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Transcript
X-LabPro 5
First of all a layer thickness can be detected in different ways:

The Emission of the coating is detected and the thicker the coating is, the
higher the intensity.

The second way is Absorption: The observed intensity is created by the
substrate.
The thicker the coating is, the bigger the absortion of the radiation of the
substrate and
the smaller the intensity of the observed peak of the substrat element.

The best way is a combination of both: Emission/Absorption
The first calibration can be used for Au-Layers on other metals, the second can be
used, if the coating material is not visible for XRF (like plastic coatings) and the
combination is used e.g. for wafers.
The example above shows case 1 (Emission of the coating material) for Gold
layers. In this case some options for the substrate material are disabled, because
the substrate is not taken into account.
The calibration is completed, if the intensity, which is found for the blank sample
(green high-lighted in the figure above), is used as "Offset" value (here: 0,0041)
(light blue). This has to be done manually !!!!
SPECTRO Analytical Instruments GmbH
Pro
Software Help X-Lab 5
Revision 4; 17/08/2011
Page 371 of 397