Download M450_01 TSC

DATA
8 DATA
The Data menu is used for real time monitoring of connected tubes and review logging data.
Its features include:
•
•
•
•
•
•
All data generated by the tube controllers is automatically logged every second.
Only changed data will be stored.
All events like start, stop, continue, set and reset of alarms are logged in an ‘event
log file’ to provide a quick events check.
Provides an excellent base for data capture and storage required for ISO 900X.
Data is easily retrievable for process set-up analysis and fault finding.
Wafer Lot information is stored with the run data, and can also be used as search
criteria for logged data.
Batch or Lot identification is widely used in the industry to track wafers throughout the
production process. TSC-2 provides Lot Identification during process start and allows
process review based on Lot Identification.
•
At every recipe start the system can be set up to use the wafer LOT ID. This LOT
ID will be stored with the actual run data.
•
Retrieving data for a specific LOT ID provides all process recipes that a lot has
been running in one or any of the tubes connected to the TSC-2 network. From
the list of runs one can select the run that is required, and view the actual data in
graphical for or actual numbers.
The DATA screen contains two selection menus, GENERAL and TUBE. The General data
shows the Logging Data (History) and Run (Real-time) from all tubes. The Tube Data shows
the real-time data per tube (Main Details, Temperature, Normal Temperature Table, Profile
Temperature Table and Recipe).
TSC-II USER MANUAL
8-1