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MEMSLib Reference Introduction Element Description Library Accessing the MEMS Library Palette on page 526 Active Elements S_LCOMB Linear Electrostatic Comb Drive Elements (S_LCOMB_1, S_LCOMB_2) on page 532 S_LSDM Linear Side Drive Elements (S_LSDM_1, S_LSDM_2)) on page 535 S_RCOMBU Unidirectional Rotary Comb Drive Elements - Type 1 (S_RCOMBU_1, S_RCOMBU_2) on page 538 S_RCOMBUA Unidirectional Rotary Comb Drive Elements - Type 2 (S_RCOMBUA_1, S_RCOMBUA_2) on page 542 S_RCOMBD Bidirectional Rotary Comb Drive Elements (S_RCOMBD_1, S_RCOMBD_2) on page 546 S_RCDM Rotary Comb Drive Elements (S_RCDM_1, S_RCDM_2) on page 550 S_RSDM Rotary Side Drive Elements (S_RSDM_1, S_RSDM_2) on page 554 S_HSDM Harmonic Side Drive Elements (S_HSDM_1, S_HSDM_2) on page 557 Passive Elements S_JBEARG_1 Journal Bearing Elements 1 (S_JBEARG_1) on page 560 S_JBEARG_2 Journal Bearing Elements 2 (S_JBEARG_2) on page 563 MEMS Pro User Guide Contents Index 520
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