Download F40 User Manual

Welcome
What is the F40 used for?
The Filmetrics F40 is used to measure the thickness and optical constants (n and k) of transparent thin
films. The F40 attaches to a microscope’s c-mount fitting to provide a square measurement spot size as
small as 1 micron. Measured films must be optically smooth and within the thickness range set by the
system configuration requirements specified in Performance Specifications. Commonly measured films
include semiconductor process films such as oxides, nitrides, resists, and polysilicon, optical coatings
such as hardness and anti-reflection coatings, flat panel display films such as polyimides, resist, and cell
gaps, and the various coatings used in CD and DVD manufacture. Films that cannot be measured include
very rough films and opaque films.
Warning: Accurate measurements require suitable recipe settings and a valid baseline. Improper system setup or
an aged lamp may also lead to errors. It is the user’s responsibility to ensure that this instrument is being used
properly for its intended purpose. Please contact Filmetrics for assistance with any questions.