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ATLAS User’s Manual Table 3-18. User-Specifiable Parameters for Equations 3-147 and 3-148 Statement Parameter Default Units MOBILITY MU1N.CAUG 55.24 cm2/(V ⋅ s) MOBILITY MU1P.CAUG 49.7 cm2/(V ⋅ s) MOBILITY MU2N.CAUG 1429.23 cm2/(V ⋅ s) MOBILITY MU2P.CAUG 479.37 cm2/(V ⋅ s) MOBILITY ALPHAN.CAUG 0.0 arbitrary MOBILITY ALPHAP.CAUG 0.0 arbitrary MOBILITY BETAN. CAUG -2.3 arbitrary MOBILITY BETAP. CAUG -2.2 arbitrary MOBILITY GAMMAN.CAUG -3.8 arbitrary MOBILITY GAMMAP.CAUG -3.7 arbitrary MOBILITY DELTAN.CAUG 0.73 arbitrary MOBILITY DELTAP.CAUG 0.70 arbitrary MOBILITY NCRITN.CAUG 1.072×1017 cm-3 MOBILITY NCRITP.CAUG 1.606×1017 cm-3 The Arora Model for Low Field Mobility Another analytic model for the doping and temperature dependence of the low field mobility is available in ATLAS. This model, which is due to Arora [12], has the following form: µ n0 = µ p0 T L ALPHAN.ARORA MU1N.ARORA ---------- + 300 T L BETAN.ARORA 300 --------------------------------------------------------------------------------------------------------N 1 + ------------------------------------------------------------------------------------------------T L GAMMAN.ARORA NCRITN . ARORA ⋅ ---------- 300 MU2N.ARORA ---------- T BETAP.ARORA L MU2P.ARORA ---------- T ALPHAP.ARORA 300 L = MU1P.ARORA ---------+ ------------------------------------------------------------------------------------------------------------------------------------------------------ 300 N 1 + -------------------------------------------------------------------------------------------------------------------------------------------T GAMMAP.ARORA L NCRITP.ARORA Þ ---------- 300 3-149 3-150 This model is used if CONMOB and ARORA are specified in the MODELS statement. The parameters of the model are specified in the MOBILITY statement. The default parameters are for silicon at TL=300K. 3-38 SILVACO International
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