Download HP-200 - Oltec

Hotplate HP-200-BM
Nitrogen flushing and HMDS priming
This replaces the option Nitrogen flushing:
 The lid for Nitrogen flushing has an additional inlet.
 Both a solenoid valve for N2 and for HMDS is provided.
 In the control program the handling of the HMDS is added to the
N2 handling.
Programmable shutter
This option is required for processing with HMDS.
The manually operated shutter (A) for the exhaust of a hotplate
defines the suction rate. An optional electro pneumatic shutter (B)
can open and close the flow by program control. This controllable
shutter is an addition to the manual shutter:
B
A
The shutter can be opened and closed during a process step.
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MA-HP-200-BM en v2.0
2013-11-12