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X-LabPro 5 First of all a layer thickness can be detected in different ways: The Emission of the coating is detected and the thicker the coating is, the higher the intensity. The second way is Absorption: The observed intensity is created by the substrate. The thicker the coating is, the bigger the absortion of the radiation of the substrate and the smaller the intensity of the observed peak of the substrat element. The best way is a combination of both: Emission/Absorption The first calibration can be used for Au-Layers on other metals, the second can be used, if the coating material is not visible for XRF (like plastic coatings) and the combination is used e.g. for wafers. The example above shows case 1 (Emission of the coating material) for Gold layers. In this case some options for the substrate material are disabled, because the substrate is not taken into account. The calibration is completed, if the intensity, which is found for the blank sample (green high-lighted in the figure above), is used as "Offset" value (here: 0,0041) (light blue). This has to be done manually !!!! SPECTRO Analytical Instruments GmbH Pro Software Help X-Lab 5 Revision 4; 17/08/2011 Page 371 of 397
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