Download MF Type User`s Manual

YAMAHA LINEAR MOTOR ROBOTS PHASER series
MF Type
User s Manual
EUC0127500
Ver. 5.00
E37
General Contents
General Contents
Introduction
Chapter 1 Using the Robot Safely
1-1
Safety information
1-1
1-2
Essential precautions
1-3
1-3
Industrial robot operating and maintenance personnel 1-9
1-4
Robot safety functions
1-10
1-5
Safety measures for the system
1-11
1-6
Trial operation
1-11
1-7
Work within the safety enclosure
1-12
1-8
Automatic operation
1-13
1-9
Warranty
1-14
Chapter 2 Product Overview
2-1
Checking the product
2-1
2-2
Robot part names
2-2
2-3
Robot internal structure
2-3
Chapter 3 Installation and connections
3-1
Carrying the robot
3-1
3-2
Robot installation conditions
3-2
3-2-1
3-2-2
Installation environments
Installation base
3-3
Installing the robot
3-4
Installing an external leakage breaker and circuit protector 3-7
3-5
Protective bonding
3-8
3-6
Connecting the robot to the controller
3-9
3-2
3-3
3-5
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3-7
Precautions during user wiring and air tube installation 3-12
General Contents
Chapter 4 Robot operation
4-1
Notes on robot operation
4-1
4-1-1
4-1-2
4-1-3
Magnetic pole estimation action
Absolute search (semi-absolute specification)
Return to origin (incremental specification)
4-2
Setting operating conditions
4-2-1
4-2-2
4-2-3
Process flow for setting operating conditions
Duty monitor
Acceleration setting
4-3
Pulse train control (SRCP, SRCP30)
4-3-1
4-3-2
Acceleration/deceleration and position proportional gain 4-8
Setting the maximum speed
4-10
4-1
4-1
4-2
4-4
4-4
4-5
4-6
4-8
Chapter 5 Periodic inspection and maintenance
5-1
Before beginning work
5-1
5-2
Periodic inspection
5-4
5-2-1
5-2-2
5-2-3
5-2-4
5-2-5
Daily inspection
Three-month inspection
Six-month inspection
Three-year inspection
Greasing to the linear guides
5-3
Replacing the shutter
5-10
5-4
Replacing the shutter roller
5-12
5-5
Maintenance parts
5-15
5-4
5-5
5-6
5-6
5-7
Chapter 6 Troubleshooting
ii
6-1
If you suspect trouble
6-1
6-2
Feedback error
6-1
6-3
Magnetic pole detection error
6-3
6-4
Overload
6-4
6-5
Position deviation error
6-5
Chapter 7 Specifications
Main unit
7-1
7-1-1
7-1-2
7-1-3
7-1-4
7-1-5
7-1-6
7-1-7
MF7
MF15
MF20
MF30
MF50
MF75
MF100
7-1
7-8
7-14
7-20
7-26
7-30
7-34
7-2
Robot connector (I/O signal connector)
7-38
7-3
Robot connector (motor connector)
7-38
7-4
Robot cable (I/O signal wires)
7-39
7-5
Robot cable (motor wires)
7-39
General Contents
7-1
iii
MEMO
iv
Introduction
• This user's manual should be used with the robot and considered an integral part of
it. When the robot is moved, transferred or sold, send this manual to the new user
along with the robot. Be sure to explain to the new user the need to read through this
manual.
• Specifications of robot models other than standard models may be omitted in this
manual if they are common to those of standard models. In this case, refer to the
specifications of standard models.
• For details on specific operation of the robot, refer to the separate user’s manual for
the robot controller being used.
NOTES
◆The contents of this manual are subject to change without prior notice.
◆While every effort has been made to ensure the contents of this manual are
correct, please contact us if you find any part of this manual to be unclear,
confusing or inaccurate.
YAMAHA MOTOR CO., LTD.
IM Operations
Introduction
The YAMAHA single-axis robots MF type is an industrial robot that uses the semi-absolute
positioning method as standard and has improved ease of use, resistance to environmental
conditions, and maintenance work. A wide varaiety of product lineup allows you to select
the desired robot model that best matches your application.
This user's manual describes the safety measures, handling, adjustment and maintenance
of the MF type robots for correct, safe and effective use.
Be sure to read this manual carefully before installing the MF type robots. Even after you
have read this manual, keep it in a safe and convenient place for future reference.
MEMO
Chapter 1
Using the Robot Safely
Contents
1-1 Safety information
1-1
1-2 Essential precautions
1-3
1-3 Industrial robot operating and maintenance personnel 1-9
1-4 Robot safety functions
1-10
1-5 Safety measures for the system
1-11
1-6 Trial operation
1-11
1-7 Work within the safety enclosure
1-12
1-8 Automatic operation
1-13
1-9 Warranty
1-14
1-1 Safety information
1-1 Safety information
Warning symbols and signal words used in this manual are classified as explained below.
Make sure that you fully understand the meaning of each symbol and comply with the
instructions.
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DANGER
Failure to follow DANGER instructions will result in severe injury or
death to the robot operator, bystanders or persons inspecting or
repairing the robot.
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WARNING
Failure to follow WARNING instructions could result in severe injury
or death to the robot operator, bystanders or persons inspecting
or repairing the robot.
c
CAUTION
Failure to follow CAUTION instructions may result in injury to the robot
operator, bystanders or persons inspecting or repairing the robot, or
damage to the robot and/or robot controller.
n
NOTE
Explains the key point in the operation in a simple and clear manner.
Reference
Gives useful information related to the robot operation.
1-1
1
Using the Robot Safely
Industrial robots are highly programmable, mechanical devices that provide a large degree
of freedom when performing various manipulative tasks. To ensure correct and safe use of
YAMAHA industrial robots, carefully read this manual and make yourself well acquainted
with the contents. FOLLOW THE WARNINGS, CAUTIONS AND INSTRUCTIONS included
in this manual. Failure to take necessary safety measures or mishandling due to not
following the instructions in this manual may result in trouble or damage to the robot and
injury to personnel (robot operator or service personnel) including fatal accidents.
1-1 Safety information
1
Refer to the user's manual by any of the following methods to operate or adjust the robot
safely and correctly.
1.Operate or adjust the robot while referring to the printed version of the user's
manual (available for an additional fee).
Using the Robot Safely
2.Operate or adjust the robot while viewing the CD-ROM version of the user's
manual on your computer screen.
3.Operate or adjust the robot while referring to a printout of the necessary pages
from the CD-ROM version of the user's manual.
It is not possible to list all safety items in detail within the limited space of
this manual. So it is essential that the user have a full knowledge of basic
safety rules and also that the operator makes correct judgments on safety
procedures during operation.
For specific safety information and standards, refer to the applicable local
regulations and comply with the instructions. This manual and warning labels
supplied with or attached to the robot are written in English. Unless the
robot operators or service personnel understand English, do not permit them
to handle the robot.
* Cautions regarding the official language of EU countries
For equipment that will be installed in EU countries, the language used for the
user's manuals, CE declarations, and operation screen characters is English only.
Warning labels only have pictograms or else include warning messages in English.
In the latter case, Japanese messages might be added.
1-2
1-2 Essential precautions
1-2 Essential precautions
(1) Obser ve the following cautions during automatic operation.
• Install a safeguard (protective enclosure) to keep any person from entering within
the movement range of the robot and suffering injury due to being struck by
moving parts.
• Install a safety interlock that triggers emergency stop when the door or panel is
opened.
• Install safeguards so that no one can enter inside except from doors or panels
equipped with safety interlocks.
• Warning labels 1 are supplied with the robot and should be affixed to conspicuous
spots on doors or panels equipped with safety interlocks.
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DANGER
Serious injury or death will result from impact with moving robot.
• Keep outside of guard during operation.
• Lock out power before approaching robot.
Warning label 1
DANGER
Serious injury or death
will result from impact
with moving robot.
• Keep outside of guard
during operation.
• Lock out power before
approaching robot.
(2) Use caution to prevent hands or fingers from being pinched or crushed.
Warning label 2 is affixed to the robot. Use caution to prevent hands or fingers from
being pinched or crushed by the moving parts when carrying the robot or during
teaching.
(The labels for the MF7 are supplied with the robot.)
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WARNING
Moving parts can pinch or crush.
Keep hands away from robot arms.
1-3
1
Using the Robot Safely
Particularly important cautions for handling or operating the robot are described below. In
addition, precautions during installation, operation, inspection and maintenance are also
provided in each chapter. Be sure to comply with these instructions to ensure safe use of
the robot.
1-2 Essential precautions
Warning label 2
1
WARNING
Using the Robot Safely
Moving parts can
pinch or crush.
Keep hands away
from robot arms.
(3) Follow the instructions on warning labels and in this manual.
• Be sure to read the warning labels and this manual carefully and make sure you
thoroughly understand their contents before attempting installation and operation
of the robot.
• Before starting robot operation, be sure to reread the procedures and cautions
relating to your work as well as descriptions in this chapter (Chapter 1, "Using the
Robot Safely").
• Never install, adjust, inspect or service the robot in any manner that does not
comply with the instructions in this manual.
• The warning labels 3 are supplied with the robot and should be affixed to the robot
or conspicuous spots near the robot.
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WARNING
Improper installation or operation can result in serious injury or
death.
Read the User's Manual and all warning labels before INSTALLATION
AND operation.
Warning label 3
WARNING
Improper Installation or operation
can result in serious injury or
death.
Read user's(owner's)
manual and all warning labels
before operation.
(4) Be aware of strong magnets inside the robot.
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1-4
WARNING
Powerful magnets are installed inside the robot. Do not disassemble
the robot since this may cause injury. Devices that might
malfunction due to magnetic fields must be kept away from this
robot.
1-2 Essential precautions
(5) Do not remove, alter or stain the warning labels.
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(6) Do not use the robot in environments containing inflammable gas, etc.
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WARNING
• THIS ROBOT WAS NOT DESIGNED FOR OPERATION IN ENVIRONMENTS WHERE INFLAMMABLE OR EXPLOSIVE SUBSTANCES ARE PRESENT.
• DO NOT USE THE ROBOT IN ENVIRONMENTS CONTAINING INFLAMMABLE GAS, DUST OR LIQUIDS. EXPLOSIONS OR FIRE MIGHT OTHERWISE RESULT.
(7) Do not use the robot in locations possibly subject to electromagnetic interference, etc.
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WARNING
Do not use the robot in locations subject to electromagnetic
interference, electrostatic discharge or radio frequency
interference. MALFUNCTIONS MIGHT OTHERWISE OCCUR.
(8) Provide safety measures for end effector (gripper, etc.).
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WARNING
• END EFFECTORS MUST BE DESIGNED AND MANUFACTURED SO THAT THEY CREATE NO HAZARDS (FOR EXAMPLE, A WORKPIECE THAT COMES LOOSE) EVEN IF POWER (ELECTRICITY, AIR PRESSURE, ETC.) IS SHUT OFF OR POWER FLUCTUATIONS OCCUR.
• IF THERE IS A POSSIBLE DANGER THAT THE OBJECT GRIPPED BY THE END EFFECTOR MAY FLY OFF OR DROP, THEN PROVIDE APPROPRIATE SAFETY PROTECTION TAKING INTO ACCOUNT THE OBJECT SIZE, WEIGHT, TEMPERATURE AND CHEMICAL PROPERTIES.
1-5
1
Using the Robot Safely
WARNING
IF WARNING LABELS ARE REMOVED OR DIFFICULT TO SEE, THEN ESSENTIAL
PRECAUTIONS MIGHT NOT BE TAKEN, RESULTING IN ACCIDENTS.
• DO NOT REMOVE, ALTER OR STAIN THE WARNING LABELS ON THE ROBOT.
• DO NOT ALLOW THE WARNING LABELS TO BE HIDDEN BY DEVICES INSTALLED ONTO THE ROBOT BY THE USER.
• PROVIDE PROPER LIGHTING SO THAT THE SYMBOLS AND INSTRUCTIONS ON THE WARNING LABELS CAN BE CLEARLY SEEN EVEN FROM OUTSIDE THE SAFETY ENCLOSURE.
1-2 Essential precautions
(9) Be careful not to touch the motor and peripheral parts when hot.
1
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Using the Robot Safely
WARNING
The motor and speed reduction gear casing are extremely hot after
automatic operation, so burns may occur if these are touched.
Before handling these parts during inspection or servicing, turn off the
controller, wait for a while and check that the parts have cooled.
(10) Take the following safety precautions during inspection of controller.
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WARNING
• WHEN YOU NEED TO TOUCH THE TERMINALS OR CONNECTORS ON THE OUTSIDE OF THE CONTROLLER DURING INSPECTION, ALWAYS FIRST TURN OFF THE CONTROLLER POWER SWITCH AND ALSO THE POWER SOURCE IN ORDER TO PREVENT POSSIBLE ELECTRICAL SHOCK.
• DO NOT DISASSEMBLE THE CONTROLLER. NEVER TOUCH ANY INTERNAL PARTS OF THE CONTROLLER. DOING SO MIGHT CAUSE BREAKDOWNS, MALFUNCTIONS, INJURY OR FIRE. IF ANY PARTS OF THE CONTROLLER NEED TO BE REPLACED, FOLLOW THE SPECIFIED INSTRUCTIONS.
• Refer to the controller user's manual for precautions on handling the controller.
(11) Consult us for corrective action when the robot is damaged or malfunctions occur.
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WARNING
IF ANY PART OF THE ROBOT IS DAMAGED OR ANY MALFUNCTION OCCURS,
CONTINUING THE OPERATION MAY BE VERY DANGEROUS. PLEASE CONSULT US
FOR CORRECTIVE ACTION.
Damage or Trouble
Possible Danger
Damage to machine harness or robot cable
Electrical shock, malfunction of robot
Damage to exterior of robot
Flying outwards of damaged parts
during robot operation
Abnormal operation of robot
(positioning error, excessive vibration, etc.)
Malfunction of robot
Z-axis (vertical axis) brake trouble
Dropping of load
(12) Protective bonding
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1-6
WARNING
Be sure to ground the robot and controller to prevent electrical
shock.
1-2 Essential precautions
(13) Be sure to make correct parameter settings.
c
1
(14) Follow the specified procedures when installing, adjusting or inspecting the robot.
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WARNING
ALWAYS FOLLOW THE SPECIFIED PROCEDURES WHEN INSTALLING, ADJUSTING
OR INSPECTING THE ROBOT. NEVER ATTEMPT ANY PROCEDURE NOT DESCRIBED
IN THIS MANUAL.
(15) Do not attempt any repair, parts replacement and modification.
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WARNING
DO NOT ATTEMPT ANY REPAIR, PARTS REPLACEMENT AND MODIFICATION
UNLESS DESCRIBED IN THIS MANUAL.
THESE WORKS REQUIRE TECHNICAL KNOWLEDGE AND SKILL, AND MAY ALSO INVOLVE WORK HAZARDS.
(16) Do not use the robot in locations where strong magnetic sources are present.
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WARNING
Do not use the robot near a strong magnetic source. The robot
might otherwise break down or malfunction.
(17) Precautions when disposing of the robot
When disposing of the robot, handle it as industrial waste.
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WARNING
Handle the robot carefully when disposing of it since powerful
magnets are installed inside.
(18) Location for installing the controller and the programming box or Handy Terminal
The robot controller, programming box, and Handy Terminal should be installed at a
location that is outside the robot movement range yet where it is easy to operate and
view the robot performing tasks.
(19) Protect electrical wiring and hydraulic/pneumatic hoses as needed.
Install a cover or similar item to protect the electrical wring and hydraulic/pneumatic
hoses from possible damage.
1-7
Using the Robot Safely
CAUTION
The robot must be operated with correct tolerable moment of inertia and
acceleration coefficients according to the manipulator tip mass and
moment of inertia. If these are not correct, drive unit service life may end
prematurely, and damage to robot parts or residual vibration during
positioning may result.
1-2 Essential precautions
(20) Install an operation status light.
Install an operation status light (signal light tower, etc.) at an easy-to-see position so
the operator will know whether the robot is merely stopped or is in emergency-error
stop.
1
Using the Robot Safely
(21) Clean work tools, etc.
Work tools such as welding guns and paint nozzles which are mounted in the robot
arm will preferably be cleaned automatically.
(22) Provide adequate lighting.
Make sure to provide enough lighting to ensure safety during work.
(23) Prevent the gripped object from flying outwards.
If the object or workpiece gripped by the robot might fly outward or drop and create
a hazard to the operator, then protective equipment should be installed by taking the
size, weight, temperature and chemical properties of the object into account.
(24) Draw up "work instructions" and makes sure the operator learns them well.
Decide on "work instructions" for the following items in cases where personnel
must work within the robot movement range to perform teaching, maintenance or
inspection. Make sure the workers know these "work instructions" well.
(1) Robot operating procedures needed for tasks such as startup procedures and
handling switches
(2) Robot speeds used during tasks such as teaching
(3) Methods for workers to signal each other when two or more workers perform
tasks
(4) Steps that the worker should take when a problem or emergency occurs
(5) Steps to take after the robot has come to a stop when the emergency stop device
was triggered, including checks for cancelling the problem or error state and
safety checks in order to restart the robot.
(6) In cases other than above, the following actions should be taken as needed to
prevent hazardous situations due to sudden or unexpected robot operation or
faulty robot operation, as listed below.
1.Show a display on the operator panel
2.Ensure the safety of workers performing tasks within the robot movement range
3.Clearly specify position and posture during work
Position and posture where worker can constantly check robot movements and
immediately move to avoid trouble if an error/problem occurs
4.Install noise prevention measures
5.Use methods for signaling operators of related equipment
6.Use methods to decide that an error has occurred and identify the type of error
1-8
1-3 Industrial robot operating and maintenance personnel
Implement the "work instructions" according to the type of robot, installation
location, and type of work task.
When drawing up the "work instructions", make an effort to include opinions from
the workers involved, equipment manufacture's technicians, and workplace safety
consultants, etc.
1
Display an easy to understand sign or message on the programming box, Handy
Terminal, and operation panel during the job task, to prevent anyone other than the
operators for that job task from mistakenly operating a start or selector switch. If
needed, take other measures such as locking the cover on the operation panel.
(26) Make daily and periodic inspections.
(1) Always make sure that daily and periodic inspections are performed, and make
a pre-work check to ensure there are no problems with the robot or related
equipment. If a problem or abnormality is found, then promptly repair it or take
other measures as necessary.
(2) When you make periodic inspections or repairs, make a record and store it for at
least 3 years.
1-3 Industrial robot operating and maintenance personnel
Operators or persons who handle the robot such as for teaching, programming, movement
check, inspection, adjustment, and repair must receive appropriate training and also have
the skills needed to perform the job correctly and safely. They must read the user's manual
carefully to understand its contents before attempting the robot operation.
Tasks related to industrial robots (teaching, programming, movement check, inspection,
adjustment, repair, etc.) must be performed by qualified persons who meet requirements
established by local regulations and safety standards for industrial robots.
1-9
Using the Robot Safely
(25) Display a sign on operation panel during work
1-4 Robot safety functions
1-4 Robot safety functions
1
(1) Overload detection
This function detects an overload applied to the motor and shuts off the servo power.
Using the Robot Safely
(2) Overheat detection
This detects an abnormal temperature rise in the controller driver and shuts off the
servo power.
If an overload or overheat error occurs, take the following measures.
1.Reduce the speed.
2.Insert a "stop period" in the operation.
3.Reduce the acceleration coefficient.
(3) Soft limits
Soft limits can be set on each axis to limit the working envelope in manual operation
after return-to-origin and during automatic operation.
Note: The working envelope is the area limited by soft limits.
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WARNING
Soft limits must be set within the movement range (mechanical
stopper). If the soft limit is set outside the movement range, the robot
axis may collide with the mechanical stopper at high speed, causing
the object gripped by the end effector to fly or drop and the robot
to malfunction.
(4) Mechanical stoppers
If the servo power is shut off during robot operation by emergency stop or safety
functions, the mechanical stoppers prevent the axis from exceeding the movement
range.
Note: The movement range is the area limited by mechanical stoppers.
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WARNING
Robot movement will not stop immediately after the servo power
supply is shut off by emergency stop or other safety functions.
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WARNING
When the slider (carriage) collides with the mechanical stopper,
this might damage the parts of the robot. After a collision, check that no parts of the robot are damaged.
1-10
1-5 Safety measures for the system
1-5 Safety measures for the system
1-6 Trial operation
After making installations, adjustments, inspections, or maintenance or repairs to the
robot, make a trial run using the following procedures.
(1) If a safety enclosure has not yet been provided right after installation of the robot,
rope off or chain off around the movement area of the manipulator in place of the
safeguard, and obser ve the following points.
1.Use sturdy, stable posts which will not fall over easily.
2.The rope or chain should be easily visible by everyone around the robot.
3.Place a sign to keep the operator or other personnel from entering the movement
range of the manipulator.
(2) Check the following points before turning on the controller.
1.Is the robot securely and correctly installed?
2.Are the electrical connections to the robot correct?
3.Are air tubes correctly and securely connected?
4.Is the robot correctly connected to peripheral equipment?
5.Have safety measures (safety enclosure, etc.) been taken?
6.Does the installation environment meet the specified standards.
(3) After the controller is turned on, check the following points from outside the safety
enclosure.
1.Does the robot start and stop as intended? Can the operation mode be selected
correctly?
2.Does each axis move as intended within the soft limits?
3.Does the end effector move as intended?
4.Are the signal transmissions to the end effector and peripheral equipment correct?
5.Does emergency stop work?
6.Are the teaching and playback functions normal?
7.Are the safety enclosure and interlock working as intended?
8.Does the robot move correctly during automatic operation?
1-11
1
Using the Robot Safely
Since the robot is commonly used in conjunction with an automated system, dangerous
situations are more likely to occur from the automated system than from the robot
itself. Accordingly, appropriate safety measures must be taken on the part of the system
manufacturer according to the individual system. The system manufacturer should provide
a proper instruction manual for safe, correct operation and servicing of the system.
1-7 Work within the safety enclosure
Reference
When starting the PHASER series robots, the slider always moves a few
millimeters right after the servo is turned on and emits a high pitched noise.
This is just the routine pre-action for estimating the magnetic pole and is not
a problem.
1
Using the Robot Safely
1-7 Work within the safety enclosure
(1) Work within the safety enclosure
When work is required inside the safety enclosure, always turn off the controller and
place a sign indicating that the robot is being adjusted or serviced in order to keep
any other person from touching the controller switch or operation panel, except for
the soft limit setting and teaching. For soft limit setting, follow the suitable cautions,
notes, etc. in this manual. For teaching, follow the procedure shown below.
(2) Teaching
When performing teaching within the safety enclosure, comply with the instructions
listed below.
1)Check or perform the following points from outside the safety enclosure.
1.Make sure that no hazards are present within the safety enclosure by a visual
check.
2.Check that the programming box or Handy Terminal is operating normally.
3.Check that no failures are found in the robot.
4.Check that emergency stop works correctly.
5.Select teaching mode and prohibit automatic operation.
2)Never enter the movement range of the manipulator while within the safety
enclosure.
1-12
1-8 Automatic operation
1-8 Automatic operation
1
Automatic operation described here includes all operations in AUTO mode.
(1) Check the following before starting automatic operation.
2.The programming box or Handy Terminal, tools, etc. are in their prescribed
positions.
3.The alarm or error lamps on the robot and peripheral equipment do not flash.
4.The safety enclosure is securely installed with safety interlocks actuated.
(2) Obser ve the following during automatic operation or in cases where an error occurs.
1)After automatic operation has started, check the operation status and signal light to
ensure that the robot is in automatic operation.
2)Never enter the safety enclosure during automatic operation.
3)If an error occurs in the robot or peripheral equipment, observe the following
procedure before entering the safety enclosure.
1.Press the emergency stop button to set the robot to emergency stop.
2.Place a sign on the start switch, indicating that the robot is being inspected in
order to keep any other person from touching the start switch and restarting the
robot.
1-13
Using the Robot Safely
1.No one is within the safety enclosure.
1-9 Warranty
1-9 Warranty
1
For information on the warranty period and terms, please contact our distributor where
you purchased the product.
Using the Robot Safely
n This warranty does not cover any failure caused by:
1.Installation, wiring, connection to other control devices, operating methods,
inspection or maintenance that does not comply with industry standards or
instructions specified in the YAMAHA manual;
2.Usage that exceeded the specifications or standard performance shown in the
YAMAHA manual;
3.Product usage other than intended by YAMAHA;
4.Storage, operating conditions and utilities that are outside the range specified in
the manual;
5.Damage due to improper shipping or shipping methods; 6.Accident or collision damage;
7.Installation of other than genuine YAMAHA parts and/or accessories;
8.Modification to original parts or modifications not conforming to standard
specifications designated by YAMAHA, including customizing performed by
YAMAHA in compliance with distributor or customer requests;
9.Pollution, salt damage, condensation;
10.F ires or natural disasters such as earthquakes, tsunamis, lightning strikes, wind and
flood damage, etc;
11.B reakdown due to causes other than the above that are not the fault or
responsibility of YAMAHA;
n The following cases are not covered under the warranty:
1.Products whose serial number or production date (month & year) cannot be verified.
2.Changes in software or internal data such as programs or points that were created
or changed by the customer.
3.Products whose trouble cannot be reproduced or identified by YAMAHA.
4.Products utilized, for example, in radiological equipment, biological test
equipment applications or for other purposes whose warranty repairs are judged as
hazardous by YAMAHA.
THE WARRANTY STATED HEREIN PROVIDED BY YAMAHA ONLY COVERS DEFECTS
IN PRODUCTS AND PARTS SOLD BY YAMAHA TO DISTRIBUTORS UNDER THIS
AGREEMENT. ANY AND ALL OTHER WARRANTIES OR LIABILITIES, EXPRESS OR
IMPLIED, INCLUDING BUT NOT LIMITED TO ANY IMPLIED WARRANTIES OF
MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE ARE HEREBY EXPRESSLY
DISCLAIMED BY YAMAHA. MOREOVER, YAMAHA SHALL NOT BE HELD RESPONSIBLE
FOR CONSEQUENT OR INDIRECT DAMAGES IN ANY MANNER RELATING TO THE
PRODUCT.
Ver.1.00_201205
1-14
Chapter 2
Product Over view
Contents
2-1 Checking the product
2-1
2-2 Robot part names
2-2
2-3 Robot internal structure
2-3
2-1 Checking the product
2-1 Checking the product
After unpacking, make sure that all components and accessories are included (as specified
in your order). Also check the product for any damage on the exterior which might have
occurred during shipping. If there are any missing parts or damage due to shipping, please
notify your YAMAHA sales office or representative immediately.
Qty
Single-axis robot
1
Controller
1
Robot cable
1
I/O connector
1
Warning label 1
(DANGER label)
English and
Japanese, one each
Stick the label at easy-to-see position
of system.
Warning label 3
(WARNING label)
English and
Japanese, one each
Stick the label at easy-to-see position
of system.
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WARNING
• ALWAYS USE TWO OR MORE PEOPLE TO TAKE THE ROBOT UNIT OUT OF THE PACKAGE. EACH PERSON SHOULD GRIP THE ROBOT UNIT NEAR ONE END FROM THE LOWER SIDE. CARRY WITH THE ROBOT FACING UPWARD (SLIDER SIDE UPWARDS).
• When unpacking, carefully hold the robot not to drop it. If the robot falls, serious injury may occur or the robot may be damaged.
2-1
Product Overview
Product name
2
2-2 Robot part names
2-2 Robot part names
Robot part names
External components
<MF50>
Ground wire
2
End cover
Slider cover
Slider
Product Overview
Cable carrier
Robot cable
(motor wires)
Robot cable
(I/O signal wires)
End cover
Shutter
Side cover
Reference
The direction of the cables coming out of the cable carrier depends on the
specifications you ordered. The above illustration shows an example of RH
(right and horizontal) type.
2-2
2-3 Robot internal structure
2-3 Robot internal structure
The YAMAHA linear single-axis robot PHASER series MF type is a truly innovative singleaxis robot using a linear motor as its drive source. The internal robot structure and
features are described here.
w
WARNING
The following drawings and descriptions are given to assist in
understanding and safely using the PHASER series robots. Do not
attempt to disassemble the robot. Powerful permanent magnets are
fixed by adhesive to the magnetic plate so disassembly without
proper preparation is hazardous. Also, the required performance
may not be obtained.
Product Overview
PHASER series internal layout
2
<MF50>
Moving coil (internal)
Magnet plate
Magnetic head
Magnetic scale
Linear motion guide
Magnet plate
The robot contains powerful permanent magnets laid out at equally spaced intervals. The
magnetic field generated by these permanent magnets is utilized as propulsive power by
the robot.
Moving coil
The slider contains an internal moving coil. Passing current through this coil changes the
magnetic flux from the magnetic plate into a propulsive force. Passing current through the
coil also generates heat but heat sink fins efficiently dissipate this heat.
Structure
<MF50>
100
99
180
Moving coil
Magnet
Magnetic scale
210
88
2-3
2-3 Robot internal structure
Linear guide
The MF50 use a linear guide assembled with a ball retainer that efficiently eliminates
friction between adjacent balls. This achieves low noise, long service life and long
maintenance-free operation.
2
Magnetic scale and magnetic head
Product Overview
The magnetic scale utilizes YAMAHA's superb magnetic signal detection technology
developed in-house. The scale is made of a special alloy that retains a high-strength
magnetic field with virtually no weakening over time. Integrating it with a magnetic head
yields an astonishingly high resolution of one micrometer. Fully closed control directly
detects the table (slider) position for stable and highly precise positioning.
c
CAUTION
Do not bring a strong magnet close to the magnetic scale. A strong magnet
may erase the information recorded on the scale and cause the robot to
malfunction. A magnetic force of about 10mT (100 Gauss) does not cause
any problem.
As shown in the photos below, for example, bringing the magnetized side of
a magnetic base close to the side of the robot may erase the information on
the magnetic scale, so use caution.
Magnetized side of magnetic base
c
Magnetized side of magnetic base
CAUTION
The magnetic flux slightly leaks from the robot surface. (Max. 10mT)
When a device (sensor) that responds to the magnetism is installed, it may
respond incorrectly. Install such device 100 mm or more apart from the
robot, make the fine adjustment to eliminate incorrect response, or use a
device designed for the strong magnetic field.
Magnetic flux leak range
Robot
2-4
Robot
Chapter 3
Installation and connections
Contents
3-1 Carrying the robot
3-1
3-2 Robot installation conditions
3-2
3-2-1 Installation environments
3-2-2 Installation base
3-3 Installing the robot
3-2
3-3
3-5
3-4 Installing an external leakage breaker
and circuit protector
3-7
3-5 Protective bonding
3-8
3-6 Connecting the robot to the controller 3-9
3-7 Precautions during user wiring and
air tube installation
3-12
3-1 Carr ying the robot
3-1 Carr ying the robot
Always use 2 people to carry the robot unit. Each person should grip the robot unit near
one end from the lower side as shown and carry with the load well balanced. Carry with
the robot facing upward (slider side upwards).
w
[Never tr y this when moving!]
• Do not carry by holding the slider.
• Do not carry by holding the cable.
• Do not carry by holding the cable carrier.
• Do not carry by gripping the end cover.
3-1
3
Installation and connections
WARNING
Always observe the following precautions when carrying the
robot.
• Remove any and all objects such as hands and grippers attached
to the robot slider before moving the robot. The slider will lose balance if moved with objects still attached and cause injuries.
• Keep the robot balanced and don't let it tilt while moving it. If the robot tilts, the slider may move under its own weight causing serious injuries such as crushed fingers.
• NEVER ATTEMPT TO HOLD THE ROBOT IN ANY OF THE FOLLOWING MANNERS.
3-2 Robot installation conditions
3-2 Robot installation conditions
3-2-1 Installation environments
Be sure to install the robot in the following environments.
Items
3
Specifications
Allowable ambient
temperature
0 to 40°C
Allowable ambient humidity
35 to 85% RH (no condensation)
Altitude
0 to 1000 meters above sea level
Installation and connections
Avoid installing near water, cutting water, oil, dust,
metallic chips and organic solvent.
Avoid installation near corrosive gas and corrosive
materials.
Ambient environments
Avoid installation in atmosphere containing inflammable
gas, dust or liquid.
Avoid installation near objects causing electromagnetic
interference, electrostatic discharge or radio frequency
interference.
Vibration
Do not subject to impacts or vibrations.
Working space
Allow sufficient space margin to perform jobs (teaching,
inspection, repair, etc.)
For detailed information on how to install the robot controller, refer to the separate
"YAMAHA Robot Controller User's Manual".
w
WARNING
Avoid installing the robot in locations where the ambient
conditions may exceed the allowable temperature or humidity, or in
environments where excessive moisture, corrosive gases, metallic
powder or dust are generated. Malfunctions, failures or short
circuits may otherwise result.
w
WARNING
• This robot was not designed for operation in environments where
inflammable or explosive substances are present.
• Do not use the robot in environments containing inflammable gas, dust or liquids. Explosions or fire could otherwise result.
w
WARNING
Avoid using the robot in locations subject to electromagnetic
interference, electrostatic discharge or radio frequency
interference. Malfunctions may otherwise occur.
3-2
3-2 Robot installation conditions
w
WARNING
Do not use the robot in locations subject to excessive vibration.
Robot installation bolts may otherwise become loose causing the
robot to fall over.
3-2-2 Installation base
To mount the robot, use an installation base that satisfies the following conditions.
w
WARNING
If the installation base is not sufficiently rigid and stable, vibration
(resonance) may occur during operation, causing adverse effects
on the robot work.
2)The installation base surface must be machined within a flatness of ±0.05mm/500mm.
c
CAUTION
The robot positioning accuracy, acceleration and duty might not satisfy the
required performance or the service life might be reduced if the installation
surface precision is insufficient. In worst cases, the coil inside the robot might
burn out.
3-3
3
Installation and connections
1)The installation base is subjected to a great deal of stress while the robot is in operation.
Prepare a sufficiently rigid and stable installation base, taking into account the robot
weight including the end effector (gripper) and workpiece.
3-2 Robot installation conditions
3)Use an installation base of sufficient size to match the robot body so that the robot can
be installed with the specified number of bolts. Avoid installing the robot with less than
the specified number of bolts or installing the robot closer to one end as shown at the
lower right.
Robot installation example
3
Installation and connections
Installation base
Good example
Installation base
Bad example
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WARNING
WHEN INSTALLING THE ROBOT, ALWAYS USE ALL THE INSTALLTION HOLES OR M8
TAPPED HOLES IN THE BOTTOM OF THE ROBOT FRAME. USING LESS THAN THE
SPECIFIED NUMBER OF BOLTS TO INSTALL THE ROBOT MAY CAUSE VIBRATION
AND POOR POSITIONING ACCURACY. THIS MAY ALSO RESULT IN POSITIONING
ERRORS AND REDUCED SERVICE LIFE IN THE WORST CASES.
n
NOTE
Positions of robot mounting holes differ according to the stroke length of
each robot. Refer to the outline dimension drawings shown in Chapter 7,
"Specifications".
3-4
3-3 Installing the robot
3-3 Installing the robot
w
WARNING
• Before installing the robot, always make sure that the robot controller is not connected to the robot or the power to the controller is off. Serious accidents might occur if the robot starts to operate during installation.
• Be sure to use the bolts of the correct length and tighten them securely to the correct torque. Failure to follow this instruction may cause robot vibrations, position errors and serious accidents.
Use the following method to install the MF15/MF20/MF30 robot.
1.Drill holes through the installation base and secure the robot to the base with M6
bolts from the bottom. (M6 tapped holes are already machined in the bottom of the
robot frame.)
There are two methods for installing the MF50/MF75/MF100 robot.
1.Drill and tap M8 holes into the installation base and secure the robot to the base
with M8 bolts from the top of the robot frame. (Use the mounting holes provided in
the robot frame.)
2.Drill holes through the installation base and secure the robot to the base with M8
bolts from the bottom. (M8 tapped holes are already machined in the bottom of the
robot frame.)
<When installing the MF50/MF75/MF100 from the top>
3-5
Installation and connections
Use the following method to install the MF7 robot.
1.Drill holes through the installation base and secure the robot to the base with M4
bolts from the bottom. (M4 tapped holes are already machined in the bottom of the
robot frame.)
3
3-3 Installing the robot
φ9
3
Hex socket-head bolt: M8×1.25
(Length under head: 25 to 30mm)
Installation and connections
Robot
Bolt
Installation base
Tightening torque
M4 hex socket-head bolt, Strength: 8.8T
30kgf•cm to 45kgf•cm
Length: installation base thickness +9 +0
-2 mm
M6 hex socket-head bolt, Strength: 8.8T
MF15/MF20/MF30
100kgf•cm to 130kgf•cm
Length: installation base thickness +10 +0
-2 mm
M8 hex socket-head bolt, Strength: 8.8T
MF50/MF75/
230kgf•cm to 370kgf•cm
MF100
Length: installation base thickness +15 +0
-2 mm
MF7
3-6
3-4 Installing an external leakage breaker and circuit protector
3-4 Installing an external leakage breaker and circuit protector
To ensure safety, a leakage breaker and circuit protector must be installed in the power
supply connection section of the robot controller. Make power connections to the
controller by following the instructions in the controller user's manual.
w
3
Installation and connections
c
WARNING
• Electrical shocks, injuries or fires might occur if the motor breaks down while the robot controller is used without installing a leakage breaker in the power supply section.
• Electrical shocks, injuries or fires might occur if the motor breaks down while the robot controller is used without making correct connections to the power supply.
Use a wire thicker than 2.0 square millimeters.
CAUTION
• Be sure that the power supply voltage and the terminal connections are correct. Incorrect voltage and connections could cause an equipment failure.
• Shut the control power off while in a "servo off" condition.
3-7
3-5 Protective bonding
3-5 Protective bonding
w
3
WARNING
Always ground the robot and controller unit to prevent electrical
shock.
Always use the ground terminal (M4 screw) on the robot unit to make ground connection.
The ground terminal location is shown below.
Ground terminal
Installation and connections
Ground terminal (M4 screw) for protective bonding
Ground terminal (M4 screw) for robot cable
c
CAUTION
• A secure ground connection (less than 100-ohm resistance to ground) is recommended.
• Use electrical wire thicker than AWG14 (2mm2) as the ground wire.
w
WARNING
Before making the ground connection, make sure that the
controller is not connected to the robot or the power to the
controller is off.
Provide a terminal marked "PE" as the protective conductor for the entire system, and
connect it to an external protective conductor. Also securely connect the ground terminal
on the robot frame to the protective conductor.
(Symbol 417-IEC5019)
3-8
3-6 Connecting the robot to the controller
3-6 Connecting the robot to the controller
Connect the robot cables to the mating connectors on the controller as shown. For the
connectors on the controller, refer to the user's manual of the YAMAHA robot controller
being used.
w
c
CAUTION
• After connecting the robot cable intermediate connectors together, fit the connector hoods together securely.
• Standard robot cables do not permit much movement, so attach the robot cable securely to prevent unwanted movement of the motor power and signal wires.
w
WARNING
• If the connectors are not securely inserted and the connector pins make poor contact, the robot may malfunction causing hazardous situations. Before turning on power to the robot, always make sure that each connector is correctly and securely inserted.
• Do not place a strain or load on the connector by pulling on the robot cable itself.
w
WARNING
Install the robot cable so that it will not interfere with the robot
movement.
Do not use an area where interference might occur between the
robot cable and load attached to the tip of the robot as a work area. The robot cable might break if it hangs up on the moving
parts of the robot and cause hazardous situations due to
malfunction.
w
WARNING
Install the connected robot cable in a position where it will not
interfere with other workers or operators. People might trip over
the cable and fall causing injuries.
3-9
3
Installation and connections
WARNING
• Before connecting the cables, check that there are no bends or breaks in the robot cable connector pins and that the cables are not damaged. Bent or broken pins or cable damage may cause robot malfunctions.
• Always make sure that the power to the robot controller is off before connecting the cables or ground wires.
3-6 Connecting the robot to the controller
1)Connect the robot cables (motor and I/O signal wires) to the mating connectors coming
out from the robot.
Robot cable
connector
(motor wires)
Robot cable
connector
(signal wires)
3
Installation and connections
2)After making the connections, fit the connector hoods together securely.
Hood
3)Connect the robot cable ground terminal (power and signal lines) to the ground terminal
on the robot frame.
<MF15>
<MF7>
<MF20/30>
c
3-10
<MF50/MF75/MF100>
CAUTION
Be sure to connect the ground terminal. Failure to do so may cause malfunctions.
3-6 Connecting the robot to the controller
■ Robot cable connections
Refer to "7-4 Robot cable (I/O signal wires)" and "7-5 Robot cable (motor wires)" when
wiring the cables.
Robot cable connections (when connecting to SR1)
SD
MEMORY
CARD
Programming box HPB
3
SD memory card
SR1-P
controller
RS-232C
communication
control
Robot cable (signal wires)
Robot cable (motor wires)
I/O control
Personal computer
Support software
POPCOM
General-purpose input: 8 points, custom input: 8 points
General-purpose output: 5 points, custom output: 3 points
Power AC100/200V for
supply
I/O devices
Gripper, limit switches, etc.
After making connections,
fasten the hoods securely.
Hood
External control
(PLC and similar units)
Linear Single-axis Robot (PHASER series)
* Programming box HPB and support software POPCOM are sold separately.
3-11
Installation and connections
or
3-7 Precautions during user wiring and air tube installation
3-7 Precautions during user wiring and air tube installation
●
Cable carries (plastic chain for cable guide)
User cables and air tubes can be routed in the cable carrier of the MF type robots.
Observe the following precautions when routing user cables and air tubes in the
cable carrier.
c
3
Installation and connections
CAUTION
• The cable and air tubes should take up less than 30% of the space when storing them inside the cable carrier. Lay out the cables and air tubes in rows inside the cable carrier so they do not cross each other. Use the table below as a general guide for cable and air tube installation.
• The cables and air tubes inside the cable carrier will shift while the robot is operating, becoming taut and placing a strain on the connectors at both ends. To prevent this loosely fasten the cables and air tube to the cable carrier with cable ties to prevent strain from being applied. (Fasten them lightly since the cables and air tubes might break if secured too tightly.)
• Do not remove or mount brackets installed on the cable carrier or attempt to modify them.
n Cable and air tube installation (reference)
Robot model
MF7/15/20/30
MF50/75/100
3-12
Optional
cable carrier type
Cable and air tube
S
f8 flexible cable ×1, f4 air tube ×1
M
f8 flexible cable ×2, f6 air tube ×2
L
f8 flexible cable ×2, f6 air tube ×3
–
f8 flexible cable ×2, f6 air tube ×3
Chapter 4
Robot operation
Contents
4-1 Notes on robot operation
4-1
4-1-1 Magnetic pole estimation action
4-1
4-1-2 Absolute search (semi-absolute specification) 4-1
4-1-3 Return to origin (incremental specification)
4-2
4-2 Setting operating conditions
4-2-1 Process flow for setting operating conditions
4-2-2 Duty monitor
4-2-3 Acceleration setting
4-3 Pulse train control (SRCP, SRCP30)
4-4
4-4
4-5
4-6
4-8
4-3-1 Acceleration/deceleration and position proportional gain 4-8
4-3-2 Setting the maximum speed
4-10
4-1 Notes on robot operation
4-1 Notes on robot operation
On the MF7/MF15/MF20/MF30/MF50/MF75, two linear scale specifications are provided:
incremental specification and semi-absolute specification. The MF100 is available only
in incremental specification. Action after power-on differs depending on the linear scale
specifications. Keep the following points in mind.
4-1-1 Magnetic pole estimation action
• When starting the PHASER series robots, the slider always moves a few millimeters
right after the servo is turned on and emits a high pitched noise. This is just the
routine pre-action for estimating the magnetic pole and is not a problem.
• Do not apply any external force or impact on the robot during the magnetic pole
estimation action. Doing so may cause a failure in the magnetic pole estimation
action.
4-1-2 Absolute search (semi-absolute specification)
On the semi-absolute specification, absolute search (absolute position detection) must be
performed after turning power on before starting operation. Current position is found by
reading the signal recorded on the linear scale during absolute search. The slider (carriage)
moves a maximum of 76mm while reading the signal. (The distance that the slider moves
can be shortened by allowing the slider to move back and force for signal read.
■
Absolute search motion
• Absolute reset speed is set to 20 (mm per second) prior to shipment. This speed
can be reduced by parameter entry.
• Absolute search sequence: When an absolute search (return-to-origin) command
is input or the HPB is used to perform absolute
search, the slider moves in the direction specified by
parameter and then stops when the origin position is
found, allowing automatic operation.
4-1
4
Robot operation
• Both in the incremental and semi-absolute specifications, the magnetic pole
estimation action is performed at servo-on immediately after turning the power on.
4-1 Notes on robot operation
4-1-3 Return to origin (incremental specification)
Origin position
■
• On the incremental specification, return-to-origin must be performed after turning
power on before starting operation. Magnetic poles are also detected during returnto-origin. Once return-to-origin is completed, there is no need to perform it again
unless the controller power is turned off or an error occurs.
• There are two positions at which the origin can be set. These are located one
each on both ends of the stroke. Refer to the outline dimension drawings shown
in Chapter 7, "Specifications". Unless specified otherwise, the origin position is
set on the L side prior to shipment. The origin position can be set on the R side
by changing the parameter. (See the separate "SR1 Controller User's Manual" for
information on changing the parameter.)
4
Return-to-origin direction
Robot operation
L side
R side
: Magnetic pole detection point
Slider
Cable carrier
L side
R side
: Magnetic pole detection point
Return-to-origin operation
■
• Return-to-origin speed is set at 20 (mm per second) prior to shipment. This speed
can be changed in increments of 1 to 100 (mm per second) by parameter entry.
• Return-to-origin sequence: Robot moves as follows by entering a return- to-origin
command or a return-to-origin operation from the HPB.
(1) Slider moves in the specified return-to-origin direction at a speed set by the
parameter.
Return-to-origin direction
L side
R side
: Magnetic pole detection point
4-2
4-1 Notes on robot operation
(2) Slider moves in reverse direction after contacting the mechanical stopper (stroke
end detected).
c
CAUTION
If the magnetic pole was not detected in the operation above in (1), in other
words, if return-to-origin started from a position on the left of the magnetic
pole detection point), then the slider returns to the magnetic pole detection
point (▲). There, the slider moves in the reverse direction and re-performs
the operation in (1). (This is not an equipment problem.)
Direction of movement
4
R side
Robot operation
L side
(3) Slider (carriage) moves from the stroke end to the origin position and then stops
to complete return-to-origin. Refer to the outline dimension drawings shown in
Chapter 7, "Specifications".
Origin position
L side
R side
Reference
See the separate "SR1 Controller User's Manual" for more information on
return-to-origin operation.
4-3
4-2 Setting operating conditions
4-2 Setting operating conditions
You must set operating parameters such as the payload, speed and acceleration in order to
obtain maximum performance from the PHASER series robot.
4-2-1 Process flow for setting operating conditions
Set optimum parameters using the flow chart below as a reference.
Reference
For details on the parameter setting method, refer to the user's manual of
the YAMAHA robot controller being used.
4
Process flow for setting operating conditions
Set payload parameter
Robot operation
Check actual operation
(duty check)
Does overload appear?
NO
YES
Any margin in total cycle time to
allow shortening it?
Is total cycle time appropriate?
YES
NO
Setting is appropriate
Change robot speed and/or
acceleration
YES
Lower robot speed and/or
acceleration,
or increase stop time
4-4
NO
After lowering robot speed
and/or acceleration, reduce
cycle time with tasks other than
robot operation
4-2 Setting operating conditions
4-2-2 Duty monitor
An overload error appears to warn the motor is working too hard during tough robot
operation. In these cases, either the robot acceleration or maximum speed must be
lowered, or the robot stop time increased (lower the duty). On the other hand, if you want
to shorten the cycle time even further, when there is currently no overload, you can raise
the acceleration or maximum speed, or shorten the robot stop time (raise the duty).
Viewing the duty monitor allows you to easily check the current robot operating status to
find out how hard the robot can still work versus overload criteria. By checking the duty
monitor, you can repeatedly change the settings and view the available duty to obtain
ideal operating conditions.
●
How to monitor the operation duty
To monitor the operation duty using the programming box (HPB), follow these steps.
2) Press
(MON) on the initial
menu to enter MONITOR mode.
［ＭＥＮＵ］
ｓｅｌｅｃｔ ｍｅｎｕ
１ＥＤＩＴ２ＯＰＲＴ３ＳＹＳ ４ＭＯＮ
3) Press
(DUTY).
［ＭＯＮ］
ｓｅｌｅｃｔ ｍｅｎｕ
１ＤＩ０ ２ＤＵＴＹ
4) Press
(RUN) to start
measuring the operation duty.
5) Press the
［ＭＯＮ−ＤＵＴＹ］
ｓｅｌｅｃｔ ｍｅｎｕ
ｍｅａｓｕｒｉｎｇ ．．．
１ＲＵＮ ２ＳＴＯＰ３ＲＳＬＴ
(STOP) key to quit
measurement.
Pressing the
4
Robot operation
1) Connect the HPB to the SR1
controller and turn on the
controller power.
The initial menu then appears on
the HPB.
(STOP) key
retains the measurement data.
4-5
4-2 Setting operating conditions
6) Press the
(RSLT) key to
display the measurement data.
The operation duty value in the
period from pressing
up to pressing the
(RUN)
(STOP)
［ＭＯＮ−ＤＵＴＹ］
ｍｅａｓｕｒｅｍｅｎｔ ｄａｔａ
Ｘ ＝ ５０％
then appears as a percentage.
Reference
The operation duty can also be monitored while the program is running by
using a program command. See the "SR1 Controller User's Manual" for more
information.
4
4-2-3 Acceleration setting
Robot operation
Optimal acceleration for the PHASER series robots is automatically set by entering the
payload parameter value. In the payload parameter, set the total weight of the workpiece
and the end effectors such as hands or grippers attached to the robot slider. (Acceleration
can also be changed by parameter.)
c
●
CAUTION
Be sure to enter an accurate value when making this setting, since a
mistake will cause troubles such as vibration or a shorter service life span.
Setting the payload parameter
To set the payload parameter by using the programming box (HPB), follow these
steps.
1) Connect the HPB to the SR1
controller and turn on the power
to the controller.
The initial menu screen appears
on the HPB.
2) Press
(SYS) on the initial
menu screen to enter SYSTEM
mode.
3) Press
(PRM).
The parameter setting mode is
entered.
4-6
［ＭＥＮＵ］
ｓｅｌｅｃｔ ｍｅｎｕ
１ＥＤＩＴ２ＯＰＲＴ３ＳＹＳ ４ＭＯＮ
［ＳＹＳ］
ｓｅｌｅｃｔ ｍｅｎｕ
１ＰＲＭ ２Ｂ．ＵＰ３ＩＮＩＴ４ｎｅｘｔ
［ＳＹＳ−ＰＲＭ］
ｓｅｌｅｃｔ ｍｅｎｕ
１ＡＸＩＳ２ＤＡＴＡ３ＳＹＳ１４ＳＹＳ２
4-2 Setting operating conditions
4) Select the parameter group.
Press
(AXIS) to select the
axis parameters.
The current setting for PRM100
(robot type) appears on the
screen.
Press the
［ＳＹＳ−ＰＲＭ−ＡＸＩＳ］
ＰＲＭ１００ ＝ ４２１０
ｒｏｂｏｔ ｔｙｐｅ
ｒｅａｄ ｏｎｌｙ
keys to scroll
up or down the parameters until
PRM112 (payload) is displayed.
5) When PRM112 (payload) is
displayed, use the number keys
to enter the payload and press .
4
Robot operation
6) The cursor returns to the top of
data when the parameter has
been set correctly.
［ＳＹＳ−ＰＲＭ−ＡＸＩＳ］
ＰＲＭ１１２ ＝ １０ ［ｋｇ］
ｐａｙｌｏａｄ
ｒａｎｇｅ ０→ＭＡＸ
［ＳＹＳ−ＰＲＭ−ＡＸＩＳ］
ＰＲＭ１１２ ＝ １０ ［ｋｇ］
ｐａｙｌｏａｄ
ｒａｎｇｅ ０→ＭＡＸ
4-7
4-3 Pulse train control (SRCP, SRCP30)
4-3 Pulse train control (SRCP, SRCP30)
When you control the robot movement by pulse train input, read the following description
and comply with the precautions. For detailed information on pulse train control and
specifications, refer to the separate "SRCP controller: Pulse train mode" supplementary
manual.
4-3-1 Acceleration/deceleration and position proportional gain
●
Acceleration/deceleration waveforms
Use sinusoidal acceleration/deceleration to issue acceleration/deceleration
instructions. Using other waveforms might adversely affect positioning accuracy and
current value stability.
Acceleration/deceleration and position proportional gain
Acceleration/deceleration and position proportional gain at different payloads
Combination of MF50 and SRCP
Payload (kg)
Acceleration/deceleration (G)
Position proportional gain Kpp (PRM19)
0
1.20
80
10
0.94
76
20
0.61
72
30
0.45
68
40
0.36
64
50
0.30
60
Note: Acceleration/deceleration values apply to linear acceleration/deceleration.
1.40
1.20
80
70
1.00
60
0.80
50
40
0.60
30
0.40
20
0.20
10
0.00
0
0
4-8
90
Position proportional gain Kpp
Acceleration (G)
10
20
30
Payload (kg)
40
50
Kpp
Robot operation
are shown in the tables and graphs below. Select the desired parameter values by
referring to these tables and graphs.
Acceleration/deceleration (G)
4
●
4-3 Pulse train control (SRCP, SRCP30)
Combination of MF100 and SRCP30
Payload (kg)
Acceleration/deceleration (G)
Position proportional gain Kpp (PRM19)
0
1.74
80
20
1.59
50
40
1.00
30
60
0.73
20
80
0.57
15
100
0.47
13
Note: Acceleration/deceleration values apply to linear acceleration/deceleration.
100
Position proportional gain Kpp
Acceleration (G)
90
1.6
80
1.4
70
1.2
60
1
50
0.8
40
0.6
30
0.4
20
0.2
10
4
Kpp
1.8
0
0
0
20
40
60
80
100
Payload (kg)
c
CAUTION
If the acceleration is too high, the robot might not follow the instructions or
overloads occur.
Reference
The Position proportional gain parameter (PRM19) is a hidden parameter.
For detailed information on how to display and change hidden parameters,
see the "SRCP Series Controller User's Manual" or "SRCP30 Controller User's
Manual".
4-9
Robot operation
Acceleration/deceleration (G)
2
4-3 Pulse train control (SRCP, SRCP30)
4-3-2 Setting the maximum speed
In the case of pulse train control, the robot moves 1 micrometer per pulse.
To operate the robot at a maximum speed (2500 mm/sec), a pulse train at 2.5Mpps
must be input. (The maximum speed might not be obtained depending on the operating
conditions.)
As the speed increases, the sliding resistance also increases and overloads tend to occur.
4
Robot operation
4-10
Chapter 5
Periodic inspection and maintenance
Contents
5-1 Before beginning work
5-1
5-2 Periodic inspection
5-4
5-2-1 Daily inspection
5-2-2 Three-month inspection
5-2-3 Six-month inspection
5-2-4 Three-year inspection
5-2-5 Greasing to the linear guides
5-4
5-5
5-6
5-6
5-7
5-3 Replacing the shutter
5-10
5-4 Replacing the shutter roller
5-12
5-5 Maintenance parts
5-15
5-1 Before beginning work
5-1 Before beginning work
Periodic inspection and maintenance are essential to ensure safe and efficient operation of
YAMAHA robots. This chapter describes periodic inspection items and procedures for the
PHASER series. Before beginning work, read the precautions below and also in Chapter 1
"Using the Robot Safely" and follow the instructions.
[Safety precautions]
(1) Read and understand the contents of this chapter completely before attempting to
adjust the robot.
(2) Place a sign indicating that the robot is being adjusted or serviced in order to keep
any other person from operating the controller power switch, programming box or
Handy Terminal, and the operation panel, etc.
(3) If a safety enclosure or fence has not yet been provided right after installation of the
robot, rope off or chain off the movement area around the robot in place of a safety
enclosure or fence, and observe the following points.
1.Use stable posts which will not fall over easily.
2.The rope or chain should be easily visible by everyone around the robot.
3.Place a conspicuous sign prohibiting anyone other than the person who is adjusting
the robot from entering the movement area of the robot.
(4) To check operation after adjustment, refer to "1-6 Trial Operation" in Chapter 1.
(5) For precautions on handling the controller, refer to the controller user's manual.
w
DANGER
If the inspection or maintenance procedure calls for operation of
the robot, stay out of the working area of the robot during
operation. Do not touch any parts inside the controller.
Keep watching the robot movement and surrounding area so that
the operator can press the emergency stop button if any danger
occurs.
5-1
5
Periodic inspection and maintenance
5-1 Before beginning work
w
WARNING
• When the robot does not need to be operated during adjustment or maintenance, always turn off the controller and the external switch board.
• Do not touch internal parts of the controller for 10 MINUTES after the controller has been turned off.
• When only making electrical inspections and requiring no mechanical movement of the robot, keep the emergency stop button pressed.
• Use only lubricant and greases specified by YAMAHA sales office or representative.
• Use only parts specified by YAMAHA sales office or representative. Take sufficient care not to allow any foreign matter to contaminate them during adjustment, parts replacement or reassembly.
• Do not modify any parts on the robot or controller. Modification may result in unsatisfactory specifications or threaten operator safety.
• When adjustment or maintenance is complete, retighten the bolts and screws securely.
• During robot adjustment or maintenance, place a sign indicating that the robot is being adjusted or serviced to prevent others from touching the control keys or switches. Provide a lock on the switch keys or ask someone to keep watch as needed.
w
WARNING
DO NOT DISASSEMBLE THE ROBOT. THE INTERNAL MAGNETIC PLATE USES
POWERFUL PERMANENT MAGNETS SO DISASSEMBLY WITHOUT PROPER
PREPARATION IS HAZARDOUS. ATTEMPTING TO DISASSEMBLE IT MIGHT ALSO
PREVENT OBTAINING THE SPECIFIED PERFORMANCE.
5
Periodic inspection and maintenance
5-2
5-1 Before beginning work
When applying grease to the internal linear guide, take the following precautions.
w
WARNING
Disposal of grease and waste containers
• Disposal methods are subject to legal regulations. Be sure that disposal methods comply with the established legal regulations.
• Do not apply pressure to empty containers. Pressure might cause the containers to rupture.
• Do not attempt to weld, heat, drill holes or cut these containers. Besides a potential explosion, the remaining contents of the container might ignite and catch fire.
5-3
5
Periodic inspection and maintenance
w
WARNING
Precautions when handling grease:
• Inflammation may occur if this gets in the eyes.
Before handling the grease, wear your safety goggles to ensure the grease will not come in contact with the eyes.
• Inflammation may occur if the grease comes into contact with skin. Be sure to wear protective gloves to prevent contact with skin.
• Do not take orally or eat. (Eating will cause diarrhea and vomiting.)
• Hands and fingers might be cut when opening the grease container, so use protective gloves.
• Keep out of the reach of children.
• Do not heat the grease or place near an open flame since this could lead to sparks and fires.
Emergency Treatment:
• If grease gets in the eyes, wash liberally with pure water for about 15 minutes and consult a physician for treatment.
• If grease comes in contact with the skin, wash away completely with soap and water.
• If taken internally, do not induce vomiting but promptly consult a physician for proper treatment.
5-2 Periodic inspection
5-2 Periodic inspection
The PHASER series robots use a linear motor and a linear guide with ball retainer, and
require little user maintenance. However, perform the following daily and periodic
inspections.
5-2-1 Daily inspection
The following inspections must be performed every day before and after operating the robot.
(1) Inspection to be performed with the controller power turned off
1)Turn off the controller power.
2)Place a sign indicating the robot is being inspected, to keep others from operating
the controller power.
3)Enter the safety enclosure and check the following points.
Check item
5
Description
Note
Periodic inspection and maintenance
Cables and
connectors
Check for scratches, damages and
excessively tight bends.
Shutter
Check scratches and dents. (Refer to
"5-3 Replacing the shutter".)
Motor
Check for unusual vibration and noise,
and for abnormal temperature rise.
Consult us if
damages or abnormal
conditions are found.
Using the duty
monitor, check that
the duty ratio is less
than 100%.
(2) Inspection to be performed with the controller power turned on
1)Check that no one is inside the safety enclosure, and then turn on the controller
power.
2)Place a sign indicating that the robot is being adjusted or serviced in order to
keep any other person from operating the controller, programming box or Handy
Terminal, and the operation panel, etc.
3)Check the following points from outside the safety enclosure.
Check item
5-4
Description
Safety enclosure or fence
Check if the safety enclosure or fence is in place.
Check if emergency stop is triggered when the door is
opened.
Check if warning labels are affixed at the entrance.
Emergency stop device
Press the emergency stop button to check if it works.
Robot movement
Check for abnormal movement and excessive vibration
and noise. (Contact us if any abnormal operation is
found.)
Z-axis brake operation *1
Check if the brake works to stop the Z-axis from dropping
more than 3mm from the stationary point. (Contact us if
any abnormal operation is found.)
*1:Visually check the Z-axis movement from outside the safety enclosure by pressing the emergency stop button and also by turning off the controller.
5-2 Periodic inspection
w
WARNING
The controller must be installed outside the safety enclosure. When
inspecting the controller, entering the safety enclosure while the
controller power is on is dangerous and must be avoided.
Reference
When starting the PHASER series robots, the slider always moves a few
millimeters right after the servo is turned on and emits a high pitched noise.
This is just the routine pre-action for estimating the magnet pole and is not a
problem.
5-2-2 Three-month inspection
Take the following precautions when performing 3-month inspection.
1)Turn off the controller power.
2)Place a sign indicating the robot is being inspected, to keep others from operating
the controller power.
Checkpoints
Check items
Linear guide
• Check for dust buildup or debris.
Clean if necessary. Apply grease
after cleaning.
• Check to see if linear guide is
lubricated (not dry). Apply grease
if necessary.
Shutter
Check for slack. Adjust if
necessary. (Refer to "5-3 Replacing
the shutter".)
Periodic inspection and maintenance
3)Enter the safety enclosure and check the following points.
Notes
Recommended grease: <MF7/MF15>
AFA (THK)
c
5
<MF20/MF30/MF50/MF75/MF100>
Albania S 2 (Shell)
CAUTION
The linear guide service life may be reduced if our recommended grease is
not used.
5-5
5-2 Periodic inspection
5-2-3 Six-month inspection
Take the following precautions when performing 6-month inspection.
1)Turn off the controller power.
2)Place a sign indicating the robot is being inspected, to keep others from operating
the controller power.
3)Enter the safety enclosure and check the following points.
Checkpoints
5
Check items
Periodic inspection and maintenance
Bolts and screws on
robot
Check for looseness. Tighten if
loose.
Linear guide
Check for backlash caused by air.
Controller
• Check if terminals are loose.
• Check if connectors are loose.
Greasing to linear
guide
Apply recommended grease to
linear guide every 6 months.
Shutter
Check for slack (gap). Adjust if
necessary. (Refer to "5-3 Replacing
the shutter".)
Shutter roller
Check for wear, and replace if
necessary. (Refer to "5-4 Replacing
the shutter roller".)
Notes
Contact us if any
abnormal condition
is found.
Recommended grease: <MF7/MF15>
AFA (THK)
c
<MF20/MF30/MF50/MF75/MF100>
Albania S 2 (Shell)
CAUTION
The linear guide service life may be reduced if our recommended grease is
not used.
5-2-4 Three-year inspection
Check the following points every 3 years or more often if the robot is used frequently.
Checkpoints
Linear guide
5-6
Check items
Check for backlash caused by air.
Notes
Contact us if any
abnormal condition
is found.
5-2 Periodic inspection
5-2-5 Greasing to the linear guides
When applying grease to the linear guide according to periodic inspection, follow the
procedure below.
c
CAUTION
Using grease other than those recommended by YAMAHA might shorten the
service life of the linear guide.
<MF7/MF15>
1)Prepare the following tools required for replacement.
• Phillips screwdriver
• Grease gun (recommended grease gun: THK MG70 with Type N nozzle)
2)Turn off the controller power.
3)Place a sign indicating the robot is being inspected, to keep others from operating the
controller power.
Periodic inspection and maintenance
4)Enter the safety enclosure.
5)Apply grease by either of the following methods.
(1)Remove the two screws on the end face of the robot and remove the end cover.
(2)Move the slider (carriage) all the way to one end of the robot.
(3)Using a grease gun, inject grease into the grease nipple in the grease hole.
(4)Supply grease to the other end of the robot in the same way.
(5)Reattach the end cover.
w Move the slider to one end of the robot.
End cover
e Using a grease gun, inject grease into
the grease nipple in the greasing hole.
5
q Remove the screws and
remove the end cover.
5-7
5-2 Periodic inspection
<MF20/MF30>
1)Prepare the following tools required for replacement.
• Phillips screwdriver
• Grease gun (recommended grease gun: THK MG70 with Type L nozzle)
2)Turn off the controller power.
3)Place a sign indicating the robot is being inspected, to keep others from operating the
controller power.
4)Enter the safety enclosure.
5)Apply grease by either of the following methods.
(1)Insert a grease gun into the grease supply hole provided on the side of the robot.
(2)Inject grease into the grease hole in the guide bearing.
5
Periodic inspection and maintenance
* It is recommended to open the shutter as shown and to perform work while visually
checking.
5-8
5-2 Periodic inspection
<MF50/MF75/MF100>
1)Prepare the following tools required for replacement.
• Phillips screwdriver
• Grease gun (recommended grease gun: THK MG70 with Type N nozzle)
2)Turn off the controller power.
3)Place a sign indicating the robot is being inspected, to keep others from operating the
controller power.
4)Enter the safety enclosure.
5)Apply grease by either of the following methods.
(1)Remove the four screws on the end face of the robot and remove the end cover.
(2)Move the slider (carriage) all the way to one end of the robot.
5
(3)Using a grease gun, inject grease into the grease nipple.
(4)Supply grease to the other end of the robot in the same way.
w Move the slider to one end of the robot.
e Using a grease gun, inject grease
into the grease nipple.
q Remove the screws and remove the end cover.
End cover
5-9
Periodic inspection and maintenance
(5)Reattach the end cover.
5-3 Replacing the shutter
5-3 Replacing the shutter
w
WARNING
Be careful not to let the shutter drop inside the robot body during
shutter replacement. This could cause breakdowns or damage in
both the shutter and the robot.
1) Remove both shutter clamp plates located at the ends of the robot body.
5
<MF50>
Shutter clamp plate
Periodic inspection and maintenance
2) Fasten the new shutter onto the old shutter (for replacement) with tape as shown in
the photo.
Old shutter
New shutter
<MF50>
Fasten with tape
<MF50>
c
5-10
CAUTION
Attach the tape strongly enough so it will not come loose during the pull-in
task.
If the tape is too thick the shutter will be impossible to pull in, so use tape
with the right thickness such as insulating tape.
5-3 Replacing the shutter
3) Pull gently on the old shutter as shown in the photo so that it will not come loose
from the groove in the stroke cover, and draw in the new shutter.
Be careful at this time not to let the new shutter twist, warp or hang up.
<MF50>
5
Periodic inspection and maintenance
<MF50>
4) After finished installing the new shutter, adjust its position. Then reinstall the
shutter clamp plate so that there is no looseness or play in the shutter.
<MF50>
Shutter clamp plate
5-11
5-4 Replacing the shutter roller
5-4 Replacing the shutter roller
w
WARNING
Be careful not to drop the tools and bolts onto the shutter or into
the robot body during shutter roller replacement. This could cause
breakdowns or damage in both the shutter and the robot.
c
CAUTION
This procedure applies only to the MF7 and MF75. To replace the shutter
roller for the other MF series robots, the carried object must be removed.
<For MF7>
(1)Remove the eight screws (four on each side) holding the slider cover, and remove
the slider cover.
5
Periodic inspection and maintenance
Slider cover
(2)Make a protective sheet for prevention of bolt fall-down.
Bend a 1cm-portion of 5cm-square sheet 90° as shown below.
5-12
5-4 Replacing the shutter roller
(3)Insert the protective sheet into the clearance, remove the two screws (one on each
side) that secure the shutter roller, and remove the shutter roller.
Protective sheet
Shutter roller
(4)With the protective sheet kept inserted into the clearance, install a new shutter
roller. When installing the new shutter roller, place its metal plate against the
slider.
5
(5)Reattach the slider cover and cap.
<For MF75>
(1)Remove the cap on the side cover.
Cap
5-13
Periodic inspection and maintenance
Place the shutter roller against the slider.
5-4 Replacing the shutter roller
(2)Remove the eight screws (four on each side) holding the slider cover, and remove
the slider cover.
Slider cover
(3)Remove the two screws (one on each side) holding the shutter roller, and remove
the shutter roller.
5
Periodic inspection and maintenance
(4)Install the new shutter roller and place its metal plate against the slider.
Place the shutter roller against the slider.
(5)Reattach the slider cover and cap.
5-14
5-5 Maintenance parts
5-5 Maintenance parts
<MF7>
Part name
Shutter
Shutter roller
Part No.
Remarks
KCT-M229J-X00
MF7/MF7D: up to serial No. 3000st
KCT-M22LK-X00
MF7/MF7D: serial No. 3000st and up
KCT-M224M-000
<MF15>
Part name
Shutter
Part No.
Remarks
KBW-M229J-X00
MF15: up to serial No. 3000st
KBW-M22LK-X00
MF15: serial No. 3100st and up
KBW-M225M-X00
MF15D: up to serial No. 2800st
KBW-M225N-X00
MF15D: serial No. 2900st and up
5
<MF20/MF30>
Part name
Remarks
KBS-M229J-X01
MF20: up to serial No. 3050st,
MF30: up to serial No. 3000st
KBS-M22LK-X01
MF20: serial No. 3150st and up,
MF30: serial No. 3100st and up
KBS-M225M-X03
MF20D: up to serial No. 3050st,
MF30D: up to serial No. 2950st
KBS-M225N-X03
MF20D: serial No. 3150st and up,
MF30D: serial No. 3050st and up
Periodic inspection and maintenance
Shutter
Part No.
<MF50/MF100>
Part name
Shutter
Part No.
Remarks
KBD-M229J-X03
MF50/MF100
KBD-M22LK-X01
MF50D/MF100D
<MF75>
Part name
Shutter
Shutter roller
Part No.
Remarks
KCN-M229J-X00
MF75
KCN-M22LK-X00
MF75D
KCN-M224M-000
5-15
MEMO
5-16
Chapter 6
Troubleshooting
Contents
6-1 If you suspect trouble
6-1
6-2 Feedback error
6-1
6-3 Magnetic pole detection error
6-3
6-4 Overload
6-4
6-5 Position deviation error
6-5
6-1 If you suspect trouble
6-1 If you suspect trouble
If an error such as a feedback error and overload occurs, check the following points to
find the solution before you determine the robot or controller has malfunctioned. If the
trouble still exists even after checking these points, please contact us with a detailed
description of the trouble.
6-2 Feedback error
Feedback error 1
External force or friction is applied
to slider when power is turned on.
YES
Remove external force and
friction and restart the robot.
NO
Turn power off and check slider
movement by moving it by hand.
Robot mechanical movement is
heavy at point where power is
turned on.
YES
NO
Check wiring by referring to
robot manual.
YES
* Try to turn on power in another
place to check whether the robot
operates normally.
Correct wiring or replace
defective connector pins.
NO
Robot number parameter is incorrect.
YES
Initialize parameters.
NO
If replacement controller is available,
check by exchanging the controllers.
Controller is defective.
YES
Replace the controller.
NO
External noise is large.
YES
6
Troubleshooting
Check robot number on
HPB screen while referring to
SR1 controller user's manual.
Connector wiring is incorrect.
Repair the robot. *
Take noise reduction measures.
NO
Consult us.
Requires repair or parts replacement.
Contact us.
6-1
6-2 Feedback error
Feedback error 2
Feedback error 4
Poor wiring connection or
connector is disconnected.
• Check signal wire if
feedback error 2 occurs.
• Check motor wire if
feedback error 4 occurs.
Check resistance between
wires (U-V, V-W, W-U).
MF7/MF15 : 6.5Ω
MF20 : 7.5Ω
MF30 : 8.3Ω
MF50 : 3.6Ω
MF75 : 3.1Ω
MF100 : 1.0Ω
Enter teaching mode in
emergency stop and check
current position display.
YES
Securely connect wires and
connectors.
NO
Wiring or cable is broken.
(Electrical discontinuity)
YES
Replace the cable.
NO
Motor resistance is abnormal.
YES
Repair
NO
Current position display on HPB
fluctuates. *
YES
Repair
* Current reading varies even though
slider is stopped.
Check robot number on HPB
screen while referring to SR1
controller user's manual.
6
If replacement controller is
available, check by
exchanging the controllers.
NO
Robot number parameter is incorrect.
YES
Initialize parameters.
NO
Controller is defective.
YES
Replace the controller.
Troubleshooting
NO
External noise is large.
YES
Take noise reduction measures.
NO
Consult us.
Requires repair or parts replacement.
Contact us.
6-2
6-3 Magnetic pole detection error
6-3 Magnetic pole detection error
Magnetic pole detection error
Motor wire is disconnected.
YES
Securely make connections.
NO
External force or friction is applied
to slider when power is turned on.
YES
Remove external force and
friction and restart the robot.
NO
Turn power off and check slider
movement by moving it by hand.
Robot mechanical movement is
heavy at point where power is
turned on.
YES
Repair the robot. *
NO
Check wiring by referring to
robot manual.
Connector wiring is incorrect.
YES
* Try to turn on power in another
place to check whether the robot
operates normally.
Correct wiring or replace
defective connector pins.
NO
Consult us.
6
6-3
Troubleshooting
Requires repair or parts replacement.
Contact us.
6-4 Overload
6-4 Overload
Overload
Check with duty monitor.
Operation duty is too high.
YES
Check operating conditions by
referring to the manual.
NO
External force or friction
is applied to slider.
YES
Remove external force and friction.
NO
Turn power off and check slider
movement by moving it by hand.
Robot mechanical movement is heavy.
YES
Repair
NO
6
Check resistance between
wires (U-V, V-W, W-U).
MF7/MF15 : 6.5Ω
MF20 : 7.5Ω
MF30 : 8.3Ω
MF50 : 3.6Ω
MF75 : 3.1Ω
MF100 : 1.0Ω
Troubleshooting
Check robot number on
HPB screen while referring to
SR1 controller user's manual.
Motor cable is broken or frayed.
YES
Replace the cable.
NO
Motor resistance is abnormal.
YES
Repair
NO
Robot number parameter is incorrect.
YES
Initialize parameters.
NO
If replacement controller is available,
check by exchanging the controllers.
Controller is defective.
YES
Replace the controller.
NO
External noise is large.
YES
Take noise reduction measures.
NO
Consult us.
Requires repair or parts replacement.
Contact us.
6-4
6-5 Position deviation error
6-5 Position deviation error
Position deviates.
The position deviates after
moving the robot or set up
of workpiece tool.
Operation was correct,
but position deviates.
Robot bumped into something,
or there are traces of bumping
into (rubbing against) something.
Yes
Is cable broken?
Are cables correctly wired?
Are connectors correctly fitted?
No
No
Replace
the cable.
Yes
(1) Check tool and workpiece for warping.
(2) Check robot alignment.
Check wiring and
connectors.
No
Are the robot, tools and
workpiece correctly installed?
Mechanical
cause
No
Check installation
method.
Check for looseness of
robot mechanical parts.
Troubleshooting
Yes
6
Does the position return
after return-to-origin operation?
Yes
(1) Check for looseness of
mechanical parts. Retighten
if necessary.
(2) Replace mechanical parts.
Yes
Electrical cause
Is there a large source of
noise nearby?
No
Take measures
against noise.
Check or replace the motor, cable and controller.
6-5
MEMO
6-6
Chapter 7
Specifications
Contents
7-1 Main unit
7-1
7-1-1 MF7
7-1-2 MF15
7-1-3 MF20
7-1-4 MF30
7-1-5 MF50
7-1-6 MF75
7-1-7 MF100
7-1
7-8
7-14
7-20
7-26
7-30
7-34
7-2 Robot connector (I/O signal connector)
7-38
7-3 Robot connector (motor connector)
7-38
7-4 Robot cable (I/O signal wires)
7-39
7-5 Robot cable (motor wires)
7-39
7-1 Main unit
7-1 Main unit
7
7-1-1 MF7
l Basic specifications
MF7
Specifications
Model name
Driving method
MF7D
Steel cored linear motor flat magnet
Repeated positioning accuracy (µm)
±5
Scale (μm)
Magnetic method, resolution: 1
Maximum speed (mm/sec) 2
2500
Maximum carrying weight (kg) 1
10
Rated thrust (N)
37
Maximum stroke (mm)
4000
Bearing method
3800
1 guide rails and 2 blocks (with retainer)
Maximum cross-section outside
dimensions (mm)
W85×H80 (excluding cable carrier)
Overall length (mm)
Stroke length + 280
Cable length (m)
Stroke length + 480
Standard : 3.5 Option: 5/10
SR1-P, RCX221, RCX240, RDP, TS-P
1: Weight per one carrier
2: See the maximum speed table below.
Payload (kg)
Maximum speed (m/s)
7 or less
2.5
8
2.3
9
2.2
10
2.1
Maximum speed (m/s)
Controller
3.0
2.5
2.0
1.5
1.0
0.5
0
0 1 2 3 4 5 6 7 8 9 10
Payload (kg)
l Static load moment
MY
(Unit: N•m)
MY
MP
MR
156
156
194
MP
l Allowable overhang *
MR
*Distance from the center on the top face of slider to the gravity center of the item being
carried. (This is calculated assuming that the service life of the guide is 10,000km.)
■ Horizontal installation
A
C
B
1kg
3kg
5kg
7kg
9kg
10kg
A
3000
3000
2900
2400
2200
2100
B
3000
1350
830
580
460
410
(Unit: mm)
C
680
215
125
85
60
55
7-1
145.4
20.5
14
M
49
40
20.5
14
5
2.6
Detail of section D
1.5
10
Cross-section of E-E
2
11
6
42.4
85.8
116.4
77
40
E
90
E
100
14
16
18
20
22
24
26
12
28
13
30
14
32
15
34
16
36
17
38
18
40
19
42
20
44
21
46
22
Weight (kg) 5.8 6.5 7.3 8.0 8.7 9.4 10.1 10.9 11.6 12.3 13.0 13.7 14.5 15.2 15.9 16.6 17.3 18.1 18.8 19.5
12
11
10
10
8
9
200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100
8
B
7
C
6
4
3
A
5
380 480 580 680 780 880 980 1080 1180 1280 1380 1480 1580 1680 1780 1880 1980 2080 2180 2280
L
Effective stroke 100 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000
C ±0.02
A×100
L
Effective stroke
2-φ10H7 Refer to cross-section of E-E.
B-M4×0.7 Depth 9
Ground terminal (M4)
(190)
140±5 (L side origin position)
(140)
40±1
110
4-φ4H7 Depth 10
80
(Note 1)
50
8-M5×0.8 Depth 10
±0.02
30
Note 1. Distance from both ends to the mechanical stopper.
Note 2. The origin is set on the L side at the time of shipment. It can be changed to the R side
by parameter setting.
Note 3. The drawings on this page show the unit with horizontal-right-type cable carrier (RH).
Cross-section of cable carrier
S
24
15
5.7
3.2
Optional cable carrier M type Optional cable carrier S type
170.4
D 10
80 : Top face of slider
(79.5)
58.7
Horizontal-left-type cable carrier (LH)
(φ10H7)
(Between φ4H7±0.02)
(79)
65
(100)
7-2
64.5
(90)
(40)
(140)
140±5 (R side origin position)
40±1
(Note 1)
7
50
Specifications
MF7 single-carriage horizontal mount model Standard type
7-1 Main unit
66
50
2.6
(Diameter of roller:φ30)
Note 4
Detail of section D
5
179
1.5
84.8
77
10
37
138.5
173.5
(216.5)
Cross-section of E-E
2
11
6
(φ10H7)
40
E
90
E
Ground terminal (M4)
4-φ4H7 Depth 10
8-M5×0.8 Depth 10
L
Effective stroke
A×100
2-φ10H7 Refer to cross-section of E-E. C ±0.02 B-M4×0.7 Depth 9
(190)
105
(140)
110
40±1
80
(Note 1)
50
±0.02
30
140±5 (L side origin position)
(50)
100
(90)
(40)
(140)
Note 5
140±5 (R side origin position)
40±1
(Note 1)
9
10
11
12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42
200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 4100
8
C
7
7-3
Specifications
Weight (kg) 5.8 6.5 7.3 8.0 8.7 9.4 10.1 10.9 11.6 12.3 13.0 13.7 14.5 15.2 15.9 16.6 17.3 18.1 18.8 19.5 20.2 20.9 21.7 22.4 23.1 23.8 24.5 25.3 26.0 26.7 27.4 28.1 28.9 29.6 30.3 31.0 31.7 32.5 33.2 33.9
10 12 14 16 18 20 22 24 26 28 30 32 34 36 38 40 42 44 46 48 50 52 54 56 58 60 62 64 66 68 70 72 74 76 78 80 82 84 86
6
8
5
3
A
B
4
380 480 580 680 780 880 980 1080 1180 1280 1380 1480 1580 1680 1780 1880 1980 2080 2180 2280 2380 2480 2580 2680 2780 2880 2980 3080 3180 3280 3380 3480 3580 3680 3780 3880 3980 4080 4180 4280
L
Effective stroke 100 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000
Note 1. Distance from both ends to the mechanical stopper.
Note 4. For models with a 3,000mm or longer stroke, a roller is installed to prevent the
Note 2. The origin is set on the L side at the time of shipment. It can be changed to the R side
cable carrier from sagging.
by parameter setting.
Note 5. Protrusion is the distance the cable carrier extends from the edge of the unit.
Note 3. The drawings on this page show the unit with horizontal-right-type cable carrier (RH).
φ7.5
φ6.7
Cross-section of cable carrier
35
29
80 : Top face of slider
(79.5)
58.7
D 10
64.5
50
Horizontal-left-type cable carrier (FLH)
5.7
3.2
(79)
65 (Between φ4H7±0.02)
MF7 single-carriage horizontal mount model Standard type (For optional L-type cable carrier)
7-1 Main unit
7
M
49
40
20.5
14
147
5
Detail of section D
1.5
2.6
Installation
surface
10
2
11
6
42.4
84.8
118
77
Cross-section of E-E
10
40
100
16
18
20
22
24
11
26
12
28
13
30
14
32
15
34
16
36
17
38
18
40
19
42
20
44
21
46
22
200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100
14
10
C
12
9
Weight (kg) 5.8 6.5 7.3 8.0 8.7 9.4 10.1 10.9 11.6 12.3 13.0 13.7 14.5 15.2 15.9 16.6 17.3 18.1 18.8 19.5
10
8
8
7
B
6
3
5
380 480 580 680 780 880 980 1080 1180 1280 1380 1480 1580 1680 1780 1880 1980 2080 2180 2280
L
A
4
B-M4×0.7 Depth 9
Ground terminal (M4)
4-φ4H7 Depth 10
8-M5×0.8 Depth 10
A×100
C ±0.02
L
Effective stroke
2-φ10H7 Refer to cross-section of E-E.
Effective stroke 100 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000
E
90
E
(190)
140±5 (L side origin position)
(140)
40±1
110
(Note 1)
80
50
±0.02
30
Note 1. Distance from both ends to the mechanical stopper.
Note 2. The origin is set on the L side at the time of shipment. It can be changed to the R side
by parameter setting.
Note 3. The drawings on this page show the unit with horizontal-right-type cable carrier (RH).
Cross-section of cable carrier
S
24
15
20.5
14
Optional cable carrier M type Optional cable carrier S type
172
5.7
3.2
D
12.5
80 : Top face of slider
(79.5)
58.7
Horizontal-left-type cable carrier (FLH)
(φ10H7)
(Between φ4H7±0.02)
(79)
65
(92)
7-4
64.5
(90)
(40)
140±5 (R side origin position)
40±1
(Note 1)
(140)
7
50
Specifications
MF7 single-carriage horizontal mount model Flat type
7-1 Main unit
170.4
M
49
40
145.4
5
2.6
Detail of section D
1.5
2
11
6
42.4
85.8
116.4
10
(100)
40
E
90
E
100
B-M4×0.7 Depth 9
8
9
20
22
10
11
24
26
12
28
13
30
14
32
15
34
16
36
17
38
18
40
19
42
20
44
21
46
22
48
23
50
24
Weight (kg) 9.3 10.2 11.1 12.0 12.9 13.9 14.8 15.7 16.6 17.5 18.5 19.4 20.3 21.2 22.1 23.1 24.0 24.9 25.8 26.7
18
400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300
7
16
C
6
5
12
A
B
580 680 780 880 980 1080 1180 1280 1380 1480 1580 1680 1780 1880 1980 2080 2180 2280 2380 2480
L
14
Ground terminal (M4)
4-φ4H7 Depth 10
8-M5×0.8 Depth 10
Effective stroke
2-φ10H7 Refer to cross-section of E-E.
(190)
Effective stroke 100 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000
Cross-section of E-E
D 10
Note 1. Position of the table slider when returned to the origin.
Note 2. Distance from both ends to the mechanical stopper.
20.5
14
80 : Top face of slider
(79.5)
58.7
Optional cable carrier S type
Cross-section of cable carrier
S
24
15
20.5
14
Optional cable carrier M type
5.7
3.2
77
(φ10H7)
(Between φ4H7±0.02)
(79)
65
64.5
50
140±5 (Note 1)
40±1
110
80
(Note 2)
50
±0.02
30
A×100
C
±0.02
L
(200 : Minimum distance between carriages)
Effective stroke
(90)
(40)
140±5 (Note 1)
40±1
(Note 2)
Specifications
MF7D double-carriage horizontal mount model Standard type
7-1 Main unit
7
7-5
84.8
77
10
179
1.5
(Diameter of roller:φ30)
Note 3
37
5
2.6
138.5
173.5
(216.5)
40
E
90
E
Ground terminal (M4)
A×100
(90)
100
Ground terminal (M4)
2-φ10H7 Refer to cross-section of E-E. C ±0.02 B-M4×0.7 Depth 9
105
(190)
(40)
18
20
22
24
26
28
30
14
32
15
34
16
36
17
38
18
40
19
42
20
44
21
46
22
48
23
50
24
52
25
54
26
56
27
58
28
60
29
62
30
64
31
66
32
68
33
70
34
72
35
74
36
76
37
78
38
80
39
82
40
84
41
86
42
Weight (kg) 9.3 10.2 11.1 12.0 12.9 13.9 14.8 15.7 16.6 17.5 18.5 19.4 20.3 21.2 22.1 23.1 24.0 24.9 25.8 26.7 27.7 28.6 29.5 30.4 31.3 32.3 33.2 34.1 35.0 35.9 36.9 37.8 38.7 39.6 40.5 41.5 42.4 43.3
16
13
14
12
12
11
400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 4100
10
B
9
C
8
6
5
7
580 680 780 880 980 1080 1180 1280 1380 1480 1580 1680 1780 1880 1980 2080 2180 2280 2380 2480 2580 2680 2780 2880 2980 3080 3180 3280 3380 3480 3580 3680 3780 3880 3980 4080 4180 4280
L
A
Effective stroke 100 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800
Note 3. For models with a 3,000mm or longer stroke, a roller is installed to prevent the cable carrier from sagging.
Note 4. Protrusion is the distance the cable carrier extends from the edge of the unit.
Cross-section of E-E
2
11
6
(φ10H7)
(50)
(50)
L
Note 4 140±5 (Note 1) Effective stroke
(200 : Minimum distance between carriages) 140±5 (Note 1) Note 4
110
Effective stroke
40±1
40±1
80
(Note 2)
(Note 2)
4-φ4H7 Depth 10
50
8-M5×0.8 Depth 10
30±0.02
7
Note 1. Position of the table slider when returned to the origin.
Note 2. Distance from both ends to the mechanical stopper.
φ7.5
φ6.7
Cross-section of cable carrier Detail of section D
66
50
D 10
5.7
3.2
80 : Top face of slider
(79.5)
58.7
35
29
64.5
50
7-6
(79)
65 (Between φ4H7±0.02)
Specifications
MF7D double-carriage horizontal mount model Standard type (For optional L-type cable carrier)
7-1 Main unit
M
49
40
20.5
14
147
5
Detail of section D
1.5
2.6
Installation
surface
10
2
11
6
42.4
84.8
118
10
Cross-section of E-E
58.7
D
(92)
40
E
90
E
100
18
20
22
24
26
28
30
32
15
34
16
36
17
38
18
40
19
42
20
44
21
46
22
48
23
50
24
Weight (kg) 9.3 10.2 11.1 12.0 12.9 13.9 14.8 15.7 16.6 17.5 18.5 19.4 20.3 21.2 22.1 23.1 24.0 24.9 25.8 26.7
16
14
14
13
12
12
400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300
11
B
10
C
9
6
5
8
580 680 780 880 980 1080 1180 1280 1380 1480 1580 1680 1780 1880 1980 2080 2180 2280 2380 2480
L
A
7
B-M4×0.7 Depth 9
Ground terminal (M4)
4-φ4H7 Depth 10
8-M5×0.8 Depth 10
Effective stroke
C±0.02
Ground terminal (M4)
(90)
(40)
L
(200 : Minimum distance between carriages) 140±5 (Note 1)
40±1
Effective stroke
(Note 1)
A×100
2-φ10H7 Refer to cross-section of E-E.
(190)
Effective stroke 100 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000
Note 1. Position of the table slider when returned to the origin.
Note 2. Distance from both ends to the mechanical stopper.
Cross-section of cable carrier
S
24
15
20.5
14
Optional cable carrier M type Optional cable carrier S type
172
5.7
3.2
80 : Top face of slider
(79.5)
12.5
77
(φ10H7)
(Between φ4H7±0.02)
(79)
65
64.5
50
140±5 (Note 1)
40±1
110
80
(Note 1)
50
30±0.02
Specifications
MF7D double-carriage horizontal mount model Flat type
7-1 Main unit
7
7-7
7-1 Main unit
7-1-2 MF15
Model name
MF15
Specifications
Driving method
MF15-W
MF15D
MF15D-W
Steel cored linear motor flat magnet
Repeated positioning accuracy (µm)
±5
Scale (μm)
Magnetic method, resolution: 1
Maximum speed (mm/sec) 2
2500
Maximum carrying weight (kg) 1
30
Rated thrust (N)
54
Maximum stroke (mm)
4000
Bearing method
2000
3800
1800
2 guide rails and 4 blocks (with retainer)
Maximum cross-section outside
dimensions (mm)
W100×H80 (excluding cable carrier)
Overall length (mm)
Stroke length + 260
Cable length (m)
Stroke length + 460
Standard : 3.5 Option: 5/10
Controller
SR1-P, RCX221, RCX240, RDP, TS-P
1: Weight per one carrier
2: See the maximum speed table below.
Payload (kg)
Maximum speed (m/s)
15 or less
2.5
20
2.2
25
1.8
30
1.5
l Static load moment
Maximum speed (m/s)
7
l Basic specifications
3.0
2.5
2.0
1.5
1.0
0.5
00 5 10 15 20 25 30 35
Payload (kg)
MY
(Unit: N•m)
MY
MP
MR
290
291
256
MP
MR
7-8
7-1 Main unit
l Allowable overhang *
*Distance from the center on the top face of slider to the gravity center of the item being
carried. (This is calculated assuming that the service life of the guide is 10,000km.)
7
■ Horizontal installation
C
B
(Unit: mm)
A
B
C
5kg
3000
3000
915
10kg
2604
1542
481
15kg
2368
1051
340
20kg
1820
600
260
25kg
1470
450
175
30kg
1250
310
145
Specifications
A
■ Vertical installation
B
A
C
(Unit: mm)
A
B
C
5kg
865
1880
3060
10kg
410
905
2115
15kg
255
575
1910
20kg
170
410
1780
25kg
120
295
1660
30kg
90
215
1440
7-9
100
3.7
S
24
15
Detail of section G
2
M
Cross-section of cable carrier
49
40
G
100
L
66
50
Optional cable carrier L type
188
184
φ8
φ7.5
32.5
A
80
200
Effective stroke
L
A
B
C
D
Weight (kg)
300
560
80
2
6
400
8.3
400
660
30
3
8
500
9.3
500
760
80
3
8
600
10.3
600
860
30
4
10
700
11.3
700
960
80
4
10
800
12.3
D ±0.02
(A)
(Note 3)
30
(Note 2)
31±1
(130 : When at L side origin)
130±5 (R side origin position)
800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000
1060 1160 1260 1360 1460 1560 1660 1760 1860 1960 2060 2160 2260 2360 2460 2560 2660 2760 2860 2960 3060 3160 3260 3360 3460 3560 3660 3760 3860 3960 4060 4160 4260
30 80 30 80 30 80 30 80 30 80 30 80 30 80 30 80 30 80 30 80 30 80 30 80 30 80 30 80 30 80 30 80 30
5
5
6
6
7
7
8
8
9
9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 17 17 18 18 19 19 20 20 21
12 12 14 14 16 16 18 18 20 20 22 22 24 24 26 26 28 28 30 30 32 32 34 34 36 36 38 38 40 40 42 42 44
900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 4100
13.3 14.3 15.4 16.4 17.4 18.4 19.4 20.4 21.4 22.4 23.4 24.4 25.4 26.4 27.4 28.4 29.4 30.4 31.4 32.4 33.4 34.4 35.8 36.8 37.8 38.8 39.8 40.8 41.8 42.8 43.8 44.8 45.8
Note 4. For models with a 3,000mm or longer stroke and an optional L type cable carrier,
a roller is installed to prevent the cable carrier from sagging.
Note 5. Protrusion is the distance the cable carrier extends from the edge of unit when an
optional L type cable carrier is used.
2-φ10H7 Depth 7
L
Effective stroke
Bx200
C-M6x1.0 Depth 10
Ground terminal (M4)
130±5 (L side origin position)
(130 : When at R side origin)
186
90
68
2-φ6H7 Depth 10
31±1
4-M6x1.0 Depth 12
48 ±0.02
(Note 2)
(Between φ6H7±0.02)
Note 1. Distance from both ends to the mechanical stopper.
Note 2. The origin is set on the L side at the time of shipment. It can be changed to the R
side by parameter setting.
Note 3. For models with a 2,100mm or longer stroke, optional L type cable carriers can
only be used.
20.5
14
7.2
4.5
Optional cable carrier S / M type
186.5 : M type
(161.5 : S type)
20.5
14
80 : Top face of slider
66
20
35
29
167
φ30
Diameter of roller
90
100
7-10
94
84
7
60
Specifications
MF15 single-carriage horizontal mount model
7-1 Main unit
7-11
66
50
20.5
14
14
Optional cable carrier
M type
Optional cable carrier
L type
99.5
M type
L type
20
103.5
29
24
292.4
S type
6.2
79
20
G
20
80:
Top face of slider 66
Standard and S types
Ground terminal (M4)
E
Ground terminal (M4)
4.5
7.2
Detail of section G
60
20.5
31±2
(Note 1)
(130)
130±5
80
200
(L side origin position)
A
2-φ10H7 Depth 7
Effective stroke
L
A
B
C
D
E
Weight (kg)
300
560
80
2
6
400
320
8.3
400
660
30
3
8
500
370
9.3
500
760
80
3
8
600
420
10.3
600
860
30
4
10
700
470
11.3
700 800 900 1000
960 1060 1160 1260
80
30
80
30
4
5
5
6
10
12
12
14
800 900 1000 1100
520 570 620 670
12.3 13.3 14.3 15.4
1100
1360
80
6
14
1200
720
16.4
1200
1460
30
7
16
1300
770
17.4
1300
1560
80
7
16
1400
820
18.4
1400
1660
30
8
18
1500
870
19.4
1500
1760
80
8
18
1600
920
20.4
1600
1860
30
9
20
1700
970
21.4
1700
1960
80
9
20
1800
1020
22.4
1800
2060
30
10
22
1900
1070
23.4
1900
2160
80
10
22
2000
1120
24.4
4-M6×1.0 Depth 13
2-φ6H7 Depth 10
Standard and S types
L
Effective stroke
Ground terminal (M4)
D±0.02
B×200
C-M6×1.0 Depth 10
Note 1. Distance from both ends to the mechanical stopper.
Note 2. The origin is set on the R side at the time of shipment. It can be changed to the L side by parameter setting.
Note 3. Protrusion is the distance the cable carrier extends from the edge of unit when an optional L type cable carrier is used.
l
49
40
35
φ7.7
S
M
L
φ7.5
Cross-section of optional cable carrier
15
197
3.7
2
197
6
100
24
2000
2260
30
11
24
2100
1170
25.4
48±0.02
68
90
(186)
112
130±5 (R side origin position)
(130)
(A)
(50: Note 3)
31±2
(Note 1)
(94)
84 (Between φ6H7±0.02)
Specifications
MF15 single-carriage wall mount model
7-1 Main unit
7
100
3.7
S
24
15
Detail of section G
2
M
Cross-section of cable carrier
49
40
G
100
L
66
50
Optional cable carrier L type
188
184
φ8
φ7.5
32.5
31±1
(Note 2)
30
(Note 3)
A
80
D ±0.02
(A)
30
(Note 3)
Note 4. For models with a 3,000mm or longer stroke and an optional L type cable carrier,
a roller is installed to prevent the cable carrier from sagging.
Note 5. Protrusion is the distance the cable carrier extends from the edge of unit when an
optional L type cable carrier is used.
2-φ10H7 Depth 7
Ground terminal (M4)
(Note 2)
(200 : Minimum distance between carriages)
130±5 (Note 1)
186
2-φ6H7 Depth 10
90
68
4-M6x1.0 Depth 12
±0.02
31±1
48
Effective stroke
L
Bx200
C-M6x1.0 Depth 10
Ground terminal (M4)
2-φ6H7 Depth 10
4-M6x1.0 Depth 12
Effective stroke
(Between φ6H7±0.02)
8
10
10
12
12
5
14
6
14
6
80
16
7
30
16
7
80
18
8
30
18
8
80
20
9
30
20
9
80
30
22
10
80
22
10
24
11
30
24
11
80
30
26
12
80
26
12
30
28
13
80
28
13
30
30
14
80
30
14
30
32
15
80
32
15
30
34
16
80
34
16
30
36
17
80
36
17
30
38
18
80
38
18
30
40
19
80
40
19
30
42
20
80
42
20
30
44
21
Weight (kg) 10.3 11.5 12.6 13.7 14.8 16.0 17.1 18.2 19.3 20.5 21.6 22.7 23.8 25.0 26.1 27.2 28.3 29.5 30.6 31.7 32.8 34.0 35.1 36.2 37.4 38.5 39.6 41.0 42.2 43.3 44.4 45.5 46.7 47.8 48.9 50.0 51.2 52.3
8
5
30
6
4
80
400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 4100
4
30
D
3
80
C
3
30
2
80
80
A
B
30
560 660 760 860 960 1060 1160 1260 1360 1460 1560 1660 1760 1860 1960 2060 2160 2260 2360 2460 2560 2660 2760 2860 2960 3060 3160 3260 3360 3460 3560 3660 3760 3860 3960 4060 4160 4260
L
Effective stroke 100 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800
200
186
90
68
±0.02
48
130±5 (Note 1)
Note 1. Position of the table slider when returned to the origin.
Note 2. Distance from both ends to the mechanical stopper.
Note 3. For models with a 2,100mm or longer stroke, optional L type cable carriers can
only be used.
20.5
14
7.2
4.5
Optional cable carrier S / M type
186 : M type
(161 : S type)
20.5
14
80 : Top face of slider
66
20
35
29
167
φ30
Diameter of roller
90
100
(Between φ6H7±0.02)
94
84
7-12
60
7
84
Specifications
MF15D double-carriage horizontal mount model
7-1 Main unit
7-13
14
20.5
292.4
20.5
14
Optional cable carrier
L type
24
103.5
S type
Ground terminal (M4)
Optional cable carrier
M type
20
99.5
M type
L type
6.2
E
Ground terminal (M4)
66
G
20
Standard and S types
80:
Top face of slider
20
79
4.5
7.2
Detail of section G
31±2
(Note 1)
(Note 3)
(50)
60
29
A
130±5
80
48±0.02
68
90
(186)
Effective stroke
L
A
B
C
D
E
Weight (kg)
100
560
80
2
6
400
220
10.3
200
660
30
3
8
500
270
11.5
300
760
80
3
8
600
320
12.6
400
860
30
4
10
700
370
13.7
500 600 700 800 900 1000 1100
960 1060 1160 1260 1360 1460 1560
80
30
80
30
80
30
80
4
5
5
6
6
7
7
10
12
12
14
14
16
16
800 900 1000 1100 1200 1300 1400
420 470 520 570 620 670 720
14.8 16.0 17.1 18.2 19.3 20.5 21.6
1200
1660
30
8
18
1500
770
22.7
1300
1760
80
8
18
1600
820
23.8
Ground terminal (M4)
L
1400
1860
30
9
20
1700
870
25.0
1500
1960
80
9
20
1800
920
26.1
1600
2060
30
10
22
1900
970
27.2
1700
2160
80
10
22
2000
1020
28.3
1800
2260
30
11
24
2100
1070
29.5
48±0.02
68
90
(186)
112
(200 : Minimum distance between carriages) 130±5
Effective stroke
4-M6×1.0 Depth 12 4-M6×1.0 Depth 12
2-φ6H7 Depth 10 2-φ6H7 Depth 10
Effective stroke
Standard and S types
D±0.02
B×200
C-M6×1.0 Depth 10
2-φ10H7 Depth 7
112
200
Note 1. Distance from both ends to the mechanical stopper.
Note 2. Protrusion is the distance the cable carrier extends from the edge of unit when an optional L type cable carrier is used.
l
35
φ7.7
S
M
L
φ7.5
Cross-section of optional cable carrier
20
E
66
50
197
3.7
2
197
6
100
84 (Between φ6H7±0.02)
(94)
49
40
(A)
(50: Note 3)
31±2
(Note 1)
84 (Between φ6H7±0.02)
15
(94)
24
Specifications
MF15D double-carriage wall mount model
7-1 Main unit
7
7-1 Main unit
7-1-3 MF20
Model name
MF20
Specifications
Driving method
MF20D
Steel cored linear motor flat magnet
Repeated positioning accuracy (µm)
±5
Scale (μm)
Magnetic method, resolution: 1
Maximum speed (mm/sec) 2
2500
Maximum carrying weight (kg) 1
40
Rated thrust (N)
86
Maximum stroke (mm)
4050
Bearing method
3850
2 guide rails and 6 blocks (with retainer)
Maximum cross-section outside
dimensions (mm)
W150×H80 (excluding cable carrier)
Overall length (mm)
Stroke length + 260
Cable length (m)
Stroke length + 460
Standard : 3.5 Option: 5/10
Controller
SR1-P, RCX221, RCX240, RDP, TS-P
1: Weight per one carrier
2: See the maximum speed table below.
Payload (kg)
Maximum speed (m/s)
20 or less
2.5
25
2.3
30
2.0
35
1.8
40
1.5
l Static load moment
Maximum speed (m/s)
7
l Basic specifications
3.0
2.5
2.0
1.5
1.0
0.5
00 5 10 15 20 25 30 3540 45
Payload (kg)
MY
(Unit: N•m)
MY
MP
MR
373
373
328
MP
MR
7-14
7-1 Main unit
l Allowable overhang *
*Distance from the center on the top face of slider to the gravity center of the item being
carried. (This is calculated assuming that the service life of the guide is 10,000km.)
■ Horizontal installation
A
C
B
Specifications
(Unit: mm)
A
B
C
10kg
3156
1747
1196
15kg
2811
1176
883
20kg
2679
890
717
25kg
2190
720
505
30kg
1830
605
370
35kg
1580
525
275
40kg
1390
465
225
■ Vertical installation
B
A
C
(Unit: mm)
A
B
C
10kg
1220
1320
2540
15kg
870
850
2200
20kg
670
610
2030
25kg
485
400
1280
30kg
350
325
1050
35kg
265
270
890
40kg
235
230
765
7
7-15
238
167
Note 4
90
2.5
7
3.7
S
24
15
M
Cross-section of cable carrier
49
40
G
L
66
50
150
186
φ8
φ7.5
32.5
29±1
(Note 1)
105
A
50 ±0.02
190
70
130±5 (L side origin position)
(130 : When at R side origin)
200
Depth 10
D±0.02
Bx200
L
Effective stroke
(A)
(Note 5)
30
(Note 1)
29±1
(130 : When at L side origin)
130±5 (R side origin position)
8
3
4
4
5
5
6
6
7
7
8
8
9
9
10 10
11
11
12 12 13 13 14 14 15 15 16 16 17 17 18 18 19 19 20 20 21
10 10 12 12 14 14 16 16 18 18 20 20 22 22 24 24 26 26 28 28 30 30 32 32 34 34 36 36 38 38 40 40 42 42 44
200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 4100
8
3
D
6
2
Weight (kg) 8.4 10.1 11.7 13.3 15.0 16.6 18.2 19.8 21.5 23.1 24.7 26.4 28.0 29.6 31.3 32.9 34.5 36.1 37.8 39.4 41.0 42.7 44.3 45.9 47.6 49.2 50.8 52.4 54.1 55.7 57.3 59.0 60.6 62.2 63.9 65.5 67.1 68.7 70.4 72.0
6
4
2
1
B
105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55
C
410 510 610 710 810 910 1010 1110 1210 1310 1410 1510 1610 1710 1810 1910 2010 2110 2210 2310 2410 2510 2610 2710 2810 2910 3010 3110 3210 3310 3410 3510 3610 3710 3810 3910 4010 4110 4210 4310
L
A
Effective stroke 150 250 350 450 550 650 750 850 950 1050 1150 1250 1350 1450 1550 1650 1750 1850 1950 2050 2150 2250 2350 2450 2550 2650 2750 2850 2950 3050 3150 3250 3350 3450 3550 3650 3750 3850 3950 4050
Note 4. For models with a 3,050mm or longer stroke and an optional L type cable carrier,
a roller is installed to prevent the cable carrier from sagging.
Note 5. Protrusion is the distance the cable carrier extends from the edge of unit when an
optional L type cable carrier is used.
+0.015
2-φ10H7 0
C-M6x1.0 Depth 10
Ground terminal (M4)
+0.012
4-φ6H7 0
Depth 10
4-M6x1.0 Depth 12
Note 1. Distance from both ends to the mechanical stopper.
Note 2. The origin is set on the L side at the time of shipment. It can be changed to the R
side by parameter setting.
Note 3. For models with a 2,050mm or longer stroke, optional L type cable carriers can
only be used.
20.5
14
Detail of section G
7.2
4.5
Optional cable carrier S / M type Optional cable carrier L type
240.5 (M option)
215.5 (S option)
(100)
20.5
14
136
φ30
Diameter of roller
80 : Top face of slider
64
14
35
29
(Between
φ6H7±0.02)
120
(100)
7-16
98
7
100
Specifications
MF20 single-carriage horizontal mount model
7-1 Main unit
7-17
9
(5)
290
150
49
40
66
50
Optional cable carrier S type
φ8
φ7.5
105
A
79
200
Effective stroke
L
A
B
C
D
E
Weight (kg)
150
410
105
1
4
200
220
8.4
250
510
55
2
6
300
270
10.1
350
610
105
2
6
400
320
11.7
450
710
55
3
8
500
370
13.3
550
810
105
3
8
600
420
15.0
Depth 10
±0.02
L
Effective stroke
D
Bx200
108
4-φ6H7 0
Depth 10
4-M6x1.0 Depth 12
+0.012
E
70
190
13
(A)
(30 : Note 5)
130±5 (R side origin position)
(130: When at L side origin)
29±1 (Note 1)
50 ±0.02
650 750 850 950 1050 1150 1250 1350 1450 1550 1650 1750 1850 1950 2050 2150 2250 2350 2450 2550 2650 2750 2850 2950 3050 3150 3250 3350 3450 3550 3650 3750 3850 3950 4050
910 1010 1110 1210 1310 1410 1510 1610 1710 1810 1910 2010 2110 2210 2310 2410 2510 2610 2710 2810 2910 3010 3110 3210 3310 3410 3510 3610 3710 3810 3910 4010 4110 4210 4310
55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55
4 4 5 5 6 6 7 7 8 8 9 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 17 17 18 18 19 19 20 20 21
10 10 12 12 14 14 16 16 18 18 20 20 22 22 24 24 26 26 28 28 30 30 32 32 34 34 36 36 38 38 40 40 42 42 44
700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 4100
470 520 570 620 670 720 770 820 870 920 970 1020 1070 1120 1170 1220 1270 1320 1370 1420 1470 1520 1570 1620 1670 1720 1770 1820 1870 1920 1970 2020 2070 2120 2170
16.6 18.2 19.8 21.5 23.1 24.7 26.4 28.0 29.6 31.3 32.9 34.5 36.1 37.8 39.4 41.0 42.7 44.3 45.9 47.6 49.2 50.8 52.4 54.1 55.7 57.3 59.0 60.6 62.2 63.9 65.5 67.1 68.7 70.4 72.0
Note 4. For models with a 3,050mm or longer stroke and an optional L type cable carrier,
a roller is installed to prevent the cable carrier from sagging.
Note 5. Protrusion is the distance the cable carrier extends from the edge of unit when an
optional L type cable carrier is used.
Ground terminal (M4)
Ground terminal (M4)
+0.015
C-M6x1.0 Depth 10
2-φ10H7 0
29±1 (Note 1)
(130 : When at R side origin)
130±5 (L side origin position)
14
64
Top face of slider 80
G
M and L types
Standard and S types
Optional cable carrier L type
100
Note 1. Distance from both ends to the mechanical stopper.
Note 2. The origin is set on the R side at the time of shipment. It can be changed to the L
side by parameter setting.
Note 3. For models with a 2,050mm or longer stroke, optional L type cable carriers can
only be used.
Detail of section G
4.5
7.2
2.5
3.7
M
S
L
Cross-section of optional cable carrier
24
15
7
20.5
14
Optional cable carrier M type
35
29
41.3
20.5
14
325
105
φ30
Diameter of roller
Specifications
120.3
250
150
(Between
φ6H7±0.02)
120
136
MF20 single-carriage wall mount model
7-1 Main unit
7
2.5
7
3.7
(100)
Cross-section of optional cable carrier
M
49
40
L
66
50
G
150
186
φ8
φ7.5
Optional cable carrier L type
Note 4
167
φ30
Diameter of roller
136
32.5
(Note 2)
29±1
105
A
(Note 5)
30
190
70
50±0.02
Depth 10
D±0.02
Bx200
4-M6x1.0 Depth 12
(A)
190
70
50 ±0.02
(Note 5)
(30)
(Note 2)
29±1
130±5 (Note 1)
(200 : Minimum distance between carriages)
+0.012
Depth 10
4-φ6H7 0
Effective stroke
Note 4. For models with a 3,050mm or longer stroke and an optional L type cable carrier,
a roller is installed to prevent the cable carrier from sagging.
Note 5. Protrusion is the distance the cable carrier extends from the edge of unit when an
optional L type cable carrier is used.
+0.015
2-φ10H7 0
C-M6x1.0 Depth 10
Ground terminal (M4)
4-M6x1.0 Depth 12
+0.012
Depth 10
4-φ6H7 0
L
Effective stroke
10
12
12
14
14
6
16
7
16
7
18
8
18
8
20
9
20
9
22
10
22
10
24
11
24
11
26
12
26
12
28
13
28
13
30
14
30
14
32
15
32
15
34
16
34
16
36
17
36
17
38
18
38
18
40
19
40
19
42
20
42
20
44
21
400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 4100
10
6
D
8
5
Weight (kg) 14.9 16.6 18.3 20.0 21.7 23.5 25.2 26.9 28.6 30.3 32.0 33.7 35.4 37.2 38.9 40.6 42.3 44.0 45.7 47.4 49.1 50.8 52.6 54.3 56.0 57.7 59.4 61.1 62.8 64.5 66.3 68.0 69.7 71.4 73.1 74.8 76.5 78.2
8
5
6
4
C
4
2
3
105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55
A
B
3
610 710 810 910 1010 1110 1210 1310 1410 1510 1610 1710 1810 1910 2010 2110 2210 2310 2410 2510 2610 2710 2810 2910 3010 3110 3210 3310 3410 3510 3610 3710 3810 3910 4010 4110 4210 4310
L
Effective stroke 150 250 350 450 550 650 750 850 950 1050 1150 1250 1350 1450 1550 1650 1750 1850 1950 2050 2150 2250 2350 2450 2550 2650 2750 2850 2950 3050 3150 3250 3350 3450 3550 3650 3750 3850
200
130±5 (Note 1)
Note 1. Position of the table slider when returned to the origin.
Note 2. Distance from both ends to the mechanical stopper.
Note 3. For models with a 2,050mm or longer stroke, optional L type cable carriers can
only be used.
S
24
15
Detail of section G
7.2
4.5
20.5
14
238
35
29
240.5 (M option)
215.5 (S option)
Optional cable carrier S / M type
20.5
14
90
80 : Top face of slider
64
14
(Between φ6H7±0.02)
120
(Between φ6H7±0.02)
120
7-18
(100)
7
100
Specifications
MF20D double-carriage horizontal mount model
7-1 Main unit
(5)
290
9
150
41.3
3.7
20.5
14
49
40
66
50
M and L types
G
14
64
Top face of slider 80
79
29±1 (Note 2)
50 ±0.02
105
A
E
+0.015
2-φ10H7 0
D ±0.02
Bx200
+0.012
Depth 10
4-φ6H7 0
4-M6x1.0 Depth 12
Effective stroke
108
+0.012
4-φ6H7 0
Depth 10
4-M6x1.0 Depth 12
Effective stroke
E
70
190
30 (Note 5)
29±1 (Note 2)
50 ±0.02
130±5 (Note 1)
13
(A)
7-19
10
12
12
14
14
16
16
7
18
8
18
8
20
9
20
9
22
10
22
10
24
11
24
11
26
12
26
12
28
13
28
13
30
14
30
14
32
15
32
15
34
16
34
16
36
17
36
17
38
18
38
18
40
19
40
19
42
20
21
44
20
42
220 270 320 370 420 470 520 570 620 670 720 770 820 870 920 970 1020 1070 1120 1170 1220 1270 1320 1370 1420 1470 1520 1570 1620 1670 1720 1770 1820 1870 1920 1970 2020 2070
10
7
E
8
6
Specifications
Weight (kg) 14.9 16.6 18.3 20.0 21.7 23.5 25.2 26.9 28.6 30.3 32.0 33.7 35.4 37.2 38.9 40.6 42.3 44.0 45.7 47.4 49.1 50.8 52.6 54.3 56.0 57.7 59.4 61.1 62.8 64.5 66.3 68.0 69.7 71.4 73.1 74.8 76.5 78.2
8
6
6
5
400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 4100
5
D
4
C
4
2
3
105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55
A
B
3
610 710 810 910 1010 1110 1210 1310 1410 1510 1610 1710 1810 1910 2010 2110 2210 2310 2410 2510 2610 2710 2810 2910 3010 3110 3210 3310 3410 3510 3610 3710 3810 3910 4010 4110 4210 4310
L
Effective stroke 150 250 350 450 550 650 750 850 950 1050 1150 1250 1350 1450 1550 1650 1750 1850 1950 2050 2150 2250 2350 2450 2550 2650 2750 2850 2950 3050 3150 3250 3350 3450 3550 3650 3750 3850
Note 4. For models with a 3,050mm or longer stroke and an optional L type cable carrier,
a roller is installed to prevent the cable carrier from sagging.
Note 5. Protrusion is the distance the cable carrier extends from the edge of unit when an
optional L type cable carrier is used.
70
190
108
L
Ground terminal (M4)
Ground terminal (M4)
Depth 10
C-M6x1.0 Depth 10
(200 : Minimum distance between carriages)
200
130±5 (Note 1)
13
30 (Note 5)
Standard and S types
Optional cable carrier S type
φ8
φ7.5
Optional cable carrier L type
100
Note 1. Position of the table slider when returned to the origin.
Note 2. Distance from both ends to the mechanical stopper.
Note 3. For models with a 2,050mm or longer stroke, optional L type cable carriers can
only be used.
4.5
7.2
Detail of section G
2.5
7
M
L
S
Cross-section of optional cable carrier
24
15
20.5
14
325
105
35
29
Optional cable carrier M type
136
φ30
Diameter of roller
250
150
(Between φ6H7±0.02)
120
(Between φ6H7±0.02)
120
120.3
136
MF20D double-carriage wall mount model
7-1 Main unit
7
7-1 Main unit
7-1-4 MF30
Model name
MF30
Specifications
Driving method
MF30D
Steel cored linear motor flat magnet
Repeated positioning accuracy (µm)
±5
Scale (μm)
Magnetic method, resolution: 1
Maximum speed (mm/sec) 2
2500
Maximum carrying weight (kg) 1
60
Rated thrust (N)
125
Maximum stroke (mm)
4000
Bearing method
3750
2 guide rails and 6 blocks (with retainer)
Maximum cross-section outside
dimensions (mm)
W150×H80 (excluding cable carrier)
Overall length (mm)
Stroke length + 310
Cable length (m)
Stroke length + 560
Standard : 3.5 Option: 5/10
Controller
SR1-P, RCX221, RCX240, RDP, TS-P
1: Weight per one carrier
2: See the maximum speed table below.
Payload (kg)
Maximum speed (m/s)
30 or less
2.5
40
2.2
50
1.8
60
1.5
l Static load moment
Maximum speed (m/s)
7
l Basic specifications
3.0
2.5
2.0
1.5
1.0
0.5
00 10 20 30 40 50 60 70
Payload (kg)
MY
(Unit: N•m)
MY
MP
MR
373
373
328
MP
MR
7-20
7-1 Main unit
l Allowable overhang *
*Distance from the center on the top face of slider to the gravity center of the item being
carried. (This is calculated assuming that the service life of the guide is 10,000km.)
■ Horizontal installation
A
C
B
Specifications
(Unit: mm)
A
B
C
10kg
3364
2485
1284
20kg
2298
1265
694
30kg
2060
859
507
40kg
1570
600
310
50kg
1265
400
180
60kg
1070
350
135
■ Vertical installation
B
A
C
(Unit: mm)
A
B
C
10kg
1290
1320
2730
20kg
650
610
1750
30kg
430
360
1460
40kg
205
230
610
50kg
145
175
470
60kg
105
140
380
7
7-21
(100)
Note 4
167
2.5
7
3.7
49
40
S
M
Cross-section of optional cable carrier
24
15
G
L
66
50
150
186
φ8
φ7.5
32.5
54±1
(Note 1)
155±5 (L side origin position)
(155 : When at R side origin)
105
A
200
50 ±0.02
70
190
Depth 10
D ±0.02
Bx200
Effective stroke
L
(A)
(Note 1)
54±1
(155 : When at L side origin)
155±5 (R side origin position)
6
8
8
6
6
7
7
8
8
9
9
10 10
11
11
12 12 13 13 14 14 15 15 16 16 17 17 18 18 19 19 20 20 21
10 10 12 12 14 14 16 16 18 18 20 20 22 22 24 24 26 26 28 28 30 30 32 32 34 34 36 36 38 38 40 40 42 42 44
5
Weight (kg) 9.0 10.7 12.3 13.9 15.6 17.2 18.8 20.4 22.1 23.7 25.3 27.0 28.6 30.2 31.9 33.5 35.1 36.7 38.4 40.0 41.6 43.3 44.9 46.5 48.2 49.8 51.4 53.0 54.7 56.3 57.9 59.6 61.2 62.8 64.5 66.1 67.7 69.3 71.0 72.6
6
5
4
4
200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 4100
4
D
3
C
3
1
2
105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55
A
B
2
410 510 610 710 810 910 1010 1110 1210 1310 1410 1510 1610 1710 1810 1910 2010 2110 2210 2310 2410 2510 2610 2710 2810 2910 3010 3110 3210 3310 3410 3510 3610 3710 3810 3910 4010 4110 4210 4310
L
Effective stroke 100 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000
Note 3. For models with a 2,100mm or longer stroke, optional L type cable carriers can only
be used.
Note 4. For models with a 3,000mm or longer stroke and an optional L type cable carrier,
a roller is installed to prevent the cable carrier from sagging.
+0.015
2-φ10H7 0
C-M6x1.0 Depth 10
Ground terminal (M4)
+0.012
Depth 10
4-φ6H7 0
4-M6x1.0 Depth 12
Note 1. Distance from both ends to the mechanical stopper.
Note 2. The origin is set on the L side at the time of shipment. It can be changed to the R
side by parameter setting.
20.5
14
Detail of section G
7.2
4.5
Optional cable carrier L type
238
90
φ30
Diameter of roller
Optional cable carrier S / M type
240.5 (M option)
215.5 (S option)
20.5
14
80 : Top face of slider
64
14
35
29
136
120
(Between
φ6H7±0.02)
(100)
7-22
98
7
100
Specifications
MF30 single-carriage horizontal mount model
7-1 Main unit
41.3
3.7
120.3
49
40
φ8
φ7.5
79
14
64
Top face of slider 80
G
105
A
200
Depth 10
Ground terminal (M4)
L
D ±0.02
Bx200
4-M6x1.0 Depth 12
108
+0.012
4-φ6H7 0
Depth 10
Effective stroke
Ground terminal (M4)
+0.015
C-M6x1.0 Depth 10
2-φ10H7 0
54±1 (Note 1)
(155 : When at R side origin)
155±5 (L side origin position)
Standard and S types
Optional cable carrier S type
L
66
50
M and L types
100
70
190
50 ±0.02
155±5 (R side origin position)
(155 : When at L side origin)
54±1 (Note 1)
13
(A)
7-23
4
5
5
6
6
7
7
8
8
9
9
10 10
11
11
12 12 13 13 14 14 15 15 16 16 17 17 18 18 19 19 20 20 21
220 270 320 370 420 470 520 570 620 670 720 770 820 870 920 970 1020 1070 1120 1170 1220 1270 1320 1370 1420 1470 1520 1570 1620 1670 1720 1770 1820 1870 1920 1970 2020 2070 2120 2170
4
10 10 12 12 14 14 16 16 18 18 20 20 22 22 24 24 26 26 28 28 30 30 32 32 34 34 36 36 38 38 40 40 42 42 44
E
8
3
Specifications
Weight (kg) 9.0 10.7 12.3 13.9 15.6 17.2 18.8 20.4 22.1 23.7 25.3 27.0 28.6 30.2 31.9 33.5 35.1 36.7 38.4 40.0 41.6 43.3 44.9 46.5 48.2 49.8 51.4 53.0 54.7 56.3 57.9 59.6 61.2 62.8 64.5 66.1 67.7 69.3 71.0 72.6
8
3
200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 4100
6
2
D
6
4
2
1
B
105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55
C
410 510 610 710 810 910 1010 1110 1210 1310 1410 1510 1610 1710 1810 1910 2010 2110 2210 2310 2410 2510 2610 2710 2810 2910 3010 3110 3210 3310 3410 3510 3610 3710 3810 3910 4010 4110 4210 4310
L
A
Effective stroke 100 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000
Note 1. Distance from both ends to the mechanical stopper.
Note 3. For models with a 2,100mm or longer stroke, optional L type cable carriers can only be used.
Note 2. The origin is set on the R side at the time of shipment. It can Note 4. For models with a 3,000mm or longer stroke and an optional L type cable carrier, a roller is installed to
be changed to the L side by parameter setting.
prevent the cable carrier from sagging.
Detail of section G
2.5
7
20.5
14
4.5
7.2
20.5
14
M
S
Cross-section of optional cable carrier
24
15
35
29
Optional cable carrier L type Optional cable carrier M type
325
105
(5)
290
9
150
φ30
Diameter of roller
250
150
(Between
φ6H7±0.02)
120
136
MF30 single-carriage wall mount model
7-1 Main unit
7
(100)
φ30
Diameter of roller
90
167
7
3.7
M
49
40
G
L
66
50
φ8
φ7.5
150
186
32.5
(Note 2)
54±1
105
A
50 ±0.02
190
70
200
155±5 (Note 1)
+0.015
2-φ10H7 0
Depth 10
D ±0.02
Bx200
Ground terminal (M4)
C-M6x1.0 Depth 10
4-M6x1.0 Depth 12
+0.012
Depth 10
4-φ6H7 0
L
Effective stroke
4-M6x1.0 Depth 12
(A)
155±5 (Note 1)
190
70
50±0.02
(250 : Minimum distance between carriages)
+0.012
Depth 10
4-φ6H7 0
Effective stroke
(Note 2)
54±1
(Between φ6H7±0.02)
136
10
10
12
12
14
14
16
7
16
7
18
8
18
8
20
9
20
9
22
10
22
10
24
11
24
11
26
12
26
12
28
13
28
13
30
14
30
14
32
15
32
15
34
16
34
16
36
17
36
17
38
18
38
18
40
19
40
19
42
20
42
20
44
21
Weight (kg) 17.6 19.3 21.0 22.8 24.5 26.2 27.9 29.6 31.3 33.0 34.7 36.5 38.2 39.9 41.6 43.3 45.0 46.7 48.4 50.2 51.9 53.6 55.3 57.0 58.7 60.4 62.1 63.9 65.6 67.3 69.0 70.7 72.4 74.1 75.8 77.5 79.3
8
6
8
6
500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 4100
5
C
5
D
4
3
4
55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55
A
B
3
710 810 910 1010 1110 1210 1310 1410 1510 1610 1710 1810 1910 2010 2110 2210 2310 2410 2510 2610 2710 2810 2910 3010 3110 3210 3310 3410 3510 3610 3710 3810 3910 4010 4110 4210 4310
L
Effective stroke 150 250 350 450 550 650 750 850 950 1050 1150 1250 1350 1450 1550 1650 1750 1850 1950 2050 2150 2250 2350 2450 2550 2650 2750 2850 2950 3050 3150 3250 3350 3450 3550 3650 3750
Note 1. Position of the table slider when returned to the origin. Note 3. For models with a 2,050mm or longer stroke, optional L type cable carriers can only be used.
Note 2. Distance from both ends to the mechanical stopper.
Note 4. For models with a 3,050mm or longer stroke and an optional L type cable carrier, a roller is installed to
prevent the cable carrier from sagging.
Cross-section of optional cable carrier
S
24
15
Detail of section G
2.5
Note 4
238
Optional cable carrier L type
20.5
14
80 : Top face of slider
64
14
35
29
(Between φ6H7±0.02)
120
(100)
240.5 (M option)
215.5 (S option)
Optional cable carrier S / M type
7.2
4.5
20.5
14
98
7-24
100
7
120
Specifications
MF30D double-carriage horizontal mount model
7-1 Main unit
325
105
49
40
(5)
φ8
φ7.5
14
64
Top face of slider 80
G
79
Standard and S types
Optional cable carrier S type
L
66
50
M and L types
54±1 (Note 2)
50 ±0.02
E
+0.015
2-φ10H7 0
70
190
±0.02
+0.012
Depth 10
4-φ6H7 0
Effective stroke
L
Ground terminal (M4)
4-M6x1.0 Depth 12
108
D
Bx200
Ground terminal (M4)
Depth 10
C-M6x1.0 Depth 10
(250 : Minimum distance between carriages)
200
155±5 (Note 1)
13
105
A
108
+0.012
Depth 10
4-φ6H7 0
4-M6x1.0 Depth 12
Effective stroke
E
70
190
155±5 (Note 1)
50 ±0.02
54±1 (Note 2)
13
(A)
136
7-25
10
12
12
14
14
16
16
7
18
8
18
8
20
9
20
9
22
10
22
10
24
11
24
11
26
12
26
12
28
13
28
13
30
14
30
14
32
15
32
15
34
16
34
16
36
17
36
17
38
18
38
18
40
19
40
19
42
20
21
44
20
42
220 270 320 370 420 470 520 570 620 670 720 770 820 870 920 970 1020 1070 1120 1170 1220 1270 1320 1370 1420 1470 1520 1570 1620 1670 1720 1770 1820 1870 1920 1970 2020
10
7
Specifications
Weight (kg) 17.6 19.3 21.0 22.8 24.5 26.2 27.9 29.6 31.3 33.0 34.7 36.5 38.2 39.9 41.6 43.3 45.0 46.7 48.4 50.2 51.9 53.6 55.3 57.0 58.7 60.4 62.1 63.9 65.6 67.3 69.0 70.7 72.4 74.1 75.8 77.5 79.3
E
8
6
8
6
500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 4100
5
D
5
C
4
3
4
55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55
A
B
3
710 810 910 1010 1110 1210 1310 1410 1510 1610 1710 1810 1910 2010 2110 2210 2310 2410 2510 2610 2710 2810 2910 3010 3110 3210 3310 3410 3510 3610 3710 3810 3910 4010 4110 4210 4310
L
Effective stroke 150 250 350 450 550 650 750 850 950 1050 1150 1250 1350 1450 1550 1650 1750 1850 1950 2050 2150 2250 2350 2450 2550 2650 2750 2850 2950 3050 3150 3250 3350 3450 3550 3650 3750
Note 1. Position of the table slider when returned to the origin. Note 3. For models with a 2,050mm or longer stroke, optional L type cable carriers can only be used.
Note 2. Distance from both ends to the mechanical stopper.
Note 4. For models with a 3,050mm or longer stroke and an optional L type cable carrier, a roller is installed to
prevent the cable carrier from sagging.
4.5
7.2
Detail of section G
120.3
41.3
Optional cable carrier M type
M
S
Cross-section of optional cable carrier
24
15
3.7
2.5
7
20.5
14
Optional cable carrier L type
20.5
14
150
290
9
35
29
φ30
Diameter of roller
250
150
100
(Between φ6H7±0.02)
136
120
(Between φ6H7±0.02)
120
MF30D double-carriage wall mount model
7-1 Main unit
7
7-1 Main unit
7-1-5 MF50
Model name
MF50
Specifications
Driving method
MF50D
Steel cored linear motor flat magnet
Repeated positioning accuracy (µm)
±5
Scale (μm)
Magnetic method, resolution: 1
Maximum speed (mm/sec) 2
2500
Maximum carrying weight (kg) 1
150
Rated thrust (N)
200
Maximum stroke (mm)
4020
Bearing method
3700
2 guide rails and 6 blocks (with retainer)
Maximum cross-section outside
dimensions (mm)
W210×H100 (excluding cable carrier)
Overall length (mm)
Stroke length + 360
Cable length (m)
Stroke length + 680
Standard : 3.5 Option: 5/10
Controller
SR1-P, RCX221, RCX240, RDP, TS-P
1: Weight per one carrier
2: See the maximum speed table below.
Payload (kg)
Maximum speed (m/s)
50 or less
2.5
60
2.4
70
2.2
80
2.1
90
2.0
100
1.9
110
1.8
120
1.7
130
1.6
140
1.6
150
1.5
Maximum speed (m/s)
7
l Basic specifications
3.0
2.5
2.0
1.5
1.0
0.5
0
l Static load moment
0 50 60 70 80 90 100 110 120 130 140 150
Payload (kg)
MY
(Unit: N•m)
MY
MP
MR
830
831
730
MP
MR
7-26
7-1 Main unit
l Allowable overhang *
*Distance from the center on the top face of slider to the gravity center of the item being
carried. (This is calculated assuming that the service life of the guide is 10,000km.)
■ Horizontal installation
A
C
B
Specifications
(Unit: mm)
A
B
C
10kg
4000
4000
3514
20kg
3397
2841
1840
30kg
3045
1873
1247
40kg
2795
1389
964
50kg
2602
1096
797
60kg
2200
530
450
70kg
2000
290
180
80kg
1800
175
150
90kg
1650
150
125
100kg
1500
130
110
110kg
1350
115
95
120kg
1250
100
80
130kg
1150
85
70
140kg
1100
80
65
150kg
1000
70
55
7
7-27
66
50
2.5
7
Detail of slider
(Note 3)
Tool mounting hole
Insert bolt from
lateral side of axis.
Remove two top caps.
J
+0.012
G
1.4
4.8
2.6
210
141
Depth 10
88
(Roller diameter: φ30)
31±1
(Note 1)
D
105
A
200
F-M8x1.25 Depth 15
Ex200
G±0.02
Bx200
C-φ9 Depth 14 (Refer to cross-section of H-H.)
Grounding terminal (M4)
Effective stroke
L
(180 : When at L side origin)
180±5 (R side origin position)
(D)
(A)
(Note 1)
31±1
Note 3. The length under head of M8 hex socket head bolts for installing the robot body must not
be longer than 30mm.
Note 4. For models with a 3,075mm or longer stroke, a roller is installed to prevent the cable
carrier from sagging.
200
H
H
Note 4
Slot width 20: lnsert M3 nut through this slot.
(Nut mountable range: 145)
180±5 (L side origin position)
(180 : When at R side origin)
6
14
51
E
F
Weight (kg)
55
14
6
16
16
58
18
8
40
16
20
62
18
8
66
18
8
107.5 175
70
22
10
42.5
20
9
24
11
74
22
10
78
22
10
110 177.5
20
9
82
26
12
45
24
11
28
13
86
26
12
90
26
12
112.5 180
24
11
80
94
30
14
47.5
28
13
32
15
82.5
98
30
14
101
30
14
115 182.5
28
13
147.5 215
105
34
16
50
32
15
85
36
17
109
34
16
113
34
16
117.5 185
32
15
150 217.5
117
38
18
52.5
36
17
40
19
87.5
121
38
18
125
38
18
120 187.5
36
17
152.5 220
129
42
20
55
40
19
90
44
21
133
42
20
137
42
20
122.5 190
40
19
155 222.5
12
9
145 212.5
105 172.5
7
77.5
C
7
142.5 210
D
7
75
5
140 207.5
205
A
B
72.5
1410 1545 1680 1815 1950 2085 2220 2355 2490 2625 2760 2895 3030 3165 3300 3435 3570 3705 3840 3975 4110 4245 4380
L
Effective stroke 1050 1185 1320 1455 1590 1725 1860 1995 2130 2265 2400 2535 2670 2805 2940 3075 3210 3345 3480 3615 3750 3885 4020
Note 1. Distance from both ends to the mechanical stopper.
Note 2. The origin is set on the L side (as shown above) at the time of shipment. It
can be changed to the R side by parameter setting.
φ9
2-φ10H7 +0.015
Cross-section of H-H Detail of section J Depth 10 0
Remove cap from
each tool hole.
3.7
Detail of section G
7.2
4.5
100 (Top face of slider)
(99)
11.5
22 18
150
120
(Between
φ6H7±0.02)
Cross-section of optional cable carrier
35
29
4-φ6H7 0
5.7
3.2
4-M8x1.25 Depth 20
(11.5)
286
120
80±0.02
14
(107)
175
(180)
7-28
97
7
196
160
Specifications
MF50 single-carriage horizontal mount model
7-1 Main unit
66
50
2.5
Tool mounting hole
Insert bolt from
lateral side of axis.
Remove cap from
each tool hole.
(Note 3)
3.7
φ9
Remove two top caps.
1.4
4.8
2.6
210
(Roller diameter: φ30)
88
(107)
175
(180)
D
105
A
(Note 2)
31±1
200
Note 4
F-M8x1.25 Depth 15
Ex200
G±0.02
Bx200
C-φ9 Depth 14 (Refer to cross-section of H-H.)
H
H
L
Effective stroke
Slot width 20: lnsert M3 nut through this slot.
(Nut mountable range: 145)
200
180±5 (Note 1)
Ground terminal (M4)
(D)
(A)
(Note 2)
(320 : Minimum distance between carriages)
180±5 (Note 1)
Effective stroke
31±1
7-29
63
Weight (kg)
6
14
F
E
67
14
6
16
16
71
18
8
40
16
20
75
18
8
79
18
8
107.5 175
83
22
10
42.5
20
9
24
11
87
22
10
91
22
10
110 177.5
20
9
95
26
12
45
24
11
80
28
13
99
26
12
103
26
12
112.5 180
24
11
145 212.5
107
30
14
47.5
28
13
32
15
82.5
111
30
14
115
30
14
115 182.5
28
13
147.5 215
119
34
16
50
32
15
85
36
17
123
34
16
127
34
16
117.5 185
32
15
150 217.5
131
38
18
52.5
36
17
40
19
87.5
135
38
18
139
38
18
120 187.5
36
17
152.5 220
90
44
21
42
147
143
20
151
42
20
122.5 190
40
19
42
20
55
40
19
155 222.5
12
9
77.5
105 172.5
7
142.5 210
C
7
75
D
7
140 207.5
5
Specifications
72.5
205
A
1000 1135 1270 1405 1540 1675 1810 1945 2080 2215 2350 2485 2620 2755 2890 3025 3160 3295 3430 3565 3700
B
865
1410 1545 1680 1815 1950 2085 2220 2355 2490 2625 2760 2895 3030 3165 3300 3435 3570 3705 3840 3975 4110 4245 4380
L
Effective stroke 730
Note 1. Position of the table slider when returned to the origin. Note 3. The length under head of M8 hex socket head bolts for installing the robot body must not be longer than
Note 2. Distance from both ends to the mechanical stopper.
30mm.
Note 4. For models with a 3,025mm or longer stroke, a roller is installed to prevent the cable carrier from sagging.
2-φ10H7 +0.015
0
Depth 10
Detail of section G Cross-section of H-H Detail of section J
7
G
J
Depth 10
141
+0.012
4-φ6H7 0
Detail of slider
Cross-section of optional cable carrier
35
29
150
120
(Between
φ6H7±0.02)
4-M8x1.25 Depth 20
5.7
3.2
100 (Top face of slider)
(99)
11.5
22 18
14
7.2
4.5
286
120
80±0.02
(11.5)
97
196
160
MF50D double-carriage horizontal mount model
7-1 Main unit
7
7-1 Main unit
7-1-6 MF75
Model name
MF75
Specifications
Driving method
MF75D
Steel cored linear motor flat magnet
Repeated positioning accuracy (µm)
±5
Scale (μm)
Magnetic method, resolution: 1
Maximum speed (mm/sec) 2
2500
Maximum carrying weight (kg) 1
160
Rated thrust (N)
260
Maximum stroke (mm)
4000
Bearing method
3680
2 guide rails and 6 blocks (with retainer)
Maximum cross-section outside
dimensions (mm)
W210×H100 (excluding cable carrier)
Overall length (mm)
Stroke length + 360
Cable length (m)
Stroke length + 680
Standard : 3.5 Option: 5/10
Controller
SR1-P, TS-P, RDP
RCX221, RDP
1: Weight per one carrier
2: See the maximum speed table below.
Payload (kg)
Maximum speed (m/s)
75 or less
2.5
90
2.31
100
2.2
110
2.09
120
2.0
130
1.92
140
1.84
150
1.77
160
1.7
l Static load moment
Maximum speed (m/s)
7
l Basic specifications
3.0
2.5
2.0
1.5
1.0
0.5
0
0 50 60 70 80 90 100 110 120 130 140 150 160
Payload (kg)
MY
(Unit: N•m)
MY
MP
MR
830
831
730
MP
MR
7-30
7-1 Main unit
l Allowable overhang *
*Distance from the center on the top face of slider to the gravity center of the item being
carried. (This is calculated assuming that the service life of the guide is 10,000km.)
■ Horizontal installation
C
B
A
B
C
20kg
3397
2841
1840
40kg
2795
1389
964
60kg
2200
530
450
80kg
1800
175
150
100kg
1500
130
110
120kg
1250
100
80
140kg
1100
80
65
160kg
950
60
50
Specifications
A
(Unit: mm)
7
7-31
2.5
3.7
4.8
2.6
88
Detail of section J
(Note 1)
+ 0.015
2-φ10H7 0
Depth 10
D
130
A
200
Ground terminal (M4)
F-M8x1.25 Depth 15
Ex200
G± 0 .02
(D)
(A)
(Note 1)
(180 When at L side origin)
180±5 (R side origin position)
31 ± 2
6
14
E
F
5
7
16
7
16
14
6
14
6
14
6
130 180 230
12
7
18
8
80
16
7
9
20
20
9
18
8
18
8
18
8
22
10
80
20
9
24
11
80
24
11
22
10
22
10
22
10
26
12
80
24
11
28
13
80
28
13
26
12
26
12
26
12
30
14
80
28
13
32
15
80
32
15
30
14
30
14
30
14
34
16
80
32
15
36
17
80
36
17
34
16
34
16
34
16
38
18
80
36
17
40
19
80
40
19
38
18
38
18
38
18
42
20
80
40
19
44
21
80
42
20
42
20
130 180
40
19
130 180 230
130 180 230
36
17
130 180 230
130 180 230
32
15
130 180 230
130 180 230
28
13
130 180 230
130 180 230
24
11
130 180 230
130 180 230
20
9
130 180 230
130 180 230
16
80
Weight (kg) 46
49
51
54
56
59
61
64
66
69
71
74
76
79
81
84
86
89
91
94
96
99
101 104 106 109 111 114 116 119 121
1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 4100
80
D
G
5
12
B
C
130 180 230
180 230
80
1360 1460 1560 1660 1760 1860 1960 2060 2160 2260 2360 2460 2560 2660 2760 2860 2960 3060 3160 3260 3360 3460 3560 3660 3760 3860 3960 4060 4160 4260 4360
L
A
Effective stroke 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000
Note 3. The length under head of M8 hex socket head bolts for installing the robot body must not
be longer than 30mm.
Note 4. For models with a 3,000mm or longer stroke, a roller is installed to prevent the cable
carrier from sagging.
200
Note 4
Bx200
C-φ9 Depth 14 (Refer to cross-section of H-H.)
H
H
L
180±5 (L side origin position)
Effective stroke
(180 : When at R side origin) Slot width 20: lnsert M3 nut through this slot.
31 ± 2
(Nut mountable range: 145)
Note 1. Distance from both ends to the mechanical stopper.
Note 2. The origin is set on the L side (as shown above) at the time of shipment. It
can be changed to the R side by parameter setting.
4-M8x1.25 Depth 20
210
141
1.4
+ 0 .012
Depth 10
4-φ6H7 0
G
286
120
80 ± 0.02
J
Detail of slider
Cross-section of cable carrier
66
50
φ9
Cross-section of H-H
Remove cap from
each tool hole.
(Note 3)
Tool mounting hole
Insert bolt from
lateral side of axis.
Detail of section G
7.2
4.5
35
29
5.7
3.2
Remove two top caps.
100 (Top face of slider)
14
7
150
120 (Between
φ6H7±0.02)
(99 )
11 .5
22 18
(11 .5)
(Roller diameter
: φ30)
(107 )
175
(180 )
7-32
97
7
196
160
Specifications
MF75 single-carriage horizontal mount model
7-1 Main unit
3.7
Cross-section of cable carrier
66
50
210
141
Detail of slider
31 ± 2
(Note 2)
88
Detail of section J
+ 0.012
4-φ6H7 0
Depth 10
G
286
120
80 ± 0.02
J
1.4
4.8
2.6
+ 0 .015
2-φ10H7 0
Depth 10
D
130
A
Effective stroke
200
L
F-M8x1.25 Depth 15
Ex200
G ± 0.02
(D )
(A)
(Note 2)
(320 : Minimum distance between carriages)
180±5 (Note 1)
31±2
Ground terminal (M4)
Effective stroke
Note 4
Bx200
C-φ9 Depth 14 (Refer to cross-section of H-H.)
H
H
Slot width 20: lnsert M3 nut through this slot.
(Nut mountable range: 145)
200
(Note 1)
180 ± 5
7-33
6
14
D
E
F
7
16
6
6
14
6
14
18
8
80
7
9
20
9
20
18
8
18
8
18
8
130 180 230
16
22
10
80
20
9
24
11
80
24
11
22
10
22
10
22
10
26
12
80
24
11
28
13
80
28
13
26
12
26
12
26
12
30
14
80
28
13
32
15
80
32
15
30
14
30
14
30
14
34
16
80
32
15
36
17
80
36
17
34
16
34
16
34
16
38
18
80
36
17
40
19
80
40
19
38
18
38
18
38
18
42
20
80
40
19
44
21
80
42
20
42
20
130 180
40
19
130 180 230
130 180 230
36
17
130 180 230
130 180 230
32
15
130 180 230
130 180 230
28
13
130 180 230
130 180 230
24
11
130 180 230
130 180 230
20
9
130 180 230
Weight (kg) 57
60
62
65
67
70
73
75
78
81
83
86
88
91
94
96
99
101 104 107 109 112 114 117 120 122 125 127 130 133 135
1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 4100
14
7
16
80
Specifications
G
80
C
7
16
130 180 230
5
12
5
12
B
130 180 230
180 230
80
1360 1460 1560 1660 1760 1860 1960 2060 2160 2260 2360 2460 2560 2660 2760 2860 2960 3060 3160 3260 3360 3460 3560 3660 3760 3860 3960 4060 4160 4260 4360
L
A
Effective stroke 680 780 880 980 1080 1180 1280 1380 1480 1580 1680 1780 1880 1980 2080 2180 2280 2380 2480 2580 2680 2780 2880 2980 3080 3180 3280 3380 3480 3580 3680
Note 1. Position of the table slider when returned to the origin. Note 3. The length under head of M8 hex socket head bolts for installing the robot body must not be longer than 30mm.
Note 2. Distance from both ends to the mechanical stopper.
Note 4. For models with a 3,080mm or longer stroke, a roller is installed to prevent the cable carrier from sagging.
4-M8x1.25 Depth 20
φ9
Cross-section of H-H
Remove cap from
each tool hole.
(Note 3)
Tool mounting hole
Insert bolt from
lateral side of axis.
Detail of section G
7.2
4.5
35
29
14
2.5
100 (Top face of slider)
5.7
3.2
Remove two top caps.
(99 )
11 .5
22 18
(11 .5)
(Roller diameter
: φ30)
(107 )
175
(180 )
196
160
7
150
120 (Between
φ6H7±0.02)
97
MF75D double-carriage horizontal mount model
7-1 Main unit
7
7-1 Main unit
7-1-7 MF100
Model name
MF100
Specifications
Driving method
MF100D
Steel cored linear motor flat magnet
Repeated positioning accuracy (µm)
±5
Scale (μm)
Magnetic method, resolution: 1
Maximum speed (mm/sec) 2
2500
Maximum carrying weight (kg) 1
250
Rated thrust (N)
400
Maximum stroke (mm)
4000
Bearing method
3510
2 guide rails and 6 blocks (with retainer)
Maximum cross-section outside
dimensions (mm)
W210×H100 (excluding cable carrier)
Overall length (mm)
Stroke length + 515
Cable length (m)
Stroke length + 1005
Standard : 3.5 Option: 5/10
Controller
SRCP30
1: Weight per one carrier
2: If the payload exceeds 100kg, then adjust to reduce the speed by referring to the table below.
Payload (kg)
Maximum speed (m/s)
100 or less
2.5
120
2.3
140
2.1
160
2.0
180
1.9
200
1.8
220
1.7
240
1.6
250
1.5
Maximum speed (m/s)
7
l Basic specifications
3.0
2.5
2.0
1.5
1.0
0.5
0
l Static load moment
0
50 100 150 200 250 300
Payload (kg)
MY
(Unit: N•m)
MY
MP
MR
1971
1975
1734
MP
MR
7-34
7-1 Main unit
l Allowable overhang *
*Distance from the center on the top face of slider to the gravity center of the item being
carried. (This is calculated assuming that the service life of the guide is 10,000km.)
* The service life may be reduced if a collision occurs while the overhang is large.
A
C
B
Specifications
■ Horizontal installation
(Unit: mm)
A
B
C
20kg
3397
3104
1358
40kg
2210
1505
697
60kg
1969
975
488
80kg
1846
710
373
100kg
1751
624
339
120kg
1670
240
165
140kg
1655
195
135
160kg
1555
160
110
180kg
1475
130
90
200kg
1465
110
75
220kg
1425
90
60
240kg
1355
75
50
250kg
1315
70
45
7
7-35
2.5
φ9
G
J
1.4
210
141
4.8
2.6
(Roller diameter: φ30)
88
Depth 10
97
(107)
175
(180)
+0.015
2-φ10H7 0
Detail of section J Depth 10
D
105
A
Effective stroke
L
A
C
D
E
F
Weight (kg)
895
1410
205
5
105
6
14
53
1030 1165 1300 1435
1545 1680 1815 1950
72.5 140 207.5 75
7
7
7
9
172.5 40 107.5 175
6
8
8
8
14
18
18
18
57
61
65
69
1570
2085
142.5
9
42.5
10
22
73
1705
2220
210
9
110
10
22
77
200
200
F-M8x1.25 Depth 15
Ground terminal (M4)
Ex200
G±0.02
Bx200
C-φ9 Depth 14 (Refer to cross-section of H-H.)
H
H
Note 4
Slot width 20: lnsert M3 nut through this slot.
(Nut mountable range: 145)
L
Effective stroke
(D)
(A)
28.5±1
(Note 1)
(257.5 When at L side origin)
257.5±5 (R side origin position)
1840 1975 2110 2245
2355 2490 2625 2760
77.5 145 212.5 80
11
11
11
13
177.5 45 112.5 180
10
12
12
12
22
26
26
26
81
84
88
92
2380
2895
147.5
13
47.5
14
30
96
2515
3030
215
13
115
14
30
100
2650
3165
82.5
15
182.5
14
30
104
2785
3300
150
15
50
16
34
108
2920
3435
217.5
15
117.5
16
34
112
3055
3570
85
17
185
16
34
116
3190
3705
152.5
17
52.5
18
38
120
3325
3840
220
17
120
18
38
124
3460
3975
87.5
19
187.5
18
38
127
3595
4110
155
19
55
20
42
131
3730
4245
222.5
19
122.5
20
42
135
3865
4380
90
21
190
20
42
139
4000
4515
157.5
21
57.5
22
46
143
Note 3. The length under head of M8 hex socket head bolts for installing the robot body must not
be longer than 30mm.
Note 4. For models with a 3,055mm or longer stroke, a roller is installed to prevent the cable
carrier from sagging.
(Note 1)
28.5±1
257.5±5 (L side origin position)
(257.5 : When at R side origin)
Note 1. Distance from both ends to the mechanical stopper.
Note 2. The origin is set on the L side (as shown above) at the time of shipment. It
can be changed to the R side by parameter setting.
Cross-section of H-H
Remove cap from
each tool hole.
(Note 3)
3.7 Tool mounting hole
Insert bolt from
lateral side of axis.
Remove two top caps.
Detail of section G
7
Cross-section of optional cable carrier
66
50
+0.012
4-φ6H7 0
Detail of slider
8-M8x1.25 Depth 20
14
7.2
4.5
100 (Top face of slider)
(99) 11.5
22 18
150
120
(Between
φ6H7±0.02)
35
29
446
200
120
80±0.02
5.7
3.2
7-36
(11.5)
7
196
160
Specifications
MF100 single-carriage horizontal mount model
7-1 Main unit
150
120
(Between
φ6H7±0.02)
66
50
2.5
7
J
+0.012
1.4
210
141
Depth 10
4.8
2.6
88
+0.015
2-φ10H7 0
Detail of section J Depth 10
D
105
A
(Note 2)
28.5±1
200
257.5 (Note 1)
L
200
F-M8x1.25 Depth 15
Ex200
G±0.02
Bx200
C-φ9 Depth 14 (Refer to cross-section of H-H.)
H
H
Note 4
Slot width 20: lnsert M3 nut through this slot.
(Nut mountable range: 145)
Effective stroke
Ground terminal (M4)
(A)
(D)
(Note 2)
(490 : Minimum distance between carriages)
257.5 (Note 1)
Effective stroke
28.5±1
7-37
5
7
72.5
6
14
68
E
F
Weight (kg)
72
14
6
105 172.5
205
A
C
D
540
675
810
945
1080 1215 1350 1485 1620 1755 1890 2025 2160 2295 2430 2565 2700 2835 2970 3105 3240 3375 3510
76
18
8
40
7
9
75
80
18
8
84
18
8
107.5 175
7
140 207.5
88
22
10
42.5
9
11
77.5
92
22
10
96
22
10
110 177.5
9
142.5 210
100
26
12
45
11
80
13
104
26
12
108
26
12
112.5 180
11
145 212.5
112
30
14
47.5
13
15
82.5
116
30
14
120
30
14
115 182.5
13
147.5 215
124
34
16
50
15
85
17
128
34
16
132
34
16
117.5 185
15
150 217.5
136
38
18
52.5
17
19
87.5
140
38
18
144
38
18
120 187.5
17
152.5 220
148
42
20
55
19
90
21
156
152
20
42
42
20
122.5 190
19
155 222.5
160
46
22
57.5
21
157.5
1410 1545 1680 1815 1950 2085 2220 2355 2490 2625 2760 2895 3030 3165 3300 3435 3570 3705 3840 3975 4110 4245 4380 4515
Specifications
L
Effective stroke 405
Note 1. Position of the table slider when returned to the origin. Note 3. The length under head of M8 hex socket head bolts for installing the robot body must not be longer than
Note 2. Distance from both ends to the mechanical stopper.
30mm.
Note 4. For models with a 3,105mm or longer stroke, a roller is installed to prevent the cable carrier from sagging.
Cross-section of H-H
Remove cap from
each tool hole.
(Note 3)
φ9
Remove two top caps.
G
Tool mounting hole
Insert bolt from
lateral side of axis.
3.7
Detail of section G
7.2
4.5
Cross-section of optional cable carrier
35
29
4-φ6H7 0
Detail of slider
100 (Top face of slider)
(99) 11.5
22 18
14
(Roller diameter: φ30)
8-M8x1.25 Depth 20
5.7
3.2
97
196
160
446
200
120
80±0.02
(11.5)
(107)
175
(180)
MF100D double-carriage horizontal mount model
7-1 Main unit
7
7-2 Robot connector (I/O signal connector)
7-2 Robot connector (I/O signal connector)
7
Cable carrier
on robot
Hood
Specifications
To robot cable
(I/O signal wires)
Signal
Pin No.
Connection
Pin No.*
Remarks
S+
1
1
Blue
S-
2
2
Orange
C+
3
3
Green
C-
4
4
Brown
Z+
5
5
Gray
Z-
6
6
Red
+5 V
7
7
Black
D.G
8
8
Yellow
F.G
9
9
0.15mm2
twisted pair
Shield
*Internally connected
7-3 Robot connector (motor connector)
Cable carrier
Ground wire on robot
Hood
To robot cable
(motor wires)
Signal
Pin No.
Connection
Motor wire FG Round terminal
Pin No.*
Remarks
4
0.5 mm , 1.25 mm2 Green
2
U
1
1
0.5 mm2, 1.25 mm2 Red
V
2
2
0.5 mm2, 1.25 mm2 White
W
3
3
0.5 mm2, 1.25 mm2 Black
*Internally connected
7-38
7-4 Robot cable (I/O signal wires)
7-4 Robot cable (I/O signal wires)
7
Hood
To controller
To robot
Pin No. Connection Pin No.
Connect to:
Controller CN1
1
2
3
4
7
8
5
6
20
1
2
3
4
5
6
7
8
9
Signal
Connect to:
S+
SC+
CZ+
Z+5V
D.G.
FG
Robot
Remarks
0.3 mm2
2
Round terminal 0.3 mm
Blue
Orange
Green
Brown
Gray
Red
Black
Yellow
Gray
7-5 Robot cable (motor wires)
Hood
To controller
To robot
Ground wire
n SR1/SRCP
Pin No. Connection
Signal
Pin No.
Remarks
0.75 mm2 Yellow/Green
Motor wire FG
1
Round terminal
U
2
1
0.75 mm2
Red
V
4
2
0.75 mm2
White
3
mm2
Black
W
3
0.75
n RCX
Signal
Pin No. Connection
Pin No.
Remarks
0.75 mm2 Yellow/Green
Motor wire FG
1
Round terminal
U
2
1
0.75 mm2
Red
V
3
2
0.75 mm2
White
W
4
3
0.75 mm2
Black
7-39
Specifications
Ground wire
Revision record
Manual version Issue date
Description
Ver. 2.05
Oct. 2009
Addition and correction of explanations in "Chapter 1 Using the
Robot Safely". Addition and correction of "Chapter 5 Periodic
inspection and maintenance". Clerical error corrections, etc.
Ver. 3.00
Dec. 2008
Addition of descriptions regarding the addition of MF75.
Addition and correction of "Chapter 5 Periodic inspection and
maintenance". Clerical error corrections.
Ver. 4.00
Aug. 2010
Addition of descriptions regarding the addition of MF7. Clerical
error corrections.
Ver. 4.01
Jan. 2011
External view of MF7 in "7-1 Specifications" was modified/added.
The description regarding "Warranty" was changed. Clerical error
corrections, etc.
Ver. 4.02
Jun. 2011
Clerical error corrections.
Ver. 5.00
Jul. 2012
Wall-mount model was added to MF15. The description
regarding "Warranty" was changed. Clerical errors were
corrected, etc.
User's Manual
LINEAR MOTOR ROBOTS PHASER series
MF Type
Jul. 2012
Ver. 5.00
This manual is based on Ver. 5.00 of Japanese manual.
YAMAHA MOTOR CO., LTD. IM Operations
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Information furnished by YAMAHA in this manual is believed to be
reliable. However, no responsibility is assumed for possible
inaccuracies or omissions. If you find any part unclear in this manual,
please contact your distributor..
IM Operations
882 Soude, Nakaku, Hamamatsu, Shizuoka, 435-0054, Japan
Tel. 81-53-460-6103 Fax. 81-53-460-6811
Robot manuals can be downloaded from our company website.
Please use the following for more detailed information.
http://www.yamaha-motor.co.jp/global/industrial/robot/
YAMAHA MOTOR CO., LTD.