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YAMAHA LINEAR MOTOR ROBOTS PHASER series MF Type User s Manual EUC0127500 Ver. 5.00 E37 General Contents General Contents Introduction Chapter 1 Using the Robot Safely 1-1 Safety information 1-1 1-2 Essential precautions 1-3 1-3 Industrial robot operating and maintenance personnel 1-9 1-4 Robot safety functions 1-10 1-5 Safety measures for the system 1-11 1-6 Trial operation 1-11 1-7 Work within the safety enclosure 1-12 1-8 Automatic operation 1-13 1-9 Warranty 1-14 Chapter 2 Product Overview 2-1 Checking the product 2-1 2-2 Robot part names 2-2 2-3 Robot internal structure 2-3 Chapter 3 Installation and connections 3-1 Carrying the robot 3-1 3-2 Robot installation conditions 3-2 3-2-1 3-2-2 Installation environments Installation base 3-3 Installing the robot 3-4 Installing an external leakage breaker and circuit protector 3-7 3-5 Protective bonding 3-8 3-6 Connecting the robot to the controller 3-9 3-2 3-3 3-5 i 3-7 Precautions during user wiring and air tube installation 3-12 General Contents Chapter 4 Robot operation 4-1 Notes on robot operation 4-1 4-1-1 4-1-2 4-1-3 Magnetic pole estimation action Absolute search (semi-absolute specification) Return to origin (incremental specification) 4-2 Setting operating conditions 4-2-1 4-2-2 4-2-3 Process flow for setting operating conditions Duty monitor Acceleration setting 4-3 Pulse train control (SRCP, SRCP30) 4-3-1 4-3-2 Acceleration/deceleration and position proportional gain 4-8 Setting the maximum speed 4-10 4-1 4-1 4-2 4-4 4-4 4-5 4-6 4-8 Chapter 5 Periodic inspection and maintenance 5-1 Before beginning work 5-1 5-2 Periodic inspection 5-4 5-2-1 5-2-2 5-2-3 5-2-4 5-2-5 Daily inspection Three-month inspection Six-month inspection Three-year inspection Greasing to the linear guides 5-3 Replacing the shutter 5-10 5-4 Replacing the shutter roller 5-12 5-5 Maintenance parts 5-15 5-4 5-5 5-6 5-6 5-7 Chapter 6 Troubleshooting ii 6-1 If you suspect trouble 6-1 6-2 Feedback error 6-1 6-3 Magnetic pole detection error 6-3 6-4 Overload 6-4 6-5 Position deviation error 6-5 Chapter 7 Specifications Main unit 7-1 7-1-1 7-1-2 7-1-3 7-1-4 7-1-5 7-1-6 7-1-7 MF7 MF15 MF20 MF30 MF50 MF75 MF100 7-1 7-8 7-14 7-20 7-26 7-30 7-34 7-2 Robot connector (I/O signal connector) 7-38 7-3 Robot connector (motor connector) 7-38 7-4 Robot cable (I/O signal wires) 7-39 7-5 Robot cable (motor wires) 7-39 General Contents 7-1 iii MEMO iv Introduction • This user's manual should be used with the robot and considered an integral part of it. When the robot is moved, transferred or sold, send this manual to the new user along with the robot. Be sure to explain to the new user the need to read through this manual. • Specifications of robot models other than standard models may be omitted in this manual if they are common to those of standard models. In this case, refer to the specifications of standard models. • For details on specific operation of the robot, refer to the separate user’s manual for the robot controller being used. NOTES ◆The contents of this manual are subject to change without prior notice. ◆While every effort has been made to ensure the contents of this manual are correct, please contact us if you find any part of this manual to be unclear, confusing or inaccurate. YAMAHA MOTOR CO., LTD. IM Operations Introduction The YAMAHA single-axis robots MF type is an industrial robot that uses the semi-absolute positioning method as standard and has improved ease of use, resistance to environmental conditions, and maintenance work. A wide varaiety of product lineup allows you to select the desired robot model that best matches your application. This user's manual describes the safety measures, handling, adjustment and maintenance of the MF type robots for correct, safe and effective use. Be sure to read this manual carefully before installing the MF type robots. Even after you have read this manual, keep it in a safe and convenient place for future reference. MEMO Chapter 1 Using the Robot Safely Contents 1-1 Safety information 1-1 1-2 Essential precautions 1-3 1-3 Industrial robot operating and maintenance personnel 1-9 1-4 Robot safety functions 1-10 1-5 Safety measures for the system 1-11 1-6 Trial operation 1-11 1-7 Work within the safety enclosure 1-12 1-8 Automatic operation 1-13 1-9 Warranty 1-14 1-1 Safety information 1-1 Safety information Warning symbols and signal words used in this manual are classified as explained below. Make sure that you fully understand the meaning of each symbol and comply with the instructions. w DANGER Failure to follow DANGER instructions will result in severe injury or death to the robot operator, bystanders or persons inspecting or repairing the robot. w WARNING Failure to follow WARNING instructions could result in severe injury or death to the robot operator, bystanders or persons inspecting or repairing the robot. c CAUTION Failure to follow CAUTION instructions may result in injury to the robot operator, bystanders or persons inspecting or repairing the robot, or damage to the robot and/or robot controller. n NOTE Explains the key point in the operation in a simple and clear manner. Reference Gives useful information related to the robot operation. 1-1 1 Using the Robot Safely Industrial robots are highly programmable, mechanical devices that provide a large degree of freedom when performing various manipulative tasks. To ensure correct and safe use of YAMAHA industrial robots, carefully read this manual and make yourself well acquainted with the contents. FOLLOW THE WARNINGS, CAUTIONS AND INSTRUCTIONS included in this manual. Failure to take necessary safety measures or mishandling due to not following the instructions in this manual may result in trouble or damage to the robot and injury to personnel (robot operator or service personnel) including fatal accidents. 1-1 Safety information 1 Refer to the user's manual by any of the following methods to operate or adjust the robot safely and correctly. 1.Operate or adjust the robot while referring to the printed version of the user's manual (available for an additional fee). Using the Robot Safely 2.Operate or adjust the robot while viewing the CD-ROM version of the user's manual on your computer screen. 3.Operate or adjust the robot while referring to a printout of the necessary pages from the CD-ROM version of the user's manual. It is not possible to list all safety items in detail within the limited space of this manual. So it is essential that the user have a full knowledge of basic safety rules and also that the operator makes correct judgments on safety procedures during operation. For specific safety information and standards, refer to the applicable local regulations and comply with the instructions. This manual and warning labels supplied with or attached to the robot are written in English. Unless the robot operators or service personnel understand English, do not permit them to handle the robot. * Cautions regarding the official language of EU countries For equipment that will be installed in EU countries, the language used for the user's manuals, CE declarations, and operation screen characters is English only. Warning labels only have pictograms or else include warning messages in English. In the latter case, Japanese messages might be added. 1-2 1-2 Essential precautions 1-2 Essential precautions (1) Obser ve the following cautions during automatic operation. • Install a safeguard (protective enclosure) to keep any person from entering within the movement range of the robot and suffering injury due to being struck by moving parts. • Install a safety interlock that triggers emergency stop when the door or panel is opened. • Install safeguards so that no one can enter inside except from doors or panels equipped with safety interlocks. • Warning labels 1 are supplied with the robot and should be affixed to conspicuous spots on doors or panels equipped with safety interlocks. w DANGER Serious injury or death will result from impact with moving robot. • Keep outside of guard during operation. • Lock out power before approaching robot. Warning label 1 DANGER Serious injury or death will result from impact with moving robot. • Keep outside of guard during operation. • Lock out power before approaching robot. (2) Use caution to prevent hands or fingers from being pinched or crushed. Warning label 2 is affixed to the robot. Use caution to prevent hands or fingers from being pinched or crushed by the moving parts when carrying the robot or during teaching. (The labels for the MF7 are supplied with the robot.) w WARNING Moving parts can pinch or crush. Keep hands away from robot arms. 1-3 1 Using the Robot Safely Particularly important cautions for handling or operating the robot are described below. In addition, precautions during installation, operation, inspection and maintenance are also provided in each chapter. Be sure to comply with these instructions to ensure safe use of the robot. 1-2 Essential precautions Warning label 2 1 WARNING Using the Robot Safely Moving parts can pinch or crush. Keep hands away from robot arms. (3) Follow the instructions on warning labels and in this manual. • Be sure to read the warning labels and this manual carefully and make sure you thoroughly understand their contents before attempting installation and operation of the robot. • Before starting robot operation, be sure to reread the procedures and cautions relating to your work as well as descriptions in this chapter (Chapter 1, "Using the Robot Safely"). • Never install, adjust, inspect or service the robot in any manner that does not comply with the instructions in this manual. • The warning labels 3 are supplied with the robot and should be affixed to the robot or conspicuous spots near the robot. w WARNING Improper installation or operation can result in serious injury or death. Read the User's Manual and all warning labels before INSTALLATION AND operation. Warning label 3 WARNING Improper Installation or operation can result in serious injury or death. Read user's(owner's) manual and all warning labels before operation. (4) Be aware of strong magnets inside the robot. w 1-4 WARNING Powerful magnets are installed inside the robot. Do not disassemble the robot since this may cause injury. Devices that might malfunction due to magnetic fields must be kept away from this robot. 1-2 Essential precautions (5) Do not remove, alter or stain the warning labels. w (6) Do not use the robot in environments containing inflammable gas, etc. w WARNING • THIS ROBOT WAS NOT DESIGNED FOR OPERATION IN ENVIRONMENTS WHERE INFLAMMABLE OR EXPLOSIVE SUBSTANCES ARE PRESENT. • DO NOT USE THE ROBOT IN ENVIRONMENTS CONTAINING INFLAMMABLE GAS, DUST OR LIQUIDS. EXPLOSIONS OR FIRE MIGHT OTHERWISE RESULT. (7) Do not use the robot in locations possibly subject to electromagnetic interference, etc. w WARNING Do not use the robot in locations subject to electromagnetic interference, electrostatic discharge or radio frequency interference. MALFUNCTIONS MIGHT OTHERWISE OCCUR. (8) Provide safety measures for end effector (gripper, etc.). w WARNING • END EFFECTORS MUST BE DESIGNED AND MANUFACTURED SO THAT THEY CREATE NO HAZARDS (FOR EXAMPLE, A WORKPIECE THAT COMES LOOSE) EVEN IF POWER (ELECTRICITY, AIR PRESSURE, ETC.) IS SHUT OFF OR POWER FLUCTUATIONS OCCUR. • IF THERE IS A POSSIBLE DANGER THAT THE OBJECT GRIPPED BY THE END EFFECTOR MAY FLY OFF OR DROP, THEN PROVIDE APPROPRIATE SAFETY PROTECTION TAKING INTO ACCOUNT THE OBJECT SIZE, WEIGHT, TEMPERATURE AND CHEMICAL PROPERTIES. 1-5 1 Using the Robot Safely WARNING IF WARNING LABELS ARE REMOVED OR DIFFICULT TO SEE, THEN ESSENTIAL PRECAUTIONS MIGHT NOT BE TAKEN, RESULTING IN ACCIDENTS. • DO NOT REMOVE, ALTER OR STAIN THE WARNING LABELS ON THE ROBOT. • DO NOT ALLOW THE WARNING LABELS TO BE HIDDEN BY DEVICES INSTALLED ONTO THE ROBOT BY THE USER. • PROVIDE PROPER LIGHTING SO THAT THE SYMBOLS AND INSTRUCTIONS ON THE WARNING LABELS CAN BE CLEARLY SEEN EVEN FROM OUTSIDE THE SAFETY ENCLOSURE. 1-2 Essential precautions (9) Be careful not to touch the motor and peripheral parts when hot. 1 w Using the Robot Safely WARNING The motor and speed reduction gear casing are extremely hot after automatic operation, so burns may occur if these are touched. Before handling these parts during inspection or servicing, turn off the controller, wait for a while and check that the parts have cooled. (10) Take the following safety precautions during inspection of controller. w WARNING • WHEN YOU NEED TO TOUCH THE TERMINALS OR CONNECTORS ON THE OUTSIDE OF THE CONTROLLER DURING INSPECTION, ALWAYS FIRST TURN OFF THE CONTROLLER POWER SWITCH AND ALSO THE POWER SOURCE IN ORDER TO PREVENT POSSIBLE ELECTRICAL SHOCK. • DO NOT DISASSEMBLE THE CONTROLLER. NEVER TOUCH ANY INTERNAL PARTS OF THE CONTROLLER. DOING SO MIGHT CAUSE BREAKDOWNS, MALFUNCTIONS, INJURY OR FIRE. IF ANY PARTS OF THE CONTROLLER NEED TO BE REPLACED, FOLLOW THE SPECIFIED INSTRUCTIONS. • Refer to the controller user's manual for precautions on handling the controller. (11) Consult us for corrective action when the robot is damaged or malfunctions occur. w WARNING IF ANY PART OF THE ROBOT IS DAMAGED OR ANY MALFUNCTION OCCURS, CONTINUING THE OPERATION MAY BE VERY DANGEROUS. PLEASE CONSULT US FOR CORRECTIVE ACTION. Damage or Trouble Possible Danger Damage to machine harness or robot cable Electrical shock, malfunction of robot Damage to exterior of robot Flying outwards of damaged parts during robot operation Abnormal operation of robot (positioning error, excessive vibration, etc.) Malfunction of robot Z-axis (vertical axis) brake trouble Dropping of load (12) Protective bonding w 1-6 WARNING Be sure to ground the robot and controller to prevent electrical shock. 1-2 Essential precautions (13) Be sure to make correct parameter settings. c 1 (14) Follow the specified procedures when installing, adjusting or inspecting the robot. w WARNING ALWAYS FOLLOW THE SPECIFIED PROCEDURES WHEN INSTALLING, ADJUSTING OR INSPECTING THE ROBOT. NEVER ATTEMPT ANY PROCEDURE NOT DESCRIBED IN THIS MANUAL. (15) Do not attempt any repair, parts replacement and modification. w WARNING DO NOT ATTEMPT ANY REPAIR, PARTS REPLACEMENT AND MODIFICATION UNLESS DESCRIBED IN THIS MANUAL. THESE WORKS REQUIRE TECHNICAL KNOWLEDGE AND SKILL, AND MAY ALSO INVOLVE WORK HAZARDS. (16) Do not use the robot in locations where strong magnetic sources are present. w WARNING Do not use the robot near a strong magnetic source. The robot might otherwise break down or malfunction. (17) Precautions when disposing of the robot When disposing of the robot, handle it as industrial waste. w WARNING Handle the robot carefully when disposing of it since powerful magnets are installed inside. (18) Location for installing the controller and the programming box or Handy Terminal The robot controller, programming box, and Handy Terminal should be installed at a location that is outside the robot movement range yet where it is easy to operate and view the robot performing tasks. (19) Protect electrical wiring and hydraulic/pneumatic hoses as needed. Install a cover or similar item to protect the electrical wring and hydraulic/pneumatic hoses from possible damage. 1-7 Using the Robot Safely CAUTION The robot must be operated with correct tolerable moment of inertia and acceleration coefficients according to the manipulator tip mass and moment of inertia. If these are not correct, drive unit service life may end prematurely, and damage to robot parts or residual vibration during positioning may result. 1-2 Essential precautions (20) Install an operation status light. Install an operation status light (signal light tower, etc.) at an easy-to-see position so the operator will know whether the robot is merely stopped or is in emergency-error stop. 1 Using the Robot Safely (21) Clean work tools, etc. Work tools such as welding guns and paint nozzles which are mounted in the robot arm will preferably be cleaned automatically. (22) Provide adequate lighting. Make sure to provide enough lighting to ensure safety during work. (23) Prevent the gripped object from flying outwards. If the object or workpiece gripped by the robot might fly outward or drop and create a hazard to the operator, then protective equipment should be installed by taking the size, weight, temperature and chemical properties of the object into account. (24) Draw up "work instructions" and makes sure the operator learns them well. Decide on "work instructions" for the following items in cases where personnel must work within the robot movement range to perform teaching, maintenance or inspection. Make sure the workers know these "work instructions" well. (1) Robot operating procedures needed for tasks such as startup procedures and handling switches (2) Robot speeds used during tasks such as teaching (3) Methods for workers to signal each other when two or more workers perform tasks (4) Steps that the worker should take when a problem or emergency occurs (5) Steps to take after the robot has come to a stop when the emergency stop device was triggered, including checks for cancelling the problem or error state and safety checks in order to restart the robot. (6) In cases other than above, the following actions should be taken as needed to prevent hazardous situations due to sudden or unexpected robot operation or faulty robot operation, as listed below. 1.Show a display on the operator panel 2.Ensure the safety of workers performing tasks within the robot movement range 3.Clearly specify position and posture during work Position and posture where worker can constantly check robot movements and immediately move to avoid trouble if an error/problem occurs 4.Install noise prevention measures 5.Use methods for signaling operators of related equipment 6.Use methods to decide that an error has occurred and identify the type of error 1-8 1-3 Industrial robot operating and maintenance personnel Implement the "work instructions" according to the type of robot, installation location, and type of work task. When drawing up the "work instructions", make an effort to include opinions from the workers involved, equipment manufacture's technicians, and workplace safety consultants, etc. 1 Display an easy to understand sign or message on the programming box, Handy Terminal, and operation panel during the job task, to prevent anyone other than the operators for that job task from mistakenly operating a start or selector switch. If needed, take other measures such as locking the cover on the operation panel. (26) Make daily and periodic inspections. (1) Always make sure that daily and periodic inspections are performed, and make a pre-work check to ensure there are no problems with the robot or related equipment. If a problem or abnormality is found, then promptly repair it or take other measures as necessary. (2) When you make periodic inspections or repairs, make a record and store it for at least 3 years. 1-3 Industrial robot operating and maintenance personnel Operators or persons who handle the robot such as for teaching, programming, movement check, inspection, adjustment, and repair must receive appropriate training and also have the skills needed to perform the job correctly and safely. They must read the user's manual carefully to understand its contents before attempting the robot operation. Tasks related to industrial robots (teaching, programming, movement check, inspection, adjustment, repair, etc.) must be performed by qualified persons who meet requirements established by local regulations and safety standards for industrial robots. 1-9 Using the Robot Safely (25) Display a sign on operation panel during work 1-4 Robot safety functions 1-4 Robot safety functions 1 (1) Overload detection This function detects an overload applied to the motor and shuts off the servo power. Using the Robot Safely (2) Overheat detection This detects an abnormal temperature rise in the controller driver and shuts off the servo power. If an overload or overheat error occurs, take the following measures. 1.Reduce the speed. 2.Insert a "stop period" in the operation. 3.Reduce the acceleration coefficient. (3) Soft limits Soft limits can be set on each axis to limit the working envelope in manual operation after return-to-origin and during automatic operation. Note: The working envelope is the area limited by soft limits. w WARNING Soft limits must be set within the movement range (mechanical stopper). If the soft limit is set outside the movement range, the robot axis may collide with the mechanical stopper at high speed, causing the object gripped by the end effector to fly or drop and the robot to malfunction. (4) Mechanical stoppers If the servo power is shut off during robot operation by emergency stop or safety functions, the mechanical stoppers prevent the axis from exceeding the movement range. Note: The movement range is the area limited by mechanical stoppers. w WARNING Robot movement will not stop immediately after the servo power supply is shut off by emergency stop or other safety functions. w WARNING When the slider (carriage) collides with the mechanical stopper, this might damage the parts of the robot. After a collision, check that no parts of the robot are damaged. 1-10 1-5 Safety measures for the system 1-5 Safety measures for the system 1-6 Trial operation After making installations, adjustments, inspections, or maintenance or repairs to the robot, make a trial run using the following procedures. (1) If a safety enclosure has not yet been provided right after installation of the robot, rope off or chain off around the movement area of the manipulator in place of the safeguard, and obser ve the following points. 1.Use sturdy, stable posts which will not fall over easily. 2.The rope or chain should be easily visible by everyone around the robot. 3.Place a sign to keep the operator or other personnel from entering the movement range of the manipulator. (2) Check the following points before turning on the controller. 1.Is the robot securely and correctly installed? 2.Are the electrical connections to the robot correct? 3.Are air tubes correctly and securely connected? 4.Is the robot correctly connected to peripheral equipment? 5.Have safety measures (safety enclosure, etc.) been taken? 6.Does the installation environment meet the specified standards. (3) After the controller is turned on, check the following points from outside the safety enclosure. 1.Does the robot start and stop as intended? Can the operation mode be selected correctly? 2.Does each axis move as intended within the soft limits? 3.Does the end effector move as intended? 4.Are the signal transmissions to the end effector and peripheral equipment correct? 5.Does emergency stop work? 6.Are the teaching and playback functions normal? 7.Are the safety enclosure and interlock working as intended? 8.Does the robot move correctly during automatic operation? 1-11 1 Using the Robot Safely Since the robot is commonly used in conjunction with an automated system, dangerous situations are more likely to occur from the automated system than from the robot itself. Accordingly, appropriate safety measures must be taken on the part of the system manufacturer according to the individual system. The system manufacturer should provide a proper instruction manual for safe, correct operation and servicing of the system. 1-7 Work within the safety enclosure Reference When starting the PHASER series robots, the slider always moves a few millimeters right after the servo is turned on and emits a high pitched noise. This is just the routine pre-action for estimating the magnetic pole and is not a problem. 1 Using the Robot Safely 1-7 Work within the safety enclosure (1) Work within the safety enclosure When work is required inside the safety enclosure, always turn off the controller and place a sign indicating that the robot is being adjusted or serviced in order to keep any other person from touching the controller switch or operation panel, except for the soft limit setting and teaching. For soft limit setting, follow the suitable cautions, notes, etc. in this manual. For teaching, follow the procedure shown below. (2) Teaching When performing teaching within the safety enclosure, comply with the instructions listed below. 1)Check or perform the following points from outside the safety enclosure. 1.Make sure that no hazards are present within the safety enclosure by a visual check. 2.Check that the programming box or Handy Terminal is operating normally. 3.Check that no failures are found in the robot. 4.Check that emergency stop works correctly. 5.Select teaching mode and prohibit automatic operation. 2)Never enter the movement range of the manipulator while within the safety enclosure. 1-12 1-8 Automatic operation 1-8 Automatic operation 1 Automatic operation described here includes all operations in AUTO mode. (1) Check the following before starting automatic operation. 2.The programming box or Handy Terminal, tools, etc. are in their prescribed positions. 3.The alarm or error lamps on the robot and peripheral equipment do not flash. 4.The safety enclosure is securely installed with safety interlocks actuated. (2) Obser ve the following during automatic operation or in cases where an error occurs. 1)After automatic operation has started, check the operation status and signal light to ensure that the robot is in automatic operation. 2)Never enter the safety enclosure during automatic operation. 3)If an error occurs in the robot or peripheral equipment, observe the following procedure before entering the safety enclosure. 1.Press the emergency stop button to set the robot to emergency stop. 2.Place a sign on the start switch, indicating that the robot is being inspected in order to keep any other person from touching the start switch and restarting the robot. 1-13 Using the Robot Safely 1.No one is within the safety enclosure. 1-9 Warranty 1-9 Warranty 1 For information on the warranty period and terms, please contact our distributor where you purchased the product. Using the Robot Safely n This warranty does not cover any failure caused by: 1.Installation, wiring, connection to other control devices, operating methods, inspection or maintenance that does not comply with industry standards or instructions specified in the YAMAHA manual; 2.Usage that exceeded the specifications or standard performance shown in the YAMAHA manual; 3.Product usage other than intended by YAMAHA; 4.Storage, operating conditions and utilities that are outside the range specified in the manual; 5.Damage due to improper shipping or shipping methods; 6.Accident or collision damage; 7.Installation of other than genuine YAMAHA parts and/or accessories; 8.Modification to original parts or modifications not conforming to standard specifications designated by YAMAHA, including customizing performed by YAMAHA in compliance with distributor or customer requests; 9.Pollution, salt damage, condensation; 10.F ires or natural disasters such as earthquakes, tsunamis, lightning strikes, wind and flood damage, etc; 11.B reakdown due to causes other than the above that are not the fault or responsibility of YAMAHA; n The following cases are not covered under the warranty: 1.Products whose serial number or production date (month & year) cannot be verified. 2.Changes in software or internal data such as programs or points that were created or changed by the customer. 3.Products whose trouble cannot be reproduced or identified by YAMAHA. 4.Products utilized, for example, in radiological equipment, biological test equipment applications or for other purposes whose warranty repairs are judged as hazardous by YAMAHA. THE WARRANTY STATED HEREIN PROVIDED BY YAMAHA ONLY COVERS DEFECTS IN PRODUCTS AND PARTS SOLD BY YAMAHA TO DISTRIBUTORS UNDER THIS AGREEMENT. ANY AND ALL OTHER WARRANTIES OR LIABILITIES, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO ANY IMPLIED WARRANTIES OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE ARE HEREBY EXPRESSLY DISCLAIMED BY YAMAHA. MOREOVER, YAMAHA SHALL NOT BE HELD RESPONSIBLE FOR CONSEQUENT OR INDIRECT DAMAGES IN ANY MANNER RELATING TO THE PRODUCT. Ver.1.00_201205 1-14 Chapter 2 Product Over view Contents 2-1 Checking the product 2-1 2-2 Robot part names 2-2 2-3 Robot internal structure 2-3 2-1 Checking the product 2-1 Checking the product After unpacking, make sure that all components and accessories are included (as specified in your order). Also check the product for any damage on the exterior which might have occurred during shipping. If there are any missing parts or damage due to shipping, please notify your YAMAHA sales office or representative immediately. Qty Single-axis robot 1 Controller 1 Robot cable 1 I/O connector 1 Warning label 1 (DANGER label) English and Japanese, one each Stick the label at easy-to-see position of system. Warning label 3 (WARNING label) English and Japanese, one each Stick the label at easy-to-see position of system. w WARNING • ALWAYS USE TWO OR MORE PEOPLE TO TAKE THE ROBOT UNIT OUT OF THE PACKAGE. EACH PERSON SHOULD GRIP THE ROBOT UNIT NEAR ONE END FROM THE LOWER SIDE. CARRY WITH THE ROBOT FACING UPWARD (SLIDER SIDE UPWARDS). • When unpacking, carefully hold the robot not to drop it. If the robot falls, serious injury may occur or the robot may be damaged. 2-1 Product Overview Product name 2 2-2 Robot part names 2-2 Robot part names Robot part names External components <MF50> Ground wire 2 End cover Slider cover Slider Product Overview Cable carrier Robot cable (motor wires) Robot cable (I/O signal wires) End cover Shutter Side cover Reference The direction of the cables coming out of the cable carrier depends on the specifications you ordered. The above illustration shows an example of RH (right and horizontal) type. 2-2 2-3 Robot internal structure 2-3 Robot internal structure The YAMAHA linear single-axis robot PHASER series MF type is a truly innovative singleaxis robot using a linear motor as its drive source. The internal robot structure and features are described here. w WARNING The following drawings and descriptions are given to assist in understanding and safely using the PHASER series robots. Do not attempt to disassemble the robot. Powerful permanent magnets are fixed by adhesive to the magnetic plate so disassembly without proper preparation is hazardous. Also, the required performance may not be obtained. Product Overview PHASER series internal layout 2 <MF50> Moving coil (internal) Magnet plate Magnetic head Magnetic scale Linear motion guide Magnet plate The robot contains powerful permanent magnets laid out at equally spaced intervals. The magnetic field generated by these permanent magnets is utilized as propulsive power by the robot. Moving coil The slider contains an internal moving coil. Passing current through this coil changes the magnetic flux from the magnetic plate into a propulsive force. Passing current through the coil also generates heat but heat sink fins efficiently dissipate this heat. Structure <MF50> 100 99 180 Moving coil Magnet Magnetic scale 210 88 2-3 2-3 Robot internal structure Linear guide The MF50 use a linear guide assembled with a ball retainer that efficiently eliminates friction between adjacent balls. This achieves low noise, long service life and long maintenance-free operation. 2 Magnetic scale and magnetic head Product Overview The magnetic scale utilizes YAMAHA's superb magnetic signal detection technology developed in-house. The scale is made of a special alloy that retains a high-strength magnetic field with virtually no weakening over time. Integrating it with a magnetic head yields an astonishingly high resolution of one micrometer. Fully closed control directly detects the table (slider) position for stable and highly precise positioning. c CAUTION Do not bring a strong magnet close to the magnetic scale. A strong magnet may erase the information recorded on the scale and cause the robot to malfunction. A magnetic force of about 10mT (100 Gauss) does not cause any problem. As shown in the photos below, for example, bringing the magnetized side of a magnetic base close to the side of the robot may erase the information on the magnetic scale, so use caution. Magnetized side of magnetic base c Magnetized side of magnetic base CAUTION The magnetic flux slightly leaks from the robot surface. (Max. 10mT) When a device (sensor) that responds to the magnetism is installed, it may respond incorrectly. Install such device 100 mm or more apart from the robot, make the fine adjustment to eliminate incorrect response, or use a device designed for the strong magnetic field. Magnetic flux leak range Robot 2-4 Robot Chapter 3 Installation and connections Contents 3-1 Carrying the robot 3-1 3-2 Robot installation conditions 3-2 3-2-1 Installation environments 3-2-2 Installation base 3-3 Installing the robot 3-2 3-3 3-5 3-4 Installing an external leakage breaker and circuit protector 3-7 3-5 Protective bonding 3-8 3-6 Connecting the robot to the controller 3-9 3-7 Precautions during user wiring and air tube installation 3-12 3-1 Carr ying the robot 3-1 Carr ying the robot Always use 2 people to carry the robot unit. Each person should grip the robot unit near one end from the lower side as shown and carry with the load well balanced. Carry with the robot facing upward (slider side upwards). w [Never tr y this when moving!] • Do not carry by holding the slider. • Do not carry by holding the cable. • Do not carry by holding the cable carrier. • Do not carry by gripping the end cover. 3-1 3 Installation and connections WARNING Always observe the following precautions when carrying the robot. • Remove any and all objects such as hands and grippers attached to the robot slider before moving the robot. The slider will lose balance if moved with objects still attached and cause injuries. • Keep the robot balanced and don't let it tilt while moving it. If the robot tilts, the slider may move under its own weight causing serious injuries such as crushed fingers. • NEVER ATTEMPT TO HOLD THE ROBOT IN ANY OF THE FOLLOWING MANNERS. 3-2 Robot installation conditions 3-2 Robot installation conditions 3-2-1 Installation environments Be sure to install the robot in the following environments. Items 3 Specifications Allowable ambient temperature 0 to 40°C Allowable ambient humidity 35 to 85% RH (no condensation) Altitude 0 to 1000 meters above sea level Installation and connections Avoid installing near water, cutting water, oil, dust, metallic chips and organic solvent. Avoid installation near corrosive gas and corrosive materials. Ambient environments Avoid installation in atmosphere containing inflammable gas, dust or liquid. Avoid installation near objects causing electromagnetic interference, electrostatic discharge or radio frequency interference. Vibration Do not subject to impacts or vibrations. Working space Allow sufficient space margin to perform jobs (teaching, inspection, repair, etc.) For detailed information on how to install the robot controller, refer to the separate "YAMAHA Robot Controller User's Manual". w WARNING Avoid installing the robot in locations where the ambient conditions may exceed the allowable temperature or humidity, or in environments where excessive moisture, corrosive gases, metallic powder or dust are generated. Malfunctions, failures or short circuits may otherwise result. w WARNING • This robot was not designed for operation in environments where inflammable or explosive substances are present. • Do not use the robot in environments containing inflammable gas, dust or liquids. Explosions or fire could otherwise result. w WARNING Avoid using the robot in locations subject to electromagnetic interference, electrostatic discharge or radio frequency interference. Malfunctions may otherwise occur. 3-2 3-2 Robot installation conditions w WARNING Do not use the robot in locations subject to excessive vibration. Robot installation bolts may otherwise become loose causing the robot to fall over. 3-2-2 Installation base To mount the robot, use an installation base that satisfies the following conditions. w WARNING If the installation base is not sufficiently rigid and stable, vibration (resonance) may occur during operation, causing adverse effects on the robot work. 2)The installation base surface must be machined within a flatness of ±0.05mm/500mm. c CAUTION The robot positioning accuracy, acceleration and duty might not satisfy the required performance or the service life might be reduced if the installation surface precision is insufficient. In worst cases, the coil inside the robot might burn out. 3-3 3 Installation and connections 1)The installation base is subjected to a great deal of stress while the robot is in operation. Prepare a sufficiently rigid and stable installation base, taking into account the robot weight including the end effector (gripper) and workpiece. 3-2 Robot installation conditions 3)Use an installation base of sufficient size to match the robot body so that the robot can be installed with the specified number of bolts. Avoid installing the robot with less than the specified number of bolts or installing the robot closer to one end as shown at the lower right. Robot installation example 3 Installation and connections Installation base Good example Installation base Bad example w WARNING WHEN INSTALLING THE ROBOT, ALWAYS USE ALL THE INSTALLTION HOLES OR M8 TAPPED HOLES IN THE BOTTOM OF THE ROBOT FRAME. USING LESS THAN THE SPECIFIED NUMBER OF BOLTS TO INSTALL THE ROBOT MAY CAUSE VIBRATION AND POOR POSITIONING ACCURACY. THIS MAY ALSO RESULT IN POSITIONING ERRORS AND REDUCED SERVICE LIFE IN THE WORST CASES. n NOTE Positions of robot mounting holes differ according to the stroke length of each robot. Refer to the outline dimension drawings shown in Chapter 7, "Specifications". 3-4 3-3 Installing the robot 3-3 Installing the robot w WARNING • Before installing the robot, always make sure that the robot controller is not connected to the robot or the power to the controller is off. Serious accidents might occur if the robot starts to operate during installation. • Be sure to use the bolts of the correct length and tighten them securely to the correct torque. Failure to follow this instruction may cause robot vibrations, position errors and serious accidents. Use the following method to install the MF15/MF20/MF30 robot. 1.Drill holes through the installation base and secure the robot to the base with M6 bolts from the bottom. (M6 tapped holes are already machined in the bottom of the robot frame.) There are two methods for installing the MF50/MF75/MF100 robot. 1.Drill and tap M8 holes into the installation base and secure the robot to the base with M8 bolts from the top of the robot frame. (Use the mounting holes provided in the robot frame.) 2.Drill holes through the installation base and secure the robot to the base with M8 bolts from the bottom. (M8 tapped holes are already machined in the bottom of the robot frame.) <When installing the MF50/MF75/MF100 from the top> 3-5 Installation and connections Use the following method to install the MF7 robot. 1.Drill holes through the installation base and secure the robot to the base with M4 bolts from the bottom. (M4 tapped holes are already machined in the bottom of the robot frame.) 3 3-3 Installing the robot φ9 3 Hex socket-head bolt: M8×1.25 (Length under head: 25 to 30mm) Installation and connections Robot Bolt Installation base Tightening torque M4 hex socket-head bolt, Strength: 8.8T 30kgf•cm to 45kgf•cm Length: installation base thickness +9 +0 -2 mm M6 hex socket-head bolt, Strength: 8.8T MF15/MF20/MF30 100kgf•cm to 130kgf•cm Length: installation base thickness +10 +0 -2 mm M8 hex socket-head bolt, Strength: 8.8T MF50/MF75/ 230kgf•cm to 370kgf•cm MF100 Length: installation base thickness +15 +0 -2 mm MF7 3-6 3-4 Installing an external leakage breaker and circuit protector 3-4 Installing an external leakage breaker and circuit protector To ensure safety, a leakage breaker and circuit protector must be installed in the power supply connection section of the robot controller. Make power connections to the controller by following the instructions in the controller user's manual. w 3 Installation and connections c WARNING • Electrical shocks, injuries or fires might occur if the motor breaks down while the robot controller is used without installing a leakage breaker in the power supply section. • Electrical shocks, injuries or fires might occur if the motor breaks down while the robot controller is used without making correct connections to the power supply. Use a wire thicker than 2.0 square millimeters. CAUTION • Be sure that the power supply voltage and the terminal connections are correct. Incorrect voltage and connections could cause an equipment failure. • Shut the control power off while in a "servo off" condition. 3-7 3-5 Protective bonding 3-5 Protective bonding w 3 WARNING Always ground the robot and controller unit to prevent electrical shock. Always use the ground terminal (M4 screw) on the robot unit to make ground connection. The ground terminal location is shown below. Ground terminal Installation and connections Ground terminal (M4 screw) for protective bonding Ground terminal (M4 screw) for robot cable c CAUTION • A secure ground connection (less than 100-ohm resistance to ground) is recommended. • Use electrical wire thicker than AWG14 (2mm2) as the ground wire. w WARNING Before making the ground connection, make sure that the controller is not connected to the robot or the power to the controller is off. Provide a terminal marked "PE" as the protective conductor for the entire system, and connect it to an external protective conductor. Also securely connect the ground terminal on the robot frame to the protective conductor. (Symbol 417-IEC5019) 3-8 3-6 Connecting the robot to the controller 3-6 Connecting the robot to the controller Connect the robot cables to the mating connectors on the controller as shown. For the connectors on the controller, refer to the user's manual of the YAMAHA robot controller being used. w c CAUTION • After connecting the robot cable intermediate connectors together, fit the connector hoods together securely. • Standard robot cables do not permit much movement, so attach the robot cable securely to prevent unwanted movement of the motor power and signal wires. w WARNING • If the connectors are not securely inserted and the connector pins make poor contact, the robot may malfunction causing hazardous situations. Before turning on power to the robot, always make sure that each connector is correctly and securely inserted. • Do not place a strain or load on the connector by pulling on the robot cable itself. w WARNING Install the robot cable so that it will not interfere with the robot movement. Do not use an area where interference might occur between the robot cable and load attached to the tip of the robot as a work area. The robot cable might break if it hangs up on the moving parts of the robot and cause hazardous situations due to malfunction. w WARNING Install the connected robot cable in a position where it will not interfere with other workers or operators. People might trip over the cable and fall causing injuries. 3-9 3 Installation and connections WARNING • Before connecting the cables, check that there are no bends or breaks in the robot cable connector pins and that the cables are not damaged. Bent or broken pins or cable damage may cause robot malfunctions. • Always make sure that the power to the robot controller is off before connecting the cables or ground wires. 3-6 Connecting the robot to the controller 1)Connect the robot cables (motor and I/O signal wires) to the mating connectors coming out from the robot. Robot cable connector (motor wires) Robot cable connector (signal wires) 3 Installation and connections 2)After making the connections, fit the connector hoods together securely. Hood 3)Connect the robot cable ground terminal (power and signal lines) to the ground terminal on the robot frame. <MF15> <MF7> <MF20/30> c 3-10 <MF50/MF75/MF100> CAUTION Be sure to connect the ground terminal. Failure to do so may cause malfunctions. 3-6 Connecting the robot to the controller ■ Robot cable connections Refer to "7-4 Robot cable (I/O signal wires)" and "7-5 Robot cable (motor wires)" when wiring the cables. Robot cable connections (when connecting to SR1) SD MEMORY CARD Programming box HPB 3 SD memory card SR1-P controller RS-232C communication control Robot cable (signal wires) Robot cable (motor wires) I/O control Personal computer Support software POPCOM General-purpose input: 8 points, custom input: 8 points General-purpose output: 5 points, custom output: 3 points Power AC100/200V for supply I/O devices Gripper, limit switches, etc. After making connections, fasten the hoods securely. Hood External control (PLC and similar units) Linear Single-axis Robot (PHASER series) * Programming box HPB and support software POPCOM are sold separately. 3-11 Installation and connections or 3-7 Precautions during user wiring and air tube installation 3-7 Precautions during user wiring and air tube installation ● Cable carries (plastic chain for cable guide) User cables and air tubes can be routed in the cable carrier of the MF type robots. Observe the following precautions when routing user cables and air tubes in the cable carrier. c 3 Installation and connections CAUTION • The cable and air tubes should take up less than 30% of the space when storing them inside the cable carrier. Lay out the cables and air tubes in rows inside the cable carrier so they do not cross each other. Use the table below as a general guide for cable and air tube installation. • The cables and air tubes inside the cable carrier will shift while the robot is operating, becoming taut and placing a strain on the connectors at both ends. To prevent this loosely fasten the cables and air tube to the cable carrier with cable ties to prevent strain from being applied. (Fasten them lightly since the cables and air tubes might break if secured too tightly.) • Do not remove or mount brackets installed on the cable carrier or attempt to modify them. n Cable and air tube installation (reference) Robot model MF7/15/20/30 MF50/75/100 3-12 Optional cable carrier type Cable and air tube S f8 flexible cable ×1, f4 air tube ×1 M f8 flexible cable ×2, f6 air tube ×2 L f8 flexible cable ×2, f6 air tube ×3 – f8 flexible cable ×2, f6 air tube ×3 Chapter 4 Robot operation Contents 4-1 Notes on robot operation 4-1 4-1-1 Magnetic pole estimation action 4-1 4-1-2 Absolute search (semi-absolute specification) 4-1 4-1-3 Return to origin (incremental specification) 4-2 4-2 Setting operating conditions 4-2-1 Process flow for setting operating conditions 4-2-2 Duty monitor 4-2-3 Acceleration setting 4-3 Pulse train control (SRCP, SRCP30) 4-4 4-4 4-5 4-6 4-8 4-3-1 Acceleration/deceleration and position proportional gain 4-8 4-3-2 Setting the maximum speed 4-10 4-1 Notes on robot operation 4-1 Notes on robot operation On the MF7/MF15/MF20/MF30/MF50/MF75, two linear scale specifications are provided: incremental specification and semi-absolute specification. The MF100 is available only in incremental specification. Action after power-on differs depending on the linear scale specifications. Keep the following points in mind. 4-1-1 Magnetic pole estimation action • When starting the PHASER series robots, the slider always moves a few millimeters right after the servo is turned on and emits a high pitched noise. This is just the routine pre-action for estimating the magnetic pole and is not a problem. • Do not apply any external force or impact on the robot during the magnetic pole estimation action. Doing so may cause a failure in the magnetic pole estimation action. 4-1-2 Absolute search (semi-absolute specification) On the semi-absolute specification, absolute search (absolute position detection) must be performed after turning power on before starting operation. Current position is found by reading the signal recorded on the linear scale during absolute search. The slider (carriage) moves a maximum of 76mm while reading the signal. (The distance that the slider moves can be shortened by allowing the slider to move back and force for signal read. ■ Absolute search motion • Absolute reset speed is set to 20 (mm per second) prior to shipment. This speed can be reduced by parameter entry. • Absolute search sequence: When an absolute search (return-to-origin) command is input or the HPB is used to perform absolute search, the slider moves in the direction specified by parameter and then stops when the origin position is found, allowing automatic operation. 4-1 4 Robot operation • Both in the incremental and semi-absolute specifications, the magnetic pole estimation action is performed at servo-on immediately after turning the power on. 4-1 Notes on robot operation 4-1-3 Return to origin (incremental specification) Origin position ■ • On the incremental specification, return-to-origin must be performed after turning power on before starting operation. Magnetic poles are also detected during returnto-origin. Once return-to-origin is completed, there is no need to perform it again unless the controller power is turned off or an error occurs. • There are two positions at which the origin can be set. These are located one each on both ends of the stroke. Refer to the outline dimension drawings shown in Chapter 7, "Specifications". Unless specified otherwise, the origin position is set on the L side prior to shipment. The origin position can be set on the R side by changing the parameter. (See the separate "SR1 Controller User's Manual" for information on changing the parameter.) 4 Return-to-origin direction Robot operation L side R side : Magnetic pole detection point Slider Cable carrier L side R side : Magnetic pole detection point Return-to-origin operation ■ • Return-to-origin speed is set at 20 (mm per second) prior to shipment. This speed can be changed in increments of 1 to 100 (mm per second) by parameter entry. • Return-to-origin sequence: Robot moves as follows by entering a return- to-origin command or a return-to-origin operation from the HPB. (1) Slider moves in the specified return-to-origin direction at a speed set by the parameter. Return-to-origin direction L side R side : Magnetic pole detection point 4-2 4-1 Notes on robot operation (2) Slider moves in reverse direction after contacting the mechanical stopper (stroke end detected). c CAUTION If the magnetic pole was not detected in the operation above in (1), in other words, if return-to-origin started from a position on the left of the magnetic pole detection point), then the slider returns to the magnetic pole detection point (▲). There, the slider moves in the reverse direction and re-performs the operation in (1). (This is not an equipment problem.) Direction of movement 4 R side Robot operation L side (3) Slider (carriage) moves from the stroke end to the origin position and then stops to complete return-to-origin. Refer to the outline dimension drawings shown in Chapter 7, "Specifications". Origin position L side R side Reference See the separate "SR1 Controller User's Manual" for more information on return-to-origin operation. 4-3 4-2 Setting operating conditions 4-2 Setting operating conditions You must set operating parameters such as the payload, speed and acceleration in order to obtain maximum performance from the PHASER series robot. 4-2-1 Process flow for setting operating conditions Set optimum parameters using the flow chart below as a reference. Reference For details on the parameter setting method, refer to the user's manual of the YAMAHA robot controller being used. 4 Process flow for setting operating conditions Set payload parameter Robot operation Check actual operation (duty check) Does overload appear? NO YES Any margin in total cycle time to allow shortening it? Is total cycle time appropriate? YES NO Setting is appropriate Change robot speed and/or acceleration YES Lower robot speed and/or acceleration, or increase stop time 4-4 NO After lowering robot speed and/or acceleration, reduce cycle time with tasks other than robot operation 4-2 Setting operating conditions 4-2-2 Duty monitor An overload error appears to warn the motor is working too hard during tough robot operation. In these cases, either the robot acceleration or maximum speed must be lowered, or the robot stop time increased (lower the duty). On the other hand, if you want to shorten the cycle time even further, when there is currently no overload, you can raise the acceleration or maximum speed, or shorten the robot stop time (raise the duty). Viewing the duty monitor allows you to easily check the current robot operating status to find out how hard the robot can still work versus overload criteria. By checking the duty monitor, you can repeatedly change the settings and view the available duty to obtain ideal operating conditions. ● How to monitor the operation duty To monitor the operation duty using the programming box (HPB), follow these steps. 2) Press (MON) on the initial menu to enter MONITOR mode. [MENU] select menu 1EDIT2OPRT3SYS 4MON 3) Press (DUTY). [MON] select menu 1DI0 2DUTY 4) Press (RUN) to start measuring the operation duty. 5) Press the [MON−DUTY] select menu measuring ... 1RUN 2STOP3RSLT (STOP) key to quit measurement. Pressing the 4 Robot operation 1) Connect the HPB to the SR1 controller and turn on the controller power. The initial menu then appears on the HPB. (STOP) key retains the measurement data. 4-5 4-2 Setting operating conditions 6) Press the (RSLT) key to display the measurement data. The operation duty value in the period from pressing up to pressing the (RUN) (STOP) [MON−DUTY] measurement data X = 50% then appears as a percentage. Reference The operation duty can also be monitored while the program is running by using a program command. See the "SR1 Controller User's Manual" for more information. 4 4-2-3 Acceleration setting Robot operation Optimal acceleration for the PHASER series robots is automatically set by entering the payload parameter value. In the payload parameter, set the total weight of the workpiece and the end effectors such as hands or grippers attached to the robot slider. (Acceleration can also be changed by parameter.) c ● CAUTION Be sure to enter an accurate value when making this setting, since a mistake will cause troubles such as vibration or a shorter service life span. Setting the payload parameter To set the payload parameter by using the programming box (HPB), follow these steps. 1) Connect the HPB to the SR1 controller and turn on the power to the controller. The initial menu screen appears on the HPB. 2) Press (SYS) on the initial menu screen to enter SYSTEM mode. 3) Press (PRM). The parameter setting mode is entered. 4-6 [MENU] select menu 1EDIT2OPRT3SYS 4MON [SYS] select menu 1PRM 2B.UP3INIT4next [SYS−PRM] select menu 1AXIS2DATA3SYS14SYS2 4-2 Setting operating conditions 4) Select the parameter group. Press (AXIS) to select the axis parameters. The current setting for PRM100 (robot type) appears on the screen. Press the [SYS−PRM−AXIS] PRM100 = 4210 robot type read only keys to scroll up or down the parameters until PRM112 (payload) is displayed. 5) When PRM112 (payload) is displayed, use the number keys to enter the payload and press . 4 Robot operation 6) The cursor returns to the top of data when the parameter has been set correctly. [SYS−PRM−AXIS] PRM112 = 10 [kg] payload range 0→MAX [SYS−PRM−AXIS] PRM112 = 10 [kg] payload range 0→MAX 4-7 4-3 Pulse train control (SRCP, SRCP30) 4-3 Pulse train control (SRCP, SRCP30) When you control the robot movement by pulse train input, read the following description and comply with the precautions. For detailed information on pulse train control and specifications, refer to the separate "SRCP controller: Pulse train mode" supplementary manual. 4-3-1 Acceleration/deceleration and position proportional gain ● Acceleration/deceleration waveforms Use sinusoidal acceleration/deceleration to issue acceleration/deceleration instructions. Using other waveforms might adversely affect positioning accuracy and current value stability. Acceleration/deceleration and position proportional gain Acceleration/deceleration and position proportional gain at different payloads Combination of MF50 and SRCP Payload (kg) Acceleration/deceleration (G) Position proportional gain Kpp (PRM19) 0 1.20 80 10 0.94 76 20 0.61 72 30 0.45 68 40 0.36 64 50 0.30 60 Note: Acceleration/deceleration values apply to linear acceleration/deceleration. 1.40 1.20 80 70 1.00 60 0.80 50 40 0.60 30 0.40 20 0.20 10 0.00 0 0 4-8 90 Position proportional gain Kpp Acceleration (G) 10 20 30 Payload (kg) 40 50 Kpp Robot operation are shown in the tables and graphs below. Select the desired parameter values by referring to these tables and graphs. Acceleration/deceleration (G) 4 ● 4-3 Pulse train control (SRCP, SRCP30) Combination of MF100 and SRCP30 Payload (kg) Acceleration/deceleration (G) Position proportional gain Kpp (PRM19) 0 1.74 80 20 1.59 50 40 1.00 30 60 0.73 20 80 0.57 15 100 0.47 13 Note: Acceleration/deceleration values apply to linear acceleration/deceleration. 100 Position proportional gain Kpp Acceleration (G) 90 1.6 80 1.4 70 1.2 60 1 50 0.8 40 0.6 30 0.4 20 0.2 10 4 Kpp 1.8 0 0 0 20 40 60 80 100 Payload (kg) c CAUTION If the acceleration is too high, the robot might not follow the instructions or overloads occur. Reference The Position proportional gain parameter (PRM19) is a hidden parameter. For detailed information on how to display and change hidden parameters, see the "SRCP Series Controller User's Manual" or "SRCP30 Controller User's Manual". 4-9 Robot operation Acceleration/deceleration (G) 2 4-3 Pulse train control (SRCP, SRCP30) 4-3-2 Setting the maximum speed In the case of pulse train control, the robot moves 1 micrometer per pulse. To operate the robot at a maximum speed (2500 mm/sec), a pulse train at 2.5Mpps must be input. (The maximum speed might not be obtained depending on the operating conditions.) As the speed increases, the sliding resistance also increases and overloads tend to occur. 4 Robot operation 4-10 Chapter 5 Periodic inspection and maintenance Contents 5-1 Before beginning work 5-1 5-2 Periodic inspection 5-4 5-2-1 Daily inspection 5-2-2 Three-month inspection 5-2-3 Six-month inspection 5-2-4 Three-year inspection 5-2-5 Greasing to the linear guides 5-4 5-5 5-6 5-6 5-7 5-3 Replacing the shutter 5-10 5-4 Replacing the shutter roller 5-12 5-5 Maintenance parts 5-15 5-1 Before beginning work 5-1 Before beginning work Periodic inspection and maintenance are essential to ensure safe and efficient operation of YAMAHA robots. This chapter describes periodic inspection items and procedures for the PHASER series. Before beginning work, read the precautions below and also in Chapter 1 "Using the Robot Safely" and follow the instructions. [Safety precautions] (1) Read and understand the contents of this chapter completely before attempting to adjust the robot. (2) Place a sign indicating that the robot is being adjusted or serviced in order to keep any other person from operating the controller power switch, programming box or Handy Terminal, and the operation panel, etc. (3) If a safety enclosure or fence has not yet been provided right after installation of the robot, rope off or chain off the movement area around the robot in place of a safety enclosure or fence, and observe the following points. 1.Use stable posts which will not fall over easily. 2.The rope or chain should be easily visible by everyone around the robot. 3.Place a conspicuous sign prohibiting anyone other than the person who is adjusting the robot from entering the movement area of the robot. (4) To check operation after adjustment, refer to "1-6 Trial Operation" in Chapter 1. (5) For precautions on handling the controller, refer to the controller user's manual. w DANGER If the inspection or maintenance procedure calls for operation of the robot, stay out of the working area of the robot during operation. Do not touch any parts inside the controller. Keep watching the robot movement and surrounding area so that the operator can press the emergency stop button if any danger occurs. 5-1 5 Periodic inspection and maintenance 5-1 Before beginning work w WARNING • When the robot does not need to be operated during adjustment or maintenance, always turn off the controller and the external switch board. • Do not touch internal parts of the controller for 10 MINUTES after the controller has been turned off. • When only making electrical inspections and requiring no mechanical movement of the robot, keep the emergency stop button pressed. • Use only lubricant and greases specified by YAMAHA sales office or representative. • Use only parts specified by YAMAHA sales office or representative. Take sufficient care not to allow any foreign matter to contaminate them during adjustment, parts replacement or reassembly. • Do not modify any parts on the robot or controller. Modification may result in unsatisfactory specifications or threaten operator safety. • When adjustment or maintenance is complete, retighten the bolts and screws securely. • During robot adjustment or maintenance, place a sign indicating that the robot is being adjusted or serviced to prevent others from touching the control keys or switches. Provide a lock on the switch keys or ask someone to keep watch as needed. w WARNING DO NOT DISASSEMBLE THE ROBOT. THE INTERNAL MAGNETIC PLATE USES POWERFUL PERMANENT MAGNETS SO DISASSEMBLY WITHOUT PROPER PREPARATION IS HAZARDOUS. ATTEMPTING TO DISASSEMBLE IT MIGHT ALSO PREVENT OBTAINING THE SPECIFIED PERFORMANCE. 5 Periodic inspection and maintenance 5-2 5-1 Before beginning work When applying grease to the internal linear guide, take the following precautions. w WARNING Disposal of grease and waste containers • Disposal methods are subject to legal regulations. Be sure that disposal methods comply with the established legal regulations. • Do not apply pressure to empty containers. Pressure might cause the containers to rupture. • Do not attempt to weld, heat, drill holes or cut these containers. Besides a potential explosion, the remaining contents of the container might ignite and catch fire. 5-3 5 Periodic inspection and maintenance w WARNING Precautions when handling grease: • Inflammation may occur if this gets in the eyes. Before handling the grease, wear your safety goggles to ensure the grease will not come in contact with the eyes. • Inflammation may occur if the grease comes into contact with skin. Be sure to wear protective gloves to prevent contact with skin. • Do not take orally or eat. (Eating will cause diarrhea and vomiting.) • Hands and fingers might be cut when opening the grease container, so use protective gloves. • Keep out of the reach of children. • Do not heat the grease or place near an open flame since this could lead to sparks and fires. Emergency Treatment: • If grease gets in the eyes, wash liberally with pure water for about 15 minutes and consult a physician for treatment. • If grease comes in contact with the skin, wash away completely with soap and water. • If taken internally, do not induce vomiting but promptly consult a physician for proper treatment. 5-2 Periodic inspection 5-2 Periodic inspection The PHASER series robots use a linear motor and a linear guide with ball retainer, and require little user maintenance. However, perform the following daily and periodic inspections. 5-2-1 Daily inspection The following inspections must be performed every day before and after operating the robot. (1) Inspection to be performed with the controller power turned off 1)Turn off the controller power. 2)Place a sign indicating the robot is being inspected, to keep others from operating the controller power. 3)Enter the safety enclosure and check the following points. Check item 5 Description Note Periodic inspection and maintenance Cables and connectors Check for scratches, damages and excessively tight bends. Shutter Check scratches and dents. (Refer to "5-3 Replacing the shutter".) Motor Check for unusual vibration and noise, and for abnormal temperature rise. Consult us if damages or abnormal conditions are found. Using the duty monitor, check that the duty ratio is less than 100%. (2) Inspection to be performed with the controller power turned on 1)Check that no one is inside the safety enclosure, and then turn on the controller power. 2)Place a sign indicating that the robot is being adjusted or serviced in order to keep any other person from operating the controller, programming box or Handy Terminal, and the operation panel, etc. 3)Check the following points from outside the safety enclosure. Check item 5-4 Description Safety enclosure or fence Check if the safety enclosure or fence is in place. Check if emergency stop is triggered when the door is opened. Check if warning labels are affixed at the entrance. Emergency stop device Press the emergency stop button to check if it works. Robot movement Check for abnormal movement and excessive vibration and noise. (Contact us if any abnormal operation is found.) Z-axis brake operation *1 Check if the brake works to stop the Z-axis from dropping more than 3mm from the stationary point. (Contact us if any abnormal operation is found.) *1:Visually check the Z-axis movement from outside the safety enclosure by pressing the emergency stop button and also by turning off the controller. 5-2 Periodic inspection w WARNING The controller must be installed outside the safety enclosure. When inspecting the controller, entering the safety enclosure while the controller power is on is dangerous and must be avoided. Reference When starting the PHASER series robots, the slider always moves a few millimeters right after the servo is turned on and emits a high pitched noise. This is just the routine pre-action for estimating the magnet pole and is not a problem. 5-2-2 Three-month inspection Take the following precautions when performing 3-month inspection. 1)Turn off the controller power. 2)Place a sign indicating the robot is being inspected, to keep others from operating the controller power. Checkpoints Check items Linear guide • Check for dust buildup or debris. Clean if necessary. Apply grease after cleaning. • Check to see if linear guide is lubricated (not dry). Apply grease if necessary. Shutter Check for slack. Adjust if necessary. (Refer to "5-3 Replacing the shutter".) Periodic inspection and maintenance 3)Enter the safety enclosure and check the following points. Notes Recommended grease: <MF7/MF15> AFA (THK) c 5 <MF20/MF30/MF50/MF75/MF100> Albania S 2 (Shell) CAUTION The linear guide service life may be reduced if our recommended grease is not used. 5-5 5-2 Periodic inspection 5-2-3 Six-month inspection Take the following precautions when performing 6-month inspection. 1)Turn off the controller power. 2)Place a sign indicating the robot is being inspected, to keep others from operating the controller power. 3)Enter the safety enclosure and check the following points. Checkpoints 5 Check items Periodic inspection and maintenance Bolts and screws on robot Check for looseness. Tighten if loose. Linear guide Check for backlash caused by air. Controller • Check if terminals are loose. • Check if connectors are loose. Greasing to linear guide Apply recommended grease to linear guide every 6 months. Shutter Check for slack (gap). Adjust if necessary. (Refer to "5-3 Replacing the shutter".) Shutter roller Check for wear, and replace if necessary. (Refer to "5-4 Replacing the shutter roller".) Notes Contact us if any abnormal condition is found. Recommended grease: <MF7/MF15> AFA (THK) c <MF20/MF30/MF50/MF75/MF100> Albania S 2 (Shell) CAUTION The linear guide service life may be reduced if our recommended grease is not used. 5-2-4 Three-year inspection Check the following points every 3 years or more often if the robot is used frequently. Checkpoints Linear guide 5-6 Check items Check for backlash caused by air. Notes Contact us if any abnormal condition is found. 5-2 Periodic inspection 5-2-5 Greasing to the linear guides When applying grease to the linear guide according to periodic inspection, follow the procedure below. c CAUTION Using grease other than those recommended by YAMAHA might shorten the service life of the linear guide. <MF7/MF15> 1)Prepare the following tools required for replacement. • Phillips screwdriver • Grease gun (recommended grease gun: THK MG70 with Type N nozzle) 2)Turn off the controller power. 3)Place a sign indicating the robot is being inspected, to keep others from operating the controller power. Periodic inspection and maintenance 4)Enter the safety enclosure. 5)Apply grease by either of the following methods. (1)Remove the two screws on the end face of the robot and remove the end cover. (2)Move the slider (carriage) all the way to one end of the robot. (3)Using a grease gun, inject grease into the grease nipple in the grease hole. (4)Supply grease to the other end of the robot in the same way. (5)Reattach the end cover. w Move the slider to one end of the robot. End cover e Using a grease gun, inject grease into the grease nipple in the greasing hole. 5 q Remove the screws and remove the end cover. 5-7 5-2 Periodic inspection <MF20/MF30> 1)Prepare the following tools required for replacement. • Phillips screwdriver • Grease gun (recommended grease gun: THK MG70 with Type L nozzle) 2)Turn off the controller power. 3)Place a sign indicating the robot is being inspected, to keep others from operating the controller power. 4)Enter the safety enclosure. 5)Apply grease by either of the following methods. (1)Insert a grease gun into the grease supply hole provided on the side of the robot. (2)Inject grease into the grease hole in the guide bearing. 5 Periodic inspection and maintenance * It is recommended to open the shutter as shown and to perform work while visually checking. 5-8 5-2 Periodic inspection <MF50/MF75/MF100> 1)Prepare the following tools required for replacement. • Phillips screwdriver • Grease gun (recommended grease gun: THK MG70 with Type N nozzle) 2)Turn off the controller power. 3)Place a sign indicating the robot is being inspected, to keep others from operating the controller power. 4)Enter the safety enclosure. 5)Apply grease by either of the following methods. (1)Remove the four screws on the end face of the robot and remove the end cover. (2)Move the slider (carriage) all the way to one end of the robot. 5 (3)Using a grease gun, inject grease into the grease nipple. (4)Supply grease to the other end of the robot in the same way. w Move the slider to one end of the robot. e Using a grease gun, inject grease into the grease nipple. q Remove the screws and remove the end cover. End cover 5-9 Periodic inspection and maintenance (5)Reattach the end cover. 5-3 Replacing the shutter 5-3 Replacing the shutter w WARNING Be careful not to let the shutter drop inside the robot body during shutter replacement. This could cause breakdowns or damage in both the shutter and the robot. 1) Remove both shutter clamp plates located at the ends of the robot body. 5 <MF50> Shutter clamp plate Periodic inspection and maintenance 2) Fasten the new shutter onto the old shutter (for replacement) with tape as shown in the photo. Old shutter New shutter <MF50> Fasten with tape <MF50> c 5-10 CAUTION Attach the tape strongly enough so it will not come loose during the pull-in task. If the tape is too thick the shutter will be impossible to pull in, so use tape with the right thickness such as insulating tape. 5-3 Replacing the shutter 3) Pull gently on the old shutter as shown in the photo so that it will not come loose from the groove in the stroke cover, and draw in the new shutter. Be careful at this time not to let the new shutter twist, warp or hang up. <MF50> 5 Periodic inspection and maintenance <MF50> 4) After finished installing the new shutter, adjust its position. Then reinstall the shutter clamp plate so that there is no looseness or play in the shutter. <MF50> Shutter clamp plate 5-11 5-4 Replacing the shutter roller 5-4 Replacing the shutter roller w WARNING Be careful not to drop the tools and bolts onto the shutter or into the robot body during shutter roller replacement. This could cause breakdowns or damage in both the shutter and the robot. c CAUTION This procedure applies only to the MF7 and MF75. To replace the shutter roller for the other MF series robots, the carried object must be removed. <For MF7> (1)Remove the eight screws (four on each side) holding the slider cover, and remove the slider cover. 5 Periodic inspection and maintenance Slider cover (2)Make a protective sheet for prevention of bolt fall-down. Bend a 1cm-portion of 5cm-square sheet 90° as shown below. 5-12 5-4 Replacing the shutter roller (3)Insert the protective sheet into the clearance, remove the two screws (one on each side) that secure the shutter roller, and remove the shutter roller. Protective sheet Shutter roller (4)With the protective sheet kept inserted into the clearance, install a new shutter roller. When installing the new shutter roller, place its metal plate against the slider. 5 (5)Reattach the slider cover and cap. <For MF75> (1)Remove the cap on the side cover. Cap 5-13 Periodic inspection and maintenance Place the shutter roller against the slider. 5-4 Replacing the shutter roller (2)Remove the eight screws (four on each side) holding the slider cover, and remove the slider cover. Slider cover (3)Remove the two screws (one on each side) holding the shutter roller, and remove the shutter roller. 5 Periodic inspection and maintenance (4)Install the new shutter roller and place its metal plate against the slider. Place the shutter roller against the slider. (5)Reattach the slider cover and cap. 5-14 5-5 Maintenance parts 5-5 Maintenance parts <MF7> Part name Shutter Shutter roller Part No. Remarks KCT-M229J-X00 MF7/MF7D: up to serial No. 3000st KCT-M22LK-X00 MF7/MF7D: serial No. 3000st and up KCT-M224M-000 <MF15> Part name Shutter Part No. Remarks KBW-M229J-X00 MF15: up to serial No. 3000st KBW-M22LK-X00 MF15: serial No. 3100st and up KBW-M225M-X00 MF15D: up to serial No. 2800st KBW-M225N-X00 MF15D: serial No. 2900st and up 5 <MF20/MF30> Part name Remarks KBS-M229J-X01 MF20: up to serial No. 3050st, MF30: up to serial No. 3000st KBS-M22LK-X01 MF20: serial No. 3150st and up, MF30: serial No. 3100st and up KBS-M225M-X03 MF20D: up to serial No. 3050st, MF30D: up to serial No. 2950st KBS-M225N-X03 MF20D: serial No. 3150st and up, MF30D: serial No. 3050st and up Periodic inspection and maintenance Shutter Part No. <MF50/MF100> Part name Shutter Part No. Remarks KBD-M229J-X03 MF50/MF100 KBD-M22LK-X01 MF50D/MF100D <MF75> Part name Shutter Shutter roller Part No. Remarks KCN-M229J-X00 MF75 KCN-M22LK-X00 MF75D KCN-M224M-000 5-15 MEMO 5-16 Chapter 6 Troubleshooting Contents 6-1 If you suspect trouble 6-1 6-2 Feedback error 6-1 6-3 Magnetic pole detection error 6-3 6-4 Overload 6-4 6-5 Position deviation error 6-5 6-1 If you suspect trouble 6-1 If you suspect trouble If an error such as a feedback error and overload occurs, check the following points to find the solution before you determine the robot or controller has malfunctioned. If the trouble still exists even after checking these points, please contact us with a detailed description of the trouble. 6-2 Feedback error Feedback error 1 External force or friction is applied to slider when power is turned on. YES Remove external force and friction and restart the robot. NO Turn power off and check slider movement by moving it by hand. Robot mechanical movement is heavy at point where power is turned on. YES NO Check wiring by referring to robot manual. YES * Try to turn on power in another place to check whether the robot operates normally. Correct wiring or replace defective connector pins. NO Robot number parameter is incorrect. YES Initialize parameters. NO If replacement controller is available, check by exchanging the controllers. Controller is defective. YES Replace the controller. NO External noise is large. YES 6 Troubleshooting Check robot number on HPB screen while referring to SR1 controller user's manual. Connector wiring is incorrect. Repair the robot. * Take noise reduction measures. NO Consult us. Requires repair or parts replacement. Contact us. 6-1 6-2 Feedback error Feedback error 2 Feedback error 4 Poor wiring connection or connector is disconnected. • Check signal wire if feedback error 2 occurs. • Check motor wire if feedback error 4 occurs. Check resistance between wires (U-V, V-W, W-U). MF7/MF15 : 6.5Ω MF20 : 7.5Ω MF30 : 8.3Ω MF50 : 3.6Ω MF75 : 3.1Ω MF100 : 1.0Ω Enter teaching mode in emergency stop and check current position display. YES Securely connect wires and connectors. NO Wiring or cable is broken. (Electrical discontinuity) YES Replace the cable. NO Motor resistance is abnormal. YES Repair NO Current position display on HPB fluctuates. * YES Repair * Current reading varies even though slider is stopped. Check robot number on HPB screen while referring to SR1 controller user's manual. 6 If replacement controller is available, check by exchanging the controllers. NO Robot number parameter is incorrect. YES Initialize parameters. NO Controller is defective. YES Replace the controller. Troubleshooting NO External noise is large. YES Take noise reduction measures. NO Consult us. Requires repair or parts replacement. Contact us. 6-2 6-3 Magnetic pole detection error 6-3 Magnetic pole detection error Magnetic pole detection error Motor wire is disconnected. YES Securely make connections. NO External force or friction is applied to slider when power is turned on. YES Remove external force and friction and restart the robot. NO Turn power off and check slider movement by moving it by hand. Robot mechanical movement is heavy at point where power is turned on. YES Repair the robot. * NO Check wiring by referring to robot manual. Connector wiring is incorrect. YES * Try to turn on power in another place to check whether the robot operates normally. Correct wiring or replace defective connector pins. NO Consult us. 6 6-3 Troubleshooting Requires repair or parts replacement. Contact us. 6-4 Overload 6-4 Overload Overload Check with duty monitor. Operation duty is too high. YES Check operating conditions by referring to the manual. NO External force or friction is applied to slider. YES Remove external force and friction. NO Turn power off and check slider movement by moving it by hand. Robot mechanical movement is heavy. YES Repair NO 6 Check resistance between wires (U-V, V-W, W-U). MF7/MF15 : 6.5Ω MF20 : 7.5Ω MF30 : 8.3Ω MF50 : 3.6Ω MF75 : 3.1Ω MF100 : 1.0Ω Troubleshooting Check robot number on HPB screen while referring to SR1 controller user's manual. Motor cable is broken or frayed. YES Replace the cable. NO Motor resistance is abnormal. YES Repair NO Robot number parameter is incorrect. YES Initialize parameters. NO If replacement controller is available, check by exchanging the controllers. Controller is defective. YES Replace the controller. NO External noise is large. YES Take noise reduction measures. NO Consult us. Requires repair or parts replacement. Contact us. 6-4 6-5 Position deviation error 6-5 Position deviation error Position deviates. The position deviates after moving the robot or set up of workpiece tool. Operation was correct, but position deviates. Robot bumped into something, or there are traces of bumping into (rubbing against) something. Yes Is cable broken? Are cables correctly wired? Are connectors correctly fitted? No No Replace the cable. Yes (1) Check tool and workpiece for warping. (2) Check robot alignment. Check wiring and connectors. No Are the robot, tools and workpiece correctly installed? Mechanical cause No Check installation method. Check for looseness of robot mechanical parts. Troubleshooting Yes 6 Does the position return after return-to-origin operation? Yes (1) Check for looseness of mechanical parts. Retighten if necessary. (2) Replace mechanical parts. Yes Electrical cause Is there a large source of noise nearby? No Take measures against noise. Check or replace the motor, cable and controller. 6-5 MEMO 6-6 Chapter 7 Specifications Contents 7-1 Main unit 7-1 7-1-1 MF7 7-1-2 MF15 7-1-3 MF20 7-1-4 MF30 7-1-5 MF50 7-1-6 MF75 7-1-7 MF100 7-1 7-8 7-14 7-20 7-26 7-30 7-34 7-2 Robot connector (I/O signal connector) 7-38 7-3 Robot connector (motor connector) 7-38 7-4 Robot cable (I/O signal wires) 7-39 7-5 Robot cable (motor wires) 7-39 7-1 Main unit 7-1 Main unit 7 7-1-1 MF7 l Basic specifications MF7 Specifications Model name Driving method MF7D Steel cored linear motor flat magnet Repeated positioning accuracy (µm) ±5 Scale (μm) Magnetic method, resolution: 1 Maximum speed (mm/sec) 2 2500 Maximum carrying weight (kg) 1 10 Rated thrust (N) 37 Maximum stroke (mm) 4000 Bearing method 3800 1 guide rails and 2 blocks (with retainer) Maximum cross-section outside dimensions (mm) W85×H80 (excluding cable carrier) Overall length (mm) Stroke length + 280 Cable length (m) Stroke length + 480 Standard : 3.5 Option: 5/10 SR1-P, RCX221, RCX240, RDP, TS-P 1: Weight per one carrier 2: See the maximum speed table below. Payload (kg) Maximum speed (m/s) 7 or less 2.5 8 2.3 9 2.2 10 2.1 Maximum speed (m/s) Controller 3.0 2.5 2.0 1.5 1.0 0.5 0 0 1 2 3 4 5 6 7 8 9 10 Payload (kg) l Static load moment MY (Unit: N•m) MY MP MR 156 156 194 MP l Allowable overhang * MR *Distance from the center on the top face of slider to the gravity center of the item being carried. (This is calculated assuming that the service life of the guide is 10,000km.) ■ Horizontal installation A C B 1kg 3kg 5kg 7kg 9kg 10kg A 3000 3000 2900 2400 2200 2100 B 3000 1350 830 580 460 410 (Unit: mm) C 680 215 125 85 60 55 7-1 145.4 20.5 14 M 49 40 20.5 14 5 2.6 Detail of section D 1.5 10 Cross-section of E-E 2 11 6 42.4 85.8 116.4 77 40 E 90 E 100 14 16 18 20 22 24 26 12 28 13 30 14 32 15 34 16 36 17 38 18 40 19 42 20 44 21 46 22 Weight (kg) 5.8 6.5 7.3 8.0 8.7 9.4 10.1 10.9 11.6 12.3 13.0 13.7 14.5 15.2 15.9 16.6 17.3 18.1 18.8 19.5 12 11 10 10 8 9 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 8 B 7 C 6 4 3 A 5 380 480 580 680 780 880 980 1080 1180 1280 1380 1480 1580 1680 1780 1880 1980 2080 2180 2280 L Effective stroke 100 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 C ±0.02 A×100 L Effective stroke 2-φ10H7 Refer to cross-section of E-E. B-M4×0.7 Depth 9 Ground terminal (M4) (190) 140±5 (L side origin position) (140) 40±1 110 4-φ4H7 Depth 10 80 (Note 1) 50 8-M5×0.8 Depth 10 ±0.02 30 Note 1. Distance from both ends to the mechanical stopper. Note 2. The origin is set on the L side at the time of shipment. It can be changed to the R side by parameter setting. Note 3. The drawings on this page show the unit with horizontal-right-type cable carrier (RH). Cross-section of cable carrier S 24 15 5.7 3.2 Optional cable carrier M type Optional cable carrier S type 170.4 D 10 80 : Top face of slider (79.5) 58.7 Horizontal-left-type cable carrier (LH) (φ10H7) (Between φ4H7±0.02) (79) 65 (100) 7-2 64.5 (90) (40) (140) 140±5 (R side origin position) 40±1 (Note 1) 7 50 Specifications MF7 single-carriage horizontal mount model Standard type 7-1 Main unit 66 50 2.6 (Diameter of roller:φ30) Note 4 Detail of section D 5 179 1.5 84.8 77 10 37 138.5 173.5 (216.5) Cross-section of E-E 2 11 6 (φ10H7) 40 E 90 E Ground terminal (M4) 4-φ4H7 Depth 10 8-M5×0.8 Depth 10 L Effective stroke A×100 2-φ10H7 Refer to cross-section of E-E. C ±0.02 B-M4×0.7 Depth 9 (190) 105 (140) 110 40±1 80 (Note 1) 50 ±0.02 30 140±5 (L side origin position) (50) 100 (90) (40) (140) Note 5 140±5 (R side origin position) 40±1 (Note 1) 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 4100 8 C 7 7-3 Specifications Weight (kg) 5.8 6.5 7.3 8.0 8.7 9.4 10.1 10.9 11.6 12.3 13.0 13.7 14.5 15.2 15.9 16.6 17.3 18.1 18.8 19.5 20.2 20.9 21.7 22.4 23.1 23.8 24.5 25.3 26.0 26.7 27.4 28.1 28.9 29.6 30.3 31.0 31.7 32.5 33.2 33.9 10 12 14 16 18 20 22 24 26 28 30 32 34 36 38 40 42 44 46 48 50 52 54 56 58 60 62 64 66 68 70 72 74 76 78 80 82 84 86 6 8 5 3 A B 4 380 480 580 680 780 880 980 1080 1180 1280 1380 1480 1580 1680 1780 1880 1980 2080 2180 2280 2380 2480 2580 2680 2780 2880 2980 3080 3180 3280 3380 3480 3580 3680 3780 3880 3980 4080 4180 4280 L Effective stroke 100 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 Note 1. Distance from both ends to the mechanical stopper. Note 4. For models with a 3,000mm or longer stroke, a roller is installed to prevent the Note 2. The origin is set on the L side at the time of shipment. It can be changed to the R side cable carrier from sagging. by parameter setting. Note 5. Protrusion is the distance the cable carrier extends from the edge of the unit. Note 3. The drawings on this page show the unit with horizontal-right-type cable carrier (RH). φ7.5 φ6.7 Cross-section of cable carrier 35 29 80 : Top face of slider (79.5) 58.7 D 10 64.5 50 Horizontal-left-type cable carrier (FLH) 5.7 3.2 (79) 65 (Between φ4H7±0.02) MF7 single-carriage horizontal mount model Standard type (For optional L-type cable carrier) 7-1 Main unit 7 M 49 40 20.5 14 147 5 Detail of section D 1.5 2.6 Installation surface 10 2 11 6 42.4 84.8 118 77 Cross-section of E-E 10 40 100 16 18 20 22 24 11 26 12 28 13 30 14 32 15 34 16 36 17 38 18 40 19 42 20 44 21 46 22 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 14 10 C 12 9 Weight (kg) 5.8 6.5 7.3 8.0 8.7 9.4 10.1 10.9 11.6 12.3 13.0 13.7 14.5 15.2 15.9 16.6 17.3 18.1 18.8 19.5 10 8 8 7 B 6 3 5 380 480 580 680 780 880 980 1080 1180 1280 1380 1480 1580 1680 1780 1880 1980 2080 2180 2280 L A 4 B-M4×0.7 Depth 9 Ground terminal (M4) 4-φ4H7 Depth 10 8-M5×0.8 Depth 10 A×100 C ±0.02 L Effective stroke 2-φ10H7 Refer to cross-section of E-E. Effective stroke 100 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 E 90 E (190) 140±5 (L side origin position) (140) 40±1 110 (Note 1) 80 50 ±0.02 30 Note 1. Distance from both ends to the mechanical stopper. Note 2. The origin is set on the L side at the time of shipment. It can be changed to the R side by parameter setting. Note 3. The drawings on this page show the unit with horizontal-right-type cable carrier (RH). Cross-section of cable carrier S 24 15 20.5 14 Optional cable carrier M type Optional cable carrier S type 172 5.7 3.2 D 12.5 80 : Top face of slider (79.5) 58.7 Horizontal-left-type cable carrier (FLH) (φ10H7) (Between φ4H7±0.02) (79) 65 (92) 7-4 64.5 (90) (40) 140±5 (R side origin position) 40±1 (Note 1) (140) 7 50 Specifications MF7 single-carriage horizontal mount model Flat type 7-1 Main unit 170.4 M 49 40 145.4 5 2.6 Detail of section D 1.5 2 11 6 42.4 85.8 116.4 10 (100) 40 E 90 E 100 B-M4×0.7 Depth 9 8 9 20 22 10 11 24 26 12 28 13 30 14 32 15 34 16 36 17 38 18 40 19 42 20 44 21 46 22 48 23 50 24 Weight (kg) 9.3 10.2 11.1 12.0 12.9 13.9 14.8 15.7 16.6 17.5 18.5 19.4 20.3 21.2 22.1 23.1 24.0 24.9 25.8 26.7 18 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 7 16 C 6 5 12 A B 580 680 780 880 980 1080 1180 1280 1380 1480 1580 1680 1780 1880 1980 2080 2180 2280 2380 2480 L 14 Ground terminal (M4) 4-φ4H7 Depth 10 8-M5×0.8 Depth 10 Effective stroke 2-φ10H7 Refer to cross-section of E-E. (190) Effective stroke 100 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 Cross-section of E-E D 10 Note 1. Position of the table slider when returned to the origin. Note 2. Distance from both ends to the mechanical stopper. 20.5 14 80 : Top face of slider (79.5) 58.7 Optional cable carrier S type Cross-section of cable carrier S 24 15 20.5 14 Optional cable carrier M type 5.7 3.2 77 (φ10H7) (Between φ4H7±0.02) (79) 65 64.5 50 140±5 (Note 1) 40±1 110 80 (Note 2) 50 ±0.02 30 A×100 C ±0.02 L (200 : Minimum distance between carriages) Effective stroke (90) (40) 140±5 (Note 1) 40±1 (Note 2) Specifications MF7D double-carriage horizontal mount model Standard type 7-1 Main unit 7 7-5 84.8 77 10 179 1.5 (Diameter of roller:φ30) Note 3 37 5 2.6 138.5 173.5 (216.5) 40 E 90 E Ground terminal (M4) A×100 (90) 100 Ground terminal (M4) 2-φ10H7 Refer to cross-section of E-E. C ±0.02 B-M4×0.7 Depth 9 105 (190) (40) 18 20 22 24 26 28 30 14 32 15 34 16 36 17 38 18 40 19 42 20 44 21 46 22 48 23 50 24 52 25 54 26 56 27 58 28 60 29 62 30 64 31 66 32 68 33 70 34 72 35 74 36 76 37 78 38 80 39 82 40 84 41 86 42 Weight (kg) 9.3 10.2 11.1 12.0 12.9 13.9 14.8 15.7 16.6 17.5 18.5 19.4 20.3 21.2 22.1 23.1 24.0 24.9 25.8 26.7 27.7 28.6 29.5 30.4 31.3 32.3 33.2 34.1 35.0 35.9 36.9 37.8 38.7 39.6 40.5 41.5 42.4 43.3 16 13 14 12 12 11 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 4100 10 B 9 C 8 6 5 7 580 680 780 880 980 1080 1180 1280 1380 1480 1580 1680 1780 1880 1980 2080 2180 2280 2380 2480 2580 2680 2780 2880 2980 3080 3180 3280 3380 3480 3580 3680 3780 3880 3980 4080 4180 4280 L A Effective stroke 100 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 Note 3. For models with a 3,000mm or longer stroke, a roller is installed to prevent the cable carrier from sagging. Note 4. Protrusion is the distance the cable carrier extends from the edge of the unit. Cross-section of E-E 2 11 6 (φ10H7) (50) (50) L Note 4 140±5 (Note 1) Effective stroke (200 : Minimum distance between carriages) 140±5 (Note 1) Note 4 110 Effective stroke 40±1 40±1 80 (Note 2) (Note 2) 4-φ4H7 Depth 10 50 8-M5×0.8 Depth 10 30±0.02 7 Note 1. Position of the table slider when returned to the origin. Note 2. Distance from both ends to the mechanical stopper. φ7.5 φ6.7 Cross-section of cable carrier Detail of section D 66 50 D 10 5.7 3.2 80 : Top face of slider (79.5) 58.7 35 29 64.5 50 7-6 (79) 65 (Between φ4H7±0.02) Specifications MF7D double-carriage horizontal mount model Standard type (For optional L-type cable carrier) 7-1 Main unit M 49 40 20.5 14 147 5 Detail of section D 1.5 2.6 Installation surface 10 2 11 6 42.4 84.8 118 10 Cross-section of E-E 58.7 D (92) 40 E 90 E 100 18 20 22 24 26 28 30 32 15 34 16 36 17 38 18 40 19 42 20 44 21 46 22 48 23 50 24 Weight (kg) 9.3 10.2 11.1 12.0 12.9 13.9 14.8 15.7 16.6 17.5 18.5 19.4 20.3 21.2 22.1 23.1 24.0 24.9 25.8 26.7 16 14 14 13 12 12 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 11 B 10 C 9 6 5 8 580 680 780 880 980 1080 1180 1280 1380 1480 1580 1680 1780 1880 1980 2080 2180 2280 2380 2480 L A 7 B-M4×0.7 Depth 9 Ground terminal (M4) 4-φ4H7 Depth 10 8-M5×0.8 Depth 10 Effective stroke C±0.02 Ground terminal (M4) (90) (40) L (200 : Minimum distance between carriages) 140±5 (Note 1) 40±1 Effective stroke (Note 1) A×100 2-φ10H7 Refer to cross-section of E-E. (190) Effective stroke 100 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 Note 1. Position of the table slider when returned to the origin. Note 2. Distance from both ends to the mechanical stopper. Cross-section of cable carrier S 24 15 20.5 14 Optional cable carrier M type Optional cable carrier S type 172 5.7 3.2 80 : Top face of slider (79.5) 12.5 77 (φ10H7) (Between φ4H7±0.02) (79) 65 64.5 50 140±5 (Note 1) 40±1 110 80 (Note 1) 50 30±0.02 Specifications MF7D double-carriage horizontal mount model Flat type 7-1 Main unit 7 7-7 7-1 Main unit 7-1-2 MF15 Model name MF15 Specifications Driving method MF15-W MF15D MF15D-W Steel cored linear motor flat magnet Repeated positioning accuracy (µm) ±5 Scale (μm) Magnetic method, resolution: 1 Maximum speed (mm/sec) 2 2500 Maximum carrying weight (kg) 1 30 Rated thrust (N) 54 Maximum stroke (mm) 4000 Bearing method 2000 3800 1800 2 guide rails and 4 blocks (with retainer) Maximum cross-section outside dimensions (mm) W100×H80 (excluding cable carrier) Overall length (mm) Stroke length + 260 Cable length (m) Stroke length + 460 Standard : 3.5 Option: 5/10 Controller SR1-P, RCX221, RCX240, RDP, TS-P 1: Weight per one carrier 2: See the maximum speed table below. Payload (kg) Maximum speed (m/s) 15 or less 2.5 20 2.2 25 1.8 30 1.5 l Static load moment Maximum speed (m/s) 7 l Basic specifications 3.0 2.5 2.0 1.5 1.0 0.5 00 5 10 15 20 25 30 35 Payload (kg) MY (Unit: N•m) MY MP MR 290 291 256 MP MR 7-8 7-1 Main unit l Allowable overhang * *Distance from the center on the top face of slider to the gravity center of the item being carried. (This is calculated assuming that the service life of the guide is 10,000km.) 7 ■ Horizontal installation C B (Unit: mm) A B C 5kg 3000 3000 915 10kg 2604 1542 481 15kg 2368 1051 340 20kg 1820 600 260 25kg 1470 450 175 30kg 1250 310 145 Specifications A ■ Vertical installation B A C (Unit: mm) A B C 5kg 865 1880 3060 10kg 410 905 2115 15kg 255 575 1910 20kg 170 410 1780 25kg 120 295 1660 30kg 90 215 1440 7-9 100 3.7 S 24 15 Detail of section G 2 M Cross-section of cable carrier 49 40 G 100 L 66 50 Optional cable carrier L type 188 184 φ8 φ7.5 32.5 A 80 200 Effective stroke L A B C D Weight (kg) 300 560 80 2 6 400 8.3 400 660 30 3 8 500 9.3 500 760 80 3 8 600 10.3 600 860 30 4 10 700 11.3 700 960 80 4 10 800 12.3 D ±0.02 (A) (Note 3) 30 (Note 2) 31±1 (130 : When at L side origin) 130±5 (R side origin position) 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 1060 1160 1260 1360 1460 1560 1660 1760 1860 1960 2060 2160 2260 2360 2460 2560 2660 2760 2860 2960 3060 3160 3260 3360 3460 3560 3660 3760 3860 3960 4060 4160 4260 30 80 30 80 30 80 30 80 30 80 30 80 30 80 30 80 30 80 30 80 30 80 30 80 30 80 30 80 30 80 30 80 30 5 5 6 6 7 7 8 8 9 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 17 17 18 18 19 19 20 20 21 12 12 14 14 16 16 18 18 20 20 22 22 24 24 26 26 28 28 30 30 32 32 34 34 36 36 38 38 40 40 42 42 44 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 4100 13.3 14.3 15.4 16.4 17.4 18.4 19.4 20.4 21.4 22.4 23.4 24.4 25.4 26.4 27.4 28.4 29.4 30.4 31.4 32.4 33.4 34.4 35.8 36.8 37.8 38.8 39.8 40.8 41.8 42.8 43.8 44.8 45.8 Note 4. For models with a 3,000mm or longer stroke and an optional L type cable carrier, a roller is installed to prevent the cable carrier from sagging. Note 5. Protrusion is the distance the cable carrier extends from the edge of unit when an optional L type cable carrier is used. 2-φ10H7 Depth 7 L Effective stroke Bx200 C-M6x1.0 Depth 10 Ground terminal (M4) 130±5 (L side origin position) (130 : When at R side origin) 186 90 68 2-φ6H7 Depth 10 31±1 4-M6x1.0 Depth 12 48 ±0.02 (Note 2) (Between φ6H7±0.02) Note 1. Distance from both ends to the mechanical stopper. Note 2. The origin is set on the L side at the time of shipment. It can be changed to the R side by parameter setting. Note 3. For models with a 2,100mm or longer stroke, optional L type cable carriers can only be used. 20.5 14 7.2 4.5 Optional cable carrier S / M type 186.5 : M type (161.5 : S type) 20.5 14 80 : Top face of slider 66 20 35 29 167 φ30 Diameter of roller 90 100 7-10 94 84 7 60 Specifications MF15 single-carriage horizontal mount model 7-1 Main unit 7-11 66 50 20.5 14 14 Optional cable carrier M type Optional cable carrier L type 99.5 M type L type 20 103.5 29 24 292.4 S type 6.2 79 20 G 20 80: Top face of slider 66 Standard and S types Ground terminal (M4) E Ground terminal (M4) 4.5 7.2 Detail of section G 60 20.5 31±2 (Note 1) (130) 130±5 80 200 (L side origin position) A 2-φ10H7 Depth 7 Effective stroke L A B C D E Weight (kg) 300 560 80 2 6 400 320 8.3 400 660 30 3 8 500 370 9.3 500 760 80 3 8 600 420 10.3 600 860 30 4 10 700 470 11.3 700 800 900 1000 960 1060 1160 1260 80 30 80 30 4 5 5 6 10 12 12 14 800 900 1000 1100 520 570 620 670 12.3 13.3 14.3 15.4 1100 1360 80 6 14 1200 720 16.4 1200 1460 30 7 16 1300 770 17.4 1300 1560 80 7 16 1400 820 18.4 1400 1660 30 8 18 1500 870 19.4 1500 1760 80 8 18 1600 920 20.4 1600 1860 30 9 20 1700 970 21.4 1700 1960 80 9 20 1800 1020 22.4 1800 2060 30 10 22 1900 1070 23.4 1900 2160 80 10 22 2000 1120 24.4 4-M6×1.0 Depth 13 2-φ6H7 Depth 10 Standard and S types L Effective stroke Ground terminal (M4) D±0.02 B×200 C-M6×1.0 Depth 10 Note 1. Distance from both ends to the mechanical stopper. Note 2. The origin is set on the R side at the time of shipment. It can be changed to the L side by parameter setting. Note 3. Protrusion is the distance the cable carrier extends from the edge of unit when an optional L type cable carrier is used. l 49 40 35 φ7.7 S M L φ7.5 Cross-section of optional cable carrier 15 197 3.7 2 197 6 100 24 2000 2260 30 11 24 2100 1170 25.4 48±0.02 68 90 (186) 112 130±5 (R side origin position) (130) (A) (50: Note 3) 31±2 (Note 1) (94) 84 (Between φ6H7±0.02) Specifications MF15 single-carriage wall mount model 7-1 Main unit 7 100 3.7 S 24 15 Detail of section G 2 M Cross-section of cable carrier 49 40 G 100 L 66 50 Optional cable carrier L type 188 184 φ8 φ7.5 32.5 31±1 (Note 2) 30 (Note 3) A 80 D ±0.02 (A) 30 (Note 3) Note 4. For models with a 3,000mm or longer stroke and an optional L type cable carrier, a roller is installed to prevent the cable carrier from sagging. Note 5. Protrusion is the distance the cable carrier extends from the edge of unit when an optional L type cable carrier is used. 2-φ10H7 Depth 7 Ground terminal (M4) (Note 2) (200 : Minimum distance between carriages) 130±5 (Note 1) 186 2-φ6H7 Depth 10 90 68 4-M6x1.0 Depth 12 ±0.02 31±1 48 Effective stroke L Bx200 C-M6x1.0 Depth 10 Ground terminal (M4) 2-φ6H7 Depth 10 4-M6x1.0 Depth 12 Effective stroke (Between φ6H7±0.02) 8 10 10 12 12 5 14 6 14 6 80 16 7 30 16 7 80 18 8 30 18 8 80 20 9 30 20 9 80 30 22 10 80 22 10 24 11 30 24 11 80 30 26 12 80 26 12 30 28 13 80 28 13 30 30 14 80 30 14 30 32 15 80 32 15 30 34 16 80 34 16 30 36 17 80 36 17 30 38 18 80 38 18 30 40 19 80 40 19 30 42 20 80 42 20 30 44 21 Weight (kg) 10.3 11.5 12.6 13.7 14.8 16.0 17.1 18.2 19.3 20.5 21.6 22.7 23.8 25.0 26.1 27.2 28.3 29.5 30.6 31.7 32.8 34.0 35.1 36.2 37.4 38.5 39.6 41.0 42.2 43.3 44.4 45.5 46.7 47.8 48.9 50.0 51.2 52.3 8 5 30 6 4 80 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 4100 4 30 D 3 80 C 3 30 2 80 80 A B 30 560 660 760 860 960 1060 1160 1260 1360 1460 1560 1660 1760 1860 1960 2060 2160 2260 2360 2460 2560 2660 2760 2860 2960 3060 3160 3260 3360 3460 3560 3660 3760 3860 3960 4060 4160 4260 L Effective stroke 100 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 200 186 90 68 ±0.02 48 130±5 (Note 1) Note 1. Position of the table slider when returned to the origin. Note 2. Distance from both ends to the mechanical stopper. Note 3. For models with a 2,100mm or longer stroke, optional L type cable carriers can only be used. 20.5 14 7.2 4.5 Optional cable carrier S / M type 186 : M type (161 : S type) 20.5 14 80 : Top face of slider 66 20 35 29 167 φ30 Diameter of roller 90 100 (Between φ6H7±0.02) 94 84 7-12 60 7 84 Specifications MF15D double-carriage horizontal mount model 7-1 Main unit 7-13 14 20.5 292.4 20.5 14 Optional cable carrier L type 24 103.5 S type Ground terminal (M4) Optional cable carrier M type 20 99.5 M type L type 6.2 E Ground terminal (M4) 66 G 20 Standard and S types 80: Top face of slider 20 79 4.5 7.2 Detail of section G 31±2 (Note 1) (Note 3) (50) 60 29 A 130±5 80 48±0.02 68 90 (186) Effective stroke L A B C D E Weight (kg) 100 560 80 2 6 400 220 10.3 200 660 30 3 8 500 270 11.5 300 760 80 3 8 600 320 12.6 400 860 30 4 10 700 370 13.7 500 600 700 800 900 1000 1100 960 1060 1160 1260 1360 1460 1560 80 30 80 30 80 30 80 4 5 5 6 6 7 7 10 12 12 14 14 16 16 800 900 1000 1100 1200 1300 1400 420 470 520 570 620 670 720 14.8 16.0 17.1 18.2 19.3 20.5 21.6 1200 1660 30 8 18 1500 770 22.7 1300 1760 80 8 18 1600 820 23.8 Ground terminal (M4) L 1400 1860 30 9 20 1700 870 25.0 1500 1960 80 9 20 1800 920 26.1 1600 2060 30 10 22 1900 970 27.2 1700 2160 80 10 22 2000 1020 28.3 1800 2260 30 11 24 2100 1070 29.5 48±0.02 68 90 (186) 112 (200 : Minimum distance between carriages) 130±5 Effective stroke 4-M6×1.0 Depth 12 4-M6×1.0 Depth 12 2-φ6H7 Depth 10 2-φ6H7 Depth 10 Effective stroke Standard and S types D±0.02 B×200 C-M6×1.0 Depth 10 2-φ10H7 Depth 7 112 200 Note 1. Distance from both ends to the mechanical stopper. Note 2. Protrusion is the distance the cable carrier extends from the edge of unit when an optional L type cable carrier is used. l 35 φ7.7 S M L φ7.5 Cross-section of optional cable carrier 20 E 66 50 197 3.7 2 197 6 100 84 (Between φ6H7±0.02) (94) 49 40 (A) (50: Note 3) 31±2 (Note 1) 84 (Between φ6H7±0.02) 15 (94) 24 Specifications MF15D double-carriage wall mount model 7-1 Main unit 7 7-1 Main unit 7-1-3 MF20 Model name MF20 Specifications Driving method MF20D Steel cored linear motor flat magnet Repeated positioning accuracy (µm) ±5 Scale (μm) Magnetic method, resolution: 1 Maximum speed (mm/sec) 2 2500 Maximum carrying weight (kg) 1 40 Rated thrust (N) 86 Maximum stroke (mm) 4050 Bearing method 3850 2 guide rails and 6 blocks (with retainer) Maximum cross-section outside dimensions (mm) W150×H80 (excluding cable carrier) Overall length (mm) Stroke length + 260 Cable length (m) Stroke length + 460 Standard : 3.5 Option: 5/10 Controller SR1-P, RCX221, RCX240, RDP, TS-P 1: Weight per one carrier 2: See the maximum speed table below. Payload (kg) Maximum speed (m/s) 20 or less 2.5 25 2.3 30 2.0 35 1.8 40 1.5 l Static load moment Maximum speed (m/s) 7 l Basic specifications 3.0 2.5 2.0 1.5 1.0 0.5 00 5 10 15 20 25 30 3540 45 Payload (kg) MY (Unit: N•m) MY MP MR 373 373 328 MP MR 7-14 7-1 Main unit l Allowable overhang * *Distance from the center on the top face of slider to the gravity center of the item being carried. (This is calculated assuming that the service life of the guide is 10,000km.) ■ Horizontal installation A C B Specifications (Unit: mm) A B C 10kg 3156 1747 1196 15kg 2811 1176 883 20kg 2679 890 717 25kg 2190 720 505 30kg 1830 605 370 35kg 1580 525 275 40kg 1390 465 225 ■ Vertical installation B A C (Unit: mm) A B C 10kg 1220 1320 2540 15kg 870 850 2200 20kg 670 610 2030 25kg 485 400 1280 30kg 350 325 1050 35kg 265 270 890 40kg 235 230 765 7 7-15 238 167 Note 4 90 2.5 7 3.7 S 24 15 M Cross-section of cable carrier 49 40 G L 66 50 150 186 φ8 φ7.5 32.5 29±1 (Note 1) 105 A 50 ±0.02 190 70 130±5 (L side origin position) (130 : When at R side origin) 200 Depth 10 D±0.02 Bx200 L Effective stroke (A) (Note 5) 30 (Note 1) 29±1 (130 : When at L side origin) 130±5 (R side origin position) 8 3 4 4 5 5 6 6 7 7 8 8 9 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 17 17 18 18 19 19 20 20 21 10 10 12 12 14 14 16 16 18 18 20 20 22 22 24 24 26 26 28 28 30 30 32 32 34 34 36 36 38 38 40 40 42 42 44 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 4100 8 3 D 6 2 Weight (kg) 8.4 10.1 11.7 13.3 15.0 16.6 18.2 19.8 21.5 23.1 24.7 26.4 28.0 29.6 31.3 32.9 34.5 36.1 37.8 39.4 41.0 42.7 44.3 45.9 47.6 49.2 50.8 52.4 54.1 55.7 57.3 59.0 60.6 62.2 63.9 65.5 67.1 68.7 70.4 72.0 6 4 2 1 B 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 C 410 510 610 710 810 910 1010 1110 1210 1310 1410 1510 1610 1710 1810 1910 2010 2110 2210 2310 2410 2510 2610 2710 2810 2910 3010 3110 3210 3310 3410 3510 3610 3710 3810 3910 4010 4110 4210 4310 L A Effective stroke 150 250 350 450 550 650 750 850 950 1050 1150 1250 1350 1450 1550 1650 1750 1850 1950 2050 2150 2250 2350 2450 2550 2650 2750 2850 2950 3050 3150 3250 3350 3450 3550 3650 3750 3850 3950 4050 Note 4. For models with a 3,050mm or longer stroke and an optional L type cable carrier, a roller is installed to prevent the cable carrier from sagging. Note 5. Protrusion is the distance the cable carrier extends from the edge of unit when an optional L type cable carrier is used. +0.015 2-φ10H7 0 C-M6x1.0 Depth 10 Ground terminal (M4) +0.012 4-φ6H7 0 Depth 10 4-M6x1.0 Depth 12 Note 1. Distance from both ends to the mechanical stopper. Note 2. The origin is set on the L side at the time of shipment. It can be changed to the R side by parameter setting. Note 3. For models with a 2,050mm or longer stroke, optional L type cable carriers can only be used. 20.5 14 Detail of section G 7.2 4.5 Optional cable carrier S / M type Optional cable carrier L type 240.5 (M option) 215.5 (S option) (100) 20.5 14 136 φ30 Diameter of roller 80 : Top face of slider 64 14 35 29 (Between φ6H7±0.02) 120 (100) 7-16 98 7 100 Specifications MF20 single-carriage horizontal mount model 7-1 Main unit 7-17 9 (5) 290 150 49 40 66 50 Optional cable carrier S type φ8 φ7.5 105 A 79 200 Effective stroke L A B C D E Weight (kg) 150 410 105 1 4 200 220 8.4 250 510 55 2 6 300 270 10.1 350 610 105 2 6 400 320 11.7 450 710 55 3 8 500 370 13.3 550 810 105 3 8 600 420 15.0 Depth 10 ±0.02 L Effective stroke D Bx200 108 4-φ6H7 0 Depth 10 4-M6x1.0 Depth 12 +0.012 E 70 190 13 (A) (30 : Note 5) 130±5 (R side origin position) (130: When at L side origin) 29±1 (Note 1) 50 ±0.02 650 750 850 950 1050 1150 1250 1350 1450 1550 1650 1750 1850 1950 2050 2150 2250 2350 2450 2550 2650 2750 2850 2950 3050 3150 3250 3350 3450 3550 3650 3750 3850 3950 4050 910 1010 1110 1210 1310 1410 1510 1610 1710 1810 1910 2010 2110 2210 2310 2410 2510 2610 2710 2810 2910 3010 3110 3210 3310 3410 3510 3610 3710 3810 3910 4010 4110 4210 4310 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 4 4 5 5 6 6 7 7 8 8 9 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 17 17 18 18 19 19 20 20 21 10 10 12 12 14 14 16 16 18 18 20 20 22 22 24 24 26 26 28 28 30 30 32 32 34 34 36 36 38 38 40 40 42 42 44 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 4100 470 520 570 620 670 720 770 820 870 920 970 1020 1070 1120 1170 1220 1270 1320 1370 1420 1470 1520 1570 1620 1670 1720 1770 1820 1870 1920 1970 2020 2070 2120 2170 16.6 18.2 19.8 21.5 23.1 24.7 26.4 28.0 29.6 31.3 32.9 34.5 36.1 37.8 39.4 41.0 42.7 44.3 45.9 47.6 49.2 50.8 52.4 54.1 55.7 57.3 59.0 60.6 62.2 63.9 65.5 67.1 68.7 70.4 72.0 Note 4. For models with a 3,050mm or longer stroke and an optional L type cable carrier, a roller is installed to prevent the cable carrier from sagging. Note 5. Protrusion is the distance the cable carrier extends from the edge of unit when an optional L type cable carrier is used. Ground terminal (M4) Ground terminal (M4) +0.015 C-M6x1.0 Depth 10 2-φ10H7 0 29±1 (Note 1) (130 : When at R side origin) 130±5 (L side origin position) 14 64 Top face of slider 80 G M and L types Standard and S types Optional cable carrier L type 100 Note 1. Distance from both ends to the mechanical stopper. Note 2. The origin is set on the R side at the time of shipment. It can be changed to the L side by parameter setting. Note 3. For models with a 2,050mm or longer stroke, optional L type cable carriers can only be used. Detail of section G 4.5 7.2 2.5 3.7 M S L Cross-section of optional cable carrier 24 15 7 20.5 14 Optional cable carrier M type 35 29 41.3 20.5 14 325 105 φ30 Diameter of roller Specifications 120.3 250 150 (Between φ6H7±0.02) 120 136 MF20 single-carriage wall mount model 7-1 Main unit 7 2.5 7 3.7 (100) Cross-section of optional cable carrier M 49 40 L 66 50 G 150 186 φ8 φ7.5 Optional cable carrier L type Note 4 167 φ30 Diameter of roller 136 32.5 (Note 2) 29±1 105 A (Note 5) 30 190 70 50±0.02 Depth 10 D±0.02 Bx200 4-M6x1.0 Depth 12 (A) 190 70 50 ±0.02 (Note 5) (30) (Note 2) 29±1 130±5 (Note 1) (200 : Minimum distance between carriages) +0.012 Depth 10 4-φ6H7 0 Effective stroke Note 4. For models with a 3,050mm or longer stroke and an optional L type cable carrier, a roller is installed to prevent the cable carrier from sagging. Note 5. Protrusion is the distance the cable carrier extends from the edge of unit when an optional L type cable carrier is used. +0.015 2-φ10H7 0 C-M6x1.0 Depth 10 Ground terminal (M4) 4-M6x1.0 Depth 12 +0.012 Depth 10 4-φ6H7 0 L Effective stroke 10 12 12 14 14 6 16 7 16 7 18 8 18 8 20 9 20 9 22 10 22 10 24 11 24 11 26 12 26 12 28 13 28 13 30 14 30 14 32 15 32 15 34 16 34 16 36 17 36 17 38 18 38 18 40 19 40 19 42 20 42 20 44 21 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 4100 10 6 D 8 5 Weight (kg) 14.9 16.6 18.3 20.0 21.7 23.5 25.2 26.9 28.6 30.3 32.0 33.7 35.4 37.2 38.9 40.6 42.3 44.0 45.7 47.4 49.1 50.8 52.6 54.3 56.0 57.7 59.4 61.1 62.8 64.5 66.3 68.0 69.7 71.4 73.1 74.8 76.5 78.2 8 5 6 4 C 4 2 3 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 A B 3 610 710 810 910 1010 1110 1210 1310 1410 1510 1610 1710 1810 1910 2010 2110 2210 2310 2410 2510 2610 2710 2810 2910 3010 3110 3210 3310 3410 3510 3610 3710 3810 3910 4010 4110 4210 4310 L Effective stroke 150 250 350 450 550 650 750 850 950 1050 1150 1250 1350 1450 1550 1650 1750 1850 1950 2050 2150 2250 2350 2450 2550 2650 2750 2850 2950 3050 3150 3250 3350 3450 3550 3650 3750 3850 200 130±5 (Note 1) Note 1. Position of the table slider when returned to the origin. Note 2. Distance from both ends to the mechanical stopper. Note 3. For models with a 2,050mm or longer stroke, optional L type cable carriers can only be used. S 24 15 Detail of section G 7.2 4.5 20.5 14 238 35 29 240.5 (M option) 215.5 (S option) Optional cable carrier S / M type 20.5 14 90 80 : Top face of slider 64 14 (Between φ6H7±0.02) 120 (Between φ6H7±0.02) 120 7-18 (100) 7 100 Specifications MF20D double-carriage horizontal mount model 7-1 Main unit (5) 290 9 150 41.3 3.7 20.5 14 49 40 66 50 M and L types G 14 64 Top face of slider 80 79 29±1 (Note 2) 50 ±0.02 105 A E +0.015 2-φ10H7 0 D ±0.02 Bx200 +0.012 Depth 10 4-φ6H7 0 4-M6x1.0 Depth 12 Effective stroke 108 +0.012 4-φ6H7 0 Depth 10 4-M6x1.0 Depth 12 Effective stroke E 70 190 30 (Note 5) 29±1 (Note 2) 50 ±0.02 130±5 (Note 1) 13 (A) 7-19 10 12 12 14 14 16 16 7 18 8 18 8 20 9 20 9 22 10 22 10 24 11 24 11 26 12 26 12 28 13 28 13 30 14 30 14 32 15 32 15 34 16 34 16 36 17 36 17 38 18 38 18 40 19 40 19 42 20 21 44 20 42 220 270 320 370 420 470 520 570 620 670 720 770 820 870 920 970 1020 1070 1120 1170 1220 1270 1320 1370 1420 1470 1520 1570 1620 1670 1720 1770 1820 1870 1920 1970 2020 2070 10 7 E 8 6 Specifications Weight (kg) 14.9 16.6 18.3 20.0 21.7 23.5 25.2 26.9 28.6 30.3 32.0 33.7 35.4 37.2 38.9 40.6 42.3 44.0 45.7 47.4 49.1 50.8 52.6 54.3 56.0 57.7 59.4 61.1 62.8 64.5 66.3 68.0 69.7 71.4 73.1 74.8 76.5 78.2 8 6 6 5 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 4100 5 D 4 C 4 2 3 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 A B 3 610 710 810 910 1010 1110 1210 1310 1410 1510 1610 1710 1810 1910 2010 2110 2210 2310 2410 2510 2610 2710 2810 2910 3010 3110 3210 3310 3410 3510 3610 3710 3810 3910 4010 4110 4210 4310 L Effective stroke 150 250 350 450 550 650 750 850 950 1050 1150 1250 1350 1450 1550 1650 1750 1850 1950 2050 2150 2250 2350 2450 2550 2650 2750 2850 2950 3050 3150 3250 3350 3450 3550 3650 3750 3850 Note 4. For models with a 3,050mm or longer stroke and an optional L type cable carrier, a roller is installed to prevent the cable carrier from sagging. Note 5. Protrusion is the distance the cable carrier extends from the edge of unit when an optional L type cable carrier is used. 70 190 108 L Ground terminal (M4) Ground terminal (M4) Depth 10 C-M6x1.0 Depth 10 (200 : Minimum distance between carriages) 200 130±5 (Note 1) 13 30 (Note 5) Standard and S types Optional cable carrier S type φ8 φ7.5 Optional cable carrier L type 100 Note 1. Position of the table slider when returned to the origin. Note 2. Distance from both ends to the mechanical stopper. Note 3. For models with a 2,050mm or longer stroke, optional L type cable carriers can only be used. 4.5 7.2 Detail of section G 2.5 7 M L S Cross-section of optional cable carrier 24 15 20.5 14 325 105 35 29 Optional cable carrier M type 136 φ30 Diameter of roller 250 150 (Between φ6H7±0.02) 120 (Between φ6H7±0.02) 120 120.3 136 MF20D double-carriage wall mount model 7-1 Main unit 7 7-1 Main unit 7-1-4 MF30 Model name MF30 Specifications Driving method MF30D Steel cored linear motor flat magnet Repeated positioning accuracy (µm) ±5 Scale (μm) Magnetic method, resolution: 1 Maximum speed (mm/sec) 2 2500 Maximum carrying weight (kg) 1 60 Rated thrust (N) 125 Maximum stroke (mm) 4000 Bearing method 3750 2 guide rails and 6 blocks (with retainer) Maximum cross-section outside dimensions (mm) W150×H80 (excluding cable carrier) Overall length (mm) Stroke length + 310 Cable length (m) Stroke length + 560 Standard : 3.5 Option: 5/10 Controller SR1-P, RCX221, RCX240, RDP, TS-P 1: Weight per one carrier 2: See the maximum speed table below. Payload (kg) Maximum speed (m/s) 30 or less 2.5 40 2.2 50 1.8 60 1.5 l Static load moment Maximum speed (m/s) 7 l Basic specifications 3.0 2.5 2.0 1.5 1.0 0.5 00 10 20 30 40 50 60 70 Payload (kg) MY (Unit: N•m) MY MP MR 373 373 328 MP MR 7-20 7-1 Main unit l Allowable overhang * *Distance from the center on the top face of slider to the gravity center of the item being carried. (This is calculated assuming that the service life of the guide is 10,000km.) ■ Horizontal installation A C B Specifications (Unit: mm) A B C 10kg 3364 2485 1284 20kg 2298 1265 694 30kg 2060 859 507 40kg 1570 600 310 50kg 1265 400 180 60kg 1070 350 135 ■ Vertical installation B A C (Unit: mm) A B C 10kg 1290 1320 2730 20kg 650 610 1750 30kg 430 360 1460 40kg 205 230 610 50kg 145 175 470 60kg 105 140 380 7 7-21 (100) Note 4 167 2.5 7 3.7 49 40 S M Cross-section of optional cable carrier 24 15 G L 66 50 150 186 φ8 φ7.5 32.5 54±1 (Note 1) 155±5 (L side origin position) (155 : When at R side origin) 105 A 200 50 ±0.02 70 190 Depth 10 D ±0.02 Bx200 Effective stroke L (A) (Note 1) 54±1 (155 : When at L side origin) 155±5 (R side origin position) 6 8 8 6 6 7 7 8 8 9 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 17 17 18 18 19 19 20 20 21 10 10 12 12 14 14 16 16 18 18 20 20 22 22 24 24 26 26 28 28 30 30 32 32 34 34 36 36 38 38 40 40 42 42 44 5 Weight (kg) 9.0 10.7 12.3 13.9 15.6 17.2 18.8 20.4 22.1 23.7 25.3 27.0 28.6 30.2 31.9 33.5 35.1 36.7 38.4 40.0 41.6 43.3 44.9 46.5 48.2 49.8 51.4 53.0 54.7 56.3 57.9 59.6 61.2 62.8 64.5 66.1 67.7 69.3 71.0 72.6 6 5 4 4 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 4100 4 D 3 C 3 1 2 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 A B 2 410 510 610 710 810 910 1010 1110 1210 1310 1410 1510 1610 1710 1810 1910 2010 2110 2210 2310 2410 2510 2610 2710 2810 2910 3010 3110 3210 3310 3410 3510 3610 3710 3810 3910 4010 4110 4210 4310 L Effective stroke 100 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 Note 3. For models with a 2,100mm or longer stroke, optional L type cable carriers can only be used. Note 4. For models with a 3,000mm or longer stroke and an optional L type cable carrier, a roller is installed to prevent the cable carrier from sagging. +0.015 2-φ10H7 0 C-M6x1.0 Depth 10 Ground terminal (M4) +0.012 Depth 10 4-φ6H7 0 4-M6x1.0 Depth 12 Note 1. Distance from both ends to the mechanical stopper. Note 2. The origin is set on the L side at the time of shipment. It can be changed to the R side by parameter setting. 20.5 14 Detail of section G 7.2 4.5 Optional cable carrier L type 238 90 φ30 Diameter of roller Optional cable carrier S / M type 240.5 (M option) 215.5 (S option) 20.5 14 80 : Top face of slider 64 14 35 29 136 120 (Between φ6H7±0.02) (100) 7-22 98 7 100 Specifications MF30 single-carriage horizontal mount model 7-1 Main unit 41.3 3.7 120.3 49 40 φ8 φ7.5 79 14 64 Top face of slider 80 G 105 A 200 Depth 10 Ground terminal (M4) L D ±0.02 Bx200 4-M6x1.0 Depth 12 108 +0.012 4-φ6H7 0 Depth 10 Effective stroke Ground terminal (M4) +0.015 C-M6x1.0 Depth 10 2-φ10H7 0 54±1 (Note 1) (155 : When at R side origin) 155±5 (L side origin position) Standard and S types Optional cable carrier S type L 66 50 M and L types 100 70 190 50 ±0.02 155±5 (R side origin position) (155 : When at L side origin) 54±1 (Note 1) 13 (A) 7-23 4 5 5 6 6 7 7 8 8 9 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 17 17 18 18 19 19 20 20 21 220 270 320 370 420 470 520 570 620 670 720 770 820 870 920 970 1020 1070 1120 1170 1220 1270 1320 1370 1420 1470 1520 1570 1620 1670 1720 1770 1820 1870 1920 1970 2020 2070 2120 2170 4 10 10 12 12 14 14 16 16 18 18 20 20 22 22 24 24 26 26 28 28 30 30 32 32 34 34 36 36 38 38 40 40 42 42 44 E 8 3 Specifications Weight (kg) 9.0 10.7 12.3 13.9 15.6 17.2 18.8 20.4 22.1 23.7 25.3 27.0 28.6 30.2 31.9 33.5 35.1 36.7 38.4 40.0 41.6 43.3 44.9 46.5 48.2 49.8 51.4 53.0 54.7 56.3 57.9 59.6 61.2 62.8 64.5 66.1 67.7 69.3 71.0 72.6 8 3 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 4100 6 2 D 6 4 2 1 B 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 C 410 510 610 710 810 910 1010 1110 1210 1310 1410 1510 1610 1710 1810 1910 2010 2110 2210 2310 2410 2510 2610 2710 2810 2910 3010 3110 3210 3310 3410 3510 3610 3710 3810 3910 4010 4110 4210 4310 L A Effective stroke 100 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 Note 1. Distance from both ends to the mechanical stopper. Note 3. For models with a 2,100mm or longer stroke, optional L type cable carriers can only be used. Note 2. The origin is set on the R side at the time of shipment. It can Note 4. For models with a 3,000mm or longer stroke and an optional L type cable carrier, a roller is installed to be changed to the L side by parameter setting. prevent the cable carrier from sagging. Detail of section G 2.5 7 20.5 14 4.5 7.2 20.5 14 M S Cross-section of optional cable carrier 24 15 35 29 Optional cable carrier L type Optional cable carrier M type 325 105 (5) 290 9 150 φ30 Diameter of roller 250 150 (Between φ6H7±0.02) 120 136 MF30 single-carriage wall mount model 7-1 Main unit 7 (100) φ30 Diameter of roller 90 167 7 3.7 M 49 40 G L 66 50 φ8 φ7.5 150 186 32.5 (Note 2) 54±1 105 A 50 ±0.02 190 70 200 155±5 (Note 1) +0.015 2-φ10H7 0 Depth 10 D ±0.02 Bx200 Ground terminal (M4) C-M6x1.0 Depth 10 4-M6x1.0 Depth 12 +0.012 Depth 10 4-φ6H7 0 L Effective stroke 4-M6x1.0 Depth 12 (A) 155±5 (Note 1) 190 70 50±0.02 (250 : Minimum distance between carriages) +0.012 Depth 10 4-φ6H7 0 Effective stroke (Note 2) 54±1 (Between φ6H7±0.02) 136 10 10 12 12 14 14 16 7 16 7 18 8 18 8 20 9 20 9 22 10 22 10 24 11 24 11 26 12 26 12 28 13 28 13 30 14 30 14 32 15 32 15 34 16 34 16 36 17 36 17 38 18 38 18 40 19 40 19 42 20 42 20 44 21 Weight (kg) 17.6 19.3 21.0 22.8 24.5 26.2 27.9 29.6 31.3 33.0 34.7 36.5 38.2 39.9 41.6 43.3 45.0 46.7 48.4 50.2 51.9 53.6 55.3 57.0 58.7 60.4 62.1 63.9 65.6 67.3 69.0 70.7 72.4 74.1 75.8 77.5 79.3 8 6 8 6 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 4100 5 C 5 D 4 3 4 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 A B 3 710 810 910 1010 1110 1210 1310 1410 1510 1610 1710 1810 1910 2010 2110 2210 2310 2410 2510 2610 2710 2810 2910 3010 3110 3210 3310 3410 3510 3610 3710 3810 3910 4010 4110 4210 4310 L Effective stroke 150 250 350 450 550 650 750 850 950 1050 1150 1250 1350 1450 1550 1650 1750 1850 1950 2050 2150 2250 2350 2450 2550 2650 2750 2850 2950 3050 3150 3250 3350 3450 3550 3650 3750 Note 1. Position of the table slider when returned to the origin. Note 3. For models with a 2,050mm or longer stroke, optional L type cable carriers can only be used. Note 2. Distance from both ends to the mechanical stopper. Note 4. For models with a 3,050mm or longer stroke and an optional L type cable carrier, a roller is installed to prevent the cable carrier from sagging. Cross-section of optional cable carrier S 24 15 Detail of section G 2.5 Note 4 238 Optional cable carrier L type 20.5 14 80 : Top face of slider 64 14 35 29 (Between φ6H7±0.02) 120 (100) 240.5 (M option) 215.5 (S option) Optional cable carrier S / M type 7.2 4.5 20.5 14 98 7-24 100 7 120 Specifications MF30D double-carriage horizontal mount model 7-1 Main unit 325 105 49 40 (5) φ8 φ7.5 14 64 Top face of slider 80 G 79 Standard and S types Optional cable carrier S type L 66 50 M and L types 54±1 (Note 2) 50 ±0.02 E +0.015 2-φ10H7 0 70 190 ±0.02 +0.012 Depth 10 4-φ6H7 0 Effective stroke L Ground terminal (M4) 4-M6x1.0 Depth 12 108 D Bx200 Ground terminal (M4) Depth 10 C-M6x1.0 Depth 10 (250 : Minimum distance between carriages) 200 155±5 (Note 1) 13 105 A 108 +0.012 Depth 10 4-φ6H7 0 4-M6x1.0 Depth 12 Effective stroke E 70 190 155±5 (Note 1) 50 ±0.02 54±1 (Note 2) 13 (A) 136 7-25 10 12 12 14 14 16 16 7 18 8 18 8 20 9 20 9 22 10 22 10 24 11 24 11 26 12 26 12 28 13 28 13 30 14 30 14 32 15 32 15 34 16 34 16 36 17 36 17 38 18 38 18 40 19 40 19 42 20 21 44 20 42 220 270 320 370 420 470 520 570 620 670 720 770 820 870 920 970 1020 1070 1120 1170 1220 1270 1320 1370 1420 1470 1520 1570 1620 1670 1720 1770 1820 1870 1920 1970 2020 10 7 Specifications Weight (kg) 17.6 19.3 21.0 22.8 24.5 26.2 27.9 29.6 31.3 33.0 34.7 36.5 38.2 39.9 41.6 43.3 45.0 46.7 48.4 50.2 51.9 53.6 55.3 57.0 58.7 60.4 62.1 63.9 65.6 67.3 69.0 70.7 72.4 74.1 75.8 77.5 79.3 E 8 6 8 6 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 4100 5 D 5 C 4 3 4 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 105 55 A B 3 710 810 910 1010 1110 1210 1310 1410 1510 1610 1710 1810 1910 2010 2110 2210 2310 2410 2510 2610 2710 2810 2910 3010 3110 3210 3310 3410 3510 3610 3710 3810 3910 4010 4110 4210 4310 L Effective stroke 150 250 350 450 550 650 750 850 950 1050 1150 1250 1350 1450 1550 1650 1750 1850 1950 2050 2150 2250 2350 2450 2550 2650 2750 2850 2950 3050 3150 3250 3350 3450 3550 3650 3750 Note 1. Position of the table slider when returned to the origin. Note 3. For models with a 2,050mm or longer stroke, optional L type cable carriers can only be used. Note 2. Distance from both ends to the mechanical stopper. Note 4. For models with a 3,050mm or longer stroke and an optional L type cable carrier, a roller is installed to prevent the cable carrier from sagging. 4.5 7.2 Detail of section G 120.3 41.3 Optional cable carrier M type M S Cross-section of optional cable carrier 24 15 3.7 2.5 7 20.5 14 Optional cable carrier L type 20.5 14 150 290 9 35 29 φ30 Diameter of roller 250 150 100 (Between φ6H7±0.02) 136 120 (Between φ6H7±0.02) 120 MF30D double-carriage wall mount model 7-1 Main unit 7 7-1 Main unit 7-1-5 MF50 Model name MF50 Specifications Driving method MF50D Steel cored linear motor flat magnet Repeated positioning accuracy (µm) ±5 Scale (μm) Magnetic method, resolution: 1 Maximum speed (mm/sec) 2 2500 Maximum carrying weight (kg) 1 150 Rated thrust (N) 200 Maximum stroke (mm) 4020 Bearing method 3700 2 guide rails and 6 blocks (with retainer) Maximum cross-section outside dimensions (mm) W210×H100 (excluding cable carrier) Overall length (mm) Stroke length + 360 Cable length (m) Stroke length + 680 Standard : 3.5 Option: 5/10 Controller SR1-P, RCX221, RCX240, RDP, TS-P 1: Weight per one carrier 2: See the maximum speed table below. Payload (kg) Maximum speed (m/s) 50 or less 2.5 60 2.4 70 2.2 80 2.1 90 2.0 100 1.9 110 1.8 120 1.7 130 1.6 140 1.6 150 1.5 Maximum speed (m/s) 7 l Basic specifications 3.0 2.5 2.0 1.5 1.0 0.5 0 l Static load moment 0 50 60 70 80 90 100 110 120 130 140 150 Payload (kg) MY (Unit: N•m) MY MP MR 830 831 730 MP MR 7-26 7-1 Main unit l Allowable overhang * *Distance from the center on the top face of slider to the gravity center of the item being carried. (This is calculated assuming that the service life of the guide is 10,000km.) ■ Horizontal installation A C B Specifications (Unit: mm) A B C 10kg 4000 4000 3514 20kg 3397 2841 1840 30kg 3045 1873 1247 40kg 2795 1389 964 50kg 2602 1096 797 60kg 2200 530 450 70kg 2000 290 180 80kg 1800 175 150 90kg 1650 150 125 100kg 1500 130 110 110kg 1350 115 95 120kg 1250 100 80 130kg 1150 85 70 140kg 1100 80 65 150kg 1000 70 55 7 7-27 66 50 2.5 7 Detail of slider (Note 3) Tool mounting hole Insert bolt from lateral side of axis. Remove two top caps. J +0.012 G 1.4 4.8 2.6 210 141 Depth 10 88 (Roller diameter: φ30) 31±1 (Note 1) D 105 A 200 F-M8x1.25 Depth 15 Ex200 G±0.02 Bx200 C-φ9 Depth 14 (Refer to cross-section of H-H.) Grounding terminal (M4) Effective stroke L (180 : When at L side origin) 180±5 (R side origin position) (D) (A) (Note 1) 31±1 Note 3. The length under head of M8 hex socket head bolts for installing the robot body must not be longer than 30mm. Note 4. For models with a 3,075mm or longer stroke, a roller is installed to prevent the cable carrier from sagging. 200 H H Note 4 Slot width 20: lnsert M3 nut through this slot. (Nut mountable range: 145) 180±5 (L side origin position) (180 : When at R side origin) 6 14 51 E F Weight (kg) 55 14 6 16 16 58 18 8 40 16 20 62 18 8 66 18 8 107.5 175 70 22 10 42.5 20 9 24 11 74 22 10 78 22 10 110 177.5 20 9 82 26 12 45 24 11 28 13 86 26 12 90 26 12 112.5 180 24 11 80 94 30 14 47.5 28 13 32 15 82.5 98 30 14 101 30 14 115 182.5 28 13 147.5 215 105 34 16 50 32 15 85 36 17 109 34 16 113 34 16 117.5 185 32 15 150 217.5 117 38 18 52.5 36 17 40 19 87.5 121 38 18 125 38 18 120 187.5 36 17 152.5 220 129 42 20 55 40 19 90 44 21 133 42 20 137 42 20 122.5 190 40 19 155 222.5 12 9 145 212.5 105 172.5 7 77.5 C 7 142.5 210 D 7 75 5 140 207.5 205 A B 72.5 1410 1545 1680 1815 1950 2085 2220 2355 2490 2625 2760 2895 3030 3165 3300 3435 3570 3705 3840 3975 4110 4245 4380 L Effective stroke 1050 1185 1320 1455 1590 1725 1860 1995 2130 2265 2400 2535 2670 2805 2940 3075 3210 3345 3480 3615 3750 3885 4020 Note 1. Distance from both ends to the mechanical stopper. Note 2. The origin is set on the L side (as shown above) at the time of shipment. It can be changed to the R side by parameter setting. φ9 2-φ10H7 +0.015 Cross-section of H-H Detail of section J Depth 10 0 Remove cap from each tool hole. 3.7 Detail of section G 7.2 4.5 100 (Top face of slider) (99) 11.5 22 18 150 120 (Between φ6H7±0.02) Cross-section of optional cable carrier 35 29 4-φ6H7 0 5.7 3.2 4-M8x1.25 Depth 20 (11.5) 286 120 80±0.02 14 (107) 175 (180) 7-28 97 7 196 160 Specifications MF50 single-carriage horizontal mount model 7-1 Main unit 66 50 2.5 Tool mounting hole Insert bolt from lateral side of axis. Remove cap from each tool hole. (Note 3) 3.7 φ9 Remove two top caps. 1.4 4.8 2.6 210 (Roller diameter: φ30) 88 (107) 175 (180) D 105 A (Note 2) 31±1 200 Note 4 F-M8x1.25 Depth 15 Ex200 G±0.02 Bx200 C-φ9 Depth 14 (Refer to cross-section of H-H.) H H L Effective stroke Slot width 20: lnsert M3 nut through this slot. (Nut mountable range: 145) 200 180±5 (Note 1) Ground terminal (M4) (D) (A) (Note 2) (320 : Minimum distance between carriages) 180±5 (Note 1) Effective stroke 31±1 7-29 63 Weight (kg) 6 14 F E 67 14 6 16 16 71 18 8 40 16 20 75 18 8 79 18 8 107.5 175 83 22 10 42.5 20 9 24 11 87 22 10 91 22 10 110 177.5 20 9 95 26 12 45 24 11 80 28 13 99 26 12 103 26 12 112.5 180 24 11 145 212.5 107 30 14 47.5 28 13 32 15 82.5 111 30 14 115 30 14 115 182.5 28 13 147.5 215 119 34 16 50 32 15 85 36 17 123 34 16 127 34 16 117.5 185 32 15 150 217.5 131 38 18 52.5 36 17 40 19 87.5 135 38 18 139 38 18 120 187.5 36 17 152.5 220 90 44 21 42 147 143 20 151 42 20 122.5 190 40 19 42 20 55 40 19 155 222.5 12 9 77.5 105 172.5 7 142.5 210 C 7 75 D 7 140 207.5 5 Specifications 72.5 205 A 1000 1135 1270 1405 1540 1675 1810 1945 2080 2215 2350 2485 2620 2755 2890 3025 3160 3295 3430 3565 3700 B 865 1410 1545 1680 1815 1950 2085 2220 2355 2490 2625 2760 2895 3030 3165 3300 3435 3570 3705 3840 3975 4110 4245 4380 L Effective stroke 730 Note 1. Position of the table slider when returned to the origin. Note 3. The length under head of M8 hex socket head bolts for installing the robot body must not be longer than Note 2. Distance from both ends to the mechanical stopper. 30mm. Note 4. For models with a 3,025mm or longer stroke, a roller is installed to prevent the cable carrier from sagging. 2-φ10H7 +0.015 0 Depth 10 Detail of section G Cross-section of H-H Detail of section J 7 G J Depth 10 141 +0.012 4-φ6H7 0 Detail of slider Cross-section of optional cable carrier 35 29 150 120 (Between φ6H7±0.02) 4-M8x1.25 Depth 20 5.7 3.2 100 (Top face of slider) (99) 11.5 22 18 14 7.2 4.5 286 120 80±0.02 (11.5) 97 196 160 MF50D double-carriage horizontal mount model 7-1 Main unit 7 7-1 Main unit 7-1-6 MF75 Model name MF75 Specifications Driving method MF75D Steel cored linear motor flat magnet Repeated positioning accuracy (µm) ±5 Scale (μm) Magnetic method, resolution: 1 Maximum speed (mm/sec) 2 2500 Maximum carrying weight (kg) 1 160 Rated thrust (N) 260 Maximum stroke (mm) 4000 Bearing method 3680 2 guide rails and 6 blocks (with retainer) Maximum cross-section outside dimensions (mm) W210×H100 (excluding cable carrier) Overall length (mm) Stroke length + 360 Cable length (m) Stroke length + 680 Standard : 3.5 Option: 5/10 Controller SR1-P, TS-P, RDP RCX221, RDP 1: Weight per one carrier 2: See the maximum speed table below. Payload (kg) Maximum speed (m/s) 75 or less 2.5 90 2.31 100 2.2 110 2.09 120 2.0 130 1.92 140 1.84 150 1.77 160 1.7 l Static load moment Maximum speed (m/s) 7 l Basic specifications 3.0 2.5 2.0 1.5 1.0 0.5 0 0 50 60 70 80 90 100 110 120 130 140 150 160 Payload (kg) MY (Unit: N•m) MY MP MR 830 831 730 MP MR 7-30 7-1 Main unit l Allowable overhang * *Distance from the center on the top face of slider to the gravity center of the item being carried. (This is calculated assuming that the service life of the guide is 10,000km.) ■ Horizontal installation C B A B C 20kg 3397 2841 1840 40kg 2795 1389 964 60kg 2200 530 450 80kg 1800 175 150 100kg 1500 130 110 120kg 1250 100 80 140kg 1100 80 65 160kg 950 60 50 Specifications A (Unit: mm) 7 7-31 2.5 3.7 4.8 2.6 88 Detail of section J (Note 1) + 0.015 2-φ10H7 0 Depth 10 D 130 A 200 Ground terminal (M4) F-M8x1.25 Depth 15 Ex200 G± 0 .02 (D) (A) (Note 1) (180 When at L side origin) 180±5 (R side origin position) 31 ± 2 6 14 E F 5 7 16 7 16 14 6 14 6 14 6 130 180 230 12 7 18 8 80 16 7 9 20 20 9 18 8 18 8 18 8 22 10 80 20 9 24 11 80 24 11 22 10 22 10 22 10 26 12 80 24 11 28 13 80 28 13 26 12 26 12 26 12 30 14 80 28 13 32 15 80 32 15 30 14 30 14 30 14 34 16 80 32 15 36 17 80 36 17 34 16 34 16 34 16 38 18 80 36 17 40 19 80 40 19 38 18 38 18 38 18 42 20 80 40 19 44 21 80 42 20 42 20 130 180 40 19 130 180 230 130 180 230 36 17 130 180 230 130 180 230 32 15 130 180 230 130 180 230 28 13 130 180 230 130 180 230 24 11 130 180 230 130 180 230 20 9 130 180 230 130 180 230 16 80 Weight (kg) 46 49 51 54 56 59 61 64 66 69 71 74 76 79 81 84 86 89 91 94 96 99 101 104 106 109 111 114 116 119 121 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 4100 80 D G 5 12 B C 130 180 230 180 230 80 1360 1460 1560 1660 1760 1860 1960 2060 2160 2260 2360 2460 2560 2660 2760 2860 2960 3060 3160 3260 3360 3460 3560 3660 3760 3860 3960 4060 4160 4260 4360 L A Effective stroke 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 Note 3. The length under head of M8 hex socket head bolts for installing the robot body must not be longer than 30mm. Note 4. For models with a 3,000mm or longer stroke, a roller is installed to prevent the cable carrier from sagging. 200 Note 4 Bx200 C-φ9 Depth 14 (Refer to cross-section of H-H.) H H L 180±5 (L side origin position) Effective stroke (180 : When at R side origin) Slot width 20: lnsert M3 nut through this slot. 31 ± 2 (Nut mountable range: 145) Note 1. Distance from both ends to the mechanical stopper. Note 2. The origin is set on the L side (as shown above) at the time of shipment. It can be changed to the R side by parameter setting. 4-M8x1.25 Depth 20 210 141 1.4 + 0 .012 Depth 10 4-φ6H7 0 G 286 120 80 ± 0.02 J Detail of slider Cross-section of cable carrier 66 50 φ9 Cross-section of H-H Remove cap from each tool hole. (Note 3) Tool mounting hole Insert bolt from lateral side of axis. Detail of section G 7.2 4.5 35 29 5.7 3.2 Remove two top caps. 100 (Top face of slider) 14 7 150 120 (Between φ6H7±0.02) (99 ) 11 .5 22 18 (11 .5) (Roller diameter : φ30) (107 ) 175 (180 ) 7-32 97 7 196 160 Specifications MF75 single-carriage horizontal mount model 7-1 Main unit 3.7 Cross-section of cable carrier 66 50 210 141 Detail of slider 31 ± 2 (Note 2) 88 Detail of section J + 0.012 4-φ6H7 0 Depth 10 G 286 120 80 ± 0.02 J 1.4 4.8 2.6 + 0 .015 2-φ10H7 0 Depth 10 D 130 A Effective stroke 200 L F-M8x1.25 Depth 15 Ex200 G ± 0.02 (D ) (A) (Note 2) (320 : Minimum distance between carriages) 180±5 (Note 1) 31±2 Ground terminal (M4) Effective stroke Note 4 Bx200 C-φ9 Depth 14 (Refer to cross-section of H-H.) H H Slot width 20: lnsert M3 nut through this slot. (Nut mountable range: 145) 200 (Note 1) 180 ± 5 7-33 6 14 D E F 7 16 6 6 14 6 14 18 8 80 7 9 20 9 20 18 8 18 8 18 8 130 180 230 16 22 10 80 20 9 24 11 80 24 11 22 10 22 10 22 10 26 12 80 24 11 28 13 80 28 13 26 12 26 12 26 12 30 14 80 28 13 32 15 80 32 15 30 14 30 14 30 14 34 16 80 32 15 36 17 80 36 17 34 16 34 16 34 16 38 18 80 36 17 40 19 80 40 19 38 18 38 18 38 18 42 20 80 40 19 44 21 80 42 20 42 20 130 180 40 19 130 180 230 130 180 230 36 17 130 180 230 130 180 230 32 15 130 180 230 130 180 230 28 13 130 180 230 130 180 230 24 11 130 180 230 130 180 230 20 9 130 180 230 Weight (kg) 57 60 62 65 67 70 73 75 78 81 83 86 88 91 94 96 99 101 104 107 109 112 114 117 120 122 125 127 130 133 135 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 2600 2700 2800 2900 3000 3100 3200 3300 3400 3500 3600 3700 3800 3900 4000 4100 14 7 16 80 Specifications G 80 C 7 16 130 180 230 5 12 5 12 B 130 180 230 180 230 80 1360 1460 1560 1660 1760 1860 1960 2060 2160 2260 2360 2460 2560 2660 2760 2860 2960 3060 3160 3260 3360 3460 3560 3660 3760 3860 3960 4060 4160 4260 4360 L A Effective stroke 680 780 880 980 1080 1180 1280 1380 1480 1580 1680 1780 1880 1980 2080 2180 2280 2380 2480 2580 2680 2780 2880 2980 3080 3180 3280 3380 3480 3580 3680 Note 1. Position of the table slider when returned to the origin. Note 3. The length under head of M8 hex socket head bolts for installing the robot body must not be longer than 30mm. Note 2. Distance from both ends to the mechanical stopper. Note 4. For models with a 3,080mm or longer stroke, a roller is installed to prevent the cable carrier from sagging. 4-M8x1.25 Depth 20 φ9 Cross-section of H-H Remove cap from each tool hole. (Note 3) Tool mounting hole Insert bolt from lateral side of axis. Detail of section G 7.2 4.5 35 29 14 2.5 100 (Top face of slider) 5.7 3.2 Remove two top caps. (99 ) 11 .5 22 18 (11 .5) (Roller diameter : φ30) (107 ) 175 (180 ) 196 160 7 150 120 (Between φ6H7±0.02) 97 MF75D double-carriage horizontal mount model 7-1 Main unit 7 7-1 Main unit 7-1-7 MF100 Model name MF100 Specifications Driving method MF100D Steel cored linear motor flat magnet Repeated positioning accuracy (µm) ±5 Scale (μm) Magnetic method, resolution: 1 Maximum speed (mm/sec) 2 2500 Maximum carrying weight (kg) 1 250 Rated thrust (N) 400 Maximum stroke (mm) 4000 Bearing method 3510 2 guide rails and 6 blocks (with retainer) Maximum cross-section outside dimensions (mm) W210×H100 (excluding cable carrier) Overall length (mm) Stroke length + 515 Cable length (m) Stroke length + 1005 Standard : 3.5 Option: 5/10 Controller SRCP30 1: Weight per one carrier 2: If the payload exceeds 100kg, then adjust to reduce the speed by referring to the table below. Payload (kg) Maximum speed (m/s) 100 or less 2.5 120 2.3 140 2.1 160 2.0 180 1.9 200 1.8 220 1.7 240 1.6 250 1.5 Maximum speed (m/s) 7 l Basic specifications 3.0 2.5 2.0 1.5 1.0 0.5 0 l Static load moment 0 50 100 150 200 250 300 Payload (kg) MY (Unit: N•m) MY MP MR 1971 1975 1734 MP MR 7-34 7-1 Main unit l Allowable overhang * *Distance from the center on the top face of slider to the gravity center of the item being carried. (This is calculated assuming that the service life of the guide is 10,000km.) * The service life may be reduced if a collision occurs while the overhang is large. A C B Specifications ■ Horizontal installation (Unit: mm) A B C 20kg 3397 3104 1358 40kg 2210 1505 697 60kg 1969 975 488 80kg 1846 710 373 100kg 1751 624 339 120kg 1670 240 165 140kg 1655 195 135 160kg 1555 160 110 180kg 1475 130 90 200kg 1465 110 75 220kg 1425 90 60 240kg 1355 75 50 250kg 1315 70 45 7 7-35 2.5 φ9 G J 1.4 210 141 4.8 2.6 (Roller diameter: φ30) 88 Depth 10 97 (107) 175 (180) +0.015 2-φ10H7 0 Detail of section J Depth 10 D 105 A Effective stroke L A C D E F Weight (kg) 895 1410 205 5 105 6 14 53 1030 1165 1300 1435 1545 1680 1815 1950 72.5 140 207.5 75 7 7 7 9 172.5 40 107.5 175 6 8 8 8 14 18 18 18 57 61 65 69 1570 2085 142.5 9 42.5 10 22 73 1705 2220 210 9 110 10 22 77 200 200 F-M8x1.25 Depth 15 Ground terminal (M4) Ex200 G±0.02 Bx200 C-φ9 Depth 14 (Refer to cross-section of H-H.) H H Note 4 Slot width 20: lnsert M3 nut through this slot. (Nut mountable range: 145) L Effective stroke (D) (A) 28.5±1 (Note 1) (257.5 When at L side origin) 257.5±5 (R side origin position) 1840 1975 2110 2245 2355 2490 2625 2760 77.5 145 212.5 80 11 11 11 13 177.5 45 112.5 180 10 12 12 12 22 26 26 26 81 84 88 92 2380 2895 147.5 13 47.5 14 30 96 2515 3030 215 13 115 14 30 100 2650 3165 82.5 15 182.5 14 30 104 2785 3300 150 15 50 16 34 108 2920 3435 217.5 15 117.5 16 34 112 3055 3570 85 17 185 16 34 116 3190 3705 152.5 17 52.5 18 38 120 3325 3840 220 17 120 18 38 124 3460 3975 87.5 19 187.5 18 38 127 3595 4110 155 19 55 20 42 131 3730 4245 222.5 19 122.5 20 42 135 3865 4380 90 21 190 20 42 139 4000 4515 157.5 21 57.5 22 46 143 Note 3. The length under head of M8 hex socket head bolts for installing the robot body must not be longer than 30mm. Note 4. For models with a 3,055mm or longer stroke, a roller is installed to prevent the cable carrier from sagging. (Note 1) 28.5±1 257.5±5 (L side origin position) (257.5 : When at R side origin) Note 1. Distance from both ends to the mechanical stopper. Note 2. The origin is set on the L side (as shown above) at the time of shipment. It can be changed to the R side by parameter setting. Cross-section of H-H Remove cap from each tool hole. (Note 3) 3.7 Tool mounting hole Insert bolt from lateral side of axis. Remove two top caps. Detail of section G 7 Cross-section of optional cable carrier 66 50 +0.012 4-φ6H7 0 Detail of slider 8-M8x1.25 Depth 20 14 7.2 4.5 100 (Top face of slider) (99) 11.5 22 18 150 120 (Between φ6H7±0.02) 35 29 446 200 120 80±0.02 5.7 3.2 7-36 (11.5) 7 196 160 Specifications MF100 single-carriage horizontal mount model 7-1 Main unit 150 120 (Between φ6H7±0.02) 66 50 2.5 7 J +0.012 1.4 210 141 Depth 10 4.8 2.6 88 +0.015 2-φ10H7 0 Detail of section J Depth 10 D 105 A (Note 2) 28.5±1 200 257.5 (Note 1) L 200 F-M8x1.25 Depth 15 Ex200 G±0.02 Bx200 C-φ9 Depth 14 (Refer to cross-section of H-H.) H H Note 4 Slot width 20: lnsert M3 nut through this slot. (Nut mountable range: 145) Effective stroke Ground terminal (M4) (A) (D) (Note 2) (490 : Minimum distance between carriages) 257.5 (Note 1) Effective stroke 28.5±1 7-37 5 7 72.5 6 14 68 E F Weight (kg) 72 14 6 105 172.5 205 A C D 540 675 810 945 1080 1215 1350 1485 1620 1755 1890 2025 2160 2295 2430 2565 2700 2835 2970 3105 3240 3375 3510 76 18 8 40 7 9 75 80 18 8 84 18 8 107.5 175 7 140 207.5 88 22 10 42.5 9 11 77.5 92 22 10 96 22 10 110 177.5 9 142.5 210 100 26 12 45 11 80 13 104 26 12 108 26 12 112.5 180 11 145 212.5 112 30 14 47.5 13 15 82.5 116 30 14 120 30 14 115 182.5 13 147.5 215 124 34 16 50 15 85 17 128 34 16 132 34 16 117.5 185 15 150 217.5 136 38 18 52.5 17 19 87.5 140 38 18 144 38 18 120 187.5 17 152.5 220 148 42 20 55 19 90 21 156 152 20 42 42 20 122.5 190 19 155 222.5 160 46 22 57.5 21 157.5 1410 1545 1680 1815 1950 2085 2220 2355 2490 2625 2760 2895 3030 3165 3300 3435 3570 3705 3840 3975 4110 4245 4380 4515 Specifications L Effective stroke 405 Note 1. Position of the table slider when returned to the origin. Note 3. The length under head of M8 hex socket head bolts for installing the robot body must not be longer than Note 2. Distance from both ends to the mechanical stopper. 30mm. Note 4. For models with a 3,105mm or longer stroke, a roller is installed to prevent the cable carrier from sagging. Cross-section of H-H Remove cap from each tool hole. (Note 3) φ9 Remove two top caps. G Tool mounting hole Insert bolt from lateral side of axis. 3.7 Detail of section G 7.2 4.5 Cross-section of optional cable carrier 35 29 4-φ6H7 0 Detail of slider 100 (Top face of slider) (99) 11.5 22 18 14 (Roller diameter: φ30) 8-M8x1.25 Depth 20 5.7 3.2 97 196 160 446 200 120 80±0.02 (11.5) (107) 175 (180) MF100D double-carriage horizontal mount model 7-1 Main unit 7 7-2 Robot connector (I/O signal connector) 7-2 Robot connector (I/O signal connector) 7 Cable carrier on robot Hood Specifications To robot cable (I/O signal wires) Signal Pin No. Connection Pin No.* Remarks S+ 1 1 Blue S- 2 2 Orange C+ 3 3 Green C- 4 4 Brown Z+ 5 5 Gray Z- 6 6 Red +5 V 7 7 Black D.G 8 8 Yellow F.G 9 9 0.15mm2 twisted pair Shield *Internally connected 7-3 Robot connector (motor connector) Cable carrier Ground wire on robot Hood To robot cable (motor wires) Signal Pin No. Connection Motor wire FG Round terminal Pin No.* Remarks 4 0.5 mm , 1.25 mm2 Green 2 U 1 1 0.5 mm2, 1.25 mm2 Red V 2 2 0.5 mm2, 1.25 mm2 White W 3 3 0.5 mm2, 1.25 mm2 Black *Internally connected 7-38 7-4 Robot cable (I/O signal wires) 7-4 Robot cable (I/O signal wires) 7 Hood To controller To robot Pin No. Connection Pin No. Connect to: Controller CN1 1 2 3 4 7 8 5 6 20 1 2 3 4 5 6 7 8 9 Signal Connect to: S+ SC+ CZ+ Z+5V D.G. FG Robot Remarks 0.3 mm2 2 Round terminal 0.3 mm Blue Orange Green Brown Gray Red Black Yellow Gray 7-5 Robot cable (motor wires) Hood To controller To robot Ground wire n SR1/SRCP Pin No. Connection Signal Pin No. Remarks 0.75 mm2 Yellow/Green Motor wire FG 1 Round terminal U 2 1 0.75 mm2 Red V 4 2 0.75 mm2 White 3 mm2 Black W 3 0.75 n RCX Signal Pin No. Connection Pin No. Remarks 0.75 mm2 Yellow/Green Motor wire FG 1 Round terminal U 2 1 0.75 mm2 Red V 3 2 0.75 mm2 White W 4 3 0.75 mm2 Black 7-39 Specifications Ground wire Revision record Manual version Issue date Description Ver. 2.05 Oct. 2009 Addition and correction of explanations in "Chapter 1 Using the Robot Safely". Addition and correction of "Chapter 5 Periodic inspection and maintenance". Clerical error corrections, etc. Ver. 3.00 Dec. 2008 Addition of descriptions regarding the addition of MF75. Addition and correction of "Chapter 5 Periodic inspection and maintenance". Clerical error corrections. Ver. 4.00 Aug. 2010 Addition of descriptions regarding the addition of MF7. Clerical error corrections. Ver. 4.01 Jan. 2011 External view of MF7 in "7-1 Specifications" was modified/added. The description regarding "Warranty" was changed. Clerical error corrections, etc. Ver. 4.02 Jun. 2011 Clerical error corrections. Ver. 5.00 Jul. 2012 Wall-mount model was added to MF15. The description regarding "Warranty" was changed. Clerical errors were corrected, etc. User's Manual LINEAR MOTOR ROBOTS PHASER series MF Type Jul. 2012 Ver. 5.00 This manual is based on Ver. 5.00 of Japanese manual. YAMAHA MOTOR CO., LTD. IM Operations All rights reserved. No part of this publication may be reproduced in any form without the permission of YAMAHA MOTOR CO., LTD. Information furnished by YAMAHA in this manual is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. If you find any part unclear in this manual, please contact your distributor.. IM Operations 882 Soude, Nakaku, Hamamatsu, Shizuoka, 435-0054, Japan Tel. 81-53-460-6103 Fax. 81-53-460-6811 Robot manuals can be downloaded from our company website. Please use the following for more detailed information. http://www.yamaha-motor.co.jp/global/industrial/robot/ YAMAHA MOTOR CO., LTD.