Download PGC2/D - Arun Microelectronics Limited

Transcript
INDEX
1. INTRODUCTION
2. INSTALLATION
2:1 Checks on receipt of the instrument.
2:2 Ion gaugehead installation.
2:3 Instrument installation.
2:3.1 Mounting.
2:3.2 Ventilation.
2:3.3 Connection to the mains supply and earthing.
2:4 Fusing.
2:4.1 The mains fuse.
2:4.2 The grid fuse.
2:5 Ion Gauge Cables.
2:5.1 The ion gauge power cable.
2:5.2 The ion gauge collector cable.
3. OPERATION
3:1 Familiarisation
3:1.1 Switching, basic display functions
3:1.2 Preparing to measure pressure. Setting the Ion Gauge parameters.
3:2 Pressure Measurement.
3:2.1 Pressure measurement using Pirani Gauges.
3:2.2 Starting the Ion Gauge.
3:2.3 Problems with starting or running the Ion Gauge.
3:2.4 Measuring pressure with the ion gauge.
3:3 Operation at extreme UHV and emission current selection.
3:4 Operation of the ion gauge at high pressures
3:5 Process Control and Trips
3:5.1 Use and wiring of the relays.
3:5.2 Assigning the relays to gauges and the ion gauge trip relay status
option.
3:5.3 Setting trip pressures
3:6 Leak Detection.
3:7 Ion Bombardment Degas.
3:7.1 Running degas.
3:7.2 Problems in degas.
3:8 Capacitance Manometer
3:9 Recorder Output.
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