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Installation and Operation Manual
Section 5: Specification
MF Smart Series
X-TMF-MfS-MFC-eng
PN 541-C-061-AAG
November, 2008
Power+15Vdc to +28Vdc (use only 24 Vdc for NO
requirements valves and for use of MF51) +24Vdc only for all
Profibus units
Power ConsumptionModels MF60 S, MF61 S, MF63 S and MF64 S
Mass Flow Meters for + 24 Vdc (± 10%) at 80 mA
for + 15 Vdc (± 5%) at 90 mA
Also applicable for Profibus
Power ConsumptionModels MF50 S, MF51 S and MF53 S
Mass Flowfor + 24 Vdc (± 10%) at 140 mA
Controllersfor + 15 Vdc (± 10%) at 185 mA
Also applicable for Profibus
NOTE: With valve override function activated:
the total power consumption specifications are:
for + 15 Vdc at 285 mA or
for + 24 Vdc at 370 mA
Also applicable for Profibus
TemperatureBoth ambient and process gas: 0‑70 °C.
SecurityTo prevent “unauthorized” setting or reranging of
span or zero, these functions are only accessible
via the Brooks Smart Control, model 0160, or
using Smart DDE, model 0162.
Leak IntegrityOutboard: 1 x 10-9 mbar l/sec. Helium
Warm‑up time< 10 minutes; 1% F.S. accuracy.
Performance within specifications: 45 minutes.
DampingDamping from 0 to 10 seconds is possible for
(not for Profibus)
the flow output signal (default setting is 0.5 sec.)
ResponseStandard response of the flow output signal 1 sec.
(Meters)Response of better than 0.2 seconds on request.
Settling Time Standard 1 sec. Settling time or up to 0.2 seconds
(Controllers) is possible (to within 2% full scale of final value)
for any command (Set point) step; virtually
without any dead time, over- or undershoot.
Model MF53S 3 sec. (1 sec. on request).
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