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CEOS
Corrected Electron Optical
Systems GmbH
– SAFETY –
IX
At the waterflow control unit, there are three flow meters. If the water flow of at least one
flow meter drops below the minimum permissible flow rate, all lens circuits are switched off by
relays. The lenses remain switched off as long as the water flow has been readjusted.
The status of the lens interlock is indicated by a LED in the front panel of the power supply
cabinet. If the LED is on, the water flow is normal, if the LED is off, the water flow is too low
and the lenses are switched off.
EMERGENCY-OFF FUNCTIONALITY, OVERCURRENT
PROTECTION, AND CURRENT INTERRUPTING CAPACITY
As the CETCOR system is a subunit of the electron microscope and not intended to be used
as stand-alone equipment, it has no emergency-off (EMO) circuit. It is due to the microscope
provider to include the CETCOR system into the general emergency-off (EMO) functionality
of the overall microscope system and to fulfill the requirements of the entire section 12 of SEMI
S2-0703.
The CETCOR system has to be powered by the microscope main supply unit. Therefore it
is due to the microscope provider to provide the necessary main overcurrent protection devices
and main disconnect devices rated for at least 10000 rms symmetrical amperes interrupting
capacity and to observe the requirements of SEMI S2-0703, sections 13.4.1 and 13.4.11. If
the main disconnect of the overall microscope system is placed to the off position it should
interrupt all power to the CETCOR system. The main disconnect of the overall microscope
system should fulfill the requirements for affixing energy isolating (’lockout/tagout’) devices.
No warranty is taken by CEOS GmbH if this functionality is not provided by the microscope
provider. It is not allowed to use the CETCOR system without these measures.
ENERGY ISOLATION
It is due to the microscope provider and/or user to ensure that the energy isolating devices of
the overall microscope system are located in a place where the person actuating or inspecting
the devices is not exposed to serious risks or contact to hazardous equipment.
Electrical energy: It is due to the microscope provider to verify that the main disconnect of
the overall microscope system should be in a location that is readily accessible and lockable
only in the deenergized position.
Non-electrical energy: It is due to the microscope provider to verify that the energy isolating devices of the vacuum and cooling water supplies should be in a location that is readily
accessible and lockable in a position in which the hazardous energy is isolated.
The deenergizing procedure of the equipment without shutdown of the microscope is described in Section 6.4.1.
NON-IONIZING RADIATION
It is due to the microscope provider and/or user to meet the requirements of SEMI S2-0703,
sections 25.1 - 25.6.2 upon incorporation of the CETCOR system into the overall microscope
system.