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MEMSLib Reference
Introduction
Element
Description
Library
Accessing the MEMS Library Palette on page 526
Active Elements
S_LCOMB
Linear Electrostatic Comb Drive Elements (S_LCOMB_1, S_LCOMB_2) on page 532
S_LSDM
Linear Side Drive Elements (S_LSDM_1, S_LSDM_2)) on page 535
S_RCOMBU
Unidirectional Rotary Comb Drive Elements - Type 1 (S_RCOMBU_1, S_RCOMBU_2) on page
538
S_RCOMBUA
Unidirectional Rotary Comb Drive Elements - Type 2 (S_RCOMBUA_1, S_RCOMBUA_2) on
page 542
S_RCOMBD
Bidirectional Rotary Comb Drive Elements (S_RCOMBD_1, S_RCOMBD_2) on page 546
S_RCDM
Rotary Comb Drive Elements (S_RCDM_1, S_RCDM_2) on page 550
S_RSDM
Rotary Side Drive Elements (S_RSDM_1, S_RSDM_2) on page 554
S_HSDM
Harmonic Side Drive Elements (S_HSDM_1, S_HSDM_2) on page 557
Passive Elements
S_JBEARG_1
Journal Bearing Elements 1 (S_JBEARG_1) on page 560
S_JBEARG_2
Journal Bearing Elements 2 (S_JBEARG_2) on page 563
MEMS Pro User Guide
Contents
Index
520