Download 9700A HV and 9700A LV Compressors Installation, Operation, and

Introduction
Multiple Cryo-Torr Cryopump Connections
9700A Compressors
User Manual
Multiple Cryo-Torr Cryopump Connections
The Cryo-Torr Interface permits the connection of multiple Cryo-Torr Cryopumps to
one 9700A Compressor as shown in Figure 1-8. The actual number of Cryo-Torr
Pumps that can be connected to the 9700A Compressor depends upon the process
application and the type of Cryo-Torr pumps required.
NOTE: Refer to Appendix A to consult with your local Brooks Automation Customer Support Center for information on specific compressor/cryopump applications.
Refer to Chapter 4: Installation for more information on connecting single or multiple
Cryo-Torr Cryopumps to the 9700A Compressor.
SUPPLY
RETURN
REMOTE
CRYO-TORR CRYOPUMP POWER CABLE
COOLING WATER
Figure 1-8: 9700A Compressor Connected to Multiple Cryo-Torr Cryopumps
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Brooks Automation
8040636 Revision B