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LITERATURVERZEICHNIS 127 [CFK+ 07] C HEN, Q. ; FAN, Y. ; K UMAR, S. ; BACZEWSKI, A. D. ; U DPA, L. ; AYRES, V. M. ; A HMED, I. ; M EINERS, S. ; R ICE, A. F.: Cell Response and Tissue Scaffold Triggers Investigated by Scanning Probe Recognition Microscopy. In: Mater. Res. Soc. Symp. Proc., 2007, S. 1019–FF06–04 [CMPW00] C ORBETT, J. ; M C K EOWN, P.A. ; P EGGS, G.N. ; W HATMORE, R.: Nanotechnology: International Developments and Emerging Products. In: Annals of CIRP 49 (2000), Nr. 2, S. 523–545 [Cro84] C ROW, F. C.: Summed-area tables for texture mapping. In: SIGGRAPH ’84: Proceedings of the 11th annual conference on Computer graphics and interactive techniques. New York, NY, USA : ACM, 1984, S. 207–212 [CSD01] C ROFT, D. ; S HED, G. ; D EVASIA, S.: Creep, hysteresis, and vibration compensation for piezoactuators: Atomic force microscopy application. In: ASMF J. Dyn., Sys., Meas., Ctrl. 128 (2001), Nr. 35, S. 35–43 [CV01] C HAN, T. F. ; V ESE, L. A.: Active Contours Without Edges. In: IEEE Transactions on Image Processing 10 (2001), Nr. 2, S. 266–277 [DBPD09] DAI, G. ; B UTEFISCH, S. ; P OHLENZ, F. ; DANZEBRINK, H.-U.: A high precision micro/nano CMM using piezoresistive tactile probes. In: Measurement Science and Technology 20 (2009), Nr. 8, S. 084001 (9pp) [DCKPL03] D E C HIFFRE, L. ; K UNZMANN, H. ; P EGGS, G. N. ; L UCCA, D. A.: Surfaces in Precision Engineering, Microengineering and Nanotechnology. In: Annals of CIRP 52 (2003), Nr. 2, S. 561–577 [DDX+ 09] DANZEBRINK, H.-U. ; D ZIOMBA, T. ; X U, M. ; P IDDUCK, A. ; L EACH, R. ; YA COOT , A. ; KOENDERS , L.: Scanning Probe Microscopy, Scanning Electron Microscopy And Critical Dimension: Nanometrology Status and Future Needs within Europe. In: Nanometrology Discussion Papers Co-Nanomet, 2009, S. 55–77 [DGKF89] D OYLE, J. C. ; G LOVER, K. ; K HARGONEKAR, P. P. ; F RANCIS, B. A.: Statespace Solutions to Standard H2 and H∞ Control Problems. In: IEEE Transactions on Automatic Control 34 (1989), S. 831–847 [DHH+ 06] D OROZHOVETS, N. ; H AUSOTTE, T. ; H OFMANN, N. ; M ANSKE, E. ; JÄGER, G.: Development of the interferometrical scanning probe microscope. In: Interferometry XIII: Applications, Proceedings of SPIE Vol. 6293, 2006, S. 629311 [DJP+ 04] DAI, G. ; J UNG, L. ; P OHLENZ, F. ; H.-U., Danzebrink ; K RÜGER -S EHM, R. ; H ASCHE, K. ; W ILKENING, G.: Measurement of micro-roughness using a metrological large range scanning force microscope. In: Measurement Science and Technology 15 (2004), S. 2039–2046