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1
Screw
2
Cable
3
Rubber foot
4
D-sub connector distance
5
Washer 3.2x7
6
Valve block medium
7
Lock washer
8
Valve
9
I-coupling 8 R1/8
10
O-ring 5.1x1.6
11
Box
12
Orifice
13
Screw
14
Filter disc 10um
15
Filter M5
16
Plate
17
Pump
18
C-coupling 6/4
19
C-coupling
20
Nut
22
Plate
23
O-ring 8x1
24
Probe H65
25
Probe plug
26
Valve block
28
X-coupling plug
29
Coupling
30
Sealing ring
31
X-coupling
32
Differential flow alarm switch
33
Screw
34
O-ring 4x2
35
Silicon hose
36
Orifice
37
Filter holder
38
INFICON - Maintenance Manual AP29 ECO