Download User's Guide to AutoProbe CP - Advanced Processors Technologies

viii
Chapter 5 I-V Spectroscopy .........................................................5-1
Introduction..................................................................................................................... 5-2
The I-V Spectroscopy Window....................................................................................... 5-3
I-V Spectroscopy Controls.............................................................................................. 5-5
Acquiring Current vs. Voltage Data................................................................................ 5-7
Generating a Current vs. Voltage Curve........................................................... 5-7
Generating an I-V Curve at a Different X, Y Location .................................... 5-9
Adjusting the Horizontal and Vertical Scales of an I-V Curve......................... 5-9
Zooming in on a Region of Interest ................................................................ 5-11
Zooming in Graphically Using the Cursor ....................................... 5-11
Zooming in by Changing the Voltage Sweep Range........................ 5-11
Making Point-to-Point Measurements on an I-V Curve ................................. 5-12
Saving and Exporting Data............................................................................. 5-12
Redisplaying Curves in I-V Spectroscopy...................................................... 5-13
Summary....................................................................................................................... 5-14
Chapter 6 Scanner Calibration....................................................6-1
Introduction..................................................................................................................... 6-2
How the Scanner Works ................................................................................................. 6-3
When to Calibrate the Scanner........................................................................................ 6-4
Calibrating a 5 Micron Scanner ...................................................................................... 6-5
What it Means to Calibrate a 5 Micron Scanner............................................... 6-5
Scanner Calibration Procedures........................................................................ 6-6
Setting Up the System ........................................................................ 6-7
First-Order Calibration of Scanner Sensitivity in X and Y .............. 6-11
Second-Order Calibration of Scanner Sensitivity in X and Y .......... 6-17
Calibration of Scanner Sensitivity in Z ............................................ 6-20
Creating a Backup Scanner Calibration File .................................... 6-23
Calibrating a 100 Micron Scanner ................................................................................ 6-24
How ScanMaster Works ................................................................................. 6-24
What it Means to Calibrate a 100 Micron Scanner......................................... 6-26
Scanner Calibration Procedures...................................................................... 6-27
Installing the System Hardware........................................................ 6-27
Configuring the System Software .................................................... 6-28
Calibrating the XY Detector............................................................. 6-31
Calibrating the Z Detector ................................................................ 6-34
Auto Calibration of Detector Offsets and Scanner Sensitivity ......... 6-36
Creating a Backup Scanner Calibration File .................................... 6-38
Summary....................................................................................................................... 6-40