Download Two-Axis/Four-Axis Stage Controller

■ SHOT-302GS／304GS User’s Manual ■
mechanical origin for the stage on each axis.
[Options]
S: 1 to 500000PPS
F: 1 to 500000PPS
R: 0 to 1000ms
63/63) COMM/ACK: Choose the communication protocol used when communicating with the computer
(higher-level host)
Specify whether the controller will return OK/NG in response to command signals sent from the
computer in HOST (COMPUTER) mode.
[Options]
MAIN: New system (return OK/NG when using RS232C or GP-IB,USB
「*0」
interface)
SUB: Old system (do not return OK/NG when using RS232C or GPIB,USB interface)
「*1」
64/64) CONT1: Set the control method for the first axis
65/65) CONT2: Set the control method for the second axis
66/66) CONT3: Set the control method for the third axis
(304GS only)
67/67) CONT4: Set the control method for the fourth axis (304GS only)
Set the control method (open loop or closed loop method) for each axis.
[Options]
OPEN: open loop control method
「*0」
CLOSE: closed loop control method
「*1」
68/68) INPOS1: set the in-position range of the first axis when the closed loop method is selected
69/69) INPOS2: set the in-position range of the second axis when the closed loop method is selected
70/70) INPOS3: set the in-position range of the third axis when the closed loop method is selected
(304GS only)
71/71) INPOS4: set the in-position range of the fourth axis when the closed loop method is selected
(304GS only)
Set the in-position range (range of the positioning stop at the time of positioning) for each axis when the
closed loop is selected
[ range] 0-99 degrees
"Ideology of the in-position range (0-99)"
The value specified for the in-position range completes the positioning if the travel reaches this range
against your travel instruction.
The range of 0-99 was determined based on Scale resolution, the precision per pulse from the glassscale.
<Examples : Scale resolution → 0.1μm>
Set value = 0
range from 0-+0.1μm
Set value = 1
1 x ±0.1 = range of ±0.1μm
Set value = 99 99 x ±0.1 = range of ±9.9μm
72/72) EMG MT EXCT1: set the excitation ON/OFF of the first axis when the emergency stop
73/73) EMG MT EXCT2: set the excitation ON/OFF of the second axis when the emergency stop
74/74) EMG MT EXCT3: set the excitation ON/OFF of the third axis when the emergency stop
(304GS only)
75/75) EMG MT EXCT4: set the excitation ON/OFF of the fourth axis when the emergency stop
(304GS only)
20
Tel:+81-6-6307-4835
Fax:+81-6-6307-4834
E-mail：[email protected]
Osaka branch