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Chapter 9: Cleanroom Robots
9.1 Connections
Figure 9-2. Cleanroom Connections
9.2 Requirements
Table 9-2. Cleanroom Robot Requirements
Vacuum
source
0.80 m 3/min (28 ft3/min) minimum volumetric flow rate
6 mm of water (0.2 inches of water) differential pressure measured between the robot
and the vacuum source
3/4 inch NPT female thread pipe fitting at the back of the robot
Compressed
air source
Clean, dry, oil-free compressed air
75 psi (0.52 MPa)
1.4 SCFM (.04 m 3/min.) flow rate
3/8 inch NPT female thread pipe fitting at the back of the robot, flow regulator not
supplied
Quill inside
diameter
The inside diameter of the quill must be plugged by the user’s end-effector in order for
sufficient vacuum to develop in the outer link.
9.3 Exclusions and Incompatibilities
Table 9-3. Internally Mounted Hand Valves
Installation
considerations
The internal air line normally used to supply the internally-mounted hand valves
(Adept Option Kit P/N 02853-000) is instead used to provide vacuum to the
bellows/outer link. One of the passive 6 mm user air lines would need to be used
instead.
Performance
considerations
The air exhausting from the internally-mounted hand valves (Adept Option Kit P/N
02853-000) may be of sufficient quantity/ quality to cause the robot to exceed Class
10 Particulate Limits.
Recommendation For these reasons, Adept recommends mounting hand valves externally.
Adept Cobra ePLC600/800 Robot, User’s Guide, Rev A
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