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EC9810 O3 ANALYZER SERVICE MANUAL
7.
Set the PUMP SPEED COARSE to 99 and press Enter> (↵).
8.
Allow approximately 1 minute for the pressure to drop to a stable reading.
This reading should be typically 100 to 200 torr lower than the ambient
pressure (depending upon the capacity of the pump).
9.
Set this reading (in TORR) as PRESSURE 1 LOW in the PRESSURE
CALIBRATION MENU and press Enter> (↵).
10. Disconnect the pressure transducer from the inlet and turn the pump OFF.
11. To verify that the pressure transducers on the standard flow control board are
calibrated, view the GAS PRESSURE reading in the PRESSURE CALIBRATION
MENU. it should be at ambient pressure +/- 2 TORR.
This completes the pressure transducer calibration procedure.
3.5.1.3 Flow Calibration
1.
From the HIDDEN MENU, select the FLOW CALIBRATION MENU. The menu of
Figure 18 should be displayed.
FLOW CALIBRATION MENU
DESIRED FLOW
FLOW CONTROL ZERO
FLOW TRANSDUCER DF
CONTROL LOOP
VALVE SEQUENCING
FLOW ZERO POINT
FLOW SPAN POINT
PUMP SPEED COARSE
PUMP SPEED FINE
GAS PRESSURE
GAS FLOW
0.50 SLPM
81
CANCEL
ENABLED
ON
CANCEL
0.500 SLPM
28
7
710.0 TORR
0.500 SLPM
Figure 18. Flow Calibration Menu for Standard flow block
2.
Verify the pump is turned OFF .and the CONTROL LOOP is DISABLED in the
FLOW CALIBRATION MENU.
3.
Load the linearization table into the flow control board EEPROM by setting
FLOW TRANSDUCER DF to SET and pressing Enter> (↵). The linearization
table contains the following parameters:
Flow points: 0, 0.5, 1.75, 2.5, 3.25, 3.75.
Voltage points: 0, 0.13, 0.91, 1.783, 2.5, 3.478.
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98107601 Rev D