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Download Digital PECVD Machine Design and Construction
Transcript
Figure 4.1. Frame used to build the PECVD machine. The chamber was purchased pre-owned and required corrosion removal and minor refurbishing. Once the chamber was set into the stand, the additional plumbing was then attached to connect the chamber to the pump as well as the vent valve. This connect is shown in figure 4.2. Plasma Project (ECE4007L01) 11
