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Adding ..................................................................................................................... 194 Removing ................................................................................................................ 194 Default Setups ........................................................................................................... 194 Component setup for 12000-Series ...................................................................... 194 Component setup for Alessi 6100-Series .............................................................. 195 Component setup for S300-Series ........................................................................ 195 Component setup for virtual stage ...................................................................... 196 Edge Sense ................................................................................................................ 196 Communications ...................................................................................................... 197 Joystick ....................................................................................................................... 197 Thermal Control ......................................................................................................... 197 A-Zoom digital Control ............................................................................................. 197 “Engine: serial port” setup ..................................................................................... 198 A-Zoom control setup ............................................................................................ 198 MicroChamber Interlock Switch ................................................................................ 199 Station Setup and Test .............................................................................................. 199 Appendix G: MOSAID Auto Tester 201 MOSAID Wafer Probe Utility........................................................................................ 201 Auto-Tester Mode ........................................................................................................ 201 Wafer Maps.................................................................................................................. 202 Load a prober setup file (PSF) ................................................................................. 204 Load a prober driver ................................................................................................ 204 Turn on responses from the Prober .......................................................................... 204 ID source for lot and wafer ...................................................................................... 205 Changing of wafers .................................................................................................. 205 Example PSF ............................................................................................................... 206 Index Glossary 211 215 Contents • vii
