Download Dell 3100 Specifications

System Overview
Sample Size & Handling
1.4
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Through-the-lens illumination
•
Color video camera
•
Focus tracking and automated engagement
Sample Size & Handling
Samples may be up to 8 inches in diameter and 0.5-inch thick using a multipurpose, 8-inch chuck.
For samples thicker than 0.5", contact Veeco.
Table 1.4a Sample Specifications
Specifications
Rev. D
Max Sample Size
Wafers and disk media: 8-inch dia. x 0.5"
thick.
Inspectable Area
100mm x 125mm typical
Includes interchangeable adapters for centering hard disks and removable wafer locating
pins. Vacuum pump included.
Small Samples
Magnetic holder available for mounting small
samples on mounting pucks (< 15 mm dia.
typ.).
Silicon Wafers
Silicon-dioxide-coated chuck accommodates
2-inch, 100, 125, 150 and 200 mm wafers.
Wet Samples
Optional fluid cell allows immersion of
microscope head to max depth of 2 mm.
Chuck Vacuum
The chuck vacuum pneumatics secure samples to the chuck using a separate toggle
switch at the front of the stage control electronics box.
Dimension 3100 Manual
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