Download Technical Protocols for Processing, Sputtering and RF Measuring of

22
High Pressure Water Rinsing
3.2.5
End the process
• Prepare a large beaker with two centimeters of water in. It must have a diameter
higher than the cavity flange.
• Switch off the compressor with the red button
• Close the the valve on the wall water pipe.
• Disconnect the nitrogen gas line and close the hole on the flange.
• Go to the deionized water box outside the laboratories and switch off the compressor
• Close the valve on the outlet connection of the compressor.
• Open the two valves outside the deionized water box to empty the pipe that connect
the compressor to the HPWR system.
• Back to the chemistry lab.
• Press the "Stop" button on the computer software.
• Press "Zero" and wait the bar going back to the lowest position.
• Unscrew the bottom flange of the cavity.
• To avoid that particles enter in the cavity during transportation to the clean room
set the cavity bottom flange in the beaker.
• Switch off the cap rotation and the main switch of the HPWR system.
• Cover the HPWR flange with a cap.
• Disconnect the cable from the MPR control.