Download Mass Flow Controller Replacement - Air

DRS24 Technical Service Manual
Section 4.0 : Mass Flow Controller Replacement
4.0 Mass Flow Controller Replacement
!
IMPORTANT
VERIFY DRS24 IS DISCONNECTED FROM THE POWER SOURCE.
!
IMPORTANT
WHEN DISCONNECTING A HOSE OR WIRE, BE SURE TO MAKE NOTE OF ITS
LOCATION FOR EASY RECONNECTION.
STEPS:
1
The mass flow controller is part of the pneumatics assembly, located in the left side of the
DRS module (A), (fig.1).
2
Remove the 10/32” button head screw (B), (fig.1), and swing open left box (C).
B
C
Fig. 1
A
NOTE
☛
The remaining steps will be performed assuming you are located behind the DRS24.
3
Loosen screw (D) and swing open computer plate
sub-assembly (E), (fig.2).
D
Fig. 2
E
2