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CEOS
Corrected Electron Optical
Systems GmbH
– FOREWORD –
I
Foreword
Application
The CETCOR system is designed and constructed for the correction of the spherical aberration
in a conventional Transmission Electron Microscope (TEM). It improves the resolution limit
and reduces delocalization effects in TEM images. The CETCOR consists of a column extension for an electron microscope (in the following often called ’corrector’ or ’Cs -corrector’) and
a Power Supply Cabinet (PSC), containing also a Personal Computer (corrector PC) for control
purposes.
Precaution
Regarding the use of an electron microscope equipped with a CETCOR system, same safety
regulations hold true as for the microscope without a CETCOR system.
Usually (if not specified differently from the microscope provider) it is not required to make
registry notification to the authorities concerned in accordance with the “Radiation Hazard
Preventive Laws” or the “Ionizing Radiation Hazard Preventive Regulations” currently in effect
since X-rays are not taken out of the electron microscope in common application. Regarding
the use of the microscope overall system it is due to the microscope provider to follow all
applicable requirements of sections 24.1 - 24.5.3 and appendix 4 of SEMI S2-0703. It is due
to the user of the microscope to follow local regulations regarding additional X-ray labeling
requirements of the country where the overall system will be operated.
The CETCOR system is designed to conform to section 24.2.1 and appendix 4 of SEMI
S2-0703, stating that the effective dose equivalent of leakage X-ray radiation should be less
than 2µSv/h during normal operation. This has been officially tested at a FEI TITAN 80-300
electron microscope applying the German X-ray regulations (RöV). No warranty is taken if
parts of the electron microscope are different from this microscope.
Within a CETCOR system neither radioactive sources nor gamma rays are used. Therefore
access to radioactive contamination or internal exposure to radioactive materials is not possible,
neither when installed in the microscope column nor when unmounted.
However, electron microscopes, along with home TV sets, fall into a category of potential radiation sources that could produce undesired byproduct X-rays. It is therefore required
to ensure safety with sufficient care in operation of an electron microscope equipped with a
CETCOR system.
Risk assessment
The manufacturer did not perform a hazard analysis of the CETCOR system according to SEMI
S10. This is due to the microscope provider after incorporation of the equipment into the overall
electron microscope system.
However, the equipment was evaluated according to the standard IEC 61010-1. Since hazards associated with the equipment are primary of electrical nature, the results of this evaluation
were considered sufficient as fire protection documentation.
Warranty
All warranty concerns of the electron microscope equipped with a CETCOR system are due to
the microscope provider. Please read the warranty statement of your microscope provider for