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B 30
Installing the machine on the site
1 - Precautions
Whenever handling the machine and the associated pumps, use the equipment provided and
observe the instructions in the user's manual.
Connections
The inlets and outlets for the different energy sources must be connected correctly in order to ensure
optimum machine operation during productive use.
Commissioning
The machine is started up, tested and controlled by the ALCATEL field service engineer. It is then the
responsibility of the user to respect the instructions contained in the user's manual relating to the
operation and preventive maintenance of machines.
Note: commissioning does not cover the connection of the different energy sources
(inlets, outlets) to the machine and associated pumps. A simple validation is
performed.
2 - Environmental conditions
Parameter
ams01556 - Edition 03 – September, 06
„
Ambient temperature
Conditions
In use : 18 °C < T < 23 °C *
During storage : 12 °C < T < 30 °C
„
Relative humidity
In use : 20 % < H < 80 %
During storage : 20 % < H < 85 %
„
Clean room class
In use :10 < p < 1000
During storage : p ≤ 10 000
„
CE conformity
YES
* : Respect these conditions imperatively.
Alcatel Vacuum Technology France – AMS 200 User’s manual
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B 30
Installing the machine on the site
3 - Height requirements
In order to insert the machine lower strip, the minimal height requested between the machine body
and the floor is 105 mm.
„
Adjust the four leveling stands under the machine until you obtain this minimal height.
„
Make sure that the machine body is horizontal.
„
Ensure that there is a clearance of 400 mm above the machine.
Do not place anything on the machine. The ventilation grills must remain clear.
ams01556 - Edition 03 – September, 06
2003
2080
Installation through the wall: 1990 + 2
400
CLEARANCE FOR MAINTENANCE
ACCESS TO CHAMBER
AMS 200
front view
105 mini
Note : all dimensions are in mm.
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Installing the machine on the site
4 - Installation area
The operator areas are the clearance required by operators to:
- load/unload the wafers
- control the machine
The technical areas are the clearance required by technicians to:
- perform the different connections (electrical, gas, utilities and vacuum)
- install the chiller
- install the external pumps
- install a laminar flow unit above the machine
The maintenance areas are the clearance required by technicians to:
- open both the hinged lateral panels and doors
- access to the programmable PLC and circuit breakers
- access to the various utilities
- permit the maintenance of the process chamber
- access the maintenance keyboard (optional)
- perform electrical supervision.
ams01556 - Edition 03 – September, 06
The plate holding the robot is placed under the laminar flow of the clean room to avoid any
pollution of wafers.
The machine can be placed across the wall. The whole machine is then installed in the grey room.
Weight of the machine = 1200 kg
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B 30
Installing the machine on the site
800
Grey
room
External pumps installation area
1200
750
725
1265
Chiller installation area
Utilities
maintenance
area
700
160
Access area to
electrical and gas
connections, PLC and
circuit breakers
360
Mains supply
Electrical and
gas connections
700
Electrical
supervision area
Utilities and vacuum
connections
ams01556 - Edition 03 – September, 06
1790
700
700
Process chamber
maintenance
area
Maintenance
supervision
area
Laminar flow area
Wall
Control area
Loading area
Operator
areas
Technical areas
Maintenance areas
1300
All dimensions are
specified in mm.
Alcatel Vacuum Technology France – AMS 200 User’s manual
Threaded M8 holes for
earthquake attachment
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Installing the machine on the site
5 – Earthquake attachment
ams01556 - Edition 03 – September, 06
Ten M8 holes have been threaded on the machine frame for earthquake attachment (OPTION).
Alcatel Vacuum Technology France – AMS 200 User’s manual
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