaĠi-vă acestuia. PăstraĠi acest manual pentru referinĠe ulterioare. ATENğIE: Nu utilizaĠi instalaĠia în afara intervalului de funcĠionare indicat în instrucĠiunile de operare. Nerespectarea acestui lucru se poate solda cu răniri grave de persoane sau defectarea instalaĠiei. x În măsura în care indicaĠiile cărĠii maúinii nu sunt suficient de lămuritoare, luaĠi legătura cu reprezentantul Brooks Instrument pentru clarificarea problemei. x PăstraĠi toate avertismentele, avizele úi instrucĠiunile livrate odată cu instalaĠia sau inscripĠionate pe aceasta. x EfectuaĠi instalarea echipamentului în conformitate cu indicaĠiile de instalare corespunzătoare, respectiv cu respectarea prevederilor naĠionale. Echipamentul se conectează exclusiv la surse de energie electrică úi de presiune corespunzătoare. x Succesiune: (1) PresurizaĠi lent instalaĠia. DeschideĠi încetul cu încetul supapa de funcĠionare pentru evitarea fluctuaĠiilor de flux. (2) ControlaĠi dacă nu sunt prelingeri la intrarea sau ieúirea debitmetrului de branúare. Dacă nu sunt scurgeri, presurizaĠi instalaĠia la presiunea de lucru. x Înaintea exploatării/ întreĠinerii, verificaĠi neapărat dacă conducta uzinală nu este sub presiune. În măsura în care este nevoie de piese de schimb, este neapărat necesar ca manevrarea pieselor de schimb să fie făcută de personal cu calificare profesională agreat de Brooks Instrument. Utilizarea altor piese de schimb decât cele originale úi licenĠiate poate avea efecte asupra performanĠelor instalaĠiei úi asupra siguranĠei sale în exploatare. Utilizarea de piese asemănătoare de substituire poate avea ca rezultat pericol de incendiu úi electrocutare. x În toate cazurile toate uúile instalaĠiei trebuie să fie închise, cuútile de protecĠie să fie puse la locurile lor, pentru evitarea electrocutării úi rănirii de persoane, exceptând situaĠiile când un specialist efectuează lucrări de întreĠinere. ATENğIE: În cazul instalaĠiilor cu flux de fluide, dacă din orice motiv este necesară închiderea valvelor de intrare úi ieúire, limitrofe instalaĠiei, instalaĠia trebuie complet golită. Neglijarea acestui lucru poate avea ca efect dilatarea termică a fluidului, care poate defecta instalaĠia úi poate produce răniri de persoane. Directiva europeană pentru instalaĠiile sub presiune (PED) Toate instalaĠiile úi sistemele presurizate ce se află sub presiuni interne ce depăúesc 0,5 mbar (g) úi au mai mult de 25 mm sau 1 Ġol, cad sub incidenĠa normei europene corespunzătoare (PED). x La capitolul "Date tehnice" din cartea maúinii se găsesc indicaĠiile corespunzătoare directivei PED. x Mijloacele de măsurare menĠionate în cartea maúinii corespund directivei 97/23/EK EU. x Toate debitmetrele Brooks corespund clasei 1 de fluide. x Mijloacele de măsurare mai mari de 25 mm sau 1 Ġol corespund categoriei PED I, II sau III. x Mijloacele de măsurare mai mici de 25 mm sau 1 Ġol se conformează practicii inginereúti acceptate (SEP). Directiva europeană privitoare la compatibilitatea electromagnetică (EMC). InstalaĠiile (electrice /electronice) ce poartă marca Brooks Instrument CE îndeplinesc cu succes cerinĠele testelor de verificare ale compatibilităĠii electromagnetice (Cf. directivelor europene EMC cu nr. 2004/108/EC). În acelaúi timp trebuie acordată o atenĠie deosebită la alegerea cablurilor de semnalizare utilizate pentru instalaĠiile ce poartă marcajul CE. Calitatea cablurilor de semnalizare, a legăturilor prin cablu úi a conectoarelor: Brooks Instrument oferă cabluri de calitate ridicată, care corespund cerinĠelor calitative ale CE. În măsura în care folosiĠi cabluri proprii, trebuie alese acelea care sunt 100% ecranate úi prevăzute cu filtre. Conectoarele „D” sau cele „circulare” trebuie sa dispună de ecrane metalice. În caz de nevoie trebuie folosite conectoare metalice pentru montarea filtrelor de cablu. Filtrul de cablu trebuie conectat la carcasa metalică sau manúon úi în ambele cazuri trebuie asigurată ecranarea la 360°. Ecranarea trebuie terminată cu o legare la pământ. Conform standardului, conectoarele aparĠinând plăcilor electronice nu sunt metalice. Cablurile folosite trebuie să fie 100% ecranate úi prevăzute cu filtre pentru a corespunde clasificării CE. Ecranarea trebuie terminată cu o legare la pământ. ConfiguraĠie de contact: Vezi instrucĠiunile de operare ataúate. Descărcare electrostatică (ESD) ATENğIE: InstalaĠia include piese care sunt predispuse la defectare sub influenĠa electricităĠii statice. Trebuie respectate metodele corespunzătoare de extragere, instalare sau alte manipulări ale circuitelor electronice. Procedură de manipulare: 1. InstalaĠia trebuie scoasă de sub tensiune. 2. Înaintea de inserarea, scoaterea sau reglarea vreunei cartele electronice, sau a altui dispozitiv intern, persoana trebuie să se lege la pământ cu banda pentru articulaĠia mâinii sau alte dispozitive de siguranĠă disponibile pentru acest scop. 3. Cartelele cu cablaje electronice imprimate trebuie transportate în ambalaje anti-electrostatice (conductoare). Cartelele se pot scoate din ambalaj, doar nemijlocit înaintea amplasării lor. Cartela demontată trebuie pusă neîntârziat în ambalajul de protecĠie în vederea transportării, a depozitării sau returnării la producător. ObservaĠii: În echipamente se găsesc adesea componente sensibile la descărcare electrostatică (ESD). Majoritatea echipamentelor moderne includ componente electronice realizate în tehnologie metal-oxid semiconductor (NMOS, SMOS, etc.) ExperienĠa a dovedit că acestea pot fi afectate sau deteriorate chiar de energii electrostatice de slabă intensitate. Componentele defectate, cu toate că în aparenĠă sunt funcĠionale, duc în timp la defecĠiuni incipiente. A-16 Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Section A Essential Instructions Brooks® Digital MFC's and MFM's Slovak Základné príkazy PreþítaĢ pred inštaláciou! Brooks Instrument svoje výrobky projektuje, vyrába a testuje takým spôsobom, aby tieto vyhoveli domácim aj medzinárodným normám. Tieto zariadenia je potrebné predpísaným spôsobom inštalovaĢ, prevádzkovaĢ a udržiavaĢ, na zabezpeþenie ich spoĐahlivej a normálnej prevádzky v celom pracovnom rozsahu. Nižšie uvedené príkazy je potrebné dodržiavaĢ a zaþleniĢ do programu bezpeþnostných predpisov v priebehu inštalácie, prevádzky a údržby výrobkov Brooks Instruments. • V záujme zabezpeþenia vyhovujúceho výkonu inštaláciu, prevádzku, programovanie, aktualizáciu a údržbu zariadení má vykonávaĢ výluþne odborne kvalifikovaný personál. • Pred inštaláciou, prevádzkou a servisu zariadení je potrebné preþítaĢ všetky príkazy. Ak táto príruþka nie je správna, tak na zadnej strane treba nájsĢ miestneho distribútora, kontaktovaĢ ho pre ćalšie informácie. Pre neskoršie informácie uschovajte príruþku. UPOZORNENIE: NeprevádzkovaĢ zariadenie v rozsahu mimo rozsahu uvedenom v prevádzkovej príruþke. Porušenie tohto oznámenia môže maĢ za následok Ģažkú ujmu na zdraví a vedie k poškodeniu zariadenia. x Ak príkazy v návode nie sú jednoznaþné, kontaktujte zástupcu Brooks Instrument na objasnenie problémov. x Dodržujte všetky upozornenia, príkazy a usmernenia uvedené na zariadení, alebo s ním dodané. x Zariadenia inštalujte podĐa návodu uvedeného v príkaze na inštaláciu, v súlade s miestnymi a národnými predpismi. Zariadenie pripojte výluþne len na vyhovujúci elektrický a tlakový zdroj x Postup: (1) Pomaly natlakujte systém. Prevádzkový ventil otvorte pomaly na zamedzenie kolísania prietoku. (2) Prekontrolujte tesnosĢ vstupného a výstupného zapojenia prietokomeru. Keć nie je presakovanie, spoje sú tesné, naplniĢ systém na prevádzkový tlak. x Pred vykonávaním servisných prác kontrolovaĢ, þi systém nie je pod tlakom. V prípade, že je potrebná výmena súþiastky, výmenu dielov, urþených Brooks Instrument musí vykonaĢ kvalifikovaná osoba. Použitie nepovolených dielov a vykonávanie nepovolených aktivít ohrozujú bezpeþnosĢ prevádzvky a majú negatívny vplyv na výkon zariadenia. Nahradenie súþiastok len podobnými komponentmi môže maĢ za následok požiar, úraz elektrickým prúdom alebo nedostatoþnú funkciu zariadenia x Všetky ochranné kryty, dvierka zariadenia majú byĢ zatvorené na zabezpeþenie ochrany proti úrazu elektrickým prúdom a proti poraneniam obsluhy. Výnimku tvorí vykonávanie údržby kvalifikovaným odborníkom. UPOZORNENIE: Pri zariadeniach s prietokom kvapalín, keć z akéhokoĐvek dôvodu je nutné uzavrieĢ vstupné a výstupné ventily, zariadenie je potrebné úplne vyprázdniĢ. Zanedbanie vypúšĢania má za následok poškodenie zariadenia s možnosĢou zranenia obsluhy z dôvodu tepelnej rozĢažnosti náplne. Európska smernica vzĢahujúca sa na tlakové zariadenia (PED) x x x x x x Všetky zariadenia s vyšším vnútorným pretlakom ako 0,5 bar (g), a väþšieho rozmeru ako 25 mm alebo 1 anglický palec, podliehajú pod Európsku smernicu vzĢahujúcu sa na tlakové nádoby (PED). Kapitola "Technické údaje" návodu na obsluhu obsahuje príkazy vzĢahujúce sa na smernicu PED. Meracie prostriedky uvedené v návode na obsluhu vyhovujú smernici 97/23/ES EÚ. Všetky prietokomery Brooks patria do 1. skupiny kvapalín. Meracie prístroje presahujúce rozmery 25 mm alebo 1 " spĎĖajú I., II., alebo III. kategóriu PED. Meracie prístroje menšie alebo rovné ako 25 mm alebo 1 " zodpovedajú zaužívanej meracej praxi (SEP). Európska smernica vzĢahujúca sa na elektromagnetickú kompatibilitu (EMC) Elektrické / elektronické zariadenia Brooks Instrument, ktoré si zaslúžili znaþku CE, úspešne splnili skúšobné testy požiadaviek elektromagnetickej kompatibility (smernica EMC þ. 2004/108/EC). Pritom treba venovaĢ zvláštnu starostlivosĢ na výber signálnych káblov zariadenia, s oznaþením CE. Kvalita signálnych káblov, káblových spojov a prípojov: Brooks Instrument ponúka vysoko kvalitné káble, ktoré spĎĖajú požiadavky kvalitatívneho zaradenia CE. Ak použijete vlastné signálne káble, majú maĢ 100%-né tienenie, s plným filtrovaním. Prípojky "kruhové" alebo tvaru "D" majú maĢ kovové tienenie. V prípade potreby treba použiĢ kovové káblové spojky k upevneniu káblového filtra. Káblový filter treba pripojiĢ ku kovovému telesu alebo k puzdru, na oboch stranách zabezpeþiĢ tienenie v kruhu 360 °. Tienenie má byĢ ukonþené uzemnením. Prípojky vedúce ku kartám podĐa noriem sú nekovové. Použité káble, pre vyhovenie predpisom CE musia maĢ 100%-né filtrovanie tienením. Tienenie má byĢ ukonþené uzemnením. Konfigurácia kontaktov: Vić priložený návod na obsluhu. . Elektrostatický výboj (ESD) UPOZORNENIE: Prístroj obsahuje súþiastky, ktoré môžu byĢ poškodené od elektrostatických nábojov. Pri montáži, odstraĖovaní alebo inej údržby vnútorných obvodových kariet je potrebné dodržiavaĢ príslušné postupy. Postup ošetrovania: 1. Zariadenie odpojiĢ od napájania. 2. Osoba vykonávajúca údržbu má byĢ uzemnená uzemĖujúcim náramkom, alebo iným, na túto prácu vyhovujúcim spôsobom pred vykonávaním inštalácie, demontáže a nastavenia obvodových kariet alebo iného vnútorného prostriedku. 3. Karty obvodov sa musia prepravovaĢ v elektricky vodivom balení. Karty sa môžu vyberaĢ z ochranného obalu výluþne len tesne pred montážou, zasunutím! Vybranú kartu okamžite treba umiestniĢ do ochranného obalu, urþeného pre dopravu, skladovanie, alebo pre spätnú prepravu do výrobného závodu. Poznámky: Existencia prvkov, ktoré sú citlivé na elektrostatické výboje (ESD) v prístroji je þastým javom. U väþšiny moderných elektronických prostriedkov sú použité prvky s technológiou oxidu kovov (NMOS, SMOS, atć.). Skúsenosti dokazujú, že aj nepatrné elektrostatické výboje poškodzujú, zniþia tieto prostriedky. Poškodené súþiastky, aj keć zdanlivo pracujú bez chyby, odkazujú na vznikajúce poruchy. A-17 Section A Essential Instructions Installation and Operation Manual Brooks® Digital MFC's and MFM's X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Slovene Osnovna navodila Najprej preberite jih Brooks Instrument tako konstruira, izdeluje in terstira svoje izdelke, da oni ustrezajo številnim domaþim in mednarodnim standardom. Te naprave se morajo ustrezno instalirati, koristiti in vzdrževati, da vsekakor delajo ustrezno normalnom podroþju funkcioniranja. Naslednjih navodil se mora držati in potrebno je vgraditi v program varstva pri delu pri instaliranju, korišþenju in vzdržavanju izdelkov proizvajalca Brooks Instrument. x Za jemstvo ustreznega uþinka naj izkljuþno strokovno osobje opravlja instaliranje, korišþenje, osveženje, programiranje in vzdrževanje izdelka. x Potrebno je prebrati vsa navodila pred instaliranjem, korišþenjem in servisiranjem izdelka. V kolikor ta priroþnik ni ustrezna publikacija, na zadnji strani poišþite lokalnega distributerja in za nadaljnje informacije stopite z njim v kontakt. Prihranite ta priroþnik za poznejše informacije. OPOMBA: Ne koristite napravo izven podroþja iz navodila za uporabo. Prekršek tega lahko privede do osebnih poškodb ali okvare naprave. x V kolikor navodila priroþnika niso enosmiselna, stopite v kontakt z zastopnikom društva Brooks Instrument, da razþistite problem. x Držite se vseh opozoril, povabil, navodil, ki so navedena na napravi ali skupaj z njim izporoþena. x Napravo instalirajte shodno navodilom in relevantnim lokalnim in nacionalnim navodilom iz navodila za instalirenje.. Izdelek spojite izkljuþno na ustrezni izvir elektrike in obskrbo tlaka. x Proces: (1) Poþasi položite sistem pod tlak. Poþasi odpirajte pogonske ventile zaradi izogibanja nihanju pretoka. (2) Preverjajte, ima li curljanja pri povezu vstopa in izstopa merilca toka. ýe ni curljanja, naplonite sistem na pogonski tlak. x Pred servisom vsekakor preverjajte, ali je pogonski vod pod tlakom. ýe je potreben rezervni del, svekakor strokovna oseba mora rokovati z rezervnimi deli odrejenimi od Brooks Instrument. Nedovoljeni rezervni deli in dejavnosti lahko vplivajo na uþinek izdelka, oziroma ugrožavajo varnostni pogon. Sprememba samo z podobnimi rezervnimi deli lahko ima za posledico požar, nevarnost elektiþnega šoka ali nedovoljno funkcioniranje. x Vsa vrata naprave svekakor morajo biti zaprta, zašþitni ovitki morajo biti na svojem mestu zaradi izogibanja šoku in osebnim poškodbam, razen, þe na njej strokovnjak opravlja dela vzdrževanja. OPOMBA: V primeru naprave za tok tekoþine, þe je iz katera koli razloga potrebno zapreti vstopne in izstopne ventile pri napravi, naprava se mora celotno izprazniti. Zamuda tega lahko provzroþi toplotno proširjenje tekoþine, kar poškoduje napravo in lahko povrzoþi osebno poškodbo. Europske smernice za naprave ohranjanja pritiska (PED) Vsaka naprava ohranjanja pritiska z notranjim pritiskom veþ od 0,5 bara (g) in veþjim od 25 mm ali 1 palca sodi pod Europskim smernicam za ohranjanje pritiska (PED). x Poglavje priroþnika „Tehniþni podatki” vsebuje navodila, ki se nanašajo na smernice PED. x Merilni instrumenti navajani v priroþniku ustrezajo smernicam EU številke 97/23/EK x Vsaki merilec pretoka Brooks sodi v skupino tekoþin številke 1. x Merilni instrumenti veþji od 25 mm ali 1 palca ustrezajo kategriji PED I, II, ali III. x Merilni instrumenti manjši od 25 mm oziroma 1 palca ali manjši sledijo sprejeti inženjeski praksi (SEP). Evropska smernica za Elektromagnetno kompatibilnost (EMC) Naprave Brooks Instrument, ki so zaslužile CE oznaþbo (elektriþni/elektronski) so uspešno izpolnile testove zahteve o elektromangnetni kompatibilnosti (št. 2004/108/EC smernice EMC) . Obenem mora se posebno pozornost posvetiti na izbiro signalnega kabla, ki se uporabljajo za naprave z oznaþbo CE. Kakaovost signalnih kablov, povezav kablov, prikljuþkov: Brooks Insturment nuja kabele visoke kakovosti, ki ustrezajo zahtevam kvalificiranja CE. V kolikor se uporbalja lastni signalni kabel, treba je izbrati, ki za 100 % senco v polni meri filtriran. Prikljuþki „D” „olika kroga” morajo biti zasenþeni kovonskom sencom. ýe bo potrebno, uporabite kovinske povezave za pritrditev filtra kabla Filtar kabla je treba prikljuþiti na kovinsko ohišje ali plašt in na obe polovici je treba senþiti v 360°. Senþenje mora završiti v ozemljitvi. Prikljuþki, ki sodijo karitcam normalno nisu kovinskik. Korišþeni kabli moraju biti filtrirani s 100 % senco, da odgovarjajo CE kvalifikaciji. Sencanje mora imat konec v ozemljitvi. Konfiguracija stika: Vidi priloženo navodilo za uporabo. Elektrostatiþno izpražnjenje (ESD) OPOZORILO: Naprava vsebuje take sestavne dele, ki so naklonjeni k poškodbi od statiþne elektrike. Treba se je držati ustreznih postopkov pri odstranjevanju, vlogu ali drugega rokovanja kartic in sredstev notranjih tokovnih krogov. Posotpek rokovanja: 1. napravo je treba izklopiti iz elektriþnega toka. 2. Osebo je treba ozemljiti zapestnim pašþekom ali z drugim varnostnim in za ta namen primernim sredstvom preden bi instalirala, jemala, ali nastavila kartico za tokovni krog ali drugo notranjo opremo. 3. Tiskane kartice tokovnega kroga je treba izporoþiti v konduktivni embalaži. Karte so odstranjive izkljuþno neposredno pred vlogom iz zašþitne embalaže ven. Izjemljeno kartico nemudoma staviti v zašþitno embalažo za gibanje, skladišþenje ali pošiljanje nazaj. Opombe: Nije poseben pojav, da se v napravi nahajajo obþutljivi sestavni deli na elektrostatiþno pražnjenje (ESD). V veüem delu modernih elektronskih sredstev nahajajo se sestavni deli na kovinsko oksidno tehnologijo (NMOS, SMOS itd..). Izkustva potrjujejo, da majhna statiþna elektrika more poškodovati ali uniþiti ta sredstva. Oškodovani rezervni deli, þe na videz dobro delajo, nakažejo zaþetno napako. A-18 Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Section A Essential Instructions Brooks® Digital MFC's and MFM's Spanish Instrucciones básicas ¡Léalos primero! El Brooks Instrument proyecta, fabrica y prueba sus productos de manera que éstos respondan a numerosas normas nacionales e internacionales. Dichas instalaciones deben ser emplazadas, operadas y mantenidas adecuadamente, para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento. Las siguientes instrucciones deben cumplirse y incorporadas en su programa de seguridad cuando instalando, operando y mantenimiento los productos Brooks Instrument. x Para asegurar el adecuado rendimiento, para instalar, operar, actualizar, programar y mantener tiene que realizarse exclusivamente por una persona calificada. x Antes de la instalación, operación y servicio del producto leer todas las respectivas instrucciones. Si el presente manual no es la adecuada publicación, busque al distribuidor local que figura en la contraportada y póngase en contacto con él para obtener informaciones. Guarde el presente manual para tener informaciones también en el futuro. ATENCIÓN: No haga funcionar los equipos fuera del rango indicado en las instrucciones de funcionamiento. El incumplimiento de estas últimas puede conducir a graves daños personales o a la avería del equipo. x Si las instrucciones del manual no son evidentes, póngase en contacto con el representante de Brooks Instrument para aclarar el problema x Observar todas las alertas, advertencias e instrucciones indicadas en el equipo o suministradas con el mismo. x Instale su equipo en conformidad con las recomendaciones indicadas en las respectivas instrucciones de instalación y con las pautas de las normas vigentes locales e internacionales. Conectar el producto exclusivamente a la adecuada fuente eléctrica y presión. x Proceso: (1) Colocar lentamente flujo en el sistema. Abrir lentamente las válvulas de proceso para evitar oscilación del flujo. (2) Verificar si hay fuga alrededor de las conexiones de entrada y salida del flujómetro, Si no hay, llenar el sistema con la presión de operación. x Antes de efectuar el servicio, verificar si hay presión o no en la tubería de la red. Si se requiere realizar un recambio de piezas, solamente el personal calificado puede manipular las piezas de repuesto determinadas por Brooks Instrument Las piezas y operaciones no autorizadas pueden afectar el rendimiento del producto o arriesgar el funcionamiento seguro. El recambio realizado con piezas sólo similares pueden traer como consecuencias incendios, choques eléctricos o funcionamiento bajo. x Todas las puertas de la instalación deben estar cerradas, las cubiertas de protección tienen que hallarse en el debido sitio con el fin de evitar los daños personales y los choques eléctricos, salvo cuando un especialista efectúa el mantenimiento. ADVERTENCIA: En caso de instalaciones que circulen líquido, si por cualquier razón se hubiera de cerrar las válvulas de entrada y salida situadas al lado del equipo, dichas instalaciones deberán ser completamente vaciadas. La omisión de esto último puede provocar la dilatación térmica del líquido, lo que puede dañar al equipo y conducir a daños personales. Directriz Europea de los Equipos de Presión (PED) Todos los equipos de presión, con una presión interna que supere a 0,5 bar (g) con tamaño mayor a 25 mm o 1 pulgada entran el ámbito de la Directriz Europea de los Equipos de Presión (PED). x El capítulo Datos Técnicos del manual incluye las instrucciones respecto a las directivas de PED x Los instrumentos de medición indicados en el Manual responden a las EN directivas 97/23/EC. x Todos los flujómetros Brooks pertenecen a la categoría 1 del grupo de fluidos. x Los instrumentos de medición más grandes que 25 mm o 1 pulgada están en conformidad con las categorías I, II o III de PED x Los instrumentos de medición más pequeños que 25 mm o 1 pulgada siguen la Práctica Aceptada de Ingeniería (SEP). Directriz Europea respecto a la Compatibilidad Electromagnética (EMC) Las instalaciones de Brooks Instrument (eléctricas/electrónicas) merecedores de la categoría CE cumplieron con éxito las pruebas que verifican las exigencias de la compatibilidad electromagnética (directiva de EMC 2004/108/EC). Al mismo tiempo se ha de prestar una especial atención en la selección de los cables de señal, utilizados con los equipos marcados con CE. Calidad de los cables de señal, piezas de unión de cable y conectores: El Brooks Instrument ofrece cables de alta calidad, que responden a los requerimientos de calificación CE. Si se utiliza cable propio de la firma, se ha de elegir uno que sea completamente filtrado con blindaje de 100%. Las piezas de unión de forma „D” o „circular” deben ser blindadas mediante blindaje metálica. Si es necesario, aplicar piezas de unión de metal para sujetar el filtro de cable. Conectar el filtro de cable a la caja o manguito de metal blindándolo en ambas caras en 360°. El blindaje debe terminar en tierra. Los conectores que pertenecen a las tarjetas normalmente no son metalizados. Los cables utilizados deben ser filtrados con una blindaje de 100% para responder a la calificación CE. El blindaje debe terminarse en tierra. Configuración de contacto: Véase Instrucciones de operación adjuntas. Descarga Electroestática (ESD) PRECAUCIÓN: El aparato incluye piezas electrónicas que son susceptibles a los daños provocados por la electricidad estática. Observar los adecuados procesos para remover, instalar o manipular las tareas y medios de circuitos eléctricos internos Proceso de operación: 1. Desconectar la fuente eléctrica de la unidad. 2. La persona debe ponerse a tierra mediante una palanca acodada o por otro medio seguro y apropiado para dicho fin antes de instalar, sacar o ajustar el circuito impreso eléctrico u otro medio interno. 3. El circuito impreso debe ser transportado en embalaje conductivo. Las tarjetas no pueden sacarse de la cubierta protectora exclusivamente directamente antes de la instalación. Las tarjetas desmontadas deben colocarse sin tardar en el embalaje protector utilizado para manipulación, almacenamiento o devolución a la fábrica. Notas: Esto equipo no es el único contenido de piezas susceptibles a la descarga electroestática (ESD). En la mayoría de los medios electrónicos modernos se encuentran piezas fabricadas por tecnología de óxido metálico. (NMOS, SMOS etc.). Las experiencias confirman que incluso una mínima electricidad estática puede dañar o destruir dichos medios. Las piezas averiadas, aunque funcionen aparentemente bien, indican una falla inicial. A-19 Section A Essential Instructions Brooks® Digital MFC's and MFM's Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Swedish Väsentliga anvisningar. Läs detta innan du fortsätter ! Brooks Instrument konstruerar, tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder. Dessa produkter måste installeras på rätt sätt, handhas och underhållas för att de skall fungera kontinuerligt enligt deras normala specifikation. De följande anvisningarna bör följas och integreras till Ert säkerhetsprogram varje gång när Brooks Instruments produkter installeras, handhas och underhålls. x För att garantera angiven funktion, använd kvalificerad personal till att installera, handha, uppgradera, programmera och serva produkten. x Läs alla instruktioner innan produkten installeras, startas upp och underhålls. Om du finner att denna instruktionshandbok inte är den rätta instruktionsboken, titta på i slutet av pärmen för information om hur man kan kontakta lokala representanter. Spara denna instruktions manual för senare behov. VARNING: Kör inte detta instrument utanför dess specifikationer som är angiven i Instruktionsboken. Undvikande att ta denna varning kan leda till allvarliga personliga skador och / eller skada utrustningen. x Om du inte förstår någon av dessa instruktioner, kontakta din representant för Brooks Instrument för klarläggande. x Följ alla varningar och instruktioner som följer med leveransen av denna produkt. x Installera din utrustning på sättet som anges i den gällande handbokens installationsanvisningar och enligt tillämpliga lokala och nationella föreskrifter. Koppla varje produkt till föreskriven ström- och tryckkällan. x Igångsättning: (1) Koppla långsamt på flöde i systemet. Öppna processventiler sakta för att undvika för höga flöden. (2) Kontrollera läckor vid mätarens anslutningar för in- och utlopp. Om inget läckage förekommer, kör systemet upp till drifttrycket. x Kontrollera att processledningens tryck är bortkopplat före service. I fall det behöves kompletteras med nya delar, se till att komponenter föreskrivna av Brooks Instrument används. Samt att kvalificerad personal utför arbetet. Ej rekommenderade komponenter och åtgärder kan påverka produktens prestanda och sätta din driftsäkerhet på spel. ”Felaktiga” ersättningar kan orsaka eld, elektriska skador samt felaktig funktion. x Se till att anordningens kåpor och skyddslock ligger på sin plats med syfte att förebygga elektriska kontakt och personliga skador; det enda undantag gäller när underhållsarbete utförs av kvalificerad personal. VARNING: I fall av - flödesmätare / regulatorer för vätskor: Ifall ventiler före och efter skall stängas av, måste alla ledningar tömmas på all vätska. Att ej tömma ledningar alt koppla bort trycket kan göra så att vätskans värmeutvidgning kan spräcka / skada utrustningen och orsaka personliga skador. European Pressure Equipment Directive (PED) - (Rådets Direktiv 99/36/EG av den 29 april 1999[1] om transportabla tryckbärande anordningar) Alla utrustning för tryck med ett tryck över 0.5 Bar(g) bar och större demensioner än 25 mm eller 1" (inch) faller under Tryck direktiv 99/36/EG av den 29 april 1999[1] om transportabla tryckbärande anordningar - PED. x Den här Instruktionsbokens Sektion ” Specifikation” innehåller anvisningar gällande PED Direktivet. x Mätare som beskrivs i denna Instruktionsbok är i överensstämmelse med EN Direktivet 97/23/EC. x Brooks Instruments alla flödesmätare faller under flödesgrupp nr. I. x Mätare som är större än 25 mm eller 1" (inch) överensstämmer med PED kategorier I, II eller III. x Mätare på 25mm eller 1" (inch) eller mindre faller under Sound Engineering Practice (SEP) (God Teknisk Praxis). European Electromagnetic Compatibility (EMC) - Elektromagnetisk kompatibilitet Brooks Instrument (elektriska/elektroniska) CE-märkta anordningar har redan genomgått ett framgångsrikt prov enligt regleringar under Electromagnetic Compatibility (EMC directive 2004/108/EC). Man måstre dock ägna särskild uppmärksamhet till valet av signalkabeln som skall används för CE-märkta anordningar. Signalkablars, packboxars och kontakdons kvalitet: Brooks Instrument levererar högkvalitativa kablar som överensstämmer med specifikation för CE-intygade produkter. Om man använder sin egen signalkabel, då bör man använda en kabel som är fullständigt skärmad med en 100% avskärmning. “D” eller “Cirkelformiga” kontakdon skall vara skärmade med metalliska avskärmningar. Om det är användbart, bör metallpackboxar som ger en bra fastspänning för kabelskärmar användas. Kabelavsärmningen måste kopplas till den metalliska skärmande anordningen eller packboxen och skärmas vid båda ändar runt omkring. Avskärmningens avspänning måste jordas. Card Edge Kontaktdon är icke metalliska. För att överensstämma med krav på CE-intyg, skall de kablarna som används vara skärmade med 100% skärmning. Skärmningen måste jordas. Vad gäller stiftkonfigurationen: Se den bifogade Instruktionshandboken. ESD (Elektrostatiska urladdningar) OBS: Denna utrustning innehåller elektroniska komponenter som är lättpåverkade av skada orsakad av statisk elektricitet. Lämplig hanteringsprocedur måste följas när man tar bort, installerar eller på något annat sätt hanterar inre kretskort eller andra anordningar. 1. Ström till enheten måste kopplas från. 2. Personalen måste jordas med hjälp av ett armband eller något annat säkert medel innan något kretskort eller andra inre anordningar installerras, tas bort eller justeras. 3. Kretskort måste transporteras i en speciell förpackning för elektronik. Kort skall ej tas bort från deras skydsskåpa innan man skall installera dem. De borttagna korten bör omedelbart läggas i speciell förpackning för transport, lagring eller återlämnande till fabriken. Anmärkningar: Dessa instrument är ej unika vad gäller dess ESD (Elektrostatiska urladdningar) - känsliga komponenter. De flesta samtida konstruktioner innehåller komponenter som utnyttjar metalloxid teknologi (NMOS, SMOS, o.s.v.). Erfarenhet har visat att även små mängder av statisk elektricitet kan skada eller förstöra dess komponenter. Skadade komponenter - även om de annars verkar fungera ordentligt – har ofta en kortare livslängd. . A-20 Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 Brooks® Digital MFC's & MFM's THIS PAGE WAS INTENTIONALLY LEFT BLANK Brooks® Digital MFC's & MFM's Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG June, 2014 LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller. Products purchased by Seller from a third party for resale to Buyer (“Resale Products”) shall carry only the warranty extended by the original manufacturer. All replacements or repairs necessitated by inadequate preventive maintenance, or by normal wear and usage, or by fault of Buyer, or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions, or by abuse, accident, alteration, misuse, improper installation, modification, repair, storage or handling, or any other cause not the fault of Seller are not covered by this limited warranty, and shall be at Buyer’s expense. Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty period or ninety (90) days, whichever is longer. This limited warranty is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller. BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards. Visit www.BrooksInstrument.com to locate the service location nearest to you. START-UP SERVICE AND IN-SITU CALIBRATION Brooks Instrument can provide start-up service prior to operation when required. For some process applications, where ISO-9001 Quality Certification is important, it is mandatory to verify and/or (re)calibrate the products periodically. In many cases this service can be provided under in-situ conditions, and the results will be traceable to the relevant international quality standards. CUSTOMER SEMINARS AND TRAINING Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons. Please contact your nearest sales representative for more details. HELP DESK In case you need technical assistance: 1 888 554 FLOW Americas Europe +31 (0) 318 549 290 Asia +81 (0) 3 5633 7100 Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice. TRADEMARKS Brooks ....................................................... Brooks Instrument, LLC Brooks Service Suite ................................ Brooks Instrument, LLC Brooks Service Tool .................................. Brooks Instrument, LLC DeviceNet .................... Open DeviceNet Vendors Association, Inc HART ...................................... HART Communications Foundation Kalrez .......................................... DuPont Performance Elastomers ODVA .......................... Open DeviceNet Vendors Association, Inc. Profibus .................................................. PROFIBUS Insternational Teflon ............................................. E.I. DuPont de Nemours & Co. VCO .................................................................................. Cajon Co. VCR .................................................................................. Cajon Co. Viton ............................................ DuPont Performance Elastomers
