1
Download MAX300 Series NanoMax 3-Axis Flexure Stage User Guide
Transcript
Chapter 2 CAUTION 75 V DC MAX DRIVE VOLTAGE P/N MAX303 Fig. 2.4 MAX303 NanoMax without piezo-actuation The NanoMax 303 has no electrical connections. 2.2.2 Drives and Actuators There are three types of drive available for the NanoMax, a motorized drive as shown in Fig. 2.5. and two manual drives as shown in Fig. 2.6. In addition, external piezo actuators are available to give an additional 20 µm or 80µm piezo travel – see Fig. 2.7.. Note The DRV001 stepper motor drive must be used in conjunction with the BSC benchtop driver or the MST601 control module. It cannot be driven by the TST001 T-Cube driver. Fig. 2.5 DRV001 NanoStep motor drive 6 HA0094T Rev 11 April 2011
