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SERVICE
L116C ELLIPSOMETER
r-----------------1
1
Vac---:~
1
FULL
WAVE I--~ SWITCH
RECT
'SOLENOID
1
1
f---:'::'
POSITION
COMPENSATOR
1
COMPUTER
INTERFACE
1
r-----------1 r-----------------------------1
PIO ANALYZER
MODULE
tri\ 1 1
1
1
PIO
ENCODER
91
1
I
PIO ELECTRONIC
CHASSIS
f,\j\ I l L . TIMER
OPTICAL I
SWITCH r-REFERENCEI
LOGIC
~==d'Y=-r-r·~~
MOTOR DRIVE
BLy TL 0
(TO ANALYZER)!
I.
I.PCTL
C-:\
P/O
ENCODER
1
TIMER
I--~_-----I
,0 YEL
~-~
AMPL I-----I-___~
TRIGGER
'1 LOGIC
COUNT
1
RESET
lORN
~II
° GR~
ON
I
AID
--'" TI ME
, DELAY
I
I
1
PREAMPL
,-
1
1
,-
rrT
AMPL
ZERO OFFSET
ADJUST
I
,
r
Lf---------
1
1
1
1 LED
- , METER
-----1
BIT ,IIMSB)
PD OUT'
AID
AID
I
RED
1
I
BIT '2 (LSBL
OFFSE'~
ADJUST ~
"-_--I
r
L _____________ I
Figure 7-1. This is the Measurement System Functional Diagram.
7109-C-229D
PFLG
l.en ,
PHOTODET r1 ~--=_;r~~l~l------~t~B~U~FF~E~R_1r----J
AND
1..1
W
1
1
r
1 1
1
°
MOT R
I CONTROLLER
AMPL
1 1
1
1
I
1
MOTOR
1
1
BRN
SPEED :...
ADJUST ~
7-2