Download 1982 , Volume , Issue Oct-1982
Transcript
Thus, with the guard filter, the additional admittance be comes a capacitance of Cg^L/ff) without a negative resis tance and only the feedback of the output current compo nent lags at high frequencies. Moreover, the additional capacitance Cg, which appears in parallel with the load, contributes to stability in the current-control mode. The low-pass characteristics of the guard filter also func tion to surround the center conductor of the triaxial cable with an equipotential surface. Current Ranging Current ranging in each SMU is performed automatically so that optimum accuracy is assured. This requires a spikeless current-range change scheme to prevent sudden changes of output voltage during a range change that can adversely affect a sensitive DUT. A novel soft-switch scheme, shown in Fig. 4, is used in the 4145A to control current ranging. By turning Ql on or off, a range resistance of 10 Mil or 1 Gil can be selected. To maintain the SMU output current at 10 nA when switching range resistance from 1 Gil to 10 Mil, the voltage across the range resistor (V0-VF) must change between +10V and +0.1V as shown in Fig. 4. The maximum change rate of VF versus time is determined by the response of the voltage control loop. The range resistance value cannot change faster than the response of the voltage control loop without causing a transient change in V0. This is prevented by applying to the gate of Ql a ramp voltage VG whose slew rate is slow enough to allow VF to change in step with the change in range resistance. During this change, the output voltage V0 is kept nearly constant by the voltage error amplifier. However, a small To Power Amplifier Input Vl,n+ 1+ Error Amplifier (a) Fig. 5. characteris Schematic of the SMU voltage and current control amplifiers, (b) Output characteris tics of the voltage and current control amplifiers. 18 HEWLETT-PACKARD JOURNAL OCTOBER 1982 © Copr. 1949-1998 Hewlett-Packard Co.