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HEIDELBERG INSTRUMENTS µPG 101 User Manual
Problem:
Plate is completely exposed
Possible causes:
- stray light
- old materials
Remedies:
- check for possible stray light sources and eliminate them
- use fresh batch of plates
Problem:
Some structures are missing
Possible causes:
- structures do not comply with design rules or are too small
- chrome etch old
- air bubbles in structures during etching
Remedies:
- check design against design rules and lens resolution
- use fresh chrome etch
- avoid drying of the substrate between developing and etching, or water the plate
thoroughly before etching
EXPOSURE WIZARD ERROR MESSAGES
All errors messages of the exposure wizard include tips on how to find and solve the
possible cause of the problem. If these don't help, shut down the system, restart it, and
try again. If the problem persists, please contact your service office (see above for
contact addresses and phone numbers).
FUSES
Types and locations of fuses used in the µPG 101:
Below main power line: 10A fast
10 A
fast
Figure 33: 10A fast fuse
at Supply Unit back
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