Download PGC2/D - Arun Microelectronics Limited
Transcript
INDEX 1. INTRODUCTION 2. INSTALLATION 2:1 Checks on receipt of the instrument. 2:2 Ion gaugehead installation. 2:3 Instrument installation. 2:3.1 Mounting. 2:3.2 Ventilation. 2:3.3 Connection to the mains supply and earthing. 2:4 Fusing. 2:4.1 The mains fuse. 2:4.2 The grid fuse. 2:5 Ion Gauge Cables. 2:5.1 The ion gauge power cable. 2:5.2 The ion gauge collector cable. 3. OPERATION 3:1 Familiarisation 3:1.1 Switching, basic display functions 3:1.2 Preparing to measure pressure. Setting the Ion Gauge parameters. 3:2 Pressure Measurement. 3:2.1 Pressure measurement using Pirani Gauges. 3:2.2 Starting the Ion Gauge. 3:2.3 Problems with starting or running the Ion Gauge. 3:2.4 Measuring pressure with the ion gauge. 3:3 Operation at extreme UHV and emission current selection. 3:4 Operation of the ion gauge at high pressures 3:5 Process Control and Trips 3:5.1 Use and wiring of the relays. 3:5.2 Assigning the relays to gauges and the ion gauge trip relay status option. 3:5.3 Setting trip pressures 3:6 Leak Detection. 3:7 Ion Bombardment Degas. 3:7.1 Running degas. 3:7.2 Problems in degas. 3:8 Capacitance Manometer 3:9 Recorder Output. 2