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SC10ASY0063C
INITIAL BOARD ALIGNMENT PROCEDURE
1. Connect TC 1, TC 2 and TC 3 to the back of the instrument.
2. With diffusion pump or cryo pump, mechanical pump and chamber at atmospheric
pressure:
1.
Set R3 to give 0.0 VDC at IC1 pin 6.
2.
Set R15 to give 0.0 VDC at IC2 pin 6.
3.
Set R18 to give 0.0 VDC at IC 3 pin 6.
4.
Start the vacuum system, pump chamber down to high vacuum and observe
ion gauge( < 1.0 10-4 torr).
5.
Adjust R9 to make cryo pump reading 000 torr.
6.
Adjust R18 for the chamber pressure to read 000 torr.
7.
Turn off diffusion pump or cryo pump, wait 20 minutes, open roughing ,
foreline and plate valves.
8.
Wait 5 minutes and then adjust R7 to make the mechanical pump reading the
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