Download Digital Mass Flow Controller User's Manual

Chapter 7. SPECIFICATIONS
● MQV9005/9020
Model No.
Item
MQV9005
MQV9020
Valve type
Proportional solenoid valve
Valve operation
Normally closed when de-energized (N.C.)
Standard full-scale flow rate
*1
Pressure
20 L/min(standard)
Air/nitrogen (N2), oxygen (O2), argon (Ar)
Gas must be dry and not contain corrosive components (chlorine,
sulfur, acid).
The gas must also be clean, not containing dust or oil mist.
Gas types
Control
5 mL/min(standard)
Range
2 to 100% FS (see “Gas type and
control range” table (page 7-9))
1 to 100% FS (see “Gas type and
control range” table (page 7-9))
Valve output update cycle
5ms
Response
(at standard differential
pressure)
Within 0.3s at setting ±2% FS (typ.)
(Control starts from the fully closed status or the setting is changed
during control.)
Accuracy
(at standard temperature
and differential pressure,
Q: flow rate)
*2
±1%FS
Repeatability
(Q: flow rate)
±0.5%
Temperature characteristics
0.06% FS max. per 1°C
Pressure characteristics
0.2% FS max. per 100kPa
Standard differential pressure 100kPa (Inlet pressure: 100kPa (gauge), outlet pressure: 0kPa
*3 (gauge))
Required differential pressure
*4
Operating differential
pressure range
30kPa
300kPa max.
*5
Pressure resistance
(allowable inlet pressure)
Temperature Standard operating
temperature
5kPa
1MPa (gauge)
+23°C
*3
Allowable operating
temperature range
–10 to +60°C
Allowable storage
temperature range
–20 to +70°C
Humidity
Allowable operating humidity
range
10 to 90% RH (condensation not allowed)
External
leaks
Helium leak rate
Within 1 x 10-6 Pa·m3/s
Flow rate
setup
Setup method
(1) Key operation
(2) External analog input
(3) RS-485 communications (3 wire-system)
Setup resolution
See “Gas type and control range” table (page 7-9).
External analog input
Input range: 0 to 5Vdc/1 to 5Vdc/0 to 20mA/4 to 20mA (switchable)
Input impedance: 1MΩ ± 10%
7-2