Download AFC 202D - MHz Electronics, Inc

SECTION 1 - INTRODUCTION .............................................................................................. 5
1.0 AFC 202.D: DIGITAL MASS FLOW CONTROLLER .............................................. 5
1.1 AFC 202.D : "USER's MANUAL" .............................................................................. 5
1.2 SPECIFICATIONS....................................................................................................... 6
1.3 CALIBRATION FEATURES ...................................................................................... 7
SECTION 2 - INSTALLATION................................................................................................ 8
2.0 INTRODUCTION ........................................................................................................ 8
2.1 UNPACKING ............................................................................................................... 8
2.2 MECHANICAL INSTALLATION.............................................................................. 8
2.3 ELECTRICAL INSTALLATION .............................................................................. 10
2.4 CHECKS BEFORE STARTING UP.......................................................................... 12
2.5 DIGITAL CARD. ....................................................................................................... 12
2.6 COMMUNICATION MODES................................................................................... 16
SECTION 3 – MAINTENANCE............................................................................................. 17
3.0 GENERAL ..................................................................................................................... 17
3.1 DISASSEMBLY AND ASSEMBLY PROCEDURES ................................................. 17
3.2 SENSOR CLEANING AND REPLACEMENT ........................................................... 20
3.3 VALVE CLEANING AND REPLACEMENT ............................................................. 20
SECTION 4 – TROUBLESHOOTING ................................................................................... 21
4.0 INITIAL CHECK. ...................................................................................................... 21
4.1 SYMPTOMS............................................................................................................... 21
SECTION 5 - WARRANTY AND SERVICES ...................................................................... 23
5.0 PRODUCT WARRANTY.......................................................................................... 23
5.1 SERVICES.................................................................................................................. 24
APPENDIX A GAS PROCESS NUMBER.......................................................................... 25
APPENDIX B EXPLODED VIEW OF THE AFC 202D .................................................... 26
APPENDIX C GENERAL MFC PRINCIPLES ................................................................... 28
AFC 202 D User’s Manual
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D 10-018 V04